Vacuum evaporation equipment

Abstract

The utility model relates to the technical field of vacuum evaporation, in particular to vacuum evaporation equipment which comprises a machine body and an auxiliary device, a base is arranged on the surface of the machine body, a glass cover is arranged above the base, an adjusting piece is arranged on the inner wall of the base, a containing disc is arranged below the adjusting piece, and an evaporation boat body is arranged on the inner wall of the base. The auxiliary device is arranged on the surface of the machine body and comprises a guide seat, the guide seat is fixedly connected with the surface of the machine body, the inner wall of the guide seat is slidably connected with a moving seat, a connecting assembly is arranged between the moving seat and the glass cover, a driving assembly is arranged on the inner wall of the guide seat, and a supporting assembly is arranged on the surface of the guide seat. According to the utility model, the auxiliary device is arranged, so that auxiliary equipment can be conveniently used, the vacuum cavity cover does not need to be manually lifted and reset, manpower and time are saved, accidents possibly occurring in manual operation, such as risks of falling of the vacuum cavity cover and the like, are reduced, and the safety of operation is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum evaporation, in particular to vacuum evaporation equipment. Background Art

[0002] Vacuum evaporation, abbreviated as evaporation, refers to a process in which a certain heating evaporation method is used under vacuum conditions to evaporate the coating material (or film material) and vaporize it, and the particles fly to the surface of the substrate and condense into a film. Evaporation is an earlier and more widely used vapor deposition technology, with the advantages of simple film formation method, high film purity and density, and unique film structure and performance.

[0003] Prior art, such as the utility model with publication number CN211522307U, the utility model relates to a vacuum evaporation device, including a shell, a vacuum chamber base and a vacuum chamber cover are arranged on the shell, the vacuum chamber base and the vacuum chamber cover form a vacuum chamber, a mounting frame is arranged on the vacuum chamber seat, a evaporation platform is arranged on the mounting frame, a rotatable baffle plate is arranged on the vacuum chamber seat, a rotating shaft is arranged on the vacuum chamber seat, the baffle plate includes an upper baffle plate and a lower baffle plate which are arranged in a vertically fitted manner, each baffle plate is rotatably mounted on the rotating shaft and each baffle plate can rotate synchronously with the rotating shaft by relying on friction between the baffle plates and the rotating shaft, and a stopper which cooperates with each baffle plate is arranged on the mounting frame. The upper and lower baffles have a limiting structure and cooperate with each other to shield the evaporation crucible after rotation. The upper and lower baffles also have a making way position to avoid the evaporation crucible below after reverse rotation. Compared with the prior art, the evaporation equipment with the above structure can reduce the volume of the vacuum chamber, thereby reducing the volume and weight of the entire evaporation equipment, saving production costs, and solving the problem that the existing shielding members are all whole plates. Since the shielding members need to rotate to shield or make way for the evaporation crucible, the volume of the vacuum chamber needs to be large enough to meet the rotation of the shielding members, resulting in a larger volume of the entire vacuum evaporation equipment, which not only increases the production cost but also makes the entire equipment bulky.

[0004] In daily work, it is found that when the above-mentioned vacuum evaporation equipment is in use, no matter when placing materials before evaporation or taking materials afterwards, the user needs to manually take out the upper vacuum chamber cover and put it aside, and then put the vacuum chamber cover back in place and buckle it, which makes the operation steps cumbersome, and once the user makes a mistake, the vacuum chamber cover in the hand will fall off from the hand and fall to the ground, causing it to break and become unusable, which leads to the problem that when the existing vacuum evaporation equipment manually takes the vacuum chamber cover, the operation is troublesome and it is easy to fall off and cause damage. Utility Model Content

[0005] The utility model aims to provide a vacuum evaporation device to solve the shortcomings of the prior art that the vacuum chamber cover is troublesome to operate and easy to fall off and cause damage when the vacuum chamber cover is manually taken.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum evaporation device comprises a body and an auxiliary device, a base is arranged on the surface of the body, a glass cover is arranged above the base, an adjusting piece is arranged on the inner wall of the base, a placing plate is arranged below the adjusting piece, an evaporation boat is arranged on the inner wall of the base, the auxiliary device is arranged on the surface of the body, the auxiliary device comprises a guide seat, the guide seat is fixedly connected to the surface of the body, a movable seat is slidably connected to the inner wall of the guide seat, a connecting component is arranged between the movable seat and the glass cover, a driving component is arranged on the inner wall of the guide seat, and a supporting component is arranged on the surface of the guide seat, through the above-mentioned components, the glass cover is connected to the movable seat through the connecting component, and then when the glass cover needs to be opened, the movable seat is driven by the driving component to slide up and down in the guide seat to realize the opening and buckling operation of the glass cover body, reducing the inconvenience of manual operation and the problem of easy falling off.

[0007] Preferably, the driving assembly includes a control screw, the control screw is rotatably connected to the inner wall of the guide seat, the control screw is threadedly connected to the inner wall of the movable seat, the upper surface of the guide seat is fixedly connected to a motor, the output end of the motor is fixedly connected to one end of the control screw, and through the above components, when the driving assembly is in operation, the control screw is driven by the motor to rotate, and the control screw can thereby drive the movable seat to slide in the guide seat to adjust its position.

[0008] Preferably, a guide column is fixedly connected to the inner wall of the guide seat, and the guide column is slidably connected to the inner wall of the movable seat. Through the above components, when the movable seat moves in the guide seat, the guide column can improve the stability during movement.

[0009] Preferably, the supporting assembly includes a concave block, and there are two concave blocks, the two concave blocks are fixedly connected to the two side surfaces of the guide seat, the inner wall of the concave block is slidably connected with a support rod, and the two sides of the movable seat are respectively fixedly connected with a column. Through the above components, when the movable seat drives the glass cover to move to the highest position, the support rod can be pushed, and then the support rod is against the surface of the column, thereby achieving the function of supporting the movable seat and the glass cover.

[0010] Preferably, the connecting assembly includes an insert rod, which is fixedly connected to the upper surface of the glass cover, a circular hole is provided on the surface of the movable seat, the insert rod is plugged into the inner wall of the circular hole, two square holes are provided on the side of the movable seat close to the circular hole, and two abutments are fixedly connected to the surface of the insert rod, and the square holes are for the abutments to pass through. When the glass cover is connected to the movable seat through the above components, the insert rod is inserted into the circular hole on the surface of the movable seat, and the abutments pass through the square holes. Then, the glass cover and the insert rod are rotated so that the abutments abut against the upper surface of the movable seat, thereby completing the preliminary connection.

[0011] Preferably, two slide grooves are provided on the surface of the movable seat, and the inner walls of the slide grooves are slidably connected to two clamping rods. Two clamping grooves are provided on the surface of the insertion rod, and the clamping rods are plugged into the inner walls of the clamping grooves. By using the above components, the two clamping rods are pushed so that the clamping rods are inserted into the clamping grooves on the surfaces of the insertion rods, thereby achieving a positioning effect.

[0012] Preferably, the inner wall of the movable seat is rotatably connected with a transmission screw, and the transmission screw is threadedly connected to the inner walls of the two clamping rods. Through the above components, the transmission screw can drive the two clamping rods to move, thereby improving the overall usability.

[0013] Compared with the prior art, the advantages and positive effects of the utility model are:

[0014] In the utility model, an auxiliary device is provided and the glass cover is connected to the movable seat through a connecting assembly. Then, when the glass cover needs to be opened, the movable seat is driven by the driving assembly to slide up and down in the guide seat to realize the opening and closing operations of the glass cover body. By providing the auxiliary device, the auxiliary equipment is convenient to use, and there is no need to manually lift and reset the vacuum chamber cover, which saves manpower and time, reduces the risks of accidents that may occur in manual operation, such as the risk of the vacuum chamber cover falling, and enhances the safety of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A three-dimensional structural schematic diagram of a vacuum evaporation device proposed in the utility model;

[0016] Figure 2 The utility model proposes a vacuum evaporation device Figure 1 Schematic diagram of the structure at A in the middle;

[0017] Figure 3 This is a schematic diagram of the structure of the auxiliary device of the vacuum evaporation equipment proposed in the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the auxiliary device of the vacuum evaporation equipment proposed in the utility model;

[0019] Figure 5The utility model provides a schematic structural diagram of the glass cover of the vacuum evaporation equipment.

[0020] Legend:

[0021] 1. Machine body; 2. Base; 3. Adjustment part; 4. Placement plate; 5. Evaporation boat; 6. Glass cover; 7. Auxiliary device; 71. Guide seat; 72. Moving seat; 73. Driving assembly; 731. Motor; 732. Control screw; 733. Guide column; 74. Support assembly; 741. Concave block; 742. Support rod; 743. Column; 75. Connecting assembly; 751. Insert rod; 752. Block; 753. Clamp rod; 754. Transmission screw; 755. Clamping slot; 756. Square hole; 757. Round hole. DETAILED DESCRIPTION

[0022] See also Figure 1-Figure 5 The utility model provides a technical solution: a vacuum evaporation device, including a body 1 and an auxiliary device 7, a base 2 is arranged on the surface of the body 1, a glass cover 6 is arranged above the base 2, an adjusting member 3 is arranged on the inner wall of the base 2, a placing plate 4 is arranged below the adjusting member 3, an evaporation boat 5 is arranged on the inner wall of the base 2, and the auxiliary device 7 is arranged on the surface of the body 1.

[0023] Specifically, the auxiliary device 7 includes a guide seat 71, which is fixedly connected to the surface of the body 1, and the inner wall of the guide seat 71 is slidably connected to a movable seat 72, a connecting component 75 is provided between the movable seat 72 and the glass cover 6, a driving component 73 is provided on the inner wall of the guide seat 71, and a supporting component 74 is provided on the surface of the guide seat 71.

[0024] In this embodiment, the glass cover 6 is connected to the movable seat 72 through the connecting component 75. When the glass cover 6 needs to be opened, the movable seat 72 is driven by the driving component 73 to slide up and down in the guide seat 71 to realize the opening and closing operation of the glass cover 6, thereby reducing the inconvenience of manual operation and the problem of easy falling off.

[0025] Specifically, the driving assembly 73 includes a control screw 732, which is rotatably connected to the inner wall of the guide seat 71, and the control screw 732 is threadedly connected to the inner wall of the movable seat 72. The upper surface of the guide seat 71 is fixedly connected with a motor 731, and the output end of the motor 731 is fixedly connected to one end of the control screw 732. When the driving assembly 73 is in operation, the control screw 732 is driven to rotate by the motor 731, and the control screw 732 can thereby drive the movable seat 72 to slide in the guide seat 71 to adjust its position.

[0026] Specifically, a guide post 733 is fixedly connected to the inner wall of the guide seat 71 , and the guide post 733 is slidably connected to the inner wall of the movable seat 72 .

[0027] In this embodiment, when the moving seat 72 moves in the guide seat 71, the guide column 733 can improve the stability during movement.

[0028] Specifically, the supporting assembly 74 includes a concave block 741, and there are two concave blocks 741. The two concave blocks 741 are fixedly connected to the two side surfaces of the guide seat 71. The inner wall of the concave block 741 is slidably connected with a support rod 742. The two sides of the movable seat 72 are respectively fixedly connected with a column 743. When the movable seat 72 drives the glass cover 6 to move to the highest position, the support rod 742 can be pushed, and then the support rod 742 is against the surface of the column 743, thereby achieving the function of supporting the movable seat 72 and the glass cover 6.

[0029] Specifically, the connecting component 75 includes an insertion rod 751, which is fixedly connected to the upper surface of the glass cover 6. A circular hole 757 is provided on the surface of the movable seat 72. The insertion rod 751 is plugged into the inner wall of the circular hole 757. Two square holes 756 are provided on one side of the movable seat 72 close to the circular hole 757. Two retaining blocks 752 are fixedly connected to the surface of the insertion rod 751, and the square holes 756 are for the retaining blocks 752 to pass through.

[0030] In this embodiment, when the glass cover 6 is connected to the movable seat 72, the insertion rod 751 is inserted into the circular hole 757 on the surface of the movable seat 72, and the stop block 752 passes through the square hole 756. Then, the glass cover 6 and the insertion rod 751 are rotated so that the stop block 752 abuts against the upper surface of the movable seat 72, and the preliminary connection is completed.

[0031] Specifically, two sliding grooves are provided on the surface of the movable seat 72, and two locking rods 753 are slidably connected to the inner walls of the sliding grooves. Two locking grooves 755 are provided on the surface of the insertion rod 751. The locking rod 753 is plugged into the inner walls of the locking grooves 755. The two locking rods 753 are pushed so that the locking rods 753 are inserted into the locking grooves 755 on the surface of the insertion rod 751, thereby achieving a positioning effect.

[0032] Specifically, the inner wall of the movable seat 72 is rotatably connected with a transmission screw 754 , and the transmission screw 754 is threadedly connected to the inner walls of the two clamping rods 753 .

[0033] In this embodiment: the transmission screw 754 can drive the two clamping rods 753 to move, thereby improving the overall usability.

[0034] Working principle: By setting the auxiliary device 7, when in use, the glass cover 6 is first connected to the moving seat 72 through the connecting component 75. When connecting, the insertion rod 751 is inserted into the circular hole 757 on the surface of the moving seat 72, and the block 752 passes through the square hole 756. Then, the glass cover 6 and the insertion rod 751 are rotated to make the block 752 abut against the upper surface of the moving seat 72, and then the transmission screw 754 is rotated. The transmission screw 754 drives the two clamping rods 753 to be inserted into the clamping groove 755 on the surface of the insertion rod 751 to complete the connection. When the glass cover 6 needs to be opened, the motor 731 is turned on through the driving component 73, and the motor 731 drives the control screw 732 to rotate, and the control screw 732 drives the moving seat 72 Move upward in the guide seat 71, so as to lift the glass cover 6 upward. After lifting to a certain position, push the support rod 742, and the support rod 742 can be against the surface of the column rod, and the corresponding operation can be performed manually. When it needs to be closed, the support rod 742 is reset, and then the motor 731 drives the control screw 732 to rotate, and the control screw 732 drives the moving seat 72 to move downward in the guide seat 71, so that the glass cover 6 can be installed on the base 2 and the use is completed. By setting the auxiliary device 7, it is convenient to use the auxiliary equipment, and there is no need to manually lift and reset the vacuum chamber cover, which saves manpower and time, reduces the risks of accidents that may occur in manual operation, such as the vacuum chamber cover falling, and enhances the safety of operation.

Claims

1. A vacuum evaporation device, comprising a body (1) and an auxiliary device (7), characterized in that: The surface of the machine body (1) is provided with a base (2), a glass cover (6) is provided above the base (2), an adjusting member (3) is provided on the inner wall of the base (2), a placing plate (4) is provided below the adjusting member (3), an evaporation boat (5) is provided on the inner wall of the base (2), the auxiliary device (7) is provided on the surface of the machine body (1), the auxiliary device (7) comprises a guide seat (71), the guide seat (71) is fixedly connected to the surface of the machine body (1), a moving seat (72) is slidably connected to the inner wall of the guide seat (71), a connecting assembly (75) is provided between the moving seat (72) and the glass cover (6), a driving assembly (73) is provided on the inner wall of the guide seat (71), and a supporting assembly (74) is provided on the surface of the guide seat (71).

2. The vacuum evaporation equipment according to claim 1, characterized in that: The driving assembly (73) comprises a control screw (732), the control screw (732) being rotatably connected to the inner wall of the guide seat (71), the control screw (732) being threadedly connected to the inner wall of the movable seat (72), a motor (731) being fixedly connected to the upper surface of the guide seat (71), and an output end of the motor (731) being fixedly connected to one end of the control screw (732).

3. The vacuum evaporation equipment according to claim 1, characterized in that: A guide column (733) is fixedly connected to the inner wall of the guide seat (71), and the guide column (733) is slidably connected to the inner wall of the movable seat (72).

4. The vacuum evaporation equipment according to claim 1, characterized in that: The support assembly (74) comprises a concave block (741), wherein there are two concave blocks (741), the two concave blocks (741) are fixedly connected to the two side surfaces of the guide seat (71), the inner wall of the concave block (741) is slidably connected to a support rod (742), and the two sides of the movable seat (72) are respectively fixedly connected to columns (743).

5. The vacuum evaporation equipment according to claim 1, characterized in that: The connecting assembly (75) comprises an insert rod (751), the insert rod (751) being fixedly connected to the upper surface of the glass cover (6), a circular hole (757) being provided on the surface of the movable seat (72), the insert rod (751) being plugged into the inner wall of the circular hole (757), two square holes (756) being provided on a side of the movable seat (72) close to the circular hole (757), two stop blocks (752) being fixedly connected to the surface of the insert rod (751), and the square holes (756) being provided for the stop blocks (752) to pass through.

6. The vacuum evaporation equipment according to claim 5, characterized in that: The surface of the movable seat (72) is provided with two slide grooves, the inner walls of the slide grooves are slidably connected to two clamping rods (753), the surface of the insertion rod (751) is provided with two clamping grooves (755), and the clamping rods (753) are plugged into the inner walls of the clamping grooves (755).

7. The vacuum evaporation equipment according to claim 1, characterized in that: The inner wall of the movable seat (72) is rotatably connected to a transmission screw (754), and the transmission screw (754) is threadedly connected to the inner walls of the two clamping rods (753).

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