Liquid leakage protection device for hydrofluoric acid constant volume container

Abstract

The utility model provides a leakage protection device for a hydrofluoric acid constant volume container. The leakage protection device comprises a protection cover body and a liquid discharge pipe, the protective cover body is provided with a containing cavity, the containing cavity is used for containing a hydrofluoric acid constant volume device, and a liquid outlet communicated with the containing cavity is formed in the protective cover body; and an inlet of the liquid discharge pipe is communicated with the liquid discharge port. The leakage protection device for the hydrofluoric acid constant volume container can collect leaked hydrofluoric acid stock solution and discharge the collected hydrofluoric acid stock solution to a waste liquid unified treatment position, so that the leaked hydrofluoric acid stock solution is prevented from corroding and damaging components around the hydrofluoric acid constant volume container, the maintenance and replacement frequency of the components is reduced, and the maintenance cost is reduced; meanwhile, the harm of the leaked hydrofluoric acid stock solution to the surrounding environment and operators is avoided, and the safety risk of a working place is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a liquid leakage protection device for a hydrofluoric acid stator container. Background Art

[0002] In the semiconductor manufacturing process, the final polishing process is a key step to achieve high flatness and cleanliness of the wafer surface. This process directly affects the quality of subsequent processes and the performance of devices. In order to improve the efficiency and quality of polishing, the polishing machine is usually equipped with a small cleaning machine. This integrated design can perform cleaning simultaneously during the polishing process to remove the debris and residues generated by polishing.

[0003] The liquid supply system provides a stable ratio of hydrofluoric acid liquid for the polishing process, which is the basis for ensuring the quality and efficiency of polishing. A stable liquid supply system can ensure the consistency of hydrofluoric acid concentration, which is crucial to achieving uniform polishing.

[0004] The existing liquid supply system prepares the hydrofluoric acid proportioning liquid through a mixing tank, injects a fixed level of pure water and a fixed volume of hydrofluoric acid stock solution into the mixing tank, and then uses a mixing pump to mix. Although the existing liquid supply system can achieve basic proportioning and supply, it has defects in the leakage of the fixed container of the hydrofluoric acid stock solution. Since hydrofluoric acid is a highly corrosive chemical, its leakage will not only damage the equipment, but also pose a threat to the health of the operators.

[0005] Therefore, in order to solve the problem of leakage of the hydrofluoric acid stock solution container in the liquid supply system, the present application provides a hydrofluoric acid stock solution container leakage protection device. Utility Model Content

[0006] In view of the problem of leakage of a hydrofluoric acid stock solution container in a liquid supply system in the prior art, the present application provides a hydrofluoric acid container leakage protection device. The hydrofluoric acid container leakage protection device can effectively protect the components around the container from being damaged and protect the health of operators by sleeve-arranging a protective cover body on the outside of the container.

[0007] One embodiment of the present application provides a liquid leakage protection device for a hydrofluoric acid container, comprising:

[0008] A protective cover body, wherein the protective cover body has a receiving cavity, the receiving cavity receives a hydrofluoric acid container, and the protective cover body is provided with a liquid discharge port communicating with the receiving cavity;

[0009] A liquid discharge pipe, the inlet of which is communicated with the liquid discharge port.

[0010] As an embodiment, the drain port is disposed at the bottom of the protective cover body; the bottom of the protective cover body is inclined, and the height gradually increases from the drain port to the side wall of the protective cover body.

[0011] As an implementation manner, a liquid sensor is provided on the liquid discharge pipe near the liquid discharge port.

[0012] As an implementation manner, the liquid sensing element is a liquid detection sensor.

[0013] As an implementation manner, the liquid sensor is connected to a controller, and the controller is connected to an alarm.

[0014] As an implementation manner, a valve is provided on the liquid discharge pipe.

[0015] As an embodiment, the material of the protective cover body is an acid- and alkali-resistant material, and the acid- and alkali-resistant material is selected from tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer or polytetrafluoroethylene.

[0016] As an implementation manner, the drain pipe and the drain port are connected via a pipe joint.

[0017] As an implementation mode, the outlet of the drain pipe is connected to the hydrofluoric acid waste liquid pipeline.

[0018] As described above, the hydrofluoric acid container leakage protection device of the present application has the following beneficial effects:

[0019] The hydrofluoric acid settling container leakage protection device of the present application includes a protection cover body and a drain pipe. The protection cover body can effectively prevent hydrofluoric acid from corroding and damaging the components around the hydrofluoric acid settling container, reduce the frequency of repair and replacement of components, and reduce maintenance costs; effectively prevent hydrofluoric acid leakage from harming operators and the surrounding environment, and reduce safety risks in the workplace. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of a hydrofluoric acid liquid supply system in the prior art.

[0021] Figure 2 Shown is a schematic structural diagram of a hydrofluoric acid stator container leakage protection device according to an embodiment of the utility model.

[0022] Figure 3 It is a schematic structural diagram showing that a hydrofluoric acid stator container leakage protection device according to an embodiment of the utility model is arranged on a hydrofluoric acid stator container.

[0023] Component number description

[0024] 10, hydrofluoric acid container; 11, sealing ring; 20, hydrofluoric acid stock solution supply pipe; 30, hydrofluoric acid stock solution pneumatic supply valve; 40, mixing barrel connecting pipe; 50, liquid inlet detection sensor; 60, hydrofluoric acid stock solution pneumatic inlet valve; 70, waste liquid discharge connecting pipe; 80, high liquid level sensor; 90, high liquid level discharge pneumatic valve; 100, protective cover body; 110, accommodating chamber; 200, discharge pipe; 300, valve; 400, liquid sensing component. DETAILED DESCRIPTION

[0025] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0026] See also Figures 1 to 3 It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the utility model in a schematic manner, and the illustrations only show the components related to the utility model rather than the number, shape and size of the components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0027] In the field of semiconductor manufacturing, in the final polishing process, hydrofluoric acid is used to chemically mechanically polish the wafer surface to achieve the required flatness and smoothness. This process is crucial to improving the quality and performance of the wafer. The polishing machine comes with a small cleaning machine. During the processing, the liquid supply system needs to provide a stable flow of hydrofluoric acid liquid to meet the process requirements. A stable liquid supply system is the basis of the polishing process.

[0028] In the liquid supply system of the final polishing process, the hydrofluoric acid ratio liquid is mixed in a mixing barrel. A fixed level of pure water is injected into the mixing barrel, and then a fixed volume of hydrofluoric acid stock solution is injected, and the ratio solution is mixed by a mixing pump.

[0029] like Figure 1The figure shows a hydrofluoric acid liquid supply system in the prior art, which includes a hydrofluoric acid container 10 and a sealing ring 11 arranged at the top of the hydrofluoric acid container 10. The inlet of the hydrofluoric acid container 10 is connected to a hydrofluoric acid stock solution supply pipe 20. The hydrofluoric acid container 10 has a first outlet and a second outlet. The first outlet is connected to a mixing barrel connecting pipe 40, and the second outlet is connected to a waste liquid discharge connecting pipe 70. A hydrofluoric acid stock solution pneumatic liquid supply valve 30 is arranged near the inlet of the hydrofluoric acid container 10 on the hydrofluoric acid stock solution supply pipe 20. The hydrofluoric acid stock solution pneumatic liquid supply valve 30 is connected to a controller. The hydrofluoric acid stock solution controls the hydrofluoric acid stock solution pneumatic liquid supply valve 30 through the controller to fill the hydrofluoric acid container 10. A high liquid level pneumatic valve 90 is provided on the waste liquid discharge connecting pipe 70, and a high liquid level sensor 80 is provided on the waste liquid discharge connecting pipe 70 between the second outlet and the high liquid level pneumatic valve 90. When the high liquid level sensor 80 detects a high liquid level, a signal is transmitted to the controller, and the controller controls the hydrofluoric acid stock liquid pneumatic supply valve 30 to close. A hydrofluoric acid stock liquid pneumatic inlet valve 60 is provided near the first outlet of the mixing barrel connecting pipe 40, and a liquid inlet detection sensor 50 is provided on the mixing barrel connecting pipe 40 between the first outlet and the hydrofluoric acid stock liquid pneumatic inlet valve 60. After the hydrofluoric acid set container 10 is filled with hydrofluoric acid stock liquid, the controller controls the hydrofluoric acid stock liquid pneumatic inlet valve 60 to open, and the hydrofluoric acid stock liquid in the hydrofluoric acid set container 10 is pumped into the mixing barrel. When the liquid inlet detection sensor 50 detects that the hydrofluoric acid stock liquid is emptied, the liquid inlet is completed.

[0030] Since the hydrofluoric acid stock solution has a strong corrosive property, when the hydrofluoric acid supply system works for a long time, the hydrofluoric acid container 10 and the sealing ring 11 are easily corroded by the hydrofluoric acid stock solution, causing the hydrofluoric acid stock solution to leak at the sealing ring 11. The leaked hydrofluoric acid may cause the components around the hydrofluoric acid container 10 to be easily burned, and the leaked hydrofluoric acid may also splash onto the operator.

[0031] In view of the above defects, the present application provides a leakage protection device for a hydrofluoric acid container, which is described in detail through the following embodiments.

[0032] This embodiment provides a leakage protection device for a hydrofluoric acid container, such as Figure 2 As shown, the hydrofluoric acid container leakage protection device includes a protection cover body 100 and a drain pipe 200.

[0033] like Figure 2 and Figure 3As shown, the protective cover body 100 has a accommodating chamber 110, and the accommodating chamber 110 is used to accommodate the hydrofluoric acid container 10. Optionally. The protective cover body 100 can be a cylindrical or rectangular structure with an opening at the top and a hollow interior. The protective cover body 100 can be connected to the shell of the hydrofluoric acid liquid supply system to fix the protective cover body 100, and the hydrofluoric acid container 10 is placed in the accommodating chamber 110 of the protective cover body 100, that is, the protective cover body 100 is sleeved on the outside of the hydrofluoric acid container 10. When the hydrofluoric acid container 10 and the sealing ring 11 leak the hydrofluoric acid stock solution, the hydrofluoric acid stock solution is collected in the protective cover body 100, which can avoid the components around the hydrofluoric acid container 10 from being burned, reduce the maintenance and replacement frequency of the components around the hydrofluoric acid container 10, and reduce the maintenance cost; it can also avoid the leaked hydrofluoric acid from splashing onto the operator, protect the surrounding environment, and reduce the safety risk in the workplace.

[0034] like Figure 2 and Figure 3 As shown, the protective cover body 100 is provided with a drain port connected to the accommodating chamber 110, which is used to discharge the hydrofluoric acid stock solution in the protective cover body 100. The hydrofluoric acid fixed container leakage protection device also includes a drain pipe 200 connected to the drain port, through which the hydrofluoric acid stock solution in the protective cover body 100 is discharged to prevent the hydrofluoric acid stock solution from polluting the environment.

[0035] The hydrofluoric acid settling container leakage protection device provided in this embodiment can collect leaked hydrofluoric acid stock solution and discharge the collected hydrofluoric acid stock solution to a unified waste liquid treatment site, thereby preventing the leaked hydrofluoric acid stock solution from corroding and damaging the components around the hydrofluoric acid settling container 10, reducing the frequency of repair and replacement of components, and reducing maintenance costs; preventing the leaked hydrofluoric acid stock solution from harming the surrounding environment and operators, and reducing safety risks in the workplace.

[0036] In an optional embodiment, if Figure 2 and Figure 3 As shown, the drain port is arranged at the bottom of the protective cover body 100, so that the hydrofluoric acid in the protective cover body 100 can be discharged through the drain pipe 200. In order to further drain the hydrofluoric acid in the protective cover body 100 as cleanly as possible, the bottom of the protective cover body 100 is inclined; along the horizontal line direction, the height of the bottom gradually increases from the drain port to the side wall of the protective cover body 10, or in other words, the angle between the bottom of the protective cover body 100 and the horizontal line outside the protective cover body 100 is an acute angle, so that the hydrofluoric acid is more likely to flow into the drain pipe 200 due to the principle of self-weight.

[0037] In an optional embodiment, if Figure 2 and Figure 3As shown, the liquid sensing element 400 is provided at the liquid discharge port of the liquid discharge pipe 200 near the protective cover body 100, and the liquid sensing element 400 is used to sense whether there is liquid (hydrofluoric acid stock solution). Optionally, the liquid sensing element 400 is a liquid detection sensor. The liquid sensing element 400 is connected to the controller, for example, it can be a wired connection, or it can be a wireless connection; the controller is connected to the alarm. When the liquid sensing element 400 senses the liquid, it transmits the signal to the controller, and the controller controls the alarm to sound an alarm and controls the liquid supply work of the hydrofluoric acid liquid supply system. The hydrofluoric acid fixed container leakage protection device of this embodiment has a real-time monitoring function, which can quickly detect and sound an alarm when hydrofluoric acid leaks, providing the operator with sufficient response time to take emergency measures; quickly identify and respond to leakage events, reduce production interruption time caused by leakage, and improve production efficiency and process continuity.

[0038] In an optional embodiment, if Figure 2 and Figure 3 As shown, a valve 300 is provided on the drain pipe 200 away from the drain port and close to the liquid sensor 400. The valve 300 may be, for example, a manual valve, which is convenient for timely closing and opening of the valve 300. Generally, the valve 300 is in a closed state. When the liquid sensor 400 senses the liquid and sounds an alarm, the maintenance personnel closes the hydrofluoric acid liquid supply system, opens the valve 300, and the liquid in the protective cover body 100 is discharged through the drain pipe 200, and then the maintenance personnel performs maintenance.

[0039] In an optional embodiment, the material of the protective cover body 100 is an acid- and alkali-resistant material. The acid- and alkali-resistant material may be, for example, tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA) or polytetrafluoroethylene (PTFE). In this way, the protective cover body 100 is resistant to corrosion by hydrofluoric acid, thereby extending the service life of the protective cover body 100.

[0040] In an optional embodiment, the drain pipe 200 is connected to the drain port of the protective cover body 100 via a pipe joint.

[0041] In an optional embodiment, the outlet of the drain pipe 200 is connected to a hydrofluoric acid waste liquid pipeline, and the hydrofluoric acid in the protective cover body 100 is discharged into the hydrofluoric acid waste liquid pipeline for centralized treatment to avoid waste liquid polluting the environment.

[0042] The hydrofluoric acid stator container leakage protection device provided in this embodiment has a simple design and is easy to operate. The operator can easily monitor and maintain it, which improves user-friendliness. The introduction of the hydrofluoric acid stator container leakage protection device enhances the stability of the hydrofluoric acid supply system, ensures the continuity and uniformity of the supply of the hydrofluoric acid proportioning liquid during the polishing process, and improves the quality of the final polishing process.

[0043] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A leakage protection device for a hydrofluoric acid container, characterized in that: include: The protective cover body has a receiving cavity, the receiving cavity receives the hydrofluoric acid container, and the protective cover body is provided with a liquid discharge port connected with the receiving cavity; the liquid discharge port is arranged at the bottom of the protective cover body. The bottom of the protective cover body is inclined, and the height gradually increases from the drain port to the side wall of the protective cover body; the material of the protective cover body is acid and alkali resistant material; A liquid discharge pipe, wherein the inlet of the liquid discharge pipe is communicated with the liquid discharge port.

2. The hydrofluoric acid container leakage protection device according to claim 1, characterized in that: A liquid sensor is arranged on the liquid discharge pipe near the liquid discharge port.

3. The hydrofluoric acid container leakage protection device according to claim 2, characterized in that: The liquid sensing element is a liquid detection sensor.

4. The hydrofluoric acid container leakage protection device according to claim 2 or 3, characterized in that: The liquid sensing element is connected to a controller, and the controller is connected to an alarm.

5. The hydrofluoric acid container leakage protection device according to claim 1, characterized in that: The liquid discharge pipe is provided with a valve.

6. The hydrofluoric acid container leakage protection device according to claim 1, characterized in that: The acid and alkali resistant material is selected from tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer or polytetrafluoroethylene.

7. The hydrofluoric acid container leakage protection device according to claim 1, characterized in that: The liquid discharge pipe is connected to the liquid discharge port via a pipe joint.

8. The hydrofluoric acid container leakage protection device according to claim 1, characterized in that: The outlet of the drain pipe is communicated with a hydrofluoric acid waste liquid pipeline.

Images