Antenna cavity assembly and MPCVD device

Abstract

The utility model provides an antenna cavity assembly and MPCVD equipment. The antenna cavity assembly comprises an antenna and a cavity, an inner cavity with a closed bottom, a closed circumference and an open top is defined by the cavity, and the inner cavity is used for containing plasma generating microwaves; the antenna cavity assembly further comprises a channel piece, and the channel piece comprises a bottom wall, an inner wall, an outer wall, an annular wall and a partition wall. The bottom wall covers the top of the cavity in a sealing mode. The inner wall is annular, is connected to the middle of the bottom wall and extends upwards, a microwave channel is defined by the inner wall, and the microwave channel is communicated with the inner cavity; the outer wall is annular and sleeves the inner wall, and the lower end of the outer wall is hermetically and fixedly connected with the inner edge of the antenna; the annular wall is connected between the outer edge of the antenna and the outer edge of the bottom wall in the vertical direction, and the inner wall, the bottom wall, the annular wall, the antenna and the outer wall define a closed space; the partition wall is arranged between the inner wall and the outer wall so as to divide the closed space into a circulating cooling flow channel allowing a cooling medium to flow. The MPCVD equipment comprises the antenna cavity assembly provided by the utility model.

Description

Technical Field

[0001] The present disclosure relates to the semiconductor vacuum industry, and more specifically to an antenna cavity assembly and an MPCVD device. Background Art

[0002] In MPCVD (Microwave plasma Chemical Vapor Deposition) equipment, the vacuum chamber and antenna designed in the industry are two separately designed components. These two components will generate a lot of heat when working. To ensure the normal operation of the equipment, the two components need to have separate cooling systems.

[0003] Since the heat dissipation is designed separately, the heat dissipation pipelines are numerous and complex, and the two heat dissipation pipelines have a certain lag in temperature control. Utility Model Content

[0004] In view of the problems existing in the background technology, an object of the present disclosure is to provide an antenna cavity assembly and an MPCVD device, which can simplify the heat dissipation structure of the antenna and the cavity.

[0005] Another object of the present disclosure is to provide an antenna cavity assembly and an MPCVD device, which can achieve synchronous heat dissipation of the antenna and the cavity.

[0006] Another object of the present disclosure is to provide an antenna cavity assembly and an MPCVD device, which can improve the heat dissipation efficiency of the antenna and the cavity.

[0007] Thus, an antenna cavity assembly includes an antenna and a cavity, the cavity forms an inner cavity with a closed bottom, a closed circumference but an open top, and the inner cavity is used to accommodate plasma that generates microwaves; the antenna cavity assembly also includes a channel member, the channel member includes a bottom wall, an inner wall, an outer wall, an annular wall and a partition wall: the bottom wall is sealed on the top of the cavity; the inner wall is annular, connected to the middle of the bottom wall and extends upward, the inner wall forms a microwave channel, and the microwave channel is connected to the inner cavity; the outer wall is annular, sleeved outside the inner wall, and the lower end of the outer wall is sealed and fixedly connected to the inner edge of the antenna; the annular wall is connected between the outer edge of the antenna and the outer edge of the bottom wall in the up and down directions, and the inner wall, bottom wall, annular wall, antenna, and outer wall form a closed space; the partition wall is arranged between the inner wall and the outer wall to separate the closed space into a circulating cooling channel for the flow of cooling medium.

[0008] An MPCVD device includes the aforementioned antenna cavity assembly.

[0009] The beneficial effects of the present disclosure are as follows: in the antenna cavity assembly and MPCVD equipment of the present disclosure, the antenna and the cavity are integrated together through a common channel member, and the antenna is arranged as a component for forming a circulating cooling channel. Thus, the common circulating cooling channel formed by the antenna and the channel member can enable the cooling medium flowing in the circulating cooling channel P to simultaneously dissipate heat to the cavity (i.e., the cooling medium dissipates heat through conduction of the cavity via the bottom wall and the contact between the bottom wall and the top of the cavity, and directly absorbs heat from the inner cavity via the bottom wall and dissipates heat from radiation to the cavity), to the antenna (i.e., the cooling medium directly performs contact heat exchange with the antenna) and to the microwave channel (i.e., the cooling medium performs heat exchange with the microwave channel via the inner wall). Thus, compared with the background technology, the heat dissipation structure of the antenna and the cavity is greatly simplified, the space of the antenna cavity assembly is greatly saved, and because the heat dissipation of the antenna, the cavity and the microwave channel is performed through a common channel member, the heat dissipation of the antenna, the heat dissipation of the cavity and the microwave channel are performed simultaneously, thereby improving the heat dissipation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 is a side view of some components of the disclosed MPCVD equipment.

[0011] Figure 2 is along Figure 1 A cross-sectional view taken along line AA, wherein arrows show an example of circulating flow of the cooling medium.

[0012] Figure 3 yes Figure 2 A cross-sectional view with the partition wall removed.

[0013] Figure 4 is along Figure 2 A cross-sectional view made along line BB.

[0014] The reference numerals are described as follows:

[0015] 1000MPCVD equipment 35 partition wall

[0016] D vertical direction 351 vertical wall

[0017] 100 antenna cavity assembly 352 upper wall

[0018] 1 Antenna 352a through hole

[0019] 2 cavity 353 lower wall

[0020] 21 Inner cavity 354 Connecting wall

[0021] 3-channel P circulation cooling channel

[0022] 31 bottom wall 4 sealing ring

[0023] 311 first horizontal wall 200 stage

[0024] 312 second horizontal wall 300 outer cover

[0025] 313 Conical wall 300a air extraction hole

[0026] 32 Inner wall G air intake clearance

[0027] W Microwave channel F Airflow space

[0028] 33 outer wall 400 plasma

[0029] 34 ring wall 500 sealing ring

[0030] S Enclosed Space DETAILED DESCRIPTION

[0031] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0032] [Antenna cavity assembly]

[0033] Reference Figures 1 to 4 According to the present disclosure, the antenna cavity assembly 100 comprises an antenna 1 and a cavity 2. The cavity 2 forms an inner cavity 21 with a closed bottom and a closed circumference but an open top, and the inner cavity 21 is used to accommodate a plasma body 400 that generates microwaves. The antenna cavity assembly 100 also includes a channel member 3, which includes a bottom wall 31, an inner wall 32, an outer wall 33, an annular wall 34 and a partition wall 35: the bottom wall 31 covers the top of the cavity 2; the inner wall 32 is annular, connected to the middle of the bottom wall 31 and extends upward, the inner wall 32 encloses a microwave channel W, and the microwave channel W is connected to the inner cavity 21; the outer wall 33 is annular, sleeved outside the inner wall 32, and the lower end of the outer wall 33 is sealed and fixedly connected to the inner edge of the antenna 1; the annular wall 34 is connected between the outer edge of the antenna 1 and the outer edge of the bottom wall 31 in the up and down direction D, and the inner wall 32, the bottom wall 31, the annular wall 34, the antenna 1, and the outer wall 33 enclose a closed space S; the partition wall 35 is arranged between the inner wall 32 and the outer wall 33 to separate the closed space S into a circulating cooling channel P for the flow of cooling medium.

[0034] In the antenna cavity assembly 100 of the present disclosure, the antenna 1 and the cavity 2 are integrated together through the common channel member 3, and the antenna 1 is provided as a component for forming a circulating cooling flow channel P. Thus, the common circulating cooling flow channel P formed by the antenna 1 and the channel member 3 can enable the cooling medium flowing in the circulating cooling flow channel P to simultaneously dissipate heat from the cavity 2 (i.e., the cooling medium conducts heat dissipation from the cavity 2 through the bottom wall 31 and the contact between the bottom wall 31 and the top of the cavity 2, and directly absorbs heat from the inner cavity 21 through the bottom wall 31 and radiates heat to the cavity 2). Heat dissipation), the antenna 1 (i.e., the cooling medium directly contacts the antenna 1 for heat exchange) and the microwave channel W (i.e., the cooling medium exchanges heat with the microwave channel W via the inner wall 32). Therefore, compared with the background technology, the heat dissipation structure of the antenna 1 and the cavity 2 is greatly simplified, the space of the antenna cavity assembly 100 is greatly saved, and because the heat dissipation of the antenna 1, the cavity 2 and the microwave channel W is carried out through the common channel member 3, the heat dissipation of the antenna 1, the heat dissipation of the cavity 2 and the microwave channel W are carried out simultaneously, thereby improving the heat dissipation efficiency.

[0035] In the antenna cavity assembly 100 of the present disclosure, the antenna 1 is provided as a component for forming a circulating cooling channel P, which not only realizes the sealing function of the circulating cooling channel P, but also plays a cooling and heat dissipation function, and at the same time realizes the function of a microwave antenna.

[0036] In one example, refer to Figure 2 and Figure 3 The bottom wall 31 includes a first horizontal wall 311, a second horizontal wall 312, and a tapered wall 313. The first horizontal wall 311 is annular, and the inner wall 32 is connected to the middle of the first horizontal wall 311. The second horizontal wall 312 is annular, and the second horizontal wall 312 is used to cover the top of the cavity 2. The tapered wall 313 is an inverted truncated cone structure, and the tapered wall 313 is connected between the outer edge of the first horizontal wall 311 and the inner edge of the second horizontal wall 312. The tapered wall 313 and the first horizontal wall 311 are used to be located in the inner cavity 21 of the cavity 2 when assembled with the cavity 2. When the partition wall 35 is assembled to the top of the cavity 2, the tapered wall 313 can play a role in guiding and positioning.

[0037] In one example, refer to Figure 2The partition wall 35 includes a vertical wall 351, an upper wall 352, a lower wall 353 and a connecting wall 354. The vertical wall 351 is annular, and is spaced between the inner wall 32 and the outer wall 33 and extends in the up-down direction D. The upper wall 352 is annular, and extends radially outward from the lower end of the outer wall 33. The upper wall 352 is located below the antenna 1 and is spaced apart from the antenna 1 in the up-down direction D. The upper wall 352 is provided with a through hole 352a that passes through in the up-down direction D. The lower wall 353 is annular, and extends radially outward from the lower end of the vertical wall 351. The lower wall 353 is located above the bottom wall 31 and is spaced apart from the bottom wall 31 in the up-down direction D. The connecting wall 354 is annular, and is connected between the outer edge of the upper wall 352 and the outer edge of the lower wall 353 in the up-down direction D. The connecting wall 354 is radially spaced apart from the annular wall 34. Among them, the space between the vertical wall 351 and the inner wall 32, the space between the lower wall 353 and the bottom wall 31, the space between the connecting wall 354 and the annular wall 34, the space between the upper wall 352 and the antenna 1, the through hole 352a of the upper wall 352, the space between the upper wall 352 and the lower wall 353, and the space between the vertical wall 351 and the outer wall 33 are connected to each other to form a circulating cooling flow channel P for circulating the cooling medium inside. Figure 2 The direction of the cooling medium circulation flow is given, but in alternative examples, the circulation flow direction can be different from Figure 2 The flow direction given is opposite.

[0038] like Figure 2 and Figure 3 As shown, the connecting wall 354 is in the shape of an inverted truncated cone. The connecting wall 354 is in the shape of an inverted truncated cone, which can increase the path length of the cooling medium flow.

[0039] like Figure 4 As shown, there are multiple through holes 352a distributed on the same circumference. Figure 4 Six through holes 352a are provided, and the number of through holes 352a can be selected according to actual conditions. Figure 4 As shown, the plurality of through holes 352a are arranged at equal intervals.

[0040] Reference Figure 2 and Figure 3 The antenna cavity assembly 100 further includes a sealing ring 4 , which is disposed below the bottom wall 31 , and is used to seal between the bottom wall 31 and the top of the cavity 2 .

[0041] like Figure 2 and Figure 3 As shown, the antenna cavity assembly 100 is an axisymmetric structure.

[0042] [MPCVD equipment]

[0043] Reference Figures 1 to 3According to the present disclosure, the MPCVD device 1000 includes the aforementioned antenna cavity assembly 100 .

[0044] The specific structure, effects, etc. of the antenna cavity assembly 100 are as mentioned above and will not be repeated here.

[0045] like Figure 2 and Figure 3 As shown, in one example, the MPCVD device 1000 further includes a carrier 200 and an outer cover 300. The carrier 200 is disposed in the cavity 2, and the carrier 200 is used to carry the plasma 400. The outer cover 300 surrounds the cavity assembly from above, below, and around, and the outer cover 300 is spaced from the outer wall 33 on the upper side to form an air intake gap G, and the outer cover 300 supports the carrier 200 on the lower side and seals the bottom of the cavity 2 from the bottom (that is, a part of the outer cover 300 constitutes the bottom of the cavity 2 to achieve the aforementioned bottom closure of the cavity 2), and the inner wall 32 of the outer cover 300 and the outer surface of the antenna cavity assembly 100 form an airflow space F, and the outer cover 300 is formed with an exhaust hole 300a on the lower side, and the air intake gap G, the airflow space F, and the exhaust hole 300a are connected to each other.

[0046] like Figure 2 and Figure 3 As shown, in one example, the MPCVD device 1000 further includes a sealing ring 500. The sealing ring 500 is disposed between the outer cover 300 and the bottom of the chamber 2.

[0047] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. An antenna cavity assembly, comprising an antenna (1) and a cavity (2), characterized in that: The cavity (2) forms an inner cavity (21) with a closed bottom and a closed circumference but an open top, and the inner cavity (21) is used to accommodate a plasma (400) that generates microwaves; The antenna cavity assembly (100) further comprises a channel member (3), The channel member (3) comprises a bottom wall (31), an inner wall (32), an outer wall (33), an annular wall (34) and a partition wall (35): The bottom wall (31) covers the top of the cavity (2); The inner wall (32) is annular, connected to the middle of the bottom wall (31) and extends upward, the inner wall (32) encloses a microwave channel (W), and the microwave channel (W) is connected to the inner cavity (21); The outer wall (33) is annular and is sleeved outside the inner wall (32); the lower end of the outer wall (33) is sealed and fixedly connected to the inner edge of the antenna (1); The annular wall (34) is connected between the outer edge of the antenna (1) and the outer edge of the bottom wall (31) in the up-down direction (D). The inner wall (32), the bottom wall (31), the annular wall (34), the antenna (1), and the outer wall (33) form a closed space (S); The partition wall (35) is arranged between the inner wall (32) and the outer wall (33) to divide the closed space (S) into a circulating cooling channel (P) for the cooling medium to flow.

2. The antenna cavity assembly according to claim 1, characterized in that: The partition wall (35) includes a vertical wall (351), an upper wall (352), a lower wall (353) and a connecting wall (354); The vertical wall (351) is annular, and the vertical wall (351) is spaced between the inner wall (32) and the outer wall (33) and extends along the up-down direction (D); The upper wall (352) is annular and extends radially outward from the lower end of the outer wall (33). The upper wall (352) is located below the antenna (1) and is spaced apart from the antenna (1) in the up-down direction (D). The upper wall (352) is provided with a through hole (352a) penetrating in the up-down direction (D). The lower wall (353) is annular and extends radially outward from the lower end of the vertical wall (351). The lower wall (353) is located above the bottom wall (31) and is spaced apart from the bottom wall (31) in the up-down direction (D). The connecting wall (354) is annular, and is connected between the outer edge of the upper wall (352) and the outer edge of the lower wall (353) along the up-down direction (D), and the connecting wall (354) is spaced apart from the annular wall (34) in the radial direction; Among them, the space between the vertical wall (351) and the inner wall (32), the space between the lower wall (353) and the bottom wall (31), the space between the connecting wall (354) and the annular wall (34), the space between the upper wall (352) and the antenna (1), the through hole (352a) of the upper wall (352), the space between the upper wall (352) and the lower wall (353), and the space between the vertical wall (351) and the outer wall (33) are connected to each other to form a circulating cooling channel (P) for circulating the cooling medium inside.

3. The antenna cavity assembly according to claim 2, characterized in that: The connecting wall (354) is in the shape of an inverted frustum.

4. The antenna cavity assembly according to claim 2, characterized in that: There are multiple through holes (352a) distributed on the same circumference.

5. The antenna cavity assembly according to claim 4, characterized in that: A plurality of through holes (352a) are arranged at equal intervals.

6. The antenna cavity assembly according to claim 1, characterized in that: The antenna cavity assembly (100) further comprises a sealing ring (4), The sealing ring (4) is arranged below the bottom wall (31), and the sealing ring (4) is used to seal between the bottom wall (31) and the top of the cavity (2).

7. The antenna cavity assembly according to claim 1, characterized in that: The bottom wall (31) includes a first horizontal wall (311), a second horizontal wall (312) and a tapered wall (313); The first horizontal wall (311) is annular, and the inner wall (32) is connected to the middle of the first horizontal wall (311); The second horizontal wall (312) is annular, and is used to cover the top of the cavity (2); The conical wall (313) is in the form of an inverted truncated cone. The conical wall (313) is connected between the outer edge of the first horizontal wall (311) and the inner edge of the second horizontal wall (312). The conical wall (313) and the first horizontal wall (311) are used to be located in the inner cavity (21) of the cavity (2) when assembled with the cavity (2).

8. An MPCVD device, characterized in that: The antenna cavity assembly (100) comprises any one of claims 1-7.

9. The MPCVD device according to claim 8, characterized in that: The MPCVD device (1000) further includes a carrier (200) and an outer cover (300). The carrier (200) is arranged in the cavity (2), and the carrier (200) is used to carry the plasma (400); The outer cover (300) surrounds the antenna cavity assembly (100) from above, below and around the periphery. The outer cover (300) is spaced from the outer wall (33) at the upper side to form an air intake gap (G). The outer cover (300) supports the carrier (200) at the lower side and seals the bottom of the cavity (2) from the lower side. The inner wall (32) of the outer cover (300) and the outer surface of the antenna cavity assembly (100) form an air flow space (F). The outer cover (300) is formed with an exhaust hole (300a) at the lower side. The air intake gap (G), the air flow space (F) and the exhaust hole (300a) are connected to each other.

10. The MPCVD device according to claim 9, characterized in that: The MPCVD device (1000) further comprises a sealing ring (500), The sealing ring (500) is arranged between the outer cover (300) and the bottom of the cavity (2).

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