PECVD automatic carrying system

Abstract

The utility model discloses a PECVD automatic carrying system, which comprises a tray carrying unit, a gantry piece distribution unit and a piece turning unit, the tray carrying unit is composed of a left mechanism, a middle mechanism and a right mechanism and conveys trays from the middle to the two sides, the gantry piece distribution unit is composed of a silicon wafer conveying mechanism and conveys silicon wafers clockwise from left to right, and the silicon wafer turning unit is composed of a silicon wafer conveying mechanism and conveys the silicon wafers clockwise from left to right. The sheet turning unit and the sheet sending unit are both connected with the gantry sheet distributing unit, the jacking height of the sheet sending unit is the same as that of the gantry sheet distributing unit, the flower basket transferring unit is connected with the flower basket conveying unit, and flower baskets conveyed by the flower basket conveying unit are received by a conveying rail in the flower basket transferring unit. According to the automatic carrying device, the multiple automatic carrying units are arranged, manpower resources are saved, automatic conveying among the multiple units and efficient cooperation of intelligent taking of the mechanical arm are achieved, carrying plates and trays in various states can be placed on the same goods shelf, software can recognize the states and conduct intelligent grabbing, and efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD automatic handling, in particular to a PECVD automatic handling system. Background Art

[0002] Thin film preparation technology has a very wide range of applications in VLSI technology. According to its film forming method, it can be divided into two categories: physical vapor deposition (PVD) and chemical vapor deposition (CVD). Plasma enhanced chemical vapor deposition (PECVD) is a type of chemical vapor deposition. Its most prominent advantage is its low deposition temperature. The thin film deposited by PECVD has excellent electrical properties, good substrate adhesion and excellent step coverage. Because of these advantages, it has a wide range of applications in VLSI, optoelectronic devices, MEMS and other fields. The automated handling system is an important equipment in the manufacturing process of solar panels, and is also an important technical link in the plasma enhanced chemical vapor deposition (PECVD) process.

[0003] The existing thin film preparation process is still in the semi-automatic stage and has low efficiency. For example, the carbon plate of the automatic loading and unloading system of the most popular plate-type PECVD equipment disclosed with publication number CN202415684U can complete the vertical transportation of the silicon wafer conveying carbon plate between the equipment discharge port or feed port and the bottom horizontal conveyor line, ensuring the fully automatic operation of silicon wafer loading and unloading. However, the entire conveying process cannot guarantee whether the loading is complete or whether it has entered the coating state, and whether the coating state cannot be accurately monitored, which is prone to errors and defective probability.

[0004] Therefore, it is necessary to invent a PECVD automated handling system to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a PECVD automatic handling system to solve the problem of low efficiency of conveying and coating in the PECVD automatic handling process in the technology.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a PECVD automated handling system, comprising a pallet handling unit, a gantry cloth unit and a flipping unit, wherein the pallet handling unit is composed of three mechanisms, namely, a left mechanism, a middle mechanism and a right mechanism, and transports the pallet from the middle to both sides, the gantry cloth unit is composed of a silicon wafer conveying mechanism, and transports the silicon wafer clockwise from left to right, the flipping unit and the wafer issuing unit are both connected with the gantry cloth unit, the wafer issuing unit and the gantry cloth unit have the same lifting height, the flower basket transfer unit is connected with the flower basket conveying unit, and the flower basket conveyed by the flower basket conveying unit is received by the conveying track in the flower basket transfer unit.

[0007] Preferably, an independent lifting cylinder is provided in the pallet transport unit, and a multi-layer pallet rack is provided in the pallet transport unit, and the bottom height of the pallet rack is flush with the bottom height of the conveying mechanisms on both sides.

[0008] Preferably, the pallets transported on the pallet rack are transported toward the same height as the gantry cloth unit, the gantry cloth unit transports silicon wafers bidirectionally toward the wafer flipping unit, and the gantry cloth unit transports silicon wafers unidirectionally between the gantry cloth unit and the wafer launching unit.

[0009] Preferably, the silicon wafers are transported bidirectionally and cyclically between the basket transfer unit and the basket conveying unit, and two sets of independent lifting mechanisms are arranged in the basket transfer unit, and the lifting mechanisms are composed of a plurality of lifting cylinders and rollers.

[0010] Preferably, the wafer sending unit conveys silicon wafers toward the gantry wafer distributing unit, and a vacuum jet conveying track is provided in the wafer sending unit. When the vacuum jet conveying track is filled with silicon wafers, the wafers are conveyed toward the basket transfer unit.

[0011] Preferably, a motor and a conveyor chain are provided in the flower basket conveying unit, and the motor drives the conveyor chain to convey the flower basket toward the flower basket transferring unit, and the flower basket transferring unit conveys the unloaded empty flower basket to the flower basket conveying unit again.

[0012] In the above technical solution, the technical effects and advantages provided by the utility model are:

[0013] 1. The utility model saves human resources by setting up multiple automated handling units. The automated transportation between the multiple units and the efficient coordination with the intelligent taking of the robot arm enable carriers and pallets in various states to be placed on the same shelf, greatly improving efficiency.

[0014] 2. The utility model transports trays and silicon wafers through the coordination between multiple conveying units, ensuring efficient conveying of silicon wafers, and the conveying and rotation of silicon wafers after they are coated. The entire process of conveying, rotating and flipping wafers is intelligent, and software is used to identify the status of silicon wafers and whether they are coated, and intelligently grasp them. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is an overall top view of the utility model;

[0016] Figure 2 This is a front view of the pallet handling unit of the utility model;

[0017] Figure 3 It is a side view of the flower basket transfer unit of the present invention.

[0018] Description of reference numerals:

[0019] 1. Pallet handling unit; 101. Pallet rack; 2. Gantry cloth unit; 3. Flip unit; 4. Sheet distribution unit; 5. Flower basket transfer unit; 501. Lifting mechanism; 6. Flower basket conveying unit. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] The utility model provides Figure 1-3 The PECVD automated handling system shown comprises a pallet handling unit 1, a gantry sheet unit 2 and a flipping unit 3. The pallet handling unit 1 is composed of three mechanisms, namely, left, middle and right, and transports pallets from the middle to both sides. The gantry sheet unit 2 is composed of a silicon wafer conveying mechanism, and transports silicon wafers clockwise from left to right. The flipping unit 3 and the wafer issuing unit 4 are both connected to the gantry sheet unit 2. The wafer issuing unit 4 and the gantry sheet unit 2 have the same lifting height. The flower basket transfer unit 5 is connected to the flower basket conveying unit 6. The flower basket conveyed by the flower basket conveying unit 6 is received by the conveying track in the flower basket transfer unit 5.

[0022] The entire mechanism for transporting trays and silicon wafers does not require human intervention, the automated processing efficiency is high, and each unit can be accurately connected to avoid human errors.

[0023] An independent lifting cylinder is provided in the pallet handling unit 1, and a multi-layer pallet rack 101 is provided in the pallet handling unit 1. The bottom height of the pallet rack 101 is flush with the bottom height of the conveying mechanism on both sides. The pallets conveyed on the pallet rack 101 are transported to the same height as the gantry cloth unit 2. The gantry cloth unit 2 conveys silicon wafers in both directions to the flipping unit 3, and silicon wafers are conveyed in one direction between the gantry cloth unit 2 and the wafer issuing unit 4.

[0024] The pallet in the pallet transport unit 1 is transported toward the gantry cloth unit 2, and then transported back by the gantry cloth unit 2 to form a circulating transport channel.

[0025] Silicon wafers are transported bidirectionally between the flower basket transfer unit 5 and the flower basket conveying unit 6. Two sets of independent lifting mechanisms 501 are arranged in the flower basket transfer unit 5. The lifting mechanisms 501 are composed of multiple lifting cylinders and rollers. The wafer sending unit 4 conveys silicon wafers toward the gantry sheet unit 2. A vacuum jet conveying track is arranged in the wafer sending unit 4. When the vacuum jet conveying track is filled with silicon wafers, the wafers are conveyed toward the flower basket transfer unit 5. A motor and a conveying chain are arranged in the flower basket conveying unit 6. The motor drives the conveying chain to convey the flower basket toward the flower basket transfer unit 5. The flower basket transfer unit 5 conveys the unloaded empty flower basket to the flower basket conveying unit 6 again.

[0026] By utilizing the connection between the flower basket transfer unit 5 and the flower basket conveying unit 6 and the conveying of the vacuum jet track, the fully loaded flower basket is conveyed and transferred, and the empty flower basket is conveyed back to the hairpin unit 4, thereby avoiding a long waiting time.

[0027] Working principle of this utility model:

[0028] Refer to the instruction manual Figure 1-2 When using the utility model, first, after the flower basket enters the flower basket conveying unit 6, it is delivered to the wafer sending unit 4 through the flower basket transfer unit 5. The wafer sending unit 4 sends the silicon wafer to the vacuum jet track, and the gantry wafer spreading unit 2 starts to spread the wafer. After a tray is filled, the tray is sent to the PECVD equipment for coating by the tray handling unit 1, and the coated tray is taken out;

[0029] Refer to the instruction manual Figure 2-3 When using the utility model, the coating sequence of silicon wafers in PECVD is: A side i layer → flip → B side i layer → B side N layer → flip → A side P layer; the tray rack 101 can classify the trays into different priorities according to the coating time of the PECVD chamber, and the robot arm will preferentially grab the trays with high priority for coating, which can effectively avoid waiting time and greatly improve the coating efficiency; the specific steps are as follows: first, the robot arm takes out the empty tray from the tray rack 101 and places it on the gantry for film distribution;

[0030] Second, the robot arm takes out the tray after PECVD coating and places it on the tray rack 101;

[0031] Third, take out the tray with i layers of A surface plated from the tray rack 101 and place it on the gantry for flipping;

[0032] Fourth, the trays after coating the B side i layer and the B side N layer in the PECVD chamber are taken out and placed on the tray rack 101; Fifth, the trays to be coated with the B side i layer and the B side N layer are taken out from the tray rack 101 and sent into the PECVD chamber for coating;

[0033] Sixth, take out the tray to be plated with the A-side P layer from the tray rack 101, and place it in the gantry cloth unit 2 for flipping; Seventh, place the tray that has been plated with the A-side P layer in the PECVD chamber in the gantry cloth unit 2 for collecting the plates and flowing to the next process.

[0034] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A PECVD automated handling system, comprising a tray handling unit (1), a gantry sheet dispensing unit (2) and a sheet turning unit (3), as well as a flower basket transfer unit (5) and a flower basket conveying unit (6), characterized in that: The pallet transport unit (1) is composed of three mechanisms, namely, left, middle and right, and transports the pallet from the middle to both sides. The gantry sheet unit (2) is composed of a silicon wafer transport mechanism and transports the silicon wafer clockwise from left to right. The sheet flipping unit (3) and the sheet sending unit (4) are both connected to the gantry sheet unit (2). The sheet sending unit (4) and the gantry sheet unit (2) have the same lifting height. The flower basket transfer unit (5) is connected to the flower basket transport unit (6). The flower basket transported by the flower basket transport unit (6) is received by the transport track in the flower basket transfer unit (5).

2. The PECVD automated handling system according to claim 1, characterized in that: An independent lifting cylinder is arranged in the pallet transport unit (1), and a multi-layer pallet rack (101) is arranged in the pallet transport unit (1), wherein the bottom height of the pallet rack (101) is flush with the bottom height of the conveying mechanisms on both sides.

3. The PECVD automated handling system according to claim 2, characterized in that: The trays transported on the tray rack (101) are transported toward the same height as the gantry sheet unit (2), the gantry sheet unit (2) transports silicon wafers bidirectionally toward the wafer flipping unit (3), and the gantry sheet unit (2) transports silicon wafers unidirectionally to the wafer flipping unit (4).

4. The PECVD automated handling system according to claim 3, characterized in that: The wafer sending unit (4) transports silicon wafers toward the gantry wafer distributing unit (2). A vacuum jet transport track is provided in the wafer sending unit (4). When the vacuum jet transport track is filled with silicon wafers, the wafers are transported toward the basket transfer unit (5).

5. The PECVD automated handling system according to claim 1, characterized in that: Silicon wafers are transported in a bidirectional cycle between the basket transfer unit (5) and the basket conveying unit (6). Two sets of independent lifting mechanisms (501) are arranged in the basket transfer unit (5), and the lifting mechanisms (501) are composed of a plurality of lifting cylinders and rollers.

6. The PECVD automated handling system according to claim 5, characterized in that: The flower basket conveying unit (6) is provided with a motor and a conveying chain, and the motor drives the conveying chain to convey the flower basket toward the flower basket transfer unit (5), and the flower basket transfer unit (5) conveys the unloaded empty flower basket to the flower basket conveying unit (6) again.

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