Mixed reaction device for isopropanol

Abstract

The utility model discloses a mixed reaction device for isopropyl alcohol, which comprises a liquid storage cylinder, an isopropyl alcohol solution is filled in the liquid storage cylinder, and an exhaust pipe is arranged at the inner top of the liquid storage cylinder; the nitrogen temporary storage mechanism comprises a mounting plate fixedly connected to the right side of the liquid storage cylinder, the upper end of the mounting plate is fixedly connected with a gas storage cylinder, a piston plate capable of sliding up and down is arranged in the gas storage cylinder, and the upper end of the piston plate is elastically connected with the inner top of the gas storage cylinder through a spring; an annular heating wire is mounted at the inner bottom of the air storage cylinder; and the gas distribution mechanism is matched with the nitrogen temporary storage mechanism. The reaction device is provided with a gas storage structure, so that nitrogen can be temporarily stored in a gas storage cylinder, and is injected into a subsequent mixing process after being fully heated, and the actual mixing effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mixing isopropanol and nitrogen, in particular to a mixing reaction device for isopropanol. Background Art

[0002] Among the various methods of using the wafer drying process, effective batch drying within a specified time will affect the overall working efficiency of the entire wafer cleaning process. Therefore, establishing an effective wafer drying method with high drying efficiency has become a link that needs to be paid special attention to in the current wafer wet cleaning technology. In order to ensure the cleaning effect, in the existing method, nitrogen gas is used in combination with isopropyl alcohol for spraying;

[0003] In the above method, an important step is to fully mix the isopropanol and the nitrogen. In this process, the nitrogen needs to be heated and then introduced into the isopropanol solution to achieve the volatilization of the isopropanol and the flow of the nitrogen together to the subsequent cleaning process. In the prior art, the nitrogen is generally heated by water bath heating, that is, the nitrogen pipeline is passed through the water bath water body. Since the nitrogen is directly injected from the high-pressure nitrogen tank, its overall flow rate is fast, and it is difficult to fully heat the nitrogen, resulting in poor mixing effect. Utility Model Content

[0004] The utility model aims to solve the shortcomings of the prior art and proposes a mixing reaction device for isopropanol. The reaction device is provided with a gas storage structure, which allows nitrogen to be temporarily stored in a gas storage cylinder and injected into a subsequent mixing process after being fully heated, thereby improving the actual mixing effect.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A mixed reaction device for isopropanol comprises a liquid storage cylinder, the liquid storage cylinder is filled with isopropanol solution, an exhaust pipe is arranged at the inner top of the liquid storage cylinder; a nitrogen temporary storage mechanism, the nitrogen temporary storage mechanism comprises a mounting plate fixedly connected to the right side of the liquid storage cylinder, an upper end of the mounting plate is fixedly connected to a gas storage cylinder, a piston plate which can slide up and down is arranged in the gas storage cylinder, the upper end of the piston plate is elastically connected to the inner top of the gas storage cylinder through a spring, and an annular heating wire is arranged at the inner bottom of the gas storage cylinder; and a gas diversion mechanism, the gas diversion mechanism cooperates with the nitrogen temporary storage mechanism.

[0007] Preferably, a connecting port is provided at the inner top of the gas cartridge, and an air inlet pipe is connected to the inner bottom space of the gas cartridge.

[0008] Preferably, a motor is installed at the lower end of the mounting plate, the output shaft of the motor extends to the bottom space in the gas cylinder and is equipped with a plurality of stirring blades.

[0009] Preferably, the gas diversion mechanism comprises an air pump installed on the right side of the liquid storage cylinder, the air inlet end of the air pump is connected to the bottom space in the gas storage cylinder, and the air outlet end of the air pump extends to the inside of the liquid storage cylinder.

[0010] Preferably, a diverter net is fixedly connected to the inner wall of the internal space of the liquid storage cylinder, a diverter cover is arranged in the liquid storage cylinder, the lower end of the diverter cover contacts the upper end of the diverter net, and the air outlet end of the air pump is connected to the inside of the diverter cover.

[0011] Preferably, solenoid valves are installed in the air inlet pipe and the air inlet end of the air pump.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] An air cylinder is provided. Through the setting of the air cylinder, nitrogen can be injected and temporarily stored in the temporary storage box. The nitrogen can be fully heated by the stirring of the stirring blades and the annular heating wire, and then injected into the isopropanol solution. With the two cuts of the diversion network, the volatile isopropanol is mixed into the nitrogen to form a mixed gas, achieving a better mixing effect, and finally discharged from the exhaust pipe for subsequent cleaning work. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic structural diagram of a mixing reaction device for isopropanol proposed in the utility model;

[0015] Figure 2 for Figure 1 Schematic cross-sectional view of ;

[0016] Figure 3 for Figure 2 Enlarged view of point A.

[0017] In the figure: 1 liquid storage cylinder, 2 mounting plate, 3 air storage cylinder, 4 connecting port, 5 motor, 6 air inlet pipe, 7 air pump, 8 exhaust pipe, 9 splitter net, 10 splitter cover, 11 piston plate, 12 spring, 13 annular heating wire, 14 stirring blade. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0019] Reference Figure 1-Figure 3A mixing reaction device for isopropanol comprises a liquid storage cylinder 1, the liquid storage cylinder 1 is filled with an isopropanol solution, an exhaust pipe 8 is arranged at the inner top of the liquid storage cylinder 1, a connecting port 4 is opened at the inner top of the gas storage cylinder 3, an air intake pipe 6 is connected to the inner bottom space of the gas storage cylinder 3, and the other end of the air intake pipe 6 is connected to an external high-pressure nitrogen tank;

[0020] The nitrogen temporary storage mechanism is also included, and the nitrogen temporary storage mechanism includes a mounting plate 2 fixedly connected to the right side of the liquid storage cylinder 1, and the upper end of the mounting plate 2 is fixedly connected to the gas storage cylinder 3, and a piston plate 11 that can slide up and down is arranged in the gas storage cylinder 3, and the upper end of the piston plate 11 is elastically connected to the inner top of the gas storage cylinder 3 through a spring 12, and an annular heating wire 13 is installed at the inner bottom of the gas storage cylinder 3, and the annular heating wire 13 is a ring-shaped electric heating wire;

[0021] Among them, the lower end of the mounting plate 2 is equipped with a motor 5, the output shaft of the motor 5 extends to the bottom space of the gas storage cylinder 3, and is equipped with a plurality of stirring blades 14. It should be noted that a rotating sealing gasket is installed at the bottom of the output shaft passing through the gas storage cylinder 3 to ensure the rotation sealing performance;

[0022] Among them, it also includes a gas diversion mechanism, which cooperates with the nitrogen temporary storage mechanism. The gas diversion mechanism includes an air pump 7 installed on the right side of the liquid storage cylinder 1, the air inlet end of the air pump 7 is connected to the bottom space of the gas storage cylinder 3, and the air outlet end of the air pump 7 extends to the inside of the liquid storage cylinder 1. A diversion net 9 is fixedly connected to the inner wall of the internal space of the liquid storage cylinder 1, and a diversion cover 10 is arranged in the liquid storage cylinder 1. The lower end of the diversion cover 10 contacts the upper end of the diversion net 9, the air outlet end of the air pump 7 is connected to the inside of the diversion cover 10, and electromagnetic valves are installed in the air inlet pipe 6 and the air inlet end of the air pump 7.

[0023] In the utility model, when in use, the electromagnetic valve inside the air intake pipe 6 is opened, and the nitrogen inside the high-pressure nitrogen box is injected into the bottom space of the gas storage cylinder 3. With the injection of gas, the piston plate 11 moves up and compresses the spring 12. After injecting a suitable amount of gas, the electromagnetic valve inside the air intake pipe 6 is closed, and then the annular heating wire 13 and the motor 5 are started. After the annular heating wire 13 is started, the internal nitrogen can be heated, and the motor 5 is started to drive the multiple stirring blades 14 to rotate, so that the gas in the entire space flows and the overall temperature is more uniform;

[0024] Then, open the air pump 7 and the electromagnetic valve on the air inlet end of the air pump 7, and then pump nitrogen into the isopropanol solution. The nitrogen enters the diverter hood 10 in the form of bubbles, moves downward, and after passing through the upper end of the diverter net 9, the bubbles are cut into small bubbles and enter the bottom part of the isopropanol solution, and then finally move upward under the action of buoyancy, and after secondary crushing by the diverter net 9, finally float to the upper end surface of the isopropanol solution, and then be discharged. In this process, the volatile isopropanol is mixed into the nitrogen to form a mixed gas, which is finally discharged from the exhaust pipe 8 for subsequent cleaning work.

[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A mixing reaction device for isopropanol, characterized in that: include: A liquid storage cylinder (1), wherein the liquid storage cylinder (1) is filled with an isopropyl alcohol solution, and an exhaust pipe (8) is provided at the inner top of the liquid storage cylinder (1); A nitrogen temporary storage mechanism, the nitrogen temporary storage mechanism comprising a mounting plate (2) fixedly connected to the right side of a liquid storage cylinder (1), the upper end of the mounting plate (2) being fixedly connected to a gas storage cylinder (3), a piston plate (11) being arranged in the gas storage cylinder (3) and being able to slide up and down, the upper end of the piston plate (11) being elastically connected to the inner top of the gas storage cylinder (3) via a spring (12), and an annular heating wire (13) being arranged at the inner bottom of the gas storage cylinder (3); A gas diversion mechanism is provided, wherein the gas diversion mechanism cooperates with the nitrogen temporary storage mechanism.

2. A mixed reaction device for isopropanol according to claim 1, characterized in that: The inner top of the gas storage cylinder (3) is provided with a connecting port (4), and the inner bottom space of the gas storage cylinder (3) is connected with an air intake pipe (6).

3. A mixing reaction device for isopropanol according to claim 1, characterized in that: A motor (5) is installed at the lower end of the mounting plate (2); an output shaft of the motor (5) extends into the bottom space inside the gas storage cylinder (3) and is equipped with a plurality of stirring blades (14).

4. A mixed reaction device for isopropanol according to claim 2, characterized in that: The gas flow diversion mechanism comprises an air pump (7) installed on the right side of the liquid storage cylinder (1), the air inlet end of the air pump (7) is connected to the bottom space inside the gas storage cylinder (3), and the air outlet end of the air pump (7) extends to the inside of the liquid storage cylinder (1).

5. A mixing reaction device for isopropanol according to claim 4, characterized in that: A flow dividing net (9) is fixedly connected to the inner wall of the internal space of the liquid storage cylinder (1), a flow dividing cover (10) is arranged inside the liquid storage cylinder (1), the lower end of the flow dividing cover (10) is in contact with the upper end of the flow dividing net (9), and the air outlet end of the air pump (7) is connected to the inside of the flow dividing cover (10).

6. A mixing reaction device for isopropanol according to claim 4, characterized in that: Solenoid valves are installed in the air inlet pipe (6) and the air inlet end of the air pump (7).

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