Polishing wheel

Abstract

The polishing wheel comprises a polishing wheel body, a polishing pad, two locking assemblies and two rotary pressing pieces, the polishing wheel body is provided with an installation groove formed in the peripheral side face of the polishing wheel body, and the installation groove penetrates through the two ends of the polishing wheel body. The polishing pad comprises two matching ends and a polishing face connected with the two matching ends, the matching ends wrap the peripheral side faces of the corresponding rotary pressing pieces and are inserted into the mounting grooves, the rotary pressing pieces are partially exposed out of the mounting grooves, and the polishing face wraps the peripheral side face of the polishing wheel body and is inserted into the mounting grooves. The two locking assemblies are installed at the two ends of the polishing wheel body correspondingly and connected with the part, exposed out of the installation groove, of the rotary pressing piece in a matched mode so as to lock the rotary pressing piece. The position of the polishing pad is kept unchanged in the polishing process in a mechanical locking mode, loosening and falling caused by vibration and the like are avoided, and the problem that the polishing pad is loosened due to a traditional pasting mode is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a polishing wheel. Background Art

[0002] As an advanced semiconductor material, indium phosphide (InP) demonstrates unparalleled value and application potential in contemporary high-tech industries, especially in the forefront of high-frequency and high-power electronic devices and optical communication technologies, including the core structure of optical fiber communication systems, wireless data transmission, and radio astronomy equipment. The production process of indium phosphide substrates requires polishing. Traditionally, polishing technology relies on the method of adhering the polishing pad to the polishing wheel and fixing it with the back colloid. However, this method has the problem of adhesive stability, that is, the polishing quality is reduced due to loose adhesion during the polishing process. Utility Model Content

[0003] The technical problem to be solved by the utility model is that the existing polishing pad is connected to the polishing wheel in an adhesive manner, which easily leads to loose adhesion and reduced polishing quality.

[0004] In order to solve the above technical problems, the utility model provides a polishing wheel, including a polishing wheel body, a polishing pad, two locking assemblies and two rotary pressing members, the polishing wheel body having a mounting groove opened on the outer peripheral side surface of the polishing wheel body, and the mounting groove is arranged through both ends of the polishing wheel body, the polishing pad comprises two mating ends and a polishing surface connecting the two mating ends, the mating ends are wrapped around the outer peripheral side surface of the corresponding rotary pressing member and inserted into the mounting groove, and are bonded to the mounting groove, the rotary pressing member is partially exposed outside the mounting groove, the polishing surface is wrapped around the outer peripheral side surface of the polishing wheel body, and the polishing surface is bonded to the outer peripheral side surface of the polishing wheel body, the two locking assemblies are respectively installed at the two ends of the polishing wheel body, and are matched and connected with the part of the rotary pressing member exposed outside the mounting groove to lock the rotary pressing member.

[0005] In some embodiments, the locking assembly includes a pressure block, a first locking member and a second locking member, the pressure block has a first locking hole, two second locking holes and two mounting holes, the second locking hole is connected to the mounting hole, the first locking member is connected to the polishing wheel body through the first locking hole, the pressure block is sleeved on the peripheral side of the rotating pressure member through the mounting hole, and the second locking member is connected to the rotating pressure member through the second locking hole.

[0006] In some embodiments, the mounting groove includes a first groove portion and a second groove portion, the first groove portion is connected to the outside through the second groove portion, and the width of the first groove portion is greater than the width of the second groove portion, and the mating end is inserted into the first groove portion.

[0007] In some embodiments, the first groove portion includes two first sub-grooves for accommodating the mating ends and a second sub-groove for connecting the two first sub-grooves, the two first sub-grooves are arranged on both sides of the second sub-groove, and the second sub-groove is connected to the second groove portion.

[0008] In some embodiments, a groove bottom of the second sub-groove protrudes toward the second groove portion.

[0009] In some embodiments, the mating end includes a mating portion, a first connecting section and a second connecting section, the mating portion is wrapped around the outer peripheral side of the rotary pressing member, the second connecting section is connected to the mating portion through the first connecting section, the side of the second connecting section away from the first connecting section is connected to the polishing surface, the first connecting section is in contact with the inner wall surface of the first groove portion, and the second connecting section is in contact with the inner wall surface of the second groove portion.

[0010] In some embodiments, the mating portion is cylindrical.

[0011] In some embodiments, the rotary pressing member includes a main body, a locking portion and a force-applying portion, the force-applying portion is connected to the main body through the locking portion, the mating end wraps around the outer peripheral side of the main body, the locking assembly is matingly connected to the locking portion, the force-applying portion is exposed outside the locking assembly, and the diameter of the main body is larger than the diameter of the locking portion, and the diameter of the locking portion is larger than the diameter of the force-applying portion.

[0012] In some embodiments, a plurality of protrusions are disposed on the surface of the main body.

[0013] In some embodiments, the polishing wheel body includes a main body portion and a rotating shaft, the main body portion has the mounting groove, the locking assembly is connected to the main body portion, and the rotating shaft is disposed at both ends of the main body portion.

[0014] Compared with the prior art, the polishing wheel of the utility model has the following beneficial effects:

[0015] The mounting grooves of the embodiment of the utility model are arranged through both ends of the polishing wheel body, ensuring that the polishing pad can be inserted from one end and then wrapped around the outer peripheral side of the polishing wheel body, and then passed out from the other end, so that the combination of the polishing pad and the polishing wheel body is tighter and more uniform. In addition, the embodiment of the utility model uses the multi-point bonding between the polishing pad and the polishing wheel body, the mating end is wrapped around the rotating clamp and then inserted into the mounting groove for looseness adjustment, and the locking assembly is connected and locked with the exposed part of the rotating clamp, so as to ensure that the position of the polishing pad remains unchanged during the polishing process by mechanical locking, avoid loosening or falling off due to vibration or external force, solve the problem of loosening of the polishing pad caused by the traditional bonding method, and thus improve the quality of substrate polishing. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a polishing wheel provided in an embodiment of the utility model;

[0017] Figure 2 It is a structural schematic diagram of the polishing wheel provided by the embodiment of the utility model without the locking assembly;

[0018] Figure 3 It is a structural schematic diagram of a polishing wheel body provided by an embodiment of the utility model;

[0019] Figure 4 It is a schematic diagram of the structure of the polishing pad provided by an embodiment of the utility model;

[0020] Figure 5 It is a structural schematic diagram of a locking assembly provided in an embodiment of the utility model;

[0021] Figure 6 It is a structural schematic diagram of a rotary pressing member provided in an embodiment of the utility model;

[0022] In the figure, 1. polishing wheel body; 11. mounting groove; 111. first groove portion; 1111. first sub-groove; 1112. second sub-groove; 112. second groove portion; 12. main body; 13. rotating shaft; 2. polishing pad; 21. mating end; 211. mating portion; 212. first connecting section; 213. second connecting section; 22. polishing surface; 3. locking assembly; 31. pressure block; 311. mounting hole; 32. first locking member; 33. second locking member; 4. rotating pressing member; 41. main body; 42. locking portion; 43. force applying portion. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0024] like Figure 1As shown, the utility model provides a polishing wheel, including a polishing wheel body 1, a polishing pad 2, two locking assemblies 3 and two rotary clamping members 4. The polishing wheel body 1 has a mounting groove 11 opened on the outer peripheral side of the polishing wheel body 1, and the mounting groove 11 is arranged at both ends of the polishing wheel body 1 to accommodate and fix the polishing pad 2. The polishing pad 2 includes two mating ends 21 and a polishing surface 22 connecting the two mating ends 21. The mating ends 21 are wrapped around the outer peripheral side of the corresponding rotary clamping member 4 and inserted into the mounting groove 11, and are bonded to the mounting groove 11, which increases additional fixing force. The rotary clamping member 4 is partially exposed outside the mounting groove 11, and the polishing surface 22 is wrapped around the outer peripheral side of the polishing wheel body 1, and the polishing surface 22 is bonded to the outer peripheral side of the polishing wheel body 1, which further improves the overall stability. The two locking assemblies 3 are respectively installed at both ends of the polishing wheel body 1, and are matched and connected with the part of the rotary clamping member 4 exposed outside the mounting groove 11, so as to realize double locking of the polishing pad 2 to lock the rotary clamping member 4.

[0025] Based on the above structure, the mounting groove 11 of the present embodiment is set through both ends of the polishing wheel body 1, ensuring that the polishing pad 2 can be inserted from one end and then wrapped around the outer peripheral side of the polishing wheel body 1, and then pass through the other end, so that the combination of the polishing pad 2 and the polishing wheel body 1 is tighter and more uniform. In addition, the present embodiment uses a multi-point bonding between the polishing pad 2 and the polishing wheel body 1, the mating end 21 is wrapped around the rotating clamp 4 and inserted into the mounting groove 11 for loose adjustment, and the locking assembly 3 is connected and locked with the exposed part of the rotating clamp 4, so as to ensure that the position of the polishing pad 2 remains unchanged during the polishing process by mechanical locking, avoid loosening or falling off due to vibration or external force, solve the problem of loosening of the polishing pad 2 caused by the traditional bonding method, and thus improve the quality of substrate polishing.

[0026] It can be understood that in this embodiment, the tightness of the polishing pad 2 is adjusted by rotating the pressing member 3 so that the polishing pad 2 is tightly attached to the polishing wheel.

[0027] In some embodiments, the locking assembly 3 includes a pressure block 31, a first locking member 32 and a second locking member 33. The pressure block 31 has a first locking hole, two second locking holes and two mounting holes 313. The second locking hole is connected to the mounting hole 313. The first locking member 32 passes through the first locking hole and is connected to the polishing wheel body 1 to achieve the positioning and preliminary fixation of the pressure block 31 itself at both ends of the polishing wheel body 1, ensuring that the pressure block 31 will not fall out from the two ends of the polishing wheel body 1. The pressure block 31 is sleeved on the peripheral side of the rotating pressure member 4 through the mounting hole 313, and the second locking member 33 passes through the second locking hole and is cooperatively connected with the rotating pressure member 4 to achieve further locking of the polishing pad 2, ensuring that the polishing pad 2 can also remain firm during polishing operation, reducing movement caused by vibration or external force, and avoiding damage to the substrate sheet.

[0028] It can be understood that the rotary clamping member 4 of this embodiment is located between the polishing pad 2 and the polishing wheel body 1, and its peripheral side is mounted by the pressure block 31 through the mounting hole 313, and then connected to it by the second locking member 33 passing through the second locking hole, forming a stable three-point support structure, which greatly improves the overall fixing strength and stability.

[0029] In some embodiments, the mounting groove 11 includes a first groove portion 111 and a second groove portion 112, the first groove portion 111 is connected to the outside through the second groove portion 112, the mating end 21 is inserted into the first groove portion 111, and the width of the first groove portion 111 is greater than the width of the second groove portion 112, ensuring that the mating end 21 can be smoothly inserted and has sufficient space after insertion to accommodate any necessary adjustments or slight deformations without causing squeezing or damage to the polishing pad 2 itself, and also facilitating installation during the assembly process; in addition, the width of the second groove portion 112 is relatively small, so that after assembly is completed, the polishing pad 2 can be further limited and locked by the narrow part of the second groove portion 112, so that the polishing pad 2 can be kept stable and not displaced even under the centrifugal force generated by the high-speed rotation of the polishing wheel.

[0030] In some embodiments, the first groove portion 111 includes two first sub-grooves 1111 and a second sub-groove 1112 for connecting the two first sub-grooves 1111, the two first sub-grooves 1111 are arranged on both sides of the second sub-groove 1112, and the first sub-groove 1111 is used to accommodate the mating end 21 to ensure that the mating end 21 of the polishing pad 2 can be tightly and firmly inserted and maintained in the correct position to reduce the occurrence of displacement during the polishing process; in addition, the second sub-groove 1112 is connected to the second groove portion 112, so that when the mating end 21 is inserted into the first sub-groove 1111, the polishing surface 22 is wrapped around the outer peripheral side of the polishing wheel body 1 through the second sub-groove 1112.

[0031] In some embodiments, the bottom of the second sub-groove 1112 protrudes toward the second groove portion 112, so that when the mating end 21 is pushed along the first sub-groove 1111 toward the second sub-groove 1112, the protruding portion can serve as a natural guide to help the mating end 21 be pushed into place more accurately, thereby ensuring the accuracy of the installation and avoiding incorrect installation or offset.

[0032] In some embodiments, the mating end 21 includes a mating portion 211, a first connecting section 212 and a second connecting section 213. The mating portion 211 is wrapped around the outer peripheral side of the rotating clamp 4 to directly contact and be fastened to the rotating clamp 4, thereby ensuring the positioning and fixation of the polishing pad 2 on the rotating clamp 4. The second connecting section 213 is connected to the mating portion 211 through the first connecting section 212. The side of the second connecting section 213 away from the first connecting section 212 is connected to the polishing surface 22. The first connecting section 212 fits with the inner wall surface of the first groove portion 111, thereby ensuring that the mating end 21 can be in close contact with the inner wall surface when inserted into the first groove portion 111, thereby preventing the mating end 21 from shaking or deflecting during the polishing process. The second connecting section 213 fits with the inner wall surface of the second groove portion 112, thereby ensuring the continuity and integrity of the overall structure of the polishing pad 2 and ensuring the surface flatness during the polishing operation.

[0033] In some embodiments, the mating portion 211 is cylindrical, so that when it surrounds the outer peripheral side of the rotating clamp 4, it forms a tight embracing structure to ensure good contact and fit between the two, thereby providing a physically stable connection basis and reducing possible sliding or misalignment during the polishing process. In addition, the cylindrical shape can ensure that the force distribution is more uniform on the entire circumferential surface where the mating portion contacts the rotating clamp 4. During the polishing process, this helps to disperse the pressure and shear force acting on the mating portion, reduce local stress concentration, protect the polishing pad 2 and the rotating clamp 4 from damage, and extend the service life.

[0034] It should be noted that the matching portion 211 of this embodiment can be a cylindrical shape formed by winding around the rotary pressing member 4, or can be a cylindrical shape formed during production to match the rotary pressing member 4. This embodiment preferably adopts a cylindrical shape formed by winding around the rotary pressing member 4.

[0035] In some embodiments, the rotary clamp 4 includes a main body 41, a locking part 42 and a force-applying part 43. The force-applying part 43 is connected to the main body 41 through the locking part 42. The mating end 21 wraps the outer peripheral side of the main body 41. The locking assembly 3 is matingly connected with the locking part 42 to achieve the tightening of the entire rotary clamp 4 to prevent loosening during the polishing process. The force-applying part 43 is exposed outside the locking assembly 3, so that the polishing pad 2 can be tightened by rotating the force-applying part 43. In addition, the diameter of the main body 41 is larger than the diameter of the locking part 42 to ensure that the main body 41 can provide a larger contact area, ensure a stable connection with the mating end 21, and improve stability. The diameter of the locking part 42 is larger than the diameter of the force-applying part 43.

[0036] In this embodiment, the close fit between the main body 41 and the mating end 21 and the precise fit between the locking portion 42 and the locking assembly 3 ensure the high stability and position accuracy of the polishing pad 2 during use, thereby reducing polishing errors.

[0037] In some embodiments, a plurality of protrusions are provided on the surface of the main body 41. In this embodiment, the contact surface area between the polishing pad 2 and the main body 41 is increased by providing the protrusions. Since the point contact or line contact between the protrusions and the material of the polishing pad 2 generates a greater friction coefficient, the friction between the two is increased, so that during the polishing operation, the polishing pad 2 can also be prevented from sliding or falling off the rotating clamp 4, ensuring the stability and safety of the polishing process. In addition, by applying local pressure to the polishing pad 2 through these protrusions, the contact between the polishing pad 2 and the polishing wheel can be made closer, the gap can be reduced, and the uniform transmission of force during the polishing process can be ensured.

[0038] It should be noted that the protrusions in this embodiment may be convex dots or pattern structures such as stripes and serrations.

[0039] In some embodiments, the polishing wheel body 1 includes a main body 12 and a rotating shaft 13. The main body 12 has a mounting groove 11. The locking assembly 3 is connected to the main body 12 so that the polishing pad 2 is installed on the main body 12 and can act on the surface of the workpiece for polishing. Rotating shafts 13 are provided at both ends of the main body 12 to connect the polishing wheel body 1 with a power source (such as an electric motor), and are installed on the equipment through bearings so that the polishing wheel can rotate.

[0040] The installation process is as follows:

[0041] Manually wrap the two mating ends 21 of the polishing pad 2 on the corresponding rotating clamping members 4, align the two wrapped rotating clamping members 4 with the mounting groove 11 along the axial direction of the polishing wheel body 1 and insert them, align the rotating axis 13 to install the pressure plate on both ends of the polishing wheel body 1, and tighten the first locking member 32; at the same time, screw the two rotating clamping members 4 until the polishing pad 2 is tensioned, tighten the second locking member 33, and the operation is completed.

[0042] In summary, the embodiment of the utility model provides a polishing wheel, which is bonded at multiple points between the polishing pad 2 and the polishing wheel body 1, the mating end 21 is wrapped around the rotary pressing member 4 and inserted into the mounting groove 11 for tightness adjustment, and the locking assembly 3 is connected and locked with the exposed part of the rotary pressing member 4, so as to ensure that the position of the polishing pad 2 remains unchanged during the polishing process by mechanical locking, avoid loosening or falling off due to vibration or external force, solve the problem of loosening of the polishing pad 2 caused by traditional pasting methods, and thus improve the polishing quality of the substrate.

[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A polishing wheel, characterized in that: It includes a polishing wheel body, a polishing pad, two locking assemblies and two rotary clamping members, the polishing wheel body having a mounting groove opened on the outer peripheral side surface of the polishing wheel body, and the mounting groove is arranged through both ends of the polishing wheel body, the polishing pad includes two mating ends and a polishing surface connecting the two mating ends, the mating ends are wrapped around the outer peripheral side surface of the corresponding rotary clamping member and inserted into the mounting groove and bonded to the mounting groove, the rotary clamping member is partially exposed outside the mounting groove, the polishing surface is wrapped around the outer peripheral side surface of the polishing wheel body, and the polishing surface is bonded to the outer peripheral side surface of the polishing wheel body, the two locking assemblies are respectively installed at both ends of the polishing wheel body, and are mated and connected with the part of the rotary clamping member exposed outside the mounting groove to lock the rotary clamping member.

2. The polishing wheel according to claim 1, characterized in that: The locking assembly includes a pressure block, a first locking piece and a second locking piece, the pressure block has a first locking hole, two second locking holes and two mounting holes, the second locking hole is connected to the mounting hole, the first locking piece is connected to the polishing wheel body through the first locking hole, the pressure block is sleeved on the circumferential side of the rotating pressure piece through the mounting hole, and the second locking piece is connected to the rotating pressure piece through the second locking hole.

3. The polishing wheel according to claim 1, characterized in that: The installation groove includes a first groove portion and a second groove portion, the first groove portion is connected to the outside through the second groove portion, and the width of the first groove portion is greater than the width of the second groove portion, and the mating end is inserted into the first groove portion.

4. The polishing wheel according to claim 3, characterized in that: The first groove portion includes two first sub-grooves for accommodating the mating ends and a second sub-groove for connecting the two first sub-grooves, the two first sub-grooves are arranged on both sides of the second sub-groove, and the second sub-groove is connected to the second groove portion.

5. The polishing wheel according to claim 4, characterized in that: The groove bottom of the second sub-groove protrudes toward the second groove portion.

6. The polishing wheel according to claim 3, characterized in that: The mating end includes a mating portion, a first connecting section and a second connecting section, the mating portion is wrapped around the outer peripheral side surface of the rotary pressing member, the second connecting section is connected to the mating portion through the first connecting section, the side of the second connecting section away from the first connecting section is connected to the polishing surface, the first connecting section is in contact with the inner wall surface of the first groove portion, and the second connecting section is in contact with the inner wall surface of the second groove portion.

7. The polishing wheel according to claim 6, characterized in that: The matching portion is cylindrical.

8. The polishing wheel according to claim 1, characterized in that: The rotary pressing member includes a main body, a locking portion and a force-applying portion, the force-applying portion is connected to the main body through the locking portion, the mating end wraps around the outer peripheral side surface of the main body, the locking assembly is matingly connected to the locking portion, the force-applying portion is exposed outside the locking assembly, and the diameter of the main body is larger than the diameter of the locking portion, and the diameter of the locking portion is larger than the diameter of the force-applying portion.

9. The polishing wheel according to claim 8, characterized in that: A plurality of protrusions are arranged on the surface of the main body.

10. The polishing wheel according to claim 1, characterized in that: The polishing wheel body comprises a main body portion and a rotating shaft, the main body portion has the mounting groove, the locking assembly is connected to the main body portion, and the rotating shaft is disposed at both ends of the main body portion.

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