Grinding fluid stirring device
By designing a grinding liquid agitating device including a stirring rod, agitating blade, a cylinder and a deflector, the problem of uneven distribution of suspended matter in the grinding liquid is solved, uniform stirring of the grinding liquid is achieved, and the grinding quality and effect of the CMP process are improved.
Patent Information
- Application Number
- CN202420488048.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-13
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2034-03-13
AI Technical Summary
How to ensure that the suspension in the abrasive liquid is evenly distributed to improve the grinding quality and effect of the CMP process.
A grinding liquid agitator device is designed, including a mixing barrel, a rotatable turntable, a mixing rod, a mixing blade and a cylinder. Through the rotation of the stirring rod and the stirring blade and the up and down movement of the cylinder, spiral agitation and up and down agitation of the abrasive liquid are achieved, and combined with the disturbance of the deflector on the abrasive liquid, ensuring uniform stirring of the abrasive liquid.
Through the use of this device, the abrasive liquid can be stirred quickly and sufficiently to ensure its uniformity, thereby improving the grinding quality and effect, and ensuring planarization and high precision of the wafer surface.
Smart Images
Figure CN222677840U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of integrated circuit manufacturing, and in particular to a grinding liquid stirring device. Background Art
[0002] The CMP (chemical mechanical polishing) process is a key process used to flatten the wafer surface during the manufacturing of integrated circuits. This process can remove micron / nanoscale materials by combining surface chemistry and mechanical grinding technology, thereby achieving nanoscale flattening of the wafer surface. Such surface flattening is crucial for the next step of the lithography process, because if the wafer surface is not flat, it is impossible to successfully perform graphics on these surfaces. The CMP process not only improves the accuracy of surface treatment, but also can achieve atomic-level surface roughness, which is of great significance for improving the performance and quality of integrated circuits.
[0003] Polishing fluid is a key material in the CMP process. During the CMP polishing process, polishing fluid is usually supplied to the polishing pad, and the semiconductor device is brought into contact and rotated with the polishing pad surface. The wafer surface is flattened through the chemical reaction between the polishing fluid and the semiconductor device and the mechanical force between the polishing pad and the semiconductor device. However, when the suspended matter in the polishing fluid is unevenly distributed, it will directly affect the polishing quality and effect.
[0004] Based on this, how to ensure uniform distribution of suspended matter in the grinding liquid is an issue that technicians in this field need to consider. Utility Model Content
[0005] A technical problem to be solved by the present disclosure is the above-mentioned problem of how to ensure uniform distribution of suspended matter in the grinding liquid.
[0006] In order to solve the above technical problems, the embodiment of the present disclosure provides a grinding liquid stirring device, including: a stirring barrel, a top cover of which is provided with a rotatable turntable; a stirring rod, the stirring rod is arranged in the stirring barrel, and the top end of the stirring rod is connected to the turntable and rotates under the drive of the turntable; a stirring blade, the stirring blade is movably arranged on the stirring rod in a vertical direction for stirring the grinding liquid in the stirring barrel; a cylinder, the cylinder is arranged on the turntable, and the driving end of the cylinder extends into the stirring barrel and is connected to the stirring blade for driving the stirring blade to move in the vertical direction.
[0007] In some embodiments, a guide plate is provided on the inner wall of the mixing barrel, and the guide plate is arranged in a spiral shape from top to bottom.
[0008] In some embodiments, there are multiple guide plates, and the multiple guide plates are evenly distributed on the inner wall of the mixing barrel.
[0009] In some embodiments, a slide groove is provided on the stirring rod along its length direction, and the stirring blade is slidably disposed in the slide groove.
[0010] In some embodiments, the grinding liquid stirring device also includes a motor for driving the turntable to rotate.
[0011] In some embodiments, a closed circular groove is provided on the top cover of the mixing barrel, and the turntable is rotatably provided in the circular groove under the drive of a motor.
[0012] In some embodiments, a liquid inlet is provided on the top cover of the mixing barrel.
[0013] In some embodiments, a filter screen is provided on the liquid inlet.
[0014] In some embodiments, a liquid outlet is provided on the bottom of the mixing barrel.
[0015] In some embodiments, an observation window is provided on the side wall of the mixing barrel.
[0016] According to the above technical scheme, the present disclosure provides a grinding liquid stirring device, which realizes spiral stirring and up and down stirring of the grinding liquid in the stirring barrel by driving the stirring rod to rotate in the stirring barrel, and the stirring blade moves in the vertical direction under the drive of the cylinder, so that the grinding liquid in the stirring barrel can be quickly and fully stirred, thereby ensuring the uniformity of the grinding liquid; the grinding liquid in the stirring barrel is disturbed by the guide plate, thereby further improving the stirring effect and efficiency of the grinding liquid; the rotation of the turntable is realized by the motor and the circular groove; the liquid inlet and outlet facilitate the discharge of the grinding liquid into and out of the stirring barrel. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0018] Figure 1 is a cross-sectional view of a grinding liquid stirring device disclosed in an embodiment of the present disclosure;
[0019] Figure 2 is a top view of a grinding liquid stirring device disclosed in an embodiment of the present disclosure;
[0020] Figure 3 is a cross-sectional view of the connection relationship between the stirring rod and the stirring blade disclosed in the embodiment of the present disclosure;
[0021] Figure 4It is a cross-sectional view of the connection relationship between the circular groove and the circular convex strip disclosed in the embodiment of the present disclosure.
[0022] Description of reference numerals:
[0023] 1. Mixing barrel; 2. Turntable; 3. Mixing rod; 4. Mixing blade; 5. Cylinder; 6. Guide plate; 7. Slide; 8. Motor; 9. Circular groove; 10. Liquid inlet; 11. Filter; 12. Liquid outlet; 13. Slide bar; 14. Circular convex strip; 15. Ball. DETAILED DESCRIPTION
[0024] The following is a further detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.
[0025] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.
[0026] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.
[0027] In addition, the words "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.
[0028] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.
[0029] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.
[0030] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.
[0031] As mentioned in the background technology above, the grinding liquid is a key material in the CMP process. During the CMP grinding process, the uniformity of the distribution of suspended matter in the grinding liquid will directly affect the grinding quality and effect. To this end, the inventors of the present application provide a grinding liquid stirring device in one or more embodiments, which drives the rotation of the stirring blade by the rotation of the stirring rod in the stirring barrel, and the stirring blade moves in the vertical direction under the drive of the cylinder, so that the grinding liquid in the stirring barrel can be fully stirred to ensure the uniformity of the grinding liquid. It is believed that it can solve one or more problems in the prior art.
[0032] In view of the above-mentioned technical problems, the utility model provides a grinding liquid stirring device, such as Figure 1 and Figure 2 As shown, it includes: a mixing barrel 1, a rotatable turntable 2 is arranged on the top cover of the mixing barrel 1; a stirring rod 3, the stirring rod 3 is arranged in the mixing barrel 1, and the top end of the stirring rod 3 is connected to the turntable 2 and rotates under the drive of the turntable 2; a stirring blade 4, the stirring blade 4 is movably arranged on the stirring rod 3 along the vertical direction to stir the grinding liquid in the mixing barrel 1; a cylinder 5, the cylinder 5 is arranged on the turntable 2, and the driving end of the cylinder 5 extends into the mixing barrel 1 and is connected to the stirring blade 4 to drive the stirring blade 4 to move in the vertical direction.
[0033] Specifically, when the grinding liquid in the mixing barrel 1 needs to be stirred, the turntable 2 can be driven to rotate by the driving mechanism, and the turntable 2 drives the stirring rod 3 to rotate, thereby driving the stirring blade 4 to rotate, so as to realize the spiral stirring of the grinding liquid in the mixing barrel 1 by the stirring blade 4, and at the same time, the cylinder 5 is started, and the driving end of the cylinder 5 is extended and retracted up and down, so that the stirring blade 4 rotates and moves back and forth in the vertical direction at the same time, thereby forming an up and down stirring of the stirring liquid. The grinding liquid in the mixing barrel 1 can be quickly stirred and evenly by the rotation and up and down movement of the stirring blade 4. Furthermore, the cylinder 5 and the driving mechanism can be controlled by a control device, and the control device can set the stirring time and the timing switch function through the control software to ensure that the stirring liquid is always in a good uniform state. Specifically, the material of the mixing barrel 1, the stirring rod 3 and the stirring liquid is not limited, as long as sufficient strength is ensured. It should be understood that although Figure 1 and 2 Two cylinders 5 are disclosed in the illustrated embodiment, but in other embodiments, different numbers of cylinders 5 may be provided as needed or based on the shape of the stirring blade 4. For example, if the shape of the stirring blade 4 includes three blades, three cylinders 5 may be provided, and so on.
[0034] Compared with the prior art, the grinding liquid stirring device of the present application realizes spiral stirring and up and down stirring of the grinding liquid in the stirring barrel 1 by driving the rotation of the stirring rod 3 in the stirring barrel 1 to drive the rotation of the stirring blade 4, and the stirring blade 4 moves in the vertical direction under the drive of the cylinder 5, so that the grinding liquid in the stirring barrel 1 can be quickly and fully stirred, thereby ensuring the uniformity of the grinding liquid.
[0035] In some embodiments, Figure 1 As shown, a guide plate 6 is provided on the inner wall of the mixing barrel 1, and the guide plate 6 is arranged in a spiral shape from top to bottom. The grinding liquid rotates under the rotation of the stirring blade. When the grinding liquid hits the guide plate, it will be disturbed due to the obstruction of the guide plate. The guide plate is set to be spiral, and the grinding liquid will rotate along the spiral guide plate while being disturbed. The guide plate 6 is used to disturb the grinding liquid in the mixing barrel 1, which further improves the stirring effect and efficiency of the grinding liquid; by setting the guide plate 6 to be spiral from top to bottom, the grinding liquid is disturbed while avoiding the influence on the rotation of the grinding liquid. Specifically, the material and cross-sectional size of the guide plate 6 are not limited.
[0036] In some embodiments, Figure 1 As shown, there are multiple guide plates 6, and the multiple guide plates 6 are evenly distributed on the inner wall of the mixing barrel 1. The multiple guide plates 6 further improve the disturbance effect and efficiency of the grinding liquid.
[0037] In some embodiments, Figure 3As shown, a slide groove 7 is provided on the stirring rod 3 along its length direction, and the stirring blade 4 is slidably arranged in the slide groove 7. The stirring blade 4 can be driven by the cylinder 5 to stably reciprocate along the vertical direction on the stirring rod 3 through the slide groove 7. Specifically, a slide bar 13 can be provided on one end of the stirring blade 4, and the slide bar 13 is slidably arranged in the slide groove 7.
[0038] In some embodiments, Figure 1 and Figure 2 As shown, the grinding liquid stirring device further includes a motor 8 for driving the turntable 2 to rotate. The turntable 2 is rotated by the motor 8. Specifically, the motor 8 can be controlled by a control device.
[0039] In some embodiments, Figure 2 and Figure 4 As shown, a closed circular groove 9 is provided on the top cover of the mixing barrel 1, and the turntable 2 is rotatably provided in the circular groove 9 under the drive of the motor 8. The closed circular groove 9 allows the turntable 2 to stably rotate on the top of the mixing barrel 1. Specifically, a closed circular convex strip 14 is provided at the bottom of the turntable 2, and the circular convex strip 14 is slidably provided in the circular groove 9. Further, in order to ensure that the circular convex strip 14 slides smoothly in the circular groove 9, a ball 15 can be provided in the circular groove 9.
[0040] In some embodiments, Figure 1 and Figure 2 As shown, a liquid inlet 10 is provided on the top cover of the mixing barrel 1. The liquid inlet 10 facilitates the injection of the grinding liquid into the mixing barrel 1 for stirring. Specifically, a cover can be provided on the liquid inlet 10. When the grinding liquid is stirred, the liquid inlet 10 is closed by the cover to prevent the grinding liquid from splashing out of the liquid inlet 10.
[0041] In some embodiments, Figure 1 As shown, a filter screen 11 is provided on the liquid inlet 10. When the grinding liquid recovered after use is reused, impurities in the recovered grinding liquid can be filtered out through the filter screen 11 to ensure the quality of the grinding liquid.
[0042] In some embodiments, Figure 1 As shown, a liquid outlet 12 is provided on the bottom of the mixing barrel 1. The liquid outlet 12 facilitates the discharge of the uniformly stirred grinding liquid from the mixing barrel 1 to grind the product.
[0043] In some embodiments, an observation window (not shown) is provided on the side wall of the mixing barrel 1. Through the observation window, the staff can observe the volume of the grinding liquid in the mixing barrel 1 and the working condition of the stirring blade 4 at any time. Specifically, the mixing barrel 1 can be made of transparent material, thereby realizing the function of the observation window.
[0044] In summary, compared with the prior art, the present invention provides a grinding liquid stirring device, which realizes spiral stirring and up and down stirring of the grinding liquid in the stirring barrel 1 by driving the stirring rod 3 to rotate in the stirring barrel 1, and the stirring blade 4 moves in the vertical direction under the drive of the cylinder 5, so that the grinding liquid in the stirring barrel 1 can be quickly and fully stirred, thereby ensuring the uniformity of the grinding liquid; the grinding liquid in the stirring barrel 1 is disturbed by the guide plate 6, thereby further improving the stirring effect and efficiency of the grinding liquid; the rotation of the turntable 2 is realized by the motor 8 and the circular groove 9; the liquid inlet 10 and the liquid outlet 12 facilitate the discharge of the grinding liquid into and out of the stirring barrel 1.
[0045] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.
[0046] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.
Claims
1. A grinding liquid stirring device, characterized in that: include: A mixing barrel (1), wherein a rotatable turntable (2) is provided on a top cover of the mixing barrel (1); A stirring rod (3), the stirring rod (3) being arranged in the stirring barrel (1), and having a top end connected to the turntable (2) and rotating under the drive of the turntable (2); a stirring blade (4), the stirring blade (4) being movably arranged on the stirring rod (3) in a vertical direction so as to stir the grinding liquid in the stirring barrel (1); and A cylinder (5), wherein the cylinder (5) is arranged on the turntable (2), and a driving end of the cylinder (5) extends into the stirring barrel (1) and is connected to the stirring blade (4) so as to drive the stirring blade (4) to move in a vertical direction.
2. The grinding liquid stirring device according to claim 1, characterized in that: A guide plate (6) is provided on the inner wall of the mixing barrel (1), and the guide plate (6) is arranged in a spiral shape from top to bottom.
3. The grinding liquid stirring device according to claim 2, characterized in that: There are a plurality of guide plates (6), and the plurality of guide plates (6) are evenly distributed on the inner wall of the mixing barrel (1).
4. The grinding liquid stirring device according to claim 1, characterized in that: The stirring rod (3) is provided with a slide groove (7) along its length direction, and the stirring blade (4) is slidably arranged in the slide groove (7).
5. The grinding liquid stirring device according to claim 1, characterized in that: The grinding liquid stirring device also includes a motor (8) for driving the rotating disk (2) to rotate.
6. The grinding liquid stirring device according to claim 5, characterized in that: A closed circular groove (9) is provided on the top cover of the mixing barrel (1), and the rotating disk (2) is rotatably arranged in the circular groove (9) under the drive of the motor (8).
7. The grinding liquid stirring device according to claim 1, characterized in that: The top cover of the stirring barrel (1) is provided with a liquid inlet (10).
8. The grinding liquid stirring device according to claim 7, characterized in that: A filter screen (11) is provided on the liquid inlet (10).
9. The grinding liquid stirring device according to claim 1, characterized in that: A liquid outlet (12) is provided on the bottom of the stirring barrel (1).
10. The grinding liquid stirring device according to claim 1, characterized in that: An observation window is provided on the side wall of the mixing barrel (1).