Anti-pressing device for silicon wafer basket

Abstract

The utility model relates to the technical field of silicon wafer transfer, in particular to an anti-pressing device for a silicon wafer flower basket, which can effectively prevent the flower basket from being crushed, comprises a suspension seat body, and is characterized in that limiting sleeves are mounted at two ends of the suspension seat body, and hanging rods are arranged in the limiting sleeves in a sliding manner; the bottom of the hanging rod is fixedly connected with a transverse rod, the top of the hanging rod is provided with an anti-falling screw, the hanging rod is sleeved with a spring, the two ends of the spring abut against the transverse rod and the hanging base body respectively, and flower basket hanging rods are arranged at the two ends of the transverse rod.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer transfer, in particular to a silicon wafer basket pressure prevention device. Background Art

[0002] Silicon wafers are the most important raw materials in the semiconductor industry. During the production and processing of silicon wafers, they are stored in a jig, which is called a silicon wafer basket in the industry. A suspension mechanism is required during the transfer of the silicon wafer basket. The existing suspension mechanism usually uses two L-shaped suspension rods for lifting. During the descent of the suspension rod, once the position deviates, the suspension rod and the silicon wafer basket will collide rigidly and the basket will be easily crushed. Summary of the invention

[0003] In order to solve the above technical problems, the utility model provides a silicon wafer flower basket anti-pressure device, which can effectively prevent the flower basket from being crushed.

[0004] The technical solution is as follows: a silicon wafer flower basket anti-pressure device, which includes a suspension seat body, characterized in that limit sleeves are installed at both ends of the suspension seat body, a suspension rod is slidably arranged in the limit sleeve, the bottom of the suspension rod is fixedly connected to the cross bar, and an anti-drop screw is arranged on the top, a spring is sleeved on the suspension rod and the two ends of the spring respectively resist the cross bar and the suspension seat body, and flower basket hanging rods are arranged at both ends of the cross bar.

[0005] Its further feature is that the suspension seat is fixed to a moving frame, and corresponding in-place sensors are installed on the moving frame and the cross bar.

[0006] After adopting the utility model, the traditional fixed suspension rod structure is cancelled, and a retractable cross bar is set by a spring. When the flower basket hanging rod or the cross bar presses the flower basket during the descent process, the cross bar can be retracted upward, effectively avoiding crushing of the silicon wafer flower basket; further, an in-place sensor is provided to timely detect when the silicon wafer flower basket is pressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 It is a schematic diagram of the structure of the utility model;

[0008] Figure 2 This is a structural cross-sectional view of the utility model. DETAILED DESCRIPTION

[0009] See Figure 1 , Figure 2As shown, a silicon wafer flower basket anti-pressure device includes a suspension base body 1, and limit sleeves 2 are installed at both ends of the suspension base body 1. A suspension rod 3 is slidably arranged in the limit sleeve 2. The bottom of the suspension rod 3 is fixedly connected to a cross bar 4, and an anti-drop screw 5 and a gasket are arranged on the top, so that the suspension rod 3 can move upward in the limit sleeve 2, but it is restricted from falling off from the limit sleeve 2. A spring 6 is mounted on the suspension rod 3, and the two ends of the spring 6 are respectively against the cross bar 4 and the suspension base body 1, and flower basket hanging rods 9 are arranged at both ends of the cross bar 4.

[0010] The suspension seat body 1 is fixed to the moving frame 8 and can move horizontally and vertically along with the moving frame 8 . The moving frame 8 and the crossbar 4 are provided with corresponding in-place sensors 7 .

[0011] The working principle is as follows: the suspension seat body 1 moves to the top of the silicon wafer flower basket under the drive of the mobile frame 8, and then starts to descend, so that the flower basket hanging rod 9 on the cross bar 4 is close to the hanging point of the silicon wafer flower basket. When a deviation occurs during the descent, the flower basket hanging rod 9 will press the silicon wafer flower basket. At this time, the flower basket hanging rod 9 is squeezed, and the suspension rod 3 can move upward, so the cross bar 4 is lifted up to make way, which will not cause serious squeezing of the silicon wafer flower basket, preventing the silicon wafer flower basket from being crushed, and an in-place sensor 7 is provided, which can detect when the cross bar 4 is lifted upward, and an alarm reminder can be realized through a voice-controlled device.

Claims

1. A silicon wafer basket pressure protection device, comprising a suspension seat, characterized in that: Limiting sleeves are installed at both ends of the suspension seat body, and a hanging rod is slidably arranged in the limiting sleeve. The bottom of the hanging rod is fixedly connected to the cross bar and the top is provided with an anti-drop screw. A spring is sleeved on the hanging rod and the two ends of the spring respectively resist the cross bar and the suspension seat body, and flower basket hanging rods are arranged at both ends of the cross bar.

2. The silicon wafer basket pressure protection device according to claim 1, characterized in that: The suspension seat is fixed to the moving frame, and corresponding in-place sensors are installed on the moving frame and the cross bar.

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