Vacuum sintering furnace
By designing a double-sided sealed plug-in valve in a vacuum sintering furnace and utilizing nitrogen pressure, the problem of poor sealing of the vacuum sintering furnace is solved, and a more stable vacuum environment and a more efficient welding process is achieved.
Patent Information
- Application Number
- CN202420402382.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-04
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-03-04
AI Technical Summary
The existing vacuum sintering furnaces have poor sealing properties, resulting in the destruction of the vacuum environment in the welding area during welding.
A vacuum sintering furnace is designed including a preheating zone, a welding zone, a cooling zone and a plurality of double-sided sealed plug-in valves. By filling the plug-in valve with nitrogen, the sealing property of the plug-in valve is improved by using pressure, thereby enhancing the sealing property of the entire vacuum sintering furnace.
Through the design of the double-sided sealed plug-in valve and the nitrogen pressure, the sealing of the vacuum sintering furnace is significantly improved, ensuring that the vacuum environment in the welding area is not destroyed, and improving the stability and efficiency of the welding process.
Smart Images
Figure CN222670674U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum sintering furnaces, in particular to a vacuum sintering furnace. Background Art
[0002] The vacuum gate valve is a valve used to isolate the vacuum pipe and block the passage of airflow. It is an important vacuum component. When semiconductor chips are packaged, they need to be carried out in a vacuum environment, which can generally be achieved in the form of a vacuum reflow oven. The vacuum reflow oven in the prior art is equipped with multiple temperature zones, which are divided into a preheating zone, a welding zone and a cooling zone. Among them, the preheating zone is protected by nitrogen and is not a completely low-oxygen environment; the welding zone is a vacuum environment. After the chip is welded, the door connecting the welding zone and the cooling zone is opened, and the chip enters the cooling zone from the welding zone. At the same time, the door connecting the welding zone and the preheating zone is opened, and the preheated chip is sent to the welding zone for welding. In this way, after completing a welding process and carrying out the next welding process, the front and rear doors of the welding zone must be opened at the same time, and the cooling zone and the preheating zone will destroy the vacuum environment of the welding zone. The gate valve of the existing vacuum sintering furnace is sealed on one side, so the sealing of the vacuum sintering furnace is not good. Summary of the invention
[0003] The utility model provides a vacuum sintering furnace, which is used to solve the problem of poor sealing of the vacuum sintering furnace in the prior art.
[0004] The utility model provides a vacuum sintering furnace, comprising a preheating zone, a welding zone, a first cooling zone, a first double-sided sealed gate valve, a second double-sided sealed gate valve, a third double-sided sealed gate valve and a fourth double-sided sealed gate valve; the preheating zone, the welding zone and the first cooling zone are arranged according to a work flow, the inlet end of the preheating zone is vacuum-sealed and provided with the first double-sided sealed gate valve, the outlet end of the preheating zone is vacuum-sealed and provided with the second double-sided sealed gate valve, the inlet end of the welding zone is vacuum-sealed and provided with the second double-sided sealed gate valve, the outlet end of the welding zone is vacuum-sealed and provided with the third double-sided sealed gate valve, the inlet end of the first cooling zone is vacuum-sealed and provided with the third double-sided sealed gate valve, and the outlet end of the first cooling zone is vacuum-sealed and provided with the fourth double-sided sealed gate valve.
[0005] According to the vacuum sintering furnace of the utility model, the driving assembly includes a cylinder and a corrugated push rod, the cylinder is arranged above the corrugated push rod, and the corrugated push rod is fixedly connected to the middle position of the driving body assembly.
[0006] According to the vacuum sintering furnace of the utility model, it also includes a first roller assembly, and multiple first roller assemblies are arranged on both sides of the driving body assembly. The first roller assembly includes a first roller, a fourth roller and a roller shaft. The roller shaft passes through the center of the first roller, and the fourth roller is perpendicular to the first roller and fixed on the roller shaft.
[0007] According to the vacuum sintering furnace of the utility model, it also includes a second roller and a third roller. The second roller is arranged on both sides of the first valve plate, the third roller is arranged on both sides of the second valve plate, and the second roller and the third roller are arranged in the middle of the first roller assembly.
[0008] According to the vacuum sintering furnace of the utility model, at least one limiting wheel assembly is provided on the lower cross beam of the mounting frame.
[0009] According to the vacuum sintering furnace of the utility model, the diameters of the second roller and the third roller are smaller than the diameter of the first roller of the first roller assembly.
[0010] According to the vacuum sintering furnace of the utility model, it also includes a second cooling zone, and the second cooling zone is vacuum-sealed in the next workstation area of the first cooling zone.
[0011] According to the vacuum sintering furnace of the present invention, the hinged arrangement is specifically that the first valve plate and the driving body assembly are hinged via a first hinge, and the second valve plate and the driving body assembly are hinged via a second hinge.
[0012] According to the vacuum sintering furnace of the utility model, the angle between the first hinge and the second hinge during operation is 80-85 degrees.
[0013] Nitrogen is filled into the gate valve through the gas pipe, and the pressure in the gate valve acts so that the first valve plate and the second valve plate have better sealing performance, thereby improving the sealing performance of the gate valve and thus improving the sealing performance of the vacuum sintering furnace. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0015] Figure 1 It is a vacuum sintering furnace;
[0016] Figure 2 The first double-sided sealing gate valve is a three-dimensional structure diagram. Figure 1 ;
[0017] Figure 3 The first double-sided sealing gate valve is a three-dimensional structure diagram. Figure 2 ;
[0018] Figure 4 It is a schematic diagram of the three-dimensional structure of the driving body assembly;
[0019] Figure 5 is a schematic diagram of the three-dimensional structure of the first roller assembly;
[0020] 1. Mounting frame; 2. Driving assembly; 3. Driving body assembly; 4. First valve plate; 5. Second valve plate; 6. First roller assembly; 7. Second roller; 8. Third roller; 9. Gas pipe; 10. Limiting wheel assembly; 11. First double-sided sealed gate valve; 12. Second double-sided sealed gate valve; 13. Third double-sided sealed gate valve; 14. Fourth double-sided sealed gate valve; 15. Fifth double-sided sealed gate valve; 16. Preheating zone; 17. Welding zone; 18. First cooling zone; 19. Second cooling zone; 20. Lifting mechanism; 21. Cylinder; 22. Bellows; 31. First hinge; 32. Second hinge; 33. Driving body; 61. Fourth roller; 62. Roller shaft; 63. First roller. DETAILED DESCRIPTION
[0021] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.
[0022] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.
[0023] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.
[0024] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0025] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0026] Combine the following Figure 1-5 A vacuum sintering furnace according to an embodiment of the utility model is described, comprising a preheating zone 16, a welding zone 17, a first cooling zone 18, a first double-sided sealed gate valve 11, a second double-sided sealed gate valve 12, a third double-sided sealed gate valve 13 and a fourth double-sided sealed gate valve 14; the preheating zone 16, the welding zone 17 and the first cooling zone 18 are arranged according to the working process, the inlet end of the preheating zone 16 is vacuum-sealed with the first double-sided sealed gate valve 11, the outlet end of the preheating zone 16 is vacuum-sealed with the second double-sided sealed gate valve 12, the inlet end of the welding zone 17 is vacuum-sealed with the second double-sided sealed gate valve 12, the outlet end of the welding zone 17 is vacuum-sealed with the third double-sided sealed gate valve 13, the inlet end of the first cooling zone 18 is vacuum-sealed with the third double-sided sealed gate valve 13, and the outlet end of the first cooling zone 18 is vacuum-sealed with the fourth double-sided sealed gate valve 14. The first double-sided sealing gate valve 11 , the second double-sided sealing gate valve 12 , the third double-sided sealing gate valve 13 and the fourth double-sided sealing gate valve 14 are identical gate valves or partially identical gate valves.
[0027] In this embodiment, a second cooling zone 19 is also included, and the next station area of the first cooling zone 18 is vacuum-sealed with the second cooling zone 19. The outlet end of the second cooling zone 19 is sealed with a fifth double-sided sealing gate valve 15. A second preheating zone can also be set in the previous station area of the preheating zone 16. The lifting mechanism 20 is arranged below the preheating zone 16, the welding zone 17, the first cooling zone 18 and the second cooling zone 19.
[0028] A preheating zone 16, used to provide a vacuum environment, a protective gas environment or a reducing gas environment during the workpiece preheating stage;
[0029] The welding zone 17 is used to provide a vacuum environment, a protective gas environment or a reducing gas environment during the welding stage of the workpiece;
[0030] The first cooling zone 18 and the second cooling zone 19 are used to provide a vacuum environment, a protective gas environment or a reducing gas environment during the workpiece cooling stage.
[0031] In this embodiment, the first double-sided sealed gate valve 11 includes a drive assembly 2, a mounting frame 1, a drive body assembly 3, a gas pipe 9, a first valve plate 4 and a second valve plate 5; the drive assembly 2 is fixed in the middle position of the upper part of the mounting frame 1, and is fixedly connected to the drive body assembly 3 through the upper crossbeam of the mounting frame 1, and the first valve plate 4 and the second valve plate 5 are hingedly provided on both sides of the drive body assembly 3, and the lower part of the mounting frame 1 is provided with a gas pipe 9. Two vertical plates are provided on the outside of the mounting frame 1, and the first valve plate 4 and the second valve plate 5 are tightly pressed against the sealing strips on the vertical plates for sealing. The gas pipe 9 is filled with a protective gas, preferably nitrogen. The gas pipe 9 preferably has both an air inlet and an air outlet.
[0032] In this embodiment, the driving assembly 2 includes a cylinder 21 and a corrugated push rod 22. The cylinder 21 is arranged above the corrugated push rod 22, and the corrugated push rod 22 is fixedly connected to the middle position of the driving body assembly 3. Specifically, the cylinder 21 is fixed to the upper beam of the mounting frame 1 through a buffer gasket, and the corrugated push rod 22 drives the driving body assembly 3 to move up and down to seal.
[0033] In this embodiment, a first roller assembly 6 is further included, and a plurality of first roller assemblies 6 are arranged on both sides of the driving body assembly 3. The first roller assembly 6 includes a first roller 63, a fourth roller 61 and a roller shaft 62, the roller shaft 62 passes through the center of the first roller 63, and the fourth roller 61 is perpendicular to the first roller 63 and fixed on the roller shaft 62. The up and down movement of the cylinder 21 causes the first roller 63 to move up and down on the vertical plate to seal. The fourth roller 61 also moves up and down.
[0034] In this embodiment, a second roller 7 and a third roller 8 are also included. The second roller 7 is arranged on both sides of the first valve plate 4, and the third roller 8 is arranged on both sides of the second valve plate 5. The second roller 7 and the third roller 8 are arranged in the middle of the first roller assembly 6.
[0035] In this embodiment, at least one limiting wheel assembly 10 is disposed on the lower cross beam of the mounting frame 1. The limiting wheel assembly 10 limits the movement range of the driving body assembly 3, thereby ensuring the movement safety of the driving body assembly 3.
[0036] In this embodiment, the diameters of the second roller 7 and the third roller 8 are smaller than the diameter 63 of the first roller of the first roller assembly 3. This ensures that the first valve plate 4 and the second valve plate 5 are not stuck by the vertical plate.
[0037] In this embodiment, the driving body assembly 3 includes a plurality of first hinges 31, a plurality of second hinges 32 and a driving body 33, wherein the first hinges 31 are arranged on one side of the driving body 33, and the second hinges 32 are arranged on the other side of the driving body 33. The hinged arrangement is specifically that the first valve plate 4 and the driving body assembly 3 are hinged by the first hinge 31, and the second valve plate 5 and the driving body assembly 3 are hinged by the second hinge 32. The angle between the first hinge 31 and the second hinge 32 during operation is 80-85 degrees.
[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.
Claims
1. A vacuum sintering furnace, characterized in that: It includes a preheating zone, a welding zone, a first cooling zone, a first double-sided sealed gate valve, a second double-sided sealed gate valve, a third double-sided sealed gate valve and a fourth double-sided sealed gate valve; the preheating zone, the welding zone and the first cooling zone are arranged according to the working process, the inlet end of the preheating zone is vacuum-sealed and provided with the first double-sided sealed gate valve, the outlet end of the preheating zone is vacuum-sealed and provided with the second double-sided sealed gate valve, the inlet end of the welding zone is vacuum-sealed and provided with the second double-sided sealed gate valve, the outlet end of the welding zone is vacuum-sealed and provided with the third double-sided sealed gate valve, the inlet end of the first cooling zone is vacuum-sealed and provided with the third double-sided sealed gate valve, and the outlet end of the first cooling zone is vacuum-sealed and provided with the fourth double-sided sealed gate valve.
2. The vacuum sintering furnace according to claim 1, characterized in that: The first double-sided sealed gate valve includes a drive assembly, a mounting frame, a drive body assembly, a gas pipe, a first valve plate and a second valve plate; the drive assembly is fixed at the upper middle position of the mounting frame, and is fixedly connected to the drive body assembly through an upper cross beam of the mounting frame, the first valve plate and the second valve plate are hingedly provided on both sides of the drive body assembly, and a gas pipe is provided at the lower part of the mounting frame.
3. The vacuum sintering furnace according to claim 2, characterized in that: The driving assembly comprises a cylinder and a corrugated push rod, wherein the cylinder is arranged above the corrugated push rod, and the corrugated push rod is fixedly connected to the middle position of the driving body assembly.
4. The vacuum sintering furnace according to claim 2, characterized in that: It also includes a first roller assembly, and multiple first roller assemblies are arranged on both sides of the driving body assembly. The first roller assembly includes a first roller, a fourth roller and a roller shaft. The roller shaft passes through the center of the first roller, and the fourth roller is perpendicular to the first roller and fixed on the roller shaft.
5. The vacuum sintering furnace according to claim 4, characterized in that: It also includes a second roller and a third roller. The second rollers are arranged on both sides of the first valve plate, the third rollers are arranged on both sides of the second valve plate, and the second roller and the third roller are arranged in the middle of the first roller assembly.
6. The vacuum sintering furnace according to claim 2, characterized in that: At least one limiting wheel assembly is arranged on the lower cross beam of the installation frame.
7. The vacuum sintering furnace according to claim 5, characterized in that: The diameters of the second roller and the third roller are smaller than the diameter of the first roller of the first roller assembly.
8. The vacuum sintering furnace according to claim 2, characterized in that: The hinged arrangement is specifically that the first valve plate and the driving body assembly are hinged via a first hinge, and the second valve plate and the driving body assembly are hinged via a second hinge.
9. The vacuum sintering furnace according to claim 8, characterized in that: The included angle between the first hinge and the second hinge during operation is 80-85 degrees.
10. The vacuum sintering furnace according to claim 1, characterized in that: It also includes a second cooling zone, and the next workstation area of the first cooling zone is vacuum-sealed and provided with the second cooling zone.