Mask workbench cooling device

Abstract

The utility model provides a mask workbench cooling device which is divided into two groups which are respectively arranged in frames on two sides of a mask bearing table, and each group of cooling device comprises two groups of U-shaped water pipes which are arranged side by side and a plurality of brackets for fixing the water pipes, the water pipes are tightly arranged, and a fixed distance is kept between the uppermost water pipe and the upper edge of the frame. The water pipe in the cooling device is parallel to the frame and the mask workbench cover plate, so that water leakage caused by water pipe scratching is avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a mask workbench cooling device. Background Art

[0002] When the lithography machine is exposing, the mask worktable (reticle stage) carrying the photomask needs to move at high speed. The driving motor will generate heat during high-speed movement, so water pipes are installed on both sides of the mask worktable to remove excess heat through cooling water. However, due to the uneven spacing between the water pipes during assembly, it is easy for them to rub against the adjacent frame and the mask worktable cover. This friction caused by long-term high-speed movement will cause serious water leakage in the water pipes. The resulting leakage can easily damage important components such as circuit boards and lenses, thereby causing long-term downtime and seriously affecting the normal production of products. Utility Model Content

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a mask workbench cooling device for solving the problem in the prior art that the cooling water pipe is rubbed and leaks due to the long-term high-speed movement of the mask workbench.

[0004] To achieve the above-mentioned purpose and other related purposes, the present application provides a mask workbench cooling device, which includes two groups of mask workbench cooling devices, which are respectively arranged in the frames on both sides of the mask support platform, and each group of cooling devices includes two groups of multiple water pipes arranged side by side in a U shape and multiple brackets for fixing the water pipes. The water pipes are closely arranged and the water pipe located at the top maintains a fixed distance from the upper edge of the frame.

[0005] Preferably, the U-shaped openings of the two groups of water pipes are arranged opposite to each other, and both ends of each U-shaped side are fixed to the frame through the bracket.

[0006] Preferably, each group of cooling devices includes four frames and eight brackets.

[0007] Preferably, the distances between the topmost water pipes in the two groups of U-shaped water pipes in each group of cooling devices and the upper edge of the frame are the same.

[0008] Preferably, the spacing between the two groups of U-shaped water pipes in each group of cooling devices is the same.

[0009] As described above, the mask workbench cooling device provided in the present application has the following beneficial effects: the water pipes in the cooling device are parallel to the frame and the mask workbench cover, thereby avoiding water leakage caused by scratching of the water pipes. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0011] Figure 1 A schematic diagram showing a mask workbench cooling device provided in an embodiment of the present application;

[0012] Figure 2 A schematic diagram showing the arrangement of the portion of the cooling water pipe parallel to the frame in the mask workbench cooling device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0013] The following describes the implementation of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. The present application can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0014] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions in this application. Obviously, the described embodiments are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0015] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating directions or positional relationships, are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0016] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, it can also be the internal connection of two components, it can be a wireless connection, or it can be a wired connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0017] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0018] In order to solve the problem that the cooling water pipe is rubbed and leaks due to the long-term high-speed movement of the mask worktable, the present application provides a mask worktable cooling device.

[0019] See also Figure 1 , which shows a schematic diagram of a mask workbench cooling device provided in an embodiment of the present application.

[0020] like Figure 1 As shown, the mask workbench cooling device has two groups, which are respectively arranged in the frames on both sides of the mask supporting platform. Each group of cooling devices includes two groups of multiple water pipes arranged side by side in a U shape and multiple brackets for fixing the water pipes.

[0021] The U-shaped openings of the two groups of water pipes are arranged opposite to each other, and the two ends of each U-shape are fixed to the frame through the bracket, so that multiple water pipes arranged side by side are arranged closely and the water pipe at the top maintains a fixed distance from the upper edge of the frame.

[0022] Each cooling device includes four frames and eight brackets.

[0023] like Figure 2 As shown, Y1 represents Figure 1 The wires and communication cables (E-duct) located above the mask carrier and two groups of multiple water pipes (P-duct) arranged side by side (only the part parallel to the frame is shown), Y2 represents Figure 1 In the figure, there are wires and communication cables (E-duct) under the mask carrier and two groups of multiple water pipes (P-duct) arranged side by side (only the part parallel to the frame is shown), the mask carrier is located between Y1 and Y2, RH is the mask transfer module located on the left side of the mask carrier, and IL is the lighting module located on the right side of the mask carrier.

[0024] The distance between the two ends of the uppermost water pipes (the two ends of the two sides of the U-shape) in the part where the two groups of water pipes in Y1 are parallel to the frame and the upper edge of the frame is y1a=y1b=y1c=y1d, the distance between the two ends of the uppermost water pipes (the two ends of the two sides of the U-shape) in the part where the two groups of water pipes in Y2 are parallel to the frame and the upper edge of the frame is y2a=y2b=y2c=y2d, the spacing y1e between the two groups of water pipes in Y1 and the spacing y2e between the two groups of water pipes in Y2 are the same, which can effectively avoid friction between the water pipes and the frame and the mask workpiece table cover, and thus avoid water leakage caused by friction.

[0025] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present application in a schematic manner. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0026] In summary, the mask workbench cooling device provided by the present application makes the water pipes in the cooling device parallel to the frame and the mask workbench cover plate, thus avoiding water leakage caused by scratching of the water pipes. Therefore, the present application effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

[0027] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed by the present invention shall still be covered by the claims of the present application.

Claims

1. A mask workbench cooling device, characterized in that: There are two groups of mask workbench cooling devices, which are respectively arranged in the frames on both sides of the mask supporting platform. Each group of cooling devices includes two groups of multiple water pipes arranged side by side in a U shape and multiple brackets for fixing the water pipes. The water pipes are closely arranged and the water pipe located at the top maintains a fixed distance from the upper edge of the frame.

2. The mask stage cooling device according to claim 1, characterized in that: The U-shaped openings of the two groups of water pipes are arranged opposite to each other, and the two ends of each U-shaped side are fixed to the frame through the bracket.

3. The mask stage cooling device according to claim 1, characterized in that: Each group of cooling devices includes four frames and eight brackets.

4. The mask stage cooling device according to claim 1, characterized in that: The distances between the topmost water pipe in the two groups of U-shaped water pipes in each group of cooling devices and the upper edge of the frame are the same.

5. The mask stage cooling device according to claim 1, characterized in that: The distances between the two groups of U-shaped water pipes in each group of cooling devices are the same.

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