Clean heating device

Abstract

The utility model discloses a clean heating device in the field of wafer wet production equipment, which comprises a hollow shell, a quartz tube with two sealed ends is arranged in the shell, and an aluminum silicate thermal insulation cotton layer is arranged on the outer surface of the quartz tube; the quartz tube is internally provided with at least one heating channel with the two ends communicated, a heating tube is inserted into the heating channel, the two ends of the quartz tube are each provided with at least one temperature detecting groove extending inwards, temperature sensing probes tightly attached to the inner wall are inserted into the temperature detecting grooves, one end of the quartz tube is connected with a conducting tube which is communicated and extends to the outer side of the shell, and the other end of the quartz tube is connected with a temperature sensor. And a sealed cock is assembled at the opening of the conducting pipe. The heating channel for heating and the temperature detecting groove are additionally arranged in the quartz tube, the heating tube in the heating channel and the temperature sensing probe in the temperature detecting groove are not in direct contact with the liquid medicine in the quartz tube, but the corresponding heating and temperature measuring operation can be well carried out on the liquid medicine, and the problem that the liquid medicine in the quartz tube is polluted is effectively solved; and heat preservation is enhanced through the aluminum silicate heat preservation cotton layer, and heat dissipation is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer wet process production equipment, in particular to a clean heating device. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, that is, a wafer. Wafers are widely used in many fields, such as communication equipment, computers, automotive electronics and industrial control.

[0003] During the manufacturing process, wafers go through a series of treatments and processes, including etching, deposition, photolithography and other steps, to eventually become semiconductor chips. Among them, wafer etching is a process that removes all or specific parts of the thin film formed on the surface of the wafer to the necessary thickness. This process plays an important role in semiconductor manufacturing and is used to define circuit patterns and component structures.

[0004] However, during the etching process of the wafer, a chemical solution of appropriate temperature is required. When the chemical solution is heated in an ordinary container, the temperature cannot be well controlled and the heat is easily dissipated. At the same time, ordinary container heating basically involves immersing the heating component in the chemical solution for heating. This heating method is prone to contaminating the cleanliness of the chemical solution and affecting the process yield. Utility Model Content

[0005] In order to overcome the deficiencies of the existing technical solutions, the utility model provides a clean heating device, which can effectively solve the technical problems that the current medicine liquid is easily contaminated during heating and the temperature is difficult to control.

[0006] The technical solution adopted by the utility model to solve its technical problems is:

[0007] A clean heating device comprises a hollow shell, a quartz tube with sealed ends is arranged in the shell, and an aluminum silicate heat-insulating cotton layer is arranged on the outer surface of the quartz tube;

[0008] The quartz tube is provided with at least one heating channel with both ends connected, and a heating tube is inserted into the heating channel. Both ends of the quartz tube are provided with at least one temperature detection groove extending inward, and a temperature sensing probe close to the inner wall is inserted into the temperature detection groove. One end of the quartz tube is connected to a conducting pipe that is connected and extends to the outside of the shell, and a sealed plug is installed at the opening of the conducting pipe.

[0009] Furthermore, heating channels protrude from both ends of the heating tube, and the two are coaxially arranged, and both ends of the heating tube are connected to mounting seats fixed to the inner wall of the shell.

[0010] Furthermore, the quartz tube is connected to at least two quartz tube seats which are sleeved on the outer surface of the aluminum silicate thermal insulation wool layer, locked and fixed inside the shell, and the quartz tube seats are distributed along the central axis direction of the quartz tube.

[0011] Furthermore, one end of the quartz tube is connected to a water inlet pipe extending to the outside of the shell, and the other end is connected to a water outlet pipe extending to the outside of the shell. The water inlet pipe is arranged below the water outlet pipe, and both openings are connected to quartz elbows with beads.

[0012] Furthermore, a first heat-insulating ring is provided at the connection between the water inlet pipe and the shell, and a second heat-insulating ring is provided at the connection between the water outlet pipe and the shell.

[0013] Furthermore, both ends of the quartz tube are fitted and connected with a locked and fixed partition, and a plurality of hollow areas are provided on the surface of the partition.

[0014] Furthermore, one end of the shell is connected to a PFA tube that is conductive and extends outward, and a waterproof joint is provided at the connection between the PFA tube and the shell.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] The utility model adds a heating channel and a temperature probe groove for heating in the quartz tube. During heating and temperature measurement, the heating tube in the heating channel and the temperature sensing probe in the temperature probe groove are not in direct contact with the medicine liquid in the quartz tube, but can perform corresponding heating and temperature measurement operations on the medicine liquid, effectively solving the problem of medicine liquid being contaminated in the quartz tube and providing excellent heating effect. At the same time, the aluminum silicate thermal insulation cotton layer is used to enhance thermal insulation to avoid heat dissipation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is the first schematic diagram of the overall structure of the embodiment of the utility model;

[0018] Figure 2 This is a second schematic diagram of the overall structure of an embodiment of the utility model;

[0019] Figure 3 This is a first schematic diagram of the internal structure of an embodiment of the utility model;

[0020] Figure 4 This is a second schematic diagram of the internal structure of an embodiment of the utility model;

[0021] Figure 5 This is a third schematic diagram of the internal structure of an embodiment of the utility model;

[0022] Figure 6 This is a fourth schematic diagram of the internal structure of an embodiment of the utility model;

[0023] Figure 7This is the fifth schematic diagram of the internal structure of the embodiment of the utility model;

[0024] Figure 8 This is the sixth schematic diagram of the internal structure of the embodiment of the utility model;

[0025] Numbers in the figure:

[0026] 1-shell, 2-quartz tube, 3-aluminum silicate insulation cotton layer, 4-heating channel, 5-heating tube, 6-temperature probe, 7-temperature sensor, 8-conducting tube, 9-cock, 10-mounting seat, 11-quartz tube seat, 12-water inlet pipe, 13-water outlet pipe, 14-bead quartz elbow, 15-first insulation ring, 16-second insulation ring, 17-partition, 18-hollow part, 19-PFA tube, 20-waterproof joint. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] like Figure 1-8 As shown, the utility model provides a clean heating device, which is mainly used to adjust and control the appropriate temperature of the liquid medicine required for wafer etching, and to prevent the liquid medicine from being contaminated. Its specific structure mainly includes a hollow shell 1, a quartz tube 2 with sealed ends is provided in the shell 1, and the liquid medicine is mainly stored inside the quartz tube 2, and is heated by a heating tube 5 close to the outside of the quartz tube 2, and the temperature of the liquid medicine is monitored in real time by a temperature sensing probe 7 in contact with the outside of the quartz tube 2, until the temperature sensing probe 7 detects that the liquid medicine is at a temperature suitable for etching the wafer, the heating tube 5 stops heating and is in a state of heat preservation.

[0029] During heating, three heating channels 4 with two ends connected are opened inside the quartz tube 2, and a heating tube 5 is inserted into each heating channel 4. The heating tube 5 transfers heat to the medicinal solution in the heating channel 4 by means of thermal radiation. The heating tube 5 is coaxially arranged with the heating channel 4, and both ends of the heating tube 5 protrude from the opening position of the heating channel 4. At this time, the heating tube 5 is suspended in the heating channel 4 without contacting the inner wall, and it is also ensured that the length of the heating tube 5 is sufficient to heat the inner side of the heating channel 4. In order to ensure that the medicinal solution is highly pure when heated in the quartz tube 2, the quartz tube 2 is made of GE214 transparent molten quartz with high cleanliness. The quartz tube 2 made of this quartz material will not release metal ions during use, thereby ensuring the safety of the heating process.

[0030] The high temperature resistance and corrosion resistance of the GE214 quartz tube 2 enable it to maintain stable operation in harsh environments and extend its overall service life. The quartz material has excellent thermal stability, can achieve rapid heating, and has low thermal inertia, which improves thermal efficiency and significantly reduces energy consumption. In terms of design, manufacturing and installation, the quartz tube 2 exhibits the characteristics of simplicity, economy and safety. In summary, the GE214 quartz tube 2 can be widely used in multiple industries due to its high cleanliness, high temperature resistance, corrosion resistance, high thermal efficiency, and convenience in design and installation, especially in the field of conductors with strict requirements on purity and safety.

[0031] The heating tube 5 adopts an infrared heating tube with a high heating rate to ensure a fast and uniform heating effect. These heating tubes 5 not only show excellent thermal efficiency, but also excel in durability, thereby reducing maintenance costs and extending service life. In order to better fix the heating tube 5, both ends of the heating tube 5 are connected to a mounting seat 10 fixed to the inner wall of the shell 1. The mounting seat 10 can adjust itself to support and fix the heating tube 5 in a specified position.

[0032] When measuring temperature, both ends of the quartz tube 2 are provided with a temperature probe groove 6 extending inward, and a temperature sensing probe 7 close to the inner wall is inserted into the temperature probe groove 6. Since the quartz tube 2 has good thermal conductivity, the temperature sensing probe 7 is placed in the temperature probe groove 6 and close to the inner wall, which can protect the heat of the medicine liquid and quickly conduct it to the temperature sensing probe, thereby ensuring the consistency of the temperature of the medicine liquid, the quartz tube 2 and the temperature sensing probe 7.

[0033] This temperature measurement is a key link in the heating process. Therefore, this device adopts a high-precision temperature sensing probe, which can monitor the temperature changes of the liquid medicine at the inlet and outlet in real time. In this way, the temperature control system can receive accurate temperature feedback information, thereby ensuring that the entire heated liquid medicine can be stably maintained within a preset range. In addition, during heating, the quartz tube 2 can be connected to a circulation pump and used in conjunction with the heating tube 5. The circulation pump promotes the circulation of the liquid medicine in the quartz tube 2, helps to avoid local temperature differences, and further improves the uniformity of the liquid medicine temperature in the quartz tube 2, which is crucial for semiconductor production processes that require precise temperature control.

[0034] Whether heating or measuring temperature, the heating tube 5 and the temperature sensing probe 7 are not in direct contact with the liquid medicine, which effectively prevents the liquid medicine from being contaminated, which is crucial for application scenarios with extremely high cleanliness requirements.

[0035] In order to further improve the efficiency of heat energy utilization and reduce heat loss, the outer surface of the quartz tube 2 is provided with an aluminum silicate insulation cotton layer 3, which is a thermal insulation material covering the outer surface of the quartz tube 2. When used in conjunction with the sturdy plastic shell 1, the heating tube 5 is fully protected from physical damage. This double-layer protection strategy not only optimizes the thermal insulation performance of the heating process, but also significantly improves the overall safety and reliability of use.

[0036] One end of the quartz tube 2 is connected to a conducting tube 8 that is connected and extends to the outside of the shell 1. A sealed plug 9 is installed at the opening of the conducting tube 8. The plug 9 is removable at the opening of the conducting tube 8. The user can adjust the internal air pressure according to the state inside the quartz tube 2, and can flexibly adjust the flow of the medicine in the quartz tube 2.

[0037] It should be noted that when the quartz tube 2 is fixed in the shell 1, the quartz tube 2 is connected to two quartz tube holders 11 which are sleeved on the outer surface of the aluminum silicate thermal insulation cotton layer 3 and locked and fixed inside the shell 1, and the quartz tube holders 11 are distributed along the central axis of the quartz tube 2. The quartz tube holder 11 is composed of a detachable support part and a locking part. The support part supports the lower part of the quartz tube 2 and is fixed inside the shell 1, while the locking part is arranged on the upper surface of the quartz tube 2 and connected to the support part at both ends. During assembly, the user first places the quartz tube 2 on the surface of the support part of the quartz tube holder 11, and then locks and fixes it on the upper part of the quartz tube 2 through the locking part.

[0038] After the quartz tube 2 is fixed in the shell 1, it is necessary to inject liquid medicine into the quartz tube 2 for heating treatment. Therefore, a water inlet pipe 12 extending to the outside of the shell 1 is connected to one end of the quartz tube 2, and a water outlet pipe 13 extending to the outside of the shell 1 is connected to the other end. The liquid medicine flows in from one end of the water inlet pipe 12, and after heating treatment, it flows out from one end of the water outlet pipe 13 for wafer etching processing. In order to allow the flowing liquid medicine to be heated more fully, the water inlet pipe 12 is arranged below the water outlet pipe 13, so that the liquid medicine flows from bottom to top. At the same time, a beaded quartz elbow 14 is installed at the openings of both the water inlet pipe 12 and the water outlet pipe 13. Moreover, a first insulation ring 15 is added at the position where the water inlet pipe 12 is connected to the shell 1, and a second insulation ring 16 is added at the position where the water outlet pipe 13 is connected to the shell 1. By adding the first insulation ring 15 and the second insulation ring 16, a good insulation effect is achieved for the shell 1 to prevent the shell 1 from being burned by heat.

[0039] In addition, both ends of the quartz tube 2 are fitted with a locked and fixed partition 17, which can reduce the heat on the surface of the quartz tube 2 from both ends, and play a certain insulation effect on the liquid medicine inside the quartz tube 2. After the partition 17 is in close contact, locking nails extending outward through the partition 17 are added at both ends of the quartz tube 2, and nuts are used at the ends of the locking nails to make the partition 17 close and fixed. At the same time, the partitions 17 at both ends are hollowed out. Specifically, the hollowed out 18 on the partition 17 near the end of the water inlet pipe 12 is mainly used for inserting the water inlet pipe 12, the heating pipe 5, the temperature sensor 7 and the conducting pipe 8. However, the hollowed out 18 on the partition 17 near the end of the water outlet pipe 13 is mainly used for inserting the water outlet pipe 13, the heating pipe 5 and the temperature sensor 7.

[0040] A PFA tube 19 is connected to one end of the shell 1 and extends outward. A waterproof joint 20 is provided at the connection between the PFA tube 19 and the shell 1. When the quartz tube 2 leaks, the liquid medicine accumulated inside can be discharged in time through the PFA tube 19.

[0041] Compared with the traditional technology, the present technical scheme adds a heating channel 4 and a temperature probe 6 for heating in the quartz tube 2. During heating and temperature measurement, the heating tube 5 in the heating channel 4 and the temperature sensing probe 7 in the temperature probe 6 are not in direct contact with the liquid medicine in the quartz tube 2, but can perform corresponding heating and temperature measurement operations on the liquid medicine well, effectively solving the problem of liquid medicine contamination in the quartz tube 2 and providing excellent heating effect. At the same time, the aluminum silicate thermal insulation cotton layer 3 is used to enhance thermal insulation and avoid heat dissipation.

[0042] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention, and any figure mark in the claims should not be regarded as limiting the claims involved.

Claims

1. A clean heating device, comprising a hollow shell, characterized in that: A quartz tube with sealed ends is arranged in the shell, and an aluminum silicate heat-insulating cotton layer is arranged on the outer surface of the quartz tube; The quartz tube is provided with at least one heating channel with both ends connected, and a heating tube is inserted into the heating channel. Both ends of the quartz tube are provided with at least one temperature detection groove extending inward, and a temperature sensing probe close to the inner wall is inserted into the temperature detection groove. One end of the quartz tube is connected to a conducting pipe that is connected and extends to the outside of the shell, and a sealed plug is installed at the opening of the conducting pipe.

2. A clean heating device according to claim 1, characterized in that: Heating channels protrude from both ends of the heating tube, and the two are coaxially arranged. Both ends of the heating tube are connected to mounting seats fixed on the inner wall of the shell.

3. A clean heating device according to claim 1, characterized in that: The quartz tube is connected with at least two quartz tube seats which are sleeved on the outer surface of the aluminum silicate thermal insulation cotton layer, locked and fixed inside the shell, and the quartz tube seats are distributed along the central axis direction of the quartz tube.

4. A clean heating device according to claim 1, characterized in that: One end of the quartz tube is connected to a water inlet pipe extending to the outside of the shell, and the other end is connected to a water outlet pipe extending to the outside of the shell. The water inlet pipe is arranged below the water outlet pipe, and both openings are connected to a beaded quartz elbow.

5. A clean heating device according to claim 4, characterized in that: A first heat-insulating ring is provided at the connection between the water inlet pipe and the shell, and a second heat-insulating ring is provided at the connection between the water outlet pipe and the shell.

6. A clean heating device according to claim 1, 3 or 4, characterized in that: Both ends of the quartz tube are fitted and connected with a locked and fixed partition, and a plurality of hollow areas are arranged on the surface of the partition.

7. A clean heating device according to claim 1, characterized in that: One end of the shell is connected to a PFA tube which is conducted and extends outwards, and a waterproof joint is provided at the connection between the PFA tube and the shell.

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