Sheet carrier and passivation apparatus

Abstract

The utility model relates to the technical field of photovoltaics or semiconductors, in particular to a sheet carrier and passivation equipment, and solves the problem that the non-section of a silicon wafer has a winding plating phenomenon due to the fact that the non-section of the silicon wafer is exposed outside. The sheet carrier comprises a cavity, a blocking piece and at least one spacer, the cavity is provided with a containing cavity, the containing cavity is provided with a first opening, sheet materials enter and exit from the containing cavity through the first opening, the blocking piece is arranged adjacent to the first opening and detachably connected with the cavity, and the at least one spacer is arranged between the cavity and the blocking piece. A gap is formed between the blocking piece and the cavity at the position of the first opening, and the passivation gas enters the first opening through the gap. The section of the sheet-shaped material is close to the first opening, so that the passivation gas passivates the section close to the first opening, and meanwhile, the non-section of the sheet-shaped material is shielded by the accommodating cavity, so that the winding plating phenomenon on the non-section can be reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic or semiconductor technology, and in particular to a sheet carrier and a passivation device. Background Art

[0002] In the process of preparing solar cells, silicon wafers usually need to go through production processes such as texturing, diffusion, laser cutting, etching, coating, printing, sintering, and testing. After laser cutting, silicon wafers will have cross sections. If the laser-cut silicon wafers are directly soldered, the conversion efficiency of the solar cells will be attenuated. Therefore, the industry adopts the passivation treatment of the cross sections of the laser-cut silicon wafers before the silicon wafers are soldered to ensure the conversion efficiency of the solar cells.

[0003] At present, the industry uses deposition equipment to coat the cross-section of silicon wafers to achieve passivation treatment. If the laser-cut silicon wafer is directly placed in the deposition equipment for coating, the non-cross-section of the silicon wafer will be exposed, and the passivation gas will diffuse to the non-cross-section of the silicon wafer, resulting in the phenomenon of wrap-around plating on the non-cross-section of the silicon wafer, which will greatly affect the conversion efficiency of the battery cell. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a sheet carrier and a passivation device, which solve the problem of wrap-around plating on the non-cross-section of the silicon wafer due to the non-cross-section of the silicon wafer being exposed to the outside.

[0005] In a first aspect, an embodiment of the present disclosure provides a sheet carrier for use in a passivation process of a sheet material, the sheet carrier comprising: a cavity having a accommodating chamber, the accommodating chamber having a first opening, the accommodating chamber being configured to accommodate the sheet material, the sheet material entering and exiting the accommodating chamber through the first opening; a blocking member disposed adjacent to the first opening and detachably connected to the cavity; at least one spacer disposed between the cavity and the blocking member so that a gap is formed between the blocking member and the cavity at the position of the first opening, and a passivating gas used in the passivation process enters the first opening through the gap; wherein, when the accommodating chamber accommodates the sheet material, a non-cross-section of the sheet material is blocked by the accommodating chamber, and a cross-section of the sheet material is close to the first opening, so that the passivating gas passivates the cross-section.

[0006] In some embodiments, the spacer is connected to the cavity; or the spacer is connected to the blocking member.

[0007] In some embodiments, when the spacer is connected to the cavity, the spacer and the cavity are formed integrally; when the spacer is connected to the blocking member, the spacer and the blocking member are formed integrally.

[0008] In some embodiments, the cavity includes: a bottom plate; a top plate, arranged opposite to the bottom plate; and at least one side plate, connecting the bottom plate and the top plate; wherein the upper surface of the bottom plate has a groove extending along a first direction, and the groove extends to the first opening, wherein the first direction is perpendicular to the plane where the first opening is located.

[0009] In some embodiments, the cavity is an axisymmetric structure, and there are multiple spacers, which are symmetrically arranged relative to a symmetric plane of the cavity.

[0010] In some embodiments, the sheet carrier also includes: a first pad, configured to carry the sheet material, wherein when the first pad is placed in the accommodating chamber, the lower surface of the first pad is in contact with the bottom plate, and when the first pad carries the sheet material, the sheet material can be in contact with the upper surface of the first pad.

[0011] In some embodiments, the sheet material carrier further includes: a second pad, and when the first pad carries at least one sheet of the sheet material, the second pad is placed on the upper surface of the uppermost sheet material.

[0012] In some embodiments, the number of the side panels is multiple, and the multiple side panels include: a first side panel, connecting the bottom panel and the top panel; a second side panel, arranged opposite to the first side panel, and connecting the bottom panel and the top panel; a third side panel, connecting the first side panel and the second side panel, and connecting the bottom panel and the top panel; wherein, when the accommodating chamber accommodates the sheet material, the difference between the vertical distance between the first side panel and the second side panel and the length of the sheet material in the second direction is less than 1 mm and greater than 0.1 mm, wherein the second direction is a direction from the first side panel vertically to the second side panel.

[0013] In some embodiments, in a first direction, a size of the gap is less than 1 mm and greater than 0.1 mm, wherein the first direction is perpendicular to a plane where the first opening is located.

[0014] In a second aspect, an embodiment of the present disclosure provides a passivation device, comprising: a main body having a passivation chamber; a sheet carrier as described in the first aspect, configured to hold a sheet material and capable of being placed in the passivation chamber so that a cross section of the sheet material is passivated.

[0015] The embodiment of the present disclosure provides a sheet carrier, which is applied to the passivation process of sheet materials. The sheet carrier includes a cavity, a blocking member and at least one spacer. The cavity has a accommodating chamber, the accommodating chamber has a first opening, the accommodating chamber is configured to accommodate the sheet material, the sheet material enters and exits the accommodating chamber through the first opening, the blocking member is arranged adjacent to the first opening, and is detachably connected to the cavity, at least one spacer is arranged between the cavity and the blocking member, so that the blocking member and the cavity form a gap at the position of the first opening, and the passivation gas used in the passivation process enters the first opening through the gap. In the case where the accommodating chamber accommodates the sheet material, the non-section of the sheet material is blocked by the accommodating chamber, and the section of the sheet material is close to the first opening, so that the passivation gas passivates the section. At the same time, since the non-section of the sheet material is blocked by the accommodating chamber, the plating phenomenon of the non-section can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic structural diagram of a sheet carrier provided in one embodiment of the present disclosure.

[0017] Figure 2 Shown is a schematic structural diagram of a sheet carrier provided in another embodiment of the present disclosure.

[0018] Figure 3 Shown Figure 2 The sheet carrier shown is a partial enlarged view of area A.

[0019] Figure 4 Shown is a schematic structural diagram of a sheet material and a first pad provided in one embodiment of the present disclosure.

[0020] Figure 5 Shown is a schematic structural diagram of a cavity provided in one embodiment of the present disclosure.

[0021] Figure 6 Shown is a schematic structural diagram of a sheet material, a first pad, a second pad and a clamp provided in one embodiment of the present disclosure.

[0022] Figure 7 Shown is a schematic diagram of an application scenario of a sheet carrier provided by an embodiment of the present disclosure.

[0023] Figure 8 Shown is a schematic diagram of an application scenario of a sheet carrier provided by another embodiment of the present disclosure.

[0024] Fig. 9 Shown is a schematic structural diagram of a passivation device provided in one embodiment of the present disclosure.

[0025] Reference numerals:

[0026] 1. Passivation equipment; 10. Sheet carrier; 100. Cavity; 101. Accommodating chamber; 102. First opening; 103. Gap; 110. Bottom plate; 1101. Upper surface of bottom plate; 1102. Groove; 120. Top plate; 130. Side plate; 131. First side plate; 132. Second side plate; 133. Third side plate; 200. Blocking member; 300. Spacer; 400. First pad; 401. Lower surface of first pad; 402. Upper surface of first pad; 500. Second pad; 501. Upper surface of second pad; 20. Main body; 201. Passivation chamber; 2. Sheet material; 21. Section; 22. Non-section; 23. Upper surface of sheet material; 3. Clamp; 31. First side of clamp; 32. Second side of clamp; 4. Driving device. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0028] In the process of preparing solar cells, silicon wafers usually need to go through production processes such as texturing, diffusion, laser cutting, etching, coating, printing, sintering, and testing. After laser cutting, silicon wafers will have cross sections. If the laser-cut silicon wafers are directly soldered, the conversion efficiency of the solar cells will be attenuated. Therefore, the industry adopts the passivation treatment of the cross sections of the laser-cut silicon wafers before the silicon wafers are soldered to ensure the conversion efficiency of the solar cells.

[0029] At present, the industry uses deposition equipment to coat the cross-section of silicon wafers to achieve passivation treatment. If the laser-cut silicon wafer is directly placed in the deposition equipment for coating, the non-cross-section of the silicon wafer will be exposed, and the passivation gas will diffuse to the non-cross-section of the silicon wafer, resulting in the phenomenon of wrap-around plating on the non-cross-section of the silicon wafer, which will greatly affect the conversion efficiency of the battery cell.

[0030] In view of the above problems, an embodiment of the present disclosure provides a sheet carrier, which is applied to the passivation process of sheet materials. The sheet carrier includes a cavity, a blocking member and at least one spacer. The cavity has a accommodating chamber, the accommodating chamber has a first opening, the accommodating chamber is configured to accommodate the sheet material, the sheet material enters and exits the accommodating chamber through the first opening, the blocking member is arranged adjacent to the first opening, and is detachably connected to the cavity, at least one spacer is arranged between the cavity and the blocking member, so that a gap is formed between the blocking member and the cavity at the position of the first opening, and the passivation gas used in the passivation process enters the first opening through the gap. In the case where the accommodating chamber accommodates the sheet material, the non-section of the sheet material is blocked by the accommodating chamber, and the section of the sheet material is close to the first opening, so that the passivation gas passivates the section. At the same time, since the non-section of the sheet material is blocked by the accommodating chamber, the plating phenomenon around the non-section can be reduced.

[0031] The specific structure of the sheet carrier is described below in conjunction with an embodiment.

[0032] Figure 1 Shown is a schematic diagram of the exploded structure of a sheet carrier provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic structural diagram of a sheet carrier provided in one embodiment of the present disclosure.

[0033] Figure 3 Shown Figure 2 The sheet carrier shown is a partial enlarged view of area A. Figure 4 FIG. 1 is a schematic diagram of the structure of a sheet material and a first pad provided by an embodiment of the present disclosure. Figures 1 to 4 As shown, the sheet carrier 10 is applied to the passivation process of the sheet material 2. The sheet carrier 10 includes a cavity 100, a blocking member 200 and at least one spacer 300. The cavity 100 has a accommodating chamber 101. The accommodating chamber 101 has a first opening 102. The accommodating chamber 101 is configured to accommodate the sheet material 2. The sheet material 2 enters and exits the accommodating chamber 101 through the first opening 102. The blocking member 200 is arranged adjacent to the first opening 102 and is detachably connected to the cavity 100. At least one spacer 300 is arranged between the cavity 100 and the blocking member 200 so that the blocking member 200 and the cavity 100 form a gap 103 at the position of the first opening 102. The passivating gas used in the passivation process enters the first opening 102 through the gap 103. When the accommodating chamber 101 accommodates the sheet material 2 , the non-section 22 of the sheet material 2 is shielded by the accommodating chamber 101 , and the section 21 of the sheet material 2 is close to the first opening 102 , so that the passivating gas can passivate the section 21 .

[0034] The horizontal cross-sectional shape of the cavity 100 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, as long as the cavity 100 can accommodate the sheet material 30 , and the present disclosure does not make any specific limitation.

[0035] The horizontal cross-sectional shape of the sheet material 2 can be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure. The sheet material 2 can be a silicon wafer, a wafer, a glass substrate, and the like.

[0036] The blocking member 200 may be a sheet plate or other structures. When the blocking member 200 is a sheet plate, the vertical cross-section of the blocking member 200 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0037] The spacer 300 may be a block structure, a strip plate structure, or other types of structures. When the spacer 300 is a block structure, at least two spacers 300 may be disposed between the cavity 100 and the blocking member 200; when the spacer 300 is a strip plate structure, at least one spacer 300 may be disposed between the cavity 100 and the blocking member 200. The vertical cross-sectional shape of the spacer 300 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0038] The sheet carrier 10 provided in the embodiment of the present disclosure is applied to the passivation process of the sheet material 2. The sheet carrier 10 includes a cavity 100, a blocking member 200 and at least one spacer 300. The spacer 300 is arranged between the cavity 100 and the blocking member 200 so that the blocking member 200 and the cavity 100 form a gap 103 at the position of the first opening 102. The accommodating chamber 101 of the cavity 100 accommodates the sheet material 2 and blocks the non-section 22 of the sheet material 2. The section 21 of the sheet material 2 is close to the first opening 102 of the accommodating chamber 101. The passivation gas used in the passivation process enters the first opening 102 through the gap 103, and the passivation gas passivates the section 21. At the same time, since the non-section 22 of the sheet material 2 is blocked by the accommodating chamber 101, the plating around the non-section 22 can be reduced.

[0039] In some embodiments, the spacer 300 is connected to the cavity 100 , and the blocking member 200 is detachably connected to the cavity 100 , so that the blocking member 200 and the cavity 100 form a gap 103 at the position of the first opening 102 . This connection method is simple and reliable.

[0040] In some embodiments, the spacer 300 is connected to the blocking member 200 , and the blocking member 200 is detachably connected to the cavity 100 , so that the blocking member 200 and the cavity 100 form a gap 103 at the position of the first opening 102 . This connection method is simple and reliable.

[0041] In some embodiments, when the spacer 300 is connected to the cavity 100 , the spacer 300 and the cavity 100 are integrally formed, which makes it easier to disassemble and assemble the cavity 100 and the blocking member 200 .

[0042] In some embodiments, when the spacer 300 is connected to the blocking member 200 , the spacer 300 and the blocking member 200 are integrally formed, which makes it easier to disassemble and assemble the cavity 100 and the blocking member 200 .

[0043] In some embodiments, Figure 5 As shown, the cavity 100 includes a bottom plate 110, a top plate 120 and at least one side plate 130, wherein the top plate 120 is arranged opposite to the bottom plate 110, and the at least one side plate 130 connects the bottom plate 110 and the top plate 120. The upper surface 1101 of the bottom plate has a groove 1102 extending along a first direction X1, and the groove 1102 extends to the first opening 102, wherein the first direction X1 is perpendicular to the plane where the first opening 102 is located. By providing the groove 1102, it is convenient to automatically load and unload the sheet material 2.

[0044] The horizontal cross-sectional shape of the groove 1102 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0045] The horizontal cross-sectional shape of the bottom plate 110 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0046] The horizontal cross-sectional shape of the top plate 120 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0047] The vertical cross-sectional shape of the side panel 130 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0048] For example, Figure 5 As shown, the horizontal cross-sectional shape of the bottom plate 110 is a rectangle, the horizontal cross-sectional shape of the top plate 120 is a rectangle, and the vertical cross-sectional shape of the side plate 130 is a rectangle.

[0049] For example, Figures 6 to 8 As shown, the driving device 4 is connected to the clamping jaw 3, and the driving device 4 drives the clamping jaw 3 to gradually approach and grasp the sheet material 2, and put the sheet material 2 into the cavity 100. The groove 1102 provides an escape space for the clamping jaw 3.

[0050] Exemplarily, the shape of the clamping jaw 3 is L-shaped, and when the clamping jaw 3 grabs the sheet material 2, the first side 31 of the clamping jaw holds the sheet material 2 by the lower side of the sheet material 2, and the second side 32 of the clamping jaw abuts against the cross section 21 of the sheet material 2. The shape of the first side 31 of the clamping jaw is rectangular, the shape of the second side 32 of the clamping jaw is rectangular, and the horizontal cross-sectional shape of the groove 1102 is rectangular.

[0051] In some embodiments, the cavity 100 is an axisymmetric structure, and there are multiple spacers 300 . The multiple spacers 300 are symmetrically arranged relative to the symmetry plane of the cavity 100 to facilitate controlling the size of the gap 103 .

[0052] For example, Figure 5 As shown, the cavity 100 is rectangular in shape, and four spacers 300 are symmetrically arranged relative to a symmetric plane of the cavity 100 .

[0053] In some embodiments, Figure 1 , Figure 4 and Figure 5 As shown, the sheet carrier 10 further includes a first pad 400. The first pad 400 is configured to carry the sheet material 2. When the first pad 400 is placed in the receiving chamber 101, the lower surface 401 of the first pad contacts the bottom plate 110. When the first pad 400 carries the sheet material 2, the sheet material 2 can contact the upper surface 402 of the first pad. The first pad 400 is used to carry multiple sheets of sheet material 2, so that multiple sheets of sheet material 2 can be placed in the receiving chamber 101 at the same time.

[0054] The horizontal cross-sectional shape of the first pad 400 may be a rectangle, a parallelogram, or other polygonal or irregular shapes. The present disclosure does not specifically limit the shape of the first pad 400. For example, the horizontal cross-sectional shape of the first pad 400 is a rectangle.

[0055] For example, Figure 7 As shown, when the clamping jaws 3 grasp the sheet material 2, the first side 31 of the clamping jaws supports the lower surface 401 of the first pad, and the second side 32 of the clamping jaws abuts against the cross section 21 of the sheet material 2 and the side of the first pad 400. The two clamping jaws 3 are used to grasp the first pad 400 and the sheet material 2 symmetrically to improve the grasping stability.

[0056] In some embodiments, Figure 1 , Figure 6 and Figure 7 As shown, the sheet carrier 10 further includes a second pad 500. When the first pad 400 carries at least one sheet material 2, the second pad 500 is placed on the upper surface 23 of the uppermost sheet material. The second pad 500 shields the upper surface 23 of the uppermost sheet material to prevent the upper surface 23 of the sheet material from being passivated.

[0057] The horizontal cross-sectional shape of the second pad 500 may be a rectangle, a parallelogram, or other polygonal or irregular shapes. The present disclosure does not specifically limit the shape of the second pad 500. For example, the horizontal cross-sectional shape of the second pad 500 is a rectangle.

[0058] For example, Figure 7 and Figure 8 As shown, when the clamp 3 grabs the sheet material 2, the first side 31 of the clamp supports the lower surface 401 of the first pad, the second side 32 of the clamp abuts the cross-section 21 of the sheet material 2, the side of the first pad 400 and the side of the second pad 500, and one side of the driving device 4 abuts the upper surface 501 of the second pad.

[0059] The driving device 4 may be a robotic arm or other structure that can provide driving force, which is not specifically limited in the present disclosure.

[0060] In some embodiments, Figure 5 and Figure 7 As shown, there are multiple side panels 130, and the multiple side panels 130 include a first side panel 131, a second side panel 132 and a third side panel 133. The first side panel 131 connects the bottom panel 110 and the top panel 120, the second side panel 132 is arranged opposite to the first side panel 131, and connects the bottom panel 110 and the top panel 120, and the third side panel 133 connects the first side panel 131 and the second side panel 132, and connects the bottom panel 110 and the top panel 120.

[0061] When the accommodating chamber 101 accommodates the sheet material 2, the difference between the vertical distance between the first side plate 131 and the second side plate 132 and the length of the sheet material 2 in the second direction X2 is less than 1 mm and greater than 0.1 mm, wherein the second direction X2 is the direction from the first side plate 131 vertically pointing to the second side plate 132. By reasonably setting the size of the accommodating chamber 101, the accommodating chamber 101 can shield the non-section 22 of the sheet material 2, and at the same time, it is convenient to take and put the sheet material 2.

[0062] For example, Figure 5 As shown, two spacers 300 are connected to the first side plate 131, and two spacers 300 are connected to the second side plate 132. The two spacers 300 connected to the second side plate 132 are symmetrically arranged with the two spacers 300 connected to the first side plate 131, respectively.

[0063] In some embodiments, in the first direction X1, the size of the gap 103 is less than 1 mm and greater than 0.1 mm, wherein the first direction X1 is perpendicular to the plane where the first opening 102 is located. By properly setting the size of the gap 103, the amount of the passivation gas entering the first opening 102 is controlled to improve the passivation effect.

[0064] Fig. 9 FIG. 1 is a schematic diagram of the structure of a passivation device provided by an embodiment of the present disclosure. Fig. 9 As shown, the passivation device 1 comprises: a sheet carrier 10 as mentioned in the above embodiment and a main body 20, the main body 20 having a passivation chamber 201. The sheet carrier 10 is configured to hold a sheet material 2 and can be placed in the passivation chamber 201 so that the section 21 of the sheet material 2 is passivated.

[0065] In some embodiments, a plurality of sheet carriers 10 may be placed in the passivation chamber 201 at the same time, and the passivation device 1 simultaneously passivates the cross sections 21 of a plurality of sheet materials 2 in the plurality of sheet carriers 10 to improve the productivity of the passivation device 1 .

[0066] Since the passivation device 1 includes the sheet carrier 10 , the passivation device 1 includes all the technical features and technical effects of the sheet carrier 10 , which will not be described in detail herein.

[0067] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the detachable form, a non-detachable connection may be made by means of welding, bonding, etc.

[0068] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0069] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0070] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0071] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0072] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A sheet carrier, characterized in that: Applied to the passivation process of sheet materials, the sheet carrier comprises: A cavity body, having a receiving chamber, the receiving chamber having a first opening, the receiving chamber being configured to receive the sheet material, the sheet material entering and exiting the receiving chamber through the first opening; a blocking member, disposed adjacent to the first opening and detachably connected to the cavity; at least one spacer disposed between the cavity and the blocking member so that a gap is formed between the blocking member and the cavity at the position of the first opening, and a passivation gas used in the passivation process enters the first opening through the gap; Wherein, when the accommodating chamber accommodates the sheet material, the non-cross-section of the sheet material is blocked by the accommodating chamber, and the cross-section of the sheet material is close to the first opening, so that the passivating gas can passivate the cross-section.

2. The sheet carrier according to claim 1, characterized in that: The spacer is connected to the cavity; or The spacer is connected to the blocking member.

3. The sheet carrier according to claim 2, characterized in that: In the case where the spacer is connected to the cavity, the spacer and the cavity are integrally formed; When the spacer is connected to the blocking member, the spacer and the blocking member are formed integrally.

4. The sheet carrier according to any one of claims 1 to 3, characterized in that: The cavity comprises: Base plate; A top plate, arranged opposite to the bottom plate; at least one side panel connecting the bottom panel and the top panel; The upper surface of the bottom plate has a groove extending along a first direction, and the groove extends to the first opening, wherein the first direction is perpendicular to the plane where the first opening is located.

5. The sheet carrier according to claim 4, characterized in that: The cavity is an axisymmetric structure, and there are multiple spacers, which are symmetrically arranged relative to the symmetry plane of the cavity.

6. The sheet carrier according to claim 4, characterized in that: Also includes: The first pad is configured to carry the sheet material. When the first pad is placed in the accommodating chamber, the lower surface of the first pad contacts the bottom plate. When the first pad carries the sheet material, the sheet material can contact the upper surface of the first pad.

7. The sheet carrier according to claim 6, characterized in that: Also includes: The second pad is placed on the upper surface of the uppermost sheet material when the first pad carries at least one sheet of the sheet material.

8. The sheet carrier according to claim 4, characterized in that: The number of the side panels is multiple, and the multiple side panels include: A first side plate, connecting the bottom plate and the top plate; A second side plate, arranged opposite to the first side plate and connecting the bottom plate and the top plate; a third side plate, connecting the first side plate and the second side plate, and connecting the bottom plate and the top plate; Wherein, when the accommodating chamber accommodates the sheet material, the difference between the vertical distance between the first side panel and the second side panel and the length of the sheet material in the second direction is less than 1 mm and greater than 0.1 mm, wherein the second direction is the direction perpendicularly pointing from the first side panel to the second side panel.

9. The sheet carrier according to any one of claims 1 to 3, characterized in that: In a first direction, a size of the gap is less than 1 mm and greater than 0.1 mm, wherein the first direction is perpendicular to a plane where the first opening is located.

10. A passivation device, characterized in that: include: a main body having a passivation chamber; The sheet carrier according to any one of claims 1 to 9 is configured to contain a sheet material and can be placed in the passivation chamber so that a cross section of the sheet material is passivated.

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