HETC heat dissipation device

Abstract

The utility model discloses an HETC heat radiation device which comprises a hot plate oven, and a cooling-water machine device is arranged on the hot plate oven. The cooling-water machine device comprises a cold water tank, a heat insulation device is arranged between the cold water tank and the hot plate oven, the cold water tank is provided with a ventilation opening and a heat dissipation opening, and the heat dissipation opening is connected with a ventilation device; the heat insulation device comprises a heat insulation support and a heat insulation pad. According to the utility model, heat generated by heat dissipation of the hot plate is prevented from directly influencing the HETC, so that normal operation of the HETC is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of cold plate devices of a coating developer, in particular to a HETC heat dissipation device. Background Art

[0002] After the wafer is baked in the coating developer, it needs to enter the cold plate for cooling, and then be transferred out after it drops to room temperature. The existing coating developer uses cooling water circulation to cool the cold plate, and the cooling water is provided by a chiller device (i.e., HETC) and needs to maintain a constant temperature. Currently, due to the limitation of the equipment installation space, HETC is installed directly above the hot plate, and the heat dissipation of the hot plate all runs into the HETC, resulting in the failure of HETC temperature control, equipment alarm, and the risk of product scrapping. Utility Model Content

[0003] The utility model aims to provide a heat dissipation device which can prevent the heat generated by the heat plate from directly affecting the chiller device (HETC) on the basis of the existing equipment, thereby ensuring the normal operation of the chiller device (HETC).

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A HETC heat dissipation device comprises a hot plate oven, wherein a water chiller device is arranged on the hot plate oven; the water chiller device comprises a cold water tank, a heat insulation device is arranged between the cold water tank and the hot plate oven, the cold water tank is provided with a vent and a heat dissipation port, and the heat dissipation port is connected to the vent; the heat insulation device comprises a heat insulation bracket and a heat insulation pad.

[0006] Separating the HETC and the hot plate and installing thermal insulation cotton in the middle can effectively improve the heat dissipation effect; adding an exhaust duct to take away the heat generated by the HETC itself can reduce the impact of the HETC itself on temperature control; this solution uses an insulating bracket to isolate the cold water tank from the hot plate oven, so that an insulating space is created between the two. In order to enhance the insulation effect, an insulating pad is placed in the insulating space, which not only prevents the cold water tank from directly contacting the hot plate oven to generate heat conduction, but also prevents the hot plate oven from generating heat conduction to the cold water tank due to heat radiation and indirect air heating; at the same time, since the heat of the hot plate oven is dissipated to the surrounding environment and will also affect the cold water tank, a ventilation device is installed on the cold water tank so that the air flow takes away the heat, so that the heat cannot accumulate in large quantities, ensuring that the chiller device can provide the cold plate with cold water that meets the requirements.

[0007] As a preferred solution of the utility model, the ventilation device includes a ventilation pipe and an exhaust fan, and the exhaust fan is arranged in the ventilation pipe. After the exhaust fan of this solution is working, air can be discharged from the cold water tank, and the surrounding air can be replenished into the cold water tank through the vent. During the air flow, the excess heat in the cold water tank can be taken away.

[0008] As a preferred solution of the utility model, the ventilation pipe is L-shaped, and the ventilation pipe opening is provided with a dust cover. The ventilation pipe of this solution can be connected to the main exhaust pipe of the workshop, or it can be set up separately, and the ventilation pipe is led to the outside, and a dust cover is provided at the ventilation pipe opening to prevent dust from entering.

[0009] As a preferred solution of the utility model, the heat-insulating bracket includes four support pads respectively arranged at the four corners of the top of the hot plate oven, and the support pads are made of heat-insulating materials. The heat-insulating bracket of this solution has a small contact area with the hot plate oven, and the heat conduction is small. At the same time, the use of heat-insulating materials such as rubber, plastic, etc. can play a supporting and heat-insulating role.

[0010] As a preferred solution of the utility model, the heat insulating pad is a rubber-plastic cotton pad. The heat insulating pad of this solution is a rubber-plastic cotton pad, and its main materials are high-quality rubber and polyvinyl chloride.

[0011] Compared with the prior art, the utility model has the beneficial effect of preventing the heat generated by the heat plate from directly affecting the chiller device (HETC), thereby ensuring that the chiller device (HETC) can operate normally. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the utility model.

[0013] In the figure: 1. Hot plate oven 2. Chiller 3. Cold water tank 4. Ventilation vent

[0014] 5. Heat dissipation port 6. Heat insulation bracket 7. Heat insulation pad 8. Ventilation pipe

[0015] 9. Exhaust fan 10. Dust cover. DETAILED DESCRIPTION

[0016] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings, and several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0017] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0019] See also Figure 1 , the utility model provides a technical solution:

[0020] A HETC heat dissipation device comprises a hot plate oven 1, on which a water chiller device 2 is arranged; the water chiller device 2 comprises a cold water tank 3, a heat insulation device is arranged between the cold water tank and the hot plate oven, the cold water tank 3 is provided with a vent 4 and a heat dissipation port 5, and the heat dissipation port 5 is connected to the ventilating device; the heat insulation device comprises a heat insulation bracket 6 and a heat insulation pad 7.

[0021] The ventilation device comprises a ventilation pipe 8 and an exhaust fan 9 , and the exhaust fan 9 is arranged in the ventilation pipe 8 .

[0022] The ventilation pipe 8 is L-shaped, and a dust cover 10 is provided at the pipe opening of the ventilation pipe 8 .

[0023] The heat-insulating support 6 comprises four supporting pads respectively arranged at the four corners of the top of the hot plate oven 1, and the supporting pads are made of heat-insulating materials.

[0024] The heat insulation pad 7 is a rubber-plastic cotton pad.

[0025] Working process of the utility model: This scheme adopts the heat-insulating bracket 6 to isolate the cold water tank 3 from the hot plate oven 1, so that a heat-insulating space is generated between the two, and the heat-insulating pad 7 is placed in the heat-insulating space, which not only prevents the cold water tank 3 from directly contacting the hot plate oven 1 to generate heat conduction, but also prevents the heat radiation of the hot plate oven 1 and the indirect air heating to the cold water tank 3 from generating heat conduction; at the same time, because the heat dissipated by the hot plate oven 1 to the surrounding environment will also affect the cold water tank 3, a ventilation device is installed on the cold water tank 3 so that the air flow takes away the heat, so that the heat cannot accumulate in large quantities, and it is ensured that the chiller device 2 can provide the cold plate with cold water that meets the requirements.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A HETC heat sink comprising a hot plate oven, characterized in that: A water chiller device is provided above the hot plate oven; The water chiller device comprises a cold water tank, a heat insulation device is arranged between the cold water tank and the hot plate oven, the cold water tank is provided with a vent and a heat dissipation port, and the heat dissipation port is connected to the ventilation device; The heat insulation device comprises a heat insulation bracket and a heat insulation pad.

2. A HETC heat dissipation device according to claim 1, characterized in that: The ventilation device comprises a ventilation pipe and an exhaust fan, and the exhaust fan is arranged in the ventilation pipe.

3. A HETC heat dissipation device according to claim 2, characterized in that: The ventilation pipe is L-shaped, and a dust cover is provided at the pipe opening of the ventilation pipe.

4. A HETC heat dissipation device according to claim 1, characterized in that: The heat-insulating support comprises four supporting pads which are respectively arranged at the four corners of the top of the hot plate oven, and the supporting pads are made of heat-insulating materials.

5. The HETC heat dissipation device according to claim 1, characterized in that: The heat insulating pad is a rubber-plastic-cotton pad.

Images