Industrial water removal system for hexafluoroethane crude product gas

Abstract

The utility model relates to the technical field of gas water removal, in particular to an industrial water removal system for hexafluoroethane crude product gas. Comprising a first-stage anhydrous calcium chloride activated carbon adsorption column, a second-stage molecular sieve adsorption column connected with the first-stage anhydrous calcium chloride activated carbon adsorption column, and a third-stage molecular sieve adsorption column connected with the second-stage molecular sieve adsorption column, the first-stage anhydrous calcium chloride activated carbon adsorption column, the second-stage molecular sieve adsorption column and the third-stage molecular sieve adsorption column are all connected with nitrogen inlet pipelines, and every two of the first-stage anhydrous calcium chloride activated carbon adsorption column, the second-stage molecular sieve adsorption column and the third-stage molecular sieve adsorption column are communicated through guide pipes. Therefore, the industrial water removal system for the hexafluoroethane crude product gas can solve the problems that solid water absorbents such as calcium chloride and the like are high in cost, cannot be recycled and are difficult to replace when being used for removing water from the gas.

Description

Technical Field

[0001] The present application relates to the technical field of gas dehydration, and more specifically, to an industrial dehydration system for crude hexafluoroethane gas. Background Art

[0002] Hexafluoroethane is increasingly attracting attention from the microelectronics industry and the chemical industry as an ultrafine cleaning gas for semiconductor oxide films. As a new generation of cleaning gas, hexafluoroethane is mainly used in high-integration semiconductor production, playing a role in plasma etching and surface cleaning. Hexafluoroethane has an ODP value (ozone depletion potential) of zero and a GWP value (greenhouse effect) of 9200. In addition to its huge role in the field of electronic cleaning and etching, it also has a certain role in other newly developed fields such as low-temperature refrigeration and medical surgery.

[0003] In the production process of hexafluoroethane, some moisture will always be introduced due to the influence of the production process. The moisture content will seriously affect the quality of the product gas. Excessive moisture in the process will cause corrosion of the gas delivery pipeline. Therefore, the national standards usually have strict requirements on the water content in the gas. At present, the dehydration and drying process of hexafluoroethane gas mainly uses water absorbents for absorption, such as anhydrous calcium chloride, soda lime, etc., or solid desiccants for adsorption, such as silica gel, molecular sieves, activated carbon, etc. The use of solid water absorbents such as calcium chloride for gas dehydration is costly, cannot be reused, and is difficult to replace. However, the use of common silica gel and molecular sieves for dehydration, such as color-changing silica gel, 3A molecular sieves, 4A molecular sieves, or activated carbon for dehydration, has insufficient adsorption depth, and the product gas after adsorption and dehydration cannot meet the higher moisture requirements. Therefore, it is very necessary to choose a correct and efficient dehydration method in the production of hexafluoroethane. Utility Model Content

[0004] The technical problem to be solved by the present application is an industrial water removal system for crude hexafluoroethane gas, which is used to solve the problems of high cost, non-reusability and difficult replacement operation of gas water removal using solid water absorbents such as calcium chloride.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0006] An industrial water removal system for crude hexafluoroethane gas comprises a primary anhydrous calcium chloride activated carbon adsorption column, a secondary molecular sieve adsorption column connected to the primary anhydrous calcium chloride activated carbon adsorption column, and a tertiary molecular sieve adsorption column connected to the secondary molecular sieve adsorption column, wherein the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column are all connected with a nitrogen inlet pipeline, and the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column are connected to each other through a conduit.

[0007] In a specific implementation scheme, switch valves are installed at the connection points between the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column and the nitrogen inlet pipeline.

[0008] In a specific possible implementation scheme, the conduit connections of the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column are all inlet at the bottom and outlet at the top, and the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column exhaust gas through a nitrogen tail pipe, and a heating structure is installed in the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column, and the conduit jacket is provided with a heating insulation layer.

[0009] In a specific possible implementation scheme, activated carbon particles are arranged in the primary anhydrous calcium chloride activated carbon adsorption column, and the pore size of the activated carbon particles used is not less than 50 nm, and the particle size is 4 to 6 mm.

[0010] In a specific embodiment, ZSM-5 molecular sieve is arranged in the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column.

[0011] In a specific embodiment, the primary anhydrous calcium chloride activated carbon adsorption column comprises a shell, an upper flange installed at the upper end of the shell, a nitrogen inlet pipe and a hexafluoroethane outlet pipe installed on the upper flange, and a nitrogen outlet pipe and a hexafluoroethane inlet pipe installed at the lower end of the shell and connected by a lower flange;

[0012] A dryer support frame is arranged on the shell, a heating tile is arranged in the shell, an insulating layer is laid outside the heating tile, a dryer body is arranged inside the heating tile, a hollow support rod bottom support is arranged in the lower flange, and nickel mesh is arranged at both ends of the dryer body.

[0013] Positive effects of the utility model:

[0014] The device achieves efficient water removal of crude hexafluoroethane gas through continuous adsorption of the primary anhydrous calcium chloride activated carbon adsorption column, the secondary molecular sieve adsorption column and the tertiary molecular sieve adsorption column. This multi-stage adsorption design can ensure that water molecules are effectively removed and improve the purity of the product.

[0015] The switch valve installed at the connection between each adsorption column and the nitrogen inlet pipeline makes the operation of the device more flexible. According to actual needs, a certain adsorption column can be opened or closed separately, which is convenient for equipment maintenance and improves the operation efficiency of the equipment.

[0016] The duct connection between the adsorption columns is designed with the air inlet at the bottom and the air outlet at the top. This structure is conducive to the uniform distribution of gas in the adsorption column and improves the adsorption efficiency. At the same time, the heating structure in the adsorption column and the heat-tracing insulation layer outside the duct ensure that the gas maintains a suitable temperature when passing through the adsorption column, avoiding the adsorption effect affected by temperature fluctuations.

[0017] The first-stage anhydrous calcium chloride activated carbon adsorption column uses anhydrous calcium chloride activated carbon particles of a specific particle size, which has excellent adsorption properties and can effectively remove moisture. The second-stage and third-stage molecular sieve adsorption columns use ZSM-5 molecular sieves, which have high selectivity and adsorption capacity, further improving the water removal effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0019] Figure 1 It is a flow chart of an embodiment of the utility model;

[0020] Figure 2 It is a primary anhydrous calcium chloride activated carbon adsorption column according to an embodiment of the utility model;

[0021] Reference numerals

[0022] 1. Primary anhydrous calcium chloride activated carbon adsorption column; 2. Secondary molecular sieve adsorption column; 3. Tertiary molecular sieve adsorption column; 4. Switch valve; 5. Upper flange; 6. Nitrogen inlet pipe; 7. Hexafluoroethane inlet pipe; 8. Nitrogen outlet pipe; 9. Hexafluoroethane outlet pipe; 10. Lower flange; 11. Dryer support frame; 12. Heating tile; 13. Insulation layer; 14. Dryer body; 15. Hollow support rod base; 16. Nickel mesh; 17. Shell. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] Example

[0025] like Figure 1 and 2As shown, an industrial dehydration system for crude hexafluoroethane gas comprises a primary anhydrous calcium chloride activated carbon adsorption column 1, a secondary molecular sieve adsorption column 2 connected to the primary anhydrous calcium chloride activated carbon adsorption column 1, and a tertiary molecular sieve adsorption column 3 connected to the secondary molecular adsorption column, wherein the primary anhydrous calcium chloride activated carbon adsorption column 1, the secondary molecular sieve adsorption column 2, and the tertiary molecular sieve adsorption column 3 are all connected with a nitrogen inlet pipe 6, and the primary anhydrous calcium chloride activated carbon adsorption column 1, the secondary molecular sieve adsorption column 2, and the tertiary molecular sieve adsorption column 3 are connected to each other through a conduit. The system can efficiently remove moisture from crude hexafluoroethane gas through the three-stage dehydration design of the primary anhydrous calcium chloride activated carbon adsorption column 1, the secondary molecular sieve adsorption column 2, and the tertiary molecular sieve adsorption column 3.

[0026] Switch valves 4 are installed at the connection points between the primary anhydrous calcium chloride activated carbon adsorption column 1 , the secondary molecular sieve adsorption column 2 , and the tertiary molecular sieve adsorption column 3 and the nitrogen inlet pipe 6 .

[0027] The conduit connections of the primary anhydrous calcium chloride activated carbon adsorption column 1, the secondary molecular sieve adsorption column 2 and the tertiary molecular sieve adsorption column 3 are all with air intake at the bottom and air outlet at the top. The primary anhydrous calcium chloride activated carbon adsorption column 1, the secondary molecular sieve adsorption column 2 and the tertiary molecular sieve adsorption column 3 exhaust air through a nitrogen tail pipe. A heating structure is installed in the primary anhydrous calcium chloride activated carbon adsorption column 1, the secondary molecular sieve adsorption column 2 and the tertiary molecular sieve adsorption column 3, and a heating insulation layer 13 is provided on the conduit jacket.

[0028] The primary anhydrous calcium chloride activated carbon adsorption column 1 is provided with activated carbon particles, the pore size of the activated carbon particles used is not less than 50nm, and the particle size is 4-6mm. The activated carbon particles are mainly used as a carrier of calcium chloride.

[0029] The secondary molecular sieve adsorption column 2 and the tertiary molecular sieve adsorption column 3 are provided with ZSM-5 molecular sieve.

[0030] The primary anhydrous calcium chloride activated carbon adsorption column 1 comprises a shell 17, an upper flange 5 installed at the upper end of the shell 17, a nitrogen inlet pipe 6 and a hexafluoroethane outlet pipe 9 installed on the upper flange 5, and a nitrogen outlet pipe 8 and a hexafluoroethane inlet pipe 7 installed at the lower end of the shell 17 and connected through a lower flange 10;

[0031] A dryer support frame 11 is provided on the shell 17, a heating tile 12 is provided in the shell 17, an insulating layer 13 is laid outside the heating tile 12, a dryer body 14 is provided inside the heating tile 12, a hollow support rod base 15 is provided in the lower flange 10, and nickel mesh 16 is provided at both ends of the dryer body 14.

[0032] Each level of adsorption column is connected to 6 nitrogen inlet pipes. Nitrogen plays an auxiliary role in the water removal process. It may help drive away the gas and promote the adsorption process, or be used to purge and regenerate the adsorption material to improve the service life of the adsorption column and the water removal efficiency.

[0033] The duct connection design of the adsorption column makes the air inlet at the bottom and the air outlet at the top, which helps the gas to flow evenly through the adsorption material and improve the adsorption efficiency. At the same time, the setting of the heating structure and the heating and insulation layer 13 can keep the temperature in the adsorption column stable, improve the dehydration effect and prevent condensation of the adsorption material.

[0034] The selection of anhydrous calcium chloride activated carbon particles and ZSM-5 molecular sieves ensures good adsorption performance and stability. Anhydrous calcium chloride can effectively adsorb water, while ZSM-5 molecular sieves have excellent adsorption performance and chemical stability, making them suitable for industrial water removal systems.

[0035] The system controls the inlet and outlet of nitrogen through the switch valve 4, which is easy to operate, control and maintain. At the same time, each level of adsorption column can be regenerated or replaced separately, ensuring the continuous and stable operation of the system.

[0036] The heating structure and the heat-tracing insulation layer 13 in the system can effectively prevent the temperature in the adsorption column from being too high or too low, thus avoiding possible safety risks. In addition, nitrogen, as an inert gas, also improves the safety of the system.

[0037] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0038] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An industrial water removal system for crude hexafluoroethane gas, characterized in that: The invention comprises a primary anhydrous calcium chloride activated carbon adsorption column (1), a secondary molecular sieve adsorption column (2) connected to the primary anhydrous calcium chloride activated carbon adsorption column (1), and a tertiary molecular sieve adsorption column (3) connected to the secondary molecular sieve adsorption column (2), wherein the primary anhydrous calcium chloride activated carbon adsorption column (1), the secondary molecular sieve adsorption column (2), and the tertiary molecular sieve adsorption column (3) are all connected to a nitrogen inlet pipe (6), and the primary anhydrous calcium chloride activated carbon adsorption column (1), the secondary molecular sieve adsorption column (2), and the tertiary molecular sieve adsorption column (3) are connected to each other through a conduit; The conduits of the first-stage anhydrous calcium chloride activated carbon adsorption column (1), the second-stage molecular sieve adsorption column (2) and the third-stage molecular sieve adsorption column (3) are connected in such a way that the air inlet is at the bottom and the air outlet is at the top. The first-stage anhydrous calcium chloride activated carbon adsorption column (1), the second-stage molecular sieve adsorption column (2) and the third-stage molecular sieve adsorption column (3) exhaust air through a nitrogen tail pipe. A heating structure is installed inside the first-stage anhydrous calcium chloride activated carbon adsorption column (1), the second-stage molecular sieve adsorption column (2) and the third-stage molecular sieve adsorption column (3). The conduit jacket is provided with a heating and heat-insulating layer (13).

2. An industrial water removal system for crude hexafluoroethane gas according to claim 1, characterized in that: Switch valves (4) are installed at the connection points between the primary anhydrous calcium chloride activated carbon adsorption column (1), the secondary molecular sieve adsorption column (2) and the tertiary molecular sieve adsorption column (3) and the nitrogen inlet pipe (6).

3. The industrial water removal system for crude hexafluoroethane gas according to claim 1, characterized in that: Activated carbon particles are arranged in the primary anhydrous calcium chloride activated carbon adsorption column (1). The pore size of the activated carbon particles used is not less than 50 nm, and the particle size is 4 to 6 mm.

4. The industrial water removal system for crude hexafluoroethane gas according to claim 1, characterized in that: The secondary molecular sieve adsorption column (2) and the tertiary molecular sieve adsorption column (3) are provided with ZSM-5 molecular sieve.

5. The industrial water removal system for crude hexafluoroethane gas according to claim 1, characterized in that: The primary anhydrous calcium chloride activated carbon adsorption column (1) comprises a shell (17), an upper flange (5) mounted on the upper end of the shell (17), a nitrogen inlet pipe (6) and a hexafluoroethane outlet pipe (9) mounted on the upper flange (5), and a nitrogen outlet pipe (8) and a hexafluoroethane inlet pipe (7) mounted on the lower end of the shell (17) and connected via a lower flange (10); A dryer support frame (11) is arranged on the shell (17), a heating tile (12) is arranged inside the shell (17), a heat-insulating layer (13) is laid outside the heating tile (12), a dryer body (14) is arranged inside the heating tile (12), a hollow support rod base (15) is arranged inside the lower flange (10), and nickel meshes (16) are arranged at both ends of the dryer body (14).

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