Hanging device of vacuum coating equipment

By using sliders and anti-detachment design in the mounting device of vacuum coating equipment, the problem of easy drop of the pendant during rotation is solved, the stability and reliability of the equipment are improved, and the uniformity of the coating is ensured.

CN222631526UActive Publication Date: 2025-03-18JIANGXI ZHAO CHI SEMICON CO LTD
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Patent Information

Application Number
CN202420550596.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-21
Publication Date
2025-03-18
Estimated Expiration
2034-03-21

AI Technical Summary

Technical Problem

The attachment devices of existing vacuum coating equipment are prone to centrifugal force during rotation, which causes the hanging parts to fall off the hanger structure assembly, reducing the stability and reliability of the equipment.

Method used

A hooking device for vacuum coating equipment is designed, using the slider to slide along the radial direction of the rotation axis to drive the anti-removal frame and the hanging frame to stay away or fit each other. Through the inner bending design of the hanging frame and the anti-removal frame, a hooking space for the hanging piece to move is formed to ensure the stability and reliability of the hanging piece.

Benefits of technology

Effectively prevent the pendant from falling during rotation, improve the stability and reliability of the equipment, and ensure that the pendant has sufficient moving space and improve the uniformity of the coating.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a hanging device of vacuum coating equipment, which relates to the technical field of vacuum coating and comprises a rotating shaft arranged in a coating chamber structure, a hanging piece frame, at least one sliding strip and an anti-falling frame connected with the sliding strip, the sliding strip is connected to the rotating shaft in a sliding mode, and the sliding direction of the sliding strip extends in the radial direction of the rotating shaft, so that when the sliding strip slides on the rotating shaft in a reciprocating mode, the sliding strip drives the anti-disengaging frames to be away from each other or attached to each other with the hanging piece frame as the target; the hanging piece frame and the anti-disengaging frame are both bent inwards, the bending direction of the hanging piece frame is opposite to that of the anti-disengaging frame, and when the hanging piece frame and the anti-disengaging frame are attached to each other, one end of the hanging piece frame is connected with one end of the anti-disengaging frame to form a hanging space for hanging pieces to move. Therefore, the movement of the pendant is limited, and the stability and reliability of the pendant hung on the pendant frame are guaranteed.
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Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a hanging device for vacuum coating equipment. Background Art

[0002] Vacuum coating technology is one of the methods of gas phase physical deposition. Under vacuum conditions, the coating material is heated by an evaporator to sublimate it, and the evaporated particle flow is directly shot toward the substrate, and deposited on the substrate surface to form a solid film. However, when the existing coating machine coats the coating parts, the coating quality is poor and the uniformity is low, which affects the product quality, and the overall stability is poor. Therefore, a mounting device for vacuum coating equipment that can improve the uniformity of coating is needed.

[0003] According to the existing patent, the publication number is "CN216107164U-A hanging device for vacuum coating equipment with uniform coating function", which includes a coating chamber structure and a rack structure assembly, and the rack structure assembly includes a motor fixing seat, a motor, a coupling, an upper sealing structure rack structure, and a lower sealing structure: the upper sealing structure is the same as the lower sealing structure, including a sleeve, a first bearing, a first retaining ring, a first pole shoe, a permanent magnet, a second pole shoe, a second retaining ring, and a second bearing, and the first bearing, the first retaining ring, the first pole shoe, the permanent magnet, the second pole shoe, the second retaining ring, and the second bearing are sequentially arranged inside the sleeve. The parts that need to be vacuum coated are sequentially hung on the rack structure assembly, and then the coating work is carried out in the coating chamber structure. The motor in the rack structure assembly drives the rack structure to rotate at a uniform speed through the coupling, and the upper sealing structure and the lower sealing structure effectively ensure that the vacuum degree in the entire coating chamber structure remains constant, thereby effectively improving the uniformity of the coating on the surface of the parts.

[0004] In order to ensure that the outer surfaces of the hangers are coated, the above-mentioned hanger structure assembly needs to rotate continuously. However, during the rotation of the hanger structure assembly, centrifugal force is likely to occur, causing some hangers to fall off the hanger structure assembly, reducing the stability and reliability of the equipment. Utility Model Content

[0005] Based on this, the purpose of the utility model is to provide a hanging device for vacuum coating equipment to solve the technical problem that the hanging device for vacuum coating equipment in the background technology is that in order to ensure that the outer surface of the hanger is coated, the hanger structure assembly in the equipment needs to rotate continuously, and centrifugal force is likely to occur on the hanger structure assembly, causing some hangers to fall from the hanger structure assembly, thereby reducing the stability and reliability of the equipment.

[0006] The utility model provides a hanging device for vacuum coating equipment, the hanging device comprising a rotating shaft arranged in a coating chamber structure, a hanging frame connected to the rotating shaft, at least one slide bar and an anti-dropping frame connected to the slide bar;

[0007] The slide bar is slidably connected to the rotating shaft, and the sliding direction of the slide bar extends along the radial direction of the rotating shaft, so that when the slide bar reciprocates on the rotating shaft, the slide bar drives the anti-slip frame to move away from or fit together with the hanging frame as a target;

[0008] The hanging frame and the anti-slip frame are both bent inwardly, and the bending directions of the hanging frame and the anti-slip frame are arranged relatively to each other, so that when the hanging frame and the anti-slip frame are attached to each other, one end of the hanging frame and one end of the anti-slip frame are connected to each other to form a hanging space for hanging activities.

[0009] Furthermore, the hanging device also includes a fixed card group arranged on the slide bar;

[0010] The rotating shaft is provided with a clamping piece matched with the fixed card group, and the clamping piece is used to clamp the fixed card group to limit the sliding of the slide bar relative to the rotating shaft.

[0011] Furthermore, the fixed card assembly comprises an inner ring and an outer ring rotatably connected to each other, and the inner ring and the outer ring are respectively provided with a first card slot and a second card slot that match the card connector, and the first card slot and the second card slot are connected to each other;

[0012] The first clamping groove extends along the radial direction of the inner ring, and the second clamping groove extends along the axial direction of the outer ring, so that when the clamping member passes through the first clamping groove and enters the second clamping groove, the outer ring can be rotated to clamp the clamping member.

[0013] Furthermore, the inner ring is connected to the slide bar.

[0014] Furthermore, at least two of the first clamping grooves are provided, and at least two of the first clamping grooves are symmetrically arranged on the inner wall of the inner ring.

[0015] Furthermore, at least two clamping parts are provided on the rotating shaft, and at least two of the clamping parts are symmetrically arranged on the rotating shaft;

[0016] Wherein, each of the clamping components is arranged opposite to each of the first clamping slots.

[0017] Furthermore, the vacuum coating device further comprises a driving member and a switch device, wherein the switch device is electrically connected to the driving member;

[0018] Wherein, the output end of the driving member is connected to one end of the rotating shaft to drive the rotating shaft to rotate.

[0019] Furthermore, the vacuum coating equipment also includes a transmission mechanism;

[0020] The vacuum coating equipment includes a plurality of rotating shafts, and the plurality of rotating shafts are arranged at intervals in the coating chamber structure. The plurality of rotating shafts are connected to each other through the transmission mechanism, so that when the driving member drives any one of the rotating shafts to rotate, the other rotating shafts rotate synchronously.

[0021] Furthermore, a plurality of hanger racks are provided on the rotating shaft, and the plurality of hanger racks are arranged at intervals along the radial direction of the rotating shaft;

[0022] Wherein, a plurality of anti-slip frames are arranged on the slide bar, and the plurality of anti-slip frames are arranged at intervals along the radial direction of the slide bar, and each of the hanging frame and each of the anti-slip frames are arranged opposite to each other.

[0023] Furthermore, the slide bar is fixedly connected to the anti-slip frame, and the rotating shaft is fixedly connected to the hanging frame.

[0024] Compared with the prior art, the beneficial effects of the utility model are:

[0025] In the hanging device of the vacuum coating equipment provided by the utility model, a sliding bar is used to slide along the radial direction of the rotating shaft, so that the sliding bar drives the anti-slip frame to move away from or fit together with the hanging frame as the target. When the anti-slip frame and the hanging frame fit together, the open hanging frame is converted into a closed type, so that the movement of the hanger is restricted, and the stability and reliability of the hanger hanging on the hanging frame are guaranteed. Moreover, since the hanging frame and the anti-slip frame are both bent inwardly, the bending directions of the hanging frame and the anti-slip frame are relatively arranged, so that when the hanging frame and the anti-slip frame fit together, one end of the hanging frame and one end of the anti-slip frame are connected to each other to form a hanging space for the hanger to move, thereby ensuring that the hanger has sufficient space to move on the hanging frame, so as to improve the practicality of the vacuum coating equipment provided by the utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a three-dimensional diagram of the overall structure of the hanging device of the vacuum coating equipment in one embodiment of the utility model;

[0027] Figure 2 This is a schematic diagram of a hanging device in one embodiment of the utility model;

[0028] Figure 3 This is a schematic diagram of a transmission mechanism in an embodiment of the utility model;

[0029] Figure 4 This is a schematic diagram of a suspension group in one embodiment of the utility model;

[0030] Figure 5This is a schematic diagram of an anti-drop mechanism in an embodiment of the utility model;

[0031] Figure 6 It is a schematic diagram of a fixed card group in one embodiment of the utility model.

[0032] In the figure: 1. switch device; 2. coating chamber structure; 3. supporting leg; 4. rotating sealing door; 5. hanging device; 51. rotating disk; 52. rotating hole; 53. shaft rod; 54. anti-drop mechanism; 541. slide bar; 542. anti-drop frame; 543. fixed card group; 5431. inner ring; 5432. first card slot; 5433. second card slot; 5434. outer ring; 5435. rotating slot; 55. hanging group; 551. rotating shaft; 552. hanging frame; 553. clamping member; 554. slide rail; 56. transmission mechanism; 561. hollow fixed disk; 562. toothed disk one; 563. square slot one; 564. toothed disk two; 565. square slot two; 6. driving member. DETAILED DESCRIPTION

[0033] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0034] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0036] See also Figures 1 to 6As shown, it is a hanging device of a vacuum coating equipment in one embodiment of the utility model. In some preferred embodiments, the vacuum coating equipment includes four supporting legs 3, the upper ends of the four supporting legs 3 are commonly fixedly connected to the coating chamber structure 2, the middle of the left end of the coating chamber structure 2 is fixedly connected to the switch device 1, the four supporting legs 3 play a role in supporting the entire coating chamber structure 2, and the right front side of the coating chamber structure 2 is rotatably connected to a rotating sealing door 4.

[0037] Specifically, the hanging device 5 includes a rotating shaft 551 arranged in the coating chamber structure 2 and a hanging rack 552 connected to the rotating shaft 551, the hanging rack 552 has the function of hanging the hanger, supporting the hanging rack 552 through the rotating shaft 551, and driving the hanging rack 552 to rotate. In some other preferred embodiments, the vacuum coating equipment also includes a driving member 6, and the switch device 1 is electrically connected to the driving member 6, wherein the output end of the driving member 6 is connected to one end of the rotating shaft 551 for driving the rotating shaft 551 to rotate.

[0038] It should be noted that the specific installation method of the switch device 1 and the drive member 6, the circuit connection method and the control method in the present invention are all conventional designs and are conventional design means for those skilled in the art. The coating chamber structure 2 includes devices such as a vapor deposition source and a conductive heating device, and the switch device 1 includes devices such as a sensor and a control module. They only need to meet the purpose of performing vacuum coating and improving the uniformity of the coating, and no special explanation is given here.

[0039] Specifically, the driving member 6 may be a driving motor.

[0040] In order to facilitate the coating treatment of the hanging part, the hanging device 5 in this embodiment further includes at least one slide bar 541 and an anti-drop frame 542 connected to the slide bar 541;

[0041] The slide bar 541 is slidably connected to the rotating shaft 551, and the sliding direction of the slide bar 541 extends along the radial direction of the rotating shaft 551, so that when the slide bar 541 slides back and forth on the rotating shaft 551, the slide bar 541 drives the anti-slip frame 542 to move away from or fit together with the hanging frame 552 as the target;

[0042] The hanging frame 552 and the anti-slip frame 542 are both bent inward, and the bending directions of the hanging frame 552 and the anti-slip frame 542 are relatively arranged, so that when the hanging frame 552 and the anti-slip frame 542 are in contact with each other, one end of the hanging frame 552 and one end of the anti-slip frame 542 are connected to each other to form a hanging space for the hanging movement.

[0043] That is to say, when the hanger is coated, the slide bar 541 is used to slide along the radial direction of the rotating shaft 551, so that the slide bar 541 drives the anti-slip frame 542 to move away from or fit together with the hanger frame 552 as the target. When the anti-slip frame 542 and the hanger frame 552 fit together, the open hanger frame 552 is converted into a closed type, so that the movement of the hanger is restricted, and the stability and reliability of the hanger hanging on the hanger frame 552 are guaranteed. Moreover, since the hanger frame 552 and the anti-slip frame 542 are both bent inwardly, the bending directions of the hanger frame 552 and the anti-slip frame 542 are relatively arranged, so that when the hanger frame 552 and the anti-slip frame 542 fit together, one end of the hanger frame 552 and one end of the anti-slip frame 542 are connected to each other to form a hanging space for the hanger to move, thereby ensuring that the hanger has sufficient space to move on the hanger frame 552, so as to improve the practicality of the vacuum coating equipment provided by the utility model.

[0044] See also Figure 4 and Figure 5 As shown, in some preferred embodiments, there can be two slide bars 541, and two slide rails 554 for the slide bars 541 to slide are arranged on the rotating shaft 551. The outer surfaces of the two slide bars 541 on the same side are slidably connected with the inner cavities of the two slide rails 554 on the same side. It should be noted that the use of the slide rail 554 is one of the sliding connection methods, and other combinations of sliding connections can also be used, which are not specifically explained here.

[0045] Furthermore, in order to limit the sliding of the slide bar 541 relative to the rotating shaft 551, the hanging device 5 further includes a fixing card group 543 arranged on the slide bar 541;

[0046] A clamping member 553 matched with the fixed clamping group 543 is disposed on the rotating shaft 551 . The clamping member 553 is used to clamp the fixed clamping group 543 to limit the sliding of the slide bar 541 relative to the rotating shaft 551 .

[0047] That is to say, in some preferred embodiments, when the hanging rack 552 and the anti-slip rack 542 fit together, the fixing card group 543 is clamped by the clamping piece 553, so that the sliding bar 541 is relatively fixed, that is, the hanging rack 552 and the anti-slip rack 542 are just pressed against each other and connected, so as to improve the stability of the hanging rack 552 and the anti-slip rack 542 after being connected by the fixing card group 543.

[0048] In some other preferred embodiments, when the hanger is coated and needs to be removed from the hanger rack 552, the hanger rack 552 and the anti-drop frame 542 are moved away from each other, that is, in some actual situations, the slide bar 541 moves upward, and after the slide bar 541 moves upward for a certain distance, the clamping member 553 is used to clamp the fixed card group 543, so that the slide bar 541 is relatively fixed, and the hangers can be removed one by one.

[0049] It should be noted that whether it is to improve the stability of the hanger frame 552 and the anti-slip frame 542 after being connected, or to facilitate the removal of the hanger, it can be achieved by adjusting the position of the clamping member 553 on the rotating shaft 551. When the clamping member 553 is set in a state that is convenient for removing the hanger, a concave-convex structure can be set at the end where the hanger frame 552 and the anti-slip frame 542 are close to each other to ensure the stability of the two after the connection.

[0050] See also Figure 6 As shown, specifically, the fixed card group 543 includes an inner ring 5431 and an outer ring 5434 rotatably connected to each other, and the inner ring 5431 and the outer ring 5434 are respectively provided with a first card slot 5432 and a second card slot 5433 that match the card connector 553, and the first card slot 5432 and the second card slot 5433 are connected to each other;

[0051] The first slot 5432 extends radially along the inner ring 5431 , and the second slot 5433 extends axially along the outer ring 5434 , so that when the clamping member 553 passes through the first slot 5432 and enters the second slot 5433 , the outer ring 5434 is rotated to clamp the clamping member 553 .

[0052] Specifically, the inner ring 5431 is connected to the slide bar 541 .

[0053] In some other preferred embodiments, the slide bar 541 and the anti-slip frame 542 are fixedly connected, the rotating shaft 551 and the hanging frame 552 are fixedly connected, and in order to ensure the mutual rotational connection between the inner ring 5431 and the outer ring 5434, a rotation groove 5435 is opened on the outer surface of the inner ring 5431, and the outer ring 5434 is rotationally connected to the inner ring 5431 through the rotation groove 5435.

[0054] When the parts are hung on each hanger rack 552 in turn, the inner ring 5431 is slid first, so that the inner ring 5431 drives the slide bar 541 and the anti-slip frame 542 to slide on the inner cavity of the slide rail 554 and the outer surface of the rotating shaft 551 respectively. At the same time, the lower part of the outer surface of the anti-slip frame 542 is separated from the upper part of the outer surface of the hanger rack 552, so that the parts that need vacuum coating are hung on the hanger rack 552 in turn. The parts hung on the hanger rack 552 are restricted by the fixed card group 543 and the self-gravity of the slide bar 541, so as to prevent the parts from accidentally falling during the vacuum coating process.

[0055] In order to facilitate the removal of parts after coating, after coating is completed, the inner ring 5431 is slid upwards, so that the inner ring 5431 drives the outer ring 5434 in the inner cavity of the rotating groove 5435 to slide upwards, and at the same time drives the sliding bar 541 and the anti-stripping frame 542 to slide upwards, so that the clamping member 553 slides through the first clamping groove 5432 and reaches the inner cavity of the second clamping groove 5433, and then the outer ring 5434 is rotated to make the second clamping groove 5433 slide on the outer surface of the clamping member 553 respectively, so that the outlet of the second clamping groove 5433 is staggered with the first clamping groove 5432, and then the inner ring 5431 drives the sliding bar 541 and the anti-stripping frame 542 to be fixed, and the anti-stripping frame 542 is restricted from sliding up and down, so that the coated parts are taken out from the hanging frame 552, thereby achieving the purpose of facilitating the removal of parts after coating.

[0056] Furthermore, at least two first slots 5432 are provided, and at least two first slots 5432 are symmetrically arranged on the inner wall of the inner ring 5431, and at least two clamping members 553 are provided on the rotating shaft 551, and at least two clamping members 553 are symmetrically arranged on the rotating shaft 551; wherein each clamping member 553 is arranged opposite to each first slot 5432.

[0057] In addition, in order to improve the practicality of the hanging device 5 of the vacuum coating equipment provided by the utility model, the vacuum coating equipment further includes a transmission mechanism 56;

[0058] The vacuum coating equipment includes a plurality of rotating shafts 551, and the plurality of rotating shafts 551 are arranged at intervals in the coating chamber structure 2. The plurality of rotating shafts 551 are connected to each other through a transmission mechanism 56, so that when the driving member 6 drives any rotating shaft 551 to rotate, the other rotating shafts 551 rotate synchronously.

[0059] Furthermore, a plurality of hanger racks 552 are provided on the rotating shaft 551, and the plurality of hanger racks 552 are arranged at intervals along the radial direction of the rotating shaft 551;

[0060] A plurality of anti-slip frames 542 are disposed on the slide bar 541 , and the plurality of anti-slip frames 542 are arranged at intervals along the radial direction of the slide bar 541 , and each hanging frame 552 is arranged opposite to each anti-slip frame 542 .

[0061] Specifically, there may be six rotating shafts 551 , and four hanging racks 552 may be disposed on each rotating shaft 551 , and four anti-slip racks 542 may be disposed on each sliding bar 541 .

[0062] To facilitate understanding of the operating principle of the transmission mechanism 56 in this case, the rotating shaft 551, the hanging frame 552, the clamping member 553 and the slide rail 554 are collectively referred to as the suspension group 55; the slide bar 541, the anti-drop frame 542, and the fixed card group 543 are collectively referred to as the anti-drop mechanism 54.

[0063] In some preferred embodiments, in order to facilitate driving each hanging frame 552 to rotate, the hanging device 5 in this example also includes a rotating disk 51, and six rotating holes 52 are opened in a circular array at the lower end of the rotating disk 51, and the inner cavities of the six rotating holes 52 are rotatably connected with a suspension group 55, and the middle parts of the six suspension groups 55 are slidably connected with an anti-drop mechanism 54, and a through hole is opened in the middle part of the upper end of the rotating disk 51, and the inner cavity of the through hole is rotatably connected with a shaft rod 53, and the lower part of the six suspension groups 55 and the lower part of the outer surface of the shaft rod 53 are slidably connected with a transmission mechanism 56, the upper end of the shaft rod 53 is fixedly connected to the output end of the driving member 6, the upper end of the rotating disk 51 is fixedly connected to the top wall of the inner cavity of the coating chamber structure 2, and the lower part of the transmission mechanism 56 is fixedly connected to the bottom wall of the inner cavity of the coating chamber structure 2.

[0064] It should be noted that, in order to facilitate driving, the driving member 6 and the shaft rod 53 are connected.

[0065] In order to achieve the purpose of rotating the suspension group 55, as Figure 3 As shown, the transmission mechanism 56 includes a hollow fixed disk 561, and a toothed disk 2 564 is rotatably connected to the middle part of the inner cavity of the hollow fixed disk 561. The upper end of the toothed disk 2 564 in the vertical direction penetrates the middle part of the top wall of the inner cavity of the hollow fixed disk 561 and is provided with a square groove 2 565. The inner cavity of the hollow fixed disk 561 is rotatably connected with six toothed disks 1 562 in a circular array. The upper ends of the six toothed disks 1 562 in the vertical direction all penetrate the top wall of the inner cavity of the hollow fixed disk 561 and are provided with a square groove 1 563. The sides of the middle parts of the outer surfaces of the six square grooves 1 563 that are close to each other are meshed and connected with the middle part of the outer surface of the toothed disk 2 564. The inner cavity of the square groove 2 565 is slidably connected to the lower part of the outer surface of the shaft 53, so as to drive the square groove 2 565 to rotate through the shaft 53. The lower part of the outer surface of the hollow fixed disk 561 is fixedly connected to the bottom wall of the inner cavity of the coating chamber structure 2, and the inner cavities of the six square grooves 1 563 are slidably connected to the lower parts of the six suspension groups 55 respectively.

[0066] First, start the driving member 6 to drive the shaft 53 to rotate, and drive the gear plate 2 564 to rotate in the inner cavity of the hollow fixed disk 561 with the cooperation of the square groove 2 565. The rotation of the gear plate 2 564 drives the six gear plates 1 562 to rotate in the inner cavity of the hollow fixed disk 561 at the same time, and then cooperates with the square groove 1 563 to drive the six suspension groups 55 to rotate at the same time.

[0067] It should be noted that in order to achieve the purpose of hanging parts and installing the anti-drop mechanism 54, as shown in the figure, the upper parts of the outer surfaces of the six rotating shafts 551 are rotatably connected to the inner cavities of the six rotating holes 52, and the lower parts of the outer surfaces of the six rotating shafts 551 are slidably connected to the inner cavities of the six square grooves 563, and the six rotating shafts 551 are quickly installed through the six square grooves 563 respectively.

[0068] It should be noted that the quantifiers in this embodiment do not limit the quantity, and can also be other quantities, which are not specifically explained here.

[0069] In summary, the hanging device of a vacuum coating device in an embodiment of the present invention has at least the following beneficial effects compared with the vacuum coating device in the prior art:

[0070] In the hanging device of the vacuum coating equipment provided by the utility model, the sliding bar 541 is used to slide along the radial direction of the rotating shaft 551, so that the sliding bar 541 drives the anti-slip frame 542 to move away from or fit together with the hanging frame 552 as the target. When the anti-slip frame 542 and the hanging frame 552 fit together, the open hanging frame 552 is converted into a closed type, so that the movement of the hanger is restricted, and the stability and reliability of the hanger hanging on the hanging frame 552 are guaranteed. Moreover, since the hanging frame 552 and the anti-slip frame 542 are both bent inwardly, the bending directions of the hanging frame 552 and the anti-slip frame 542 are relatively arranged, so that when the hanging frame 552 and the anti-slip frame 542 fit together, one end of the hanging frame 552 and one end of the anti-slip frame 542 are connected to each other to form a hanging space for the hanger to move, thereby ensuring that the hanger has sufficient space to move on the hanging frame 552, so as to improve the practicality of the vacuum coating equipment provided by the utility model.

[0071] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0072] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A hanging device for vacuum coating equipment, the hanging device comprising a rotating shaft arranged in a coating chamber structure and a hanging frame connected to the rotating shaft, characterized in that: The hooking device further comprises at least one slide bar and an anti-drop frame connected to the slide bar; The slide bar is slidably connected to the rotating shaft, and the sliding direction of the slide bar extends along the radial direction of the rotating shaft, so that when the slide bar reciprocates on the rotating shaft, the slide bar drives the anti-slip frame to move away from or fit together with the hanging frame as a target; The hanging frame and the anti-slip frame are both bent inwardly, and the bending directions of the hanging frame and the anti-slip frame are arranged relatively to each other, so that when the hanging frame and the anti-slip frame are attached to each other, one end of the hanging frame and one end of the anti-slip frame are connected to each other to form a hanging space for hanging activities.

2. The hanging device of the vacuum coating equipment according to claim 1, characterized in that: The hanging device also includes a fixed card group arranged on the slide bar; The rotating shaft is provided with a clamping piece matched with the fixed card group, and the clamping piece is used to clamp the fixed card group to limit the sliding of the slide bar relative to the rotating shaft.

3. The hanging device of the vacuum coating equipment according to claim 2, characterized in that: The fixed card assembly comprises an inner ring and an outer ring rotatably connected to each other, the inner ring and the outer ring are respectively provided with a first card slot and a second card slot matched with the card connector, and the first card slot and the second card slot are connected to each other; The first clamping groove extends along the radial direction of the inner ring, and the second clamping groove extends along the axial direction of the outer ring, so that when the clamping member passes through the first clamping groove and enters the second clamping groove, the outer ring can be rotated to clamp the clamping member.

4. The hanging device of the vacuum coating equipment according to claim 3, characterized in that: The inner ring is connected to the slide bar.

5. The hanging device of vacuum coating equipment according to claim 4, characterized in that: There are at least two first clamping grooves, and at least two of the first clamping grooves are symmetrically arranged on the inner wall of the inner ring.

6. The hanging device of the vacuum coating equipment according to claim 5, characterized in that: At least two clamping parts are arranged on the rotating shaft, and at least two of the clamping parts are symmetrically arranged on the rotating shaft; Wherein, each of the clamping components is arranged opposite to each of the first clamping slots.

7. The hanging device of vacuum coating equipment according to claim 1, characterized in that: The vacuum coating device further comprises a driving member and a switch device, wherein the switch device is electrically connected to the driving member; Wherein, the output end of the driving member is connected to one end of the rotating shaft to drive the rotating shaft to rotate.

8. The hanging device of vacuum coating equipment according to claim 7, characterized in that: The vacuum coating equipment also includes a transmission mechanism; The vacuum coating equipment includes a plurality of rotating shafts, and the plurality of rotating shafts are arranged at intervals in the coating chamber structure. The plurality of rotating shafts are connected to each other through the transmission mechanism, so that when the driving member drives any one of the rotating shafts to rotate, the other rotating shafts rotate synchronously.

9. The hanging device of vacuum coating equipment according to claim 8, characterized in that: A plurality of hanger racks are provided on the rotating shaft, and the plurality of hanger racks are arranged at intervals along the radial direction of the rotating shaft; Wherein, a plurality of anti-slip frames are arranged on the slide bar, and the plurality of anti-slip frames are arranged at intervals along the radial direction of the slide bar, and each of the hanging frame and each of the anti-slip frames are arranged opposite to each other.

10. The hanging device of vacuum coating equipment according to claim 1, characterized in that: The slide bar is fixedly connected to the anti-slip frame, and the rotating shaft is fixedly connected to the hanging frame.

Citation Information

Patent Citations

  • Vacuum coating equipment with uniform coating function

    CN216107164U