An environmentally friendly silicon material cleaning device for single crystal silicon production

Abstract

The present application discloses an environmentally friendly silicon material cleaning device for the production of monocrystalline silicon, including a carrier substrate and a cover shell portion. The carrier substrate has three placement slots, in which a first cleaning box, a static portion, and a second cleaning box are placed in sequence. The first and second cleaning boxes both include a carrier frame, a box body, a liquid inlet pipe, a liquid discharge pipe, and a liquid discharge pipe valve. The static portion includes a surrounding plate, an upper mesh plate, a lower mesh plate, and a liquid guide hopper. A liquid receiving hopper is installed below the static portion. The silicon material cleaning device of the present application realizes continuous cleaning of silicon materials through the cooperation of two cleaning boxes and the static portion, thereby improving production efficiency and achieving better cleaning effects. The cleaning liquid can flow back to the first cleaning box for recycling, thereby reducing waste of resources. Negative pressure suction can be used to absorb harmful gases volatilized in the cleaning liquid to ensure the environmental protection and safety of the working environment.

Description

Technical Field

[0001] The utility model relates to the field of silicon material cleaning devices, and more specifically, to an environmentally friendly silicon material cleaning device used for single crystal silicon production. Background Art

[0002] During the production of single crystal silicon, various stains and impurities may adhere to the surface of the silicon material, such as dust, oil, metal ions, etc. These stains and impurities will not only affect the performance of the silicon material, but also affect the quality of subsequent processing and use. Therefore, it is necessary to use a silicon material cleaning device to clean it to ensure the cleanliness and purity of the silicon material.

[0003] Existing silicon material cleaning devices often only have one cleaning box, and the cleaning method is single, which makes it difficult to effectively remove stubborn stains and impurities on the surface of the silicon material, especially for some tiny particles and oil stains, the cleaning effect is not good. This not only affects the cleaning quality of the silicon material, but may also have an adverse effect on the subsequent production process. In addition, during the cleaning process, when the silicon material basket is taken out, the cleaning liquid attached to the basket may drip, causing a large amount of cleaning liquid to be lost, which not only causes a waste of resources, but also may pollute the environment. In addition, during cleaning, the acid in the cleaning liquid will volatilize to produce harmful gases, which not only pollutes the environment, but also threatens the health of the operator. Utility Model Content

[0004] The utility model aims to overcome the defects of the prior art and provide an environmentally friendly silicon material cleaning device for single crystal silicon production.

[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: an environmentally friendly silicon material cleaning device for single crystal silicon production, comprising a carrier substrate and a cover shell part connected to the carrier substrate, the carrier substrate having three placement grooves, the placement grooves having step parts, the three placement grooves sequentially placing a first cleaning box, a static part and a second cleaning box, the first and second cleaning boxes both comprising a carrier frame placed at the step part, a box body connected to the carrier frame, a liquid inlet pipe connected to the box body, a liquid discharge pipe connected to the box body and a liquid discharge pipe valve located at the liquid discharge pipe, the static part comprising a surrounding plate, an upper mesh plate connected to the surrounding plate, a lower mesh plate connected to the surrounding plate and a liquid guide hopper connected to the surrounding plate, a liquid receiving hopper is installed below the static part, the liquid receiving hopper is connected to a connecting hard pipe and an end pipe connected to the connecting hard pipe through a connecting hose, a connecting hard pipe valve and a liquid pump are installed at the connecting hard pipe, the carrier frame of the first cleaning box has a first slot matching the end pipe, the carrier substrate has a second slot matching the connecting hose and a clamping ring matching the end pipe.

[0006] Furthermore, the bottom of the carrier substrate has a plurality of support parts, and the plurality of support parts are distributed at equal intervals, wherein two support parts are connected to a connecting plate, and the connecting plate is fixedly connected to the liquid receiving hopper.

[0007] Thus, the support portion stably supports the entire device and facilitates installation of the liquid receiving hopper.

[0008] Furthermore, two first handles are connected to the supporting frames of the first and second cleaning boxes.

[0009] Therefore, the cleaning box can be easily lifted by the first handle.

[0010] Furthermore, two second handle portions are connected to the surrounding plate of the stationary portion.

[0011] Therefore, it is convenient to lift the stationary part through the second handle part.

[0012] Furthermore, the supporting substrate has two receiving grooves capable of receiving the liquid inlet tubes.

[0013] Thereby facilitating the installation of the liquid inlet pipe.

[0014] Furthermore, the housing portion has two air suction pipes, and the two air suction pipes are respectively located above the first and second cleaning boxes.

[0015] Therefore, the volatile gas can be sucked away by negative pressure suction, which is more environmentally friendly.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] 1. The silicon material cleaning device of the present application realizes continuous cleaning of silicon materials through the cooperation of two cleaning boxes and a stationary part, thereby improving production efficiency and achieving better cleaning effect.

[0018] 2. In the silicon material cleaning device of the present application, the cleaning liquid can flow back into the first cleaning box for recycling, thereby reducing the waste of resources.

[0019] 3. The silicon material cleaning device of the present application utilizes negative pressure suction to absorb harmful gases volatile in the cleaning liquid, thereby ensuring an environmentally friendly and safe working environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A first-person perspective diagram of component separation;

[0021] Figure 2 This is an enlarged view of area A;

[0022] Figure 3 This is an enlarged view of area B;

[0023] Figure 4A second perspective diagram for separating components;

[0024] Figure 5 This is a schematic diagram of the cleaning liquid returning to the first cleaning tank.

[0025] Explanation of the reference numerals: 1. Carrying substrate; 1.1 placement groove; 1.2 step portion; 1.3 second slot; 1.4 clamping ring portion; 1.5 accommodating groove; 2 cover portion; 2.1 suction pipe; 3 first cleaning box; 3.1 carrying frame; 3.1.1 first slot; 3.2 box body; 3.3 liquid inlet pipe; 3.4 liquid discharge pipe; 3.5 first handle portion; 4 stationary portion; 4.1 surrounding plate; 4.2 upper mesh plate; 4.3 lower mesh plate; 4.4 liquid guiding hopper; 4.5 second handle portion; 5 second cleaning box; 6 liquid receiving hopper; 6.1 connecting hard pipe; 6.2 connecting hose; 6.3 end pipe; 6.4 connecting hard pipe valve; 6.5 liquid pump; 7 supporting portion; 7.1 connecting plate. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] The utility model provides Figure 1-5The environmentally friendly silicon material cleaning device for single crystal silicon production shown in the figure comprises a carrier substrate 1 and a cover shell portion 2 connected to the carrier substrate 1, the carrier substrate 1 has three placement grooves 1.1, the placement grooves 1.1 have step portions 1.2, and the three placement grooves 1.1 are sequentially placed with a first cleaning box 3, a static portion 4 and a second cleaning box 5, the first and second cleaning boxes each comprise a carrier frame 3.1 placed at the step portion 1.2, a box body 3.2 connected to the carrier frame 3.1, a liquid inlet pipe 3.3 connected to the box body 3.2, a liquid discharge pipe 3.4 connected to the box body 3.2 and a liquid discharge pipe valve located at the liquid discharge pipe 3.4, the static portion 4 comprises a surrounding plate 4.1, a surrounding plate 4.2 connected to the surrounding plate The upper mesh plate 4.2 connected to the surrounding plate 4.1, the lower mesh plate 4.3 connected to the surrounding plate 4.1 and the liquid guiding hopper 4.4 connected to the surrounding plate 4.1, a liquid receiving hopper 6 is installed below the static portion 4, the liquid receiving hopper 6 is connected to a connecting hard pipe 6.1 and an end pipe 6.3 connected to the connecting hard pipe 6.1 through a connecting hose 6.2, a connecting hard pipe valve 6.4 and a liquid pump 6.5 are installed at the connecting hard pipe 6.1, the supporting frame 3.1 of the first cleaning box 3 has a first slot 3.1.1 cooperating with the end pipe 6.3, the supporting base plate 1 has a second slot 1.3 cooperating with the connecting hose 6.2 and a clamping ring portion 1.4 cooperating with the end pipe 6.3.

[0028] The bottom of the supporting substrate 1 has a plurality of supporting parts 7, and the plurality of supporting parts 7 are evenly spaced, wherein two supporting parts 7 are connected to connecting plates 7.1, and the connecting plates 7.1 are fixedly connected to the liquid receiving hopper 6; the supporting frames 3.1 of the first and second cleaning boxes are connected to two first handle parts 3.5; the surrounding plate 4.1 of the stationary part 4 is connected to two second handle parts 4.5; the supporting substrate 1 has two accommodating grooves 1.5 that can accommodate liquid inlet pipes 3.3; the cover shell part 2 has two suction pipes 2.1, and the two suction pipes 2.1 are respectively located above the first and second cleaning boxes.

[0029] Working principle: The silicon material cleaning device of the present application realizes continuous cleaning of silicon materials through the cooperation of two cleaning boxes and a stationary part, thereby improving production efficiency and achieving better cleaning effect. In addition, the cleaning liquid can flow back to the first cleaning box for recycling, thereby reducing the waste of resources.

[0030] During specific cleaning, first place the silicon material flower basket in the first cleaning box. After setting the time, lift the silicon material flower basket and place it in the static part. The liquid attached to the flower basket will fall into the liquid receiving hopper. When there is more liquid in the liquid receiving hopper, it can be refluxed to the first cleaning box through the liquid pump, so that the cleaning liquid can be recycled and the waste of resources can be reduced. After the silicon material flower basket is placed in the static part for a certain period of time, it is placed in the second cleaning box. After being placed in the second cleaning box for a certain period of time, the cleaning is completed, and the flower basket is lifted up to enter the next process, so that the cleaning effect is better. When not in use, in addition, during the cleaning process, since acid is used in the cleaning liquid, the volatile gas is sucked away by negative pressure suction, which can be more environmentally friendly.

[0031] Although the present invention has been illustrated and described with respect to preferred embodiments, it should be understood by those skilled in the art that various changes and modifications may be made to the present invention without departing from the scope of the present invention as defined by the claims.

Claims

1. An environmentally friendly silicon material cleaning device for single crystal silicon production, characterized in that: The invention comprises a carrier substrate and a cover shell part connected to the carrier substrate, the carrier substrate has three placement grooves, each of which has a step portion, and a first cleaning box, a static part and a second cleaning box are placed in the three placement grooves in sequence, the first and second cleaning boxes both comprise a carrier frame placed at the step portion, a box body connected to the carrier frame, a liquid inlet pipe connected to the box body, a liquid discharge pipe connected to the box body and a liquid discharge pipe valve located at the liquid discharge pipe, the static part comprises a surrounding plate, an upper mesh plate connected to the surrounding plate, a lower mesh plate connected to the surrounding plate and a liquid guiding hopper connected to the surrounding plate, a liquid receiving hopper is installed below the static part, the liquid receiving hopper is connected to a connecting hard pipe and an end pipe connected to the connecting hard pipe through a connecting hose, a connecting hard pipe valve and a liquid pump are installed at the connecting hard pipe, the carrier frame of the first cleaning box comprises a first slot matching with the end pipe, the carrier substrate comprises a second slot matching with the connecting hose and a clamping ring matching with the end pipe.

2. The environmentally friendly silicon material cleaning device for single crystal silicon production according to claim 1, characterized in that: The bottom of the carrier substrate has a plurality of support parts, which are distributed at equal intervals, wherein two support parts are connected with a connecting plate, and the connecting plate is fixedly connected to the liquid receiving hopper.

3. The environmentally friendly silicon material cleaning device for single crystal silicon production according to claim 1, characterized in that: The supporting frames of the first and second cleaning boxes are both connected with two first handles.

4. The environmentally friendly silicon material cleaning device for single crystal silicon production according to claim 1, characterized in that: Two second handle parts are connected to the surrounding plate of the stationary part.

5. The environmentally friendly silicon material cleaning device for single crystal silicon production according to claim 1, characterized in that: The supporting substrate has two receiving grooves capable of receiving liquid inlet tubes.

6. The environmentally friendly silicon material cleaning device for single crystal silicon production according to claim 1, characterized in that: The housing portion has two air suction pipes, and the two air suction pipes are respectively located above the first and second cleaning boxes.

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