Furnace components and processing equipment
Through the assembly method of independently formed insulation and heating parts, the cumbersome processing and high cost problems caused by the integrated molding of CVD tube furnace and gas structures are solved, and a faster, safer and more economical assembly process is achieved.
Patent Information
- Application Number
- CN202421503783.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-27
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-06-27
AI Technical Summary
The furnace gall structure of the existing CVD tube furnace adopts an integrated molding preparation method, resulting in cumbersome processing, high difficulty and high cost.
A furnace gallbladder assembly is designed, including an independently formed insulation body and heating element. By leaving a mounting cavity and installation port in the insulation body, the heating resistance wire is directly inserted, avoiding the difficulty of misoperation and assembly.
The preparation cycle of furnace gallbladder assembly is shortened, the preparation difficulty and cost are reduced, and the assembly accuracy and safety is improved.
Smart Images
Figure CN222718654U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a furnace component and processing equipment. Background Art
[0002] Semiconductor or photovoltaic products are widely used in electronics, new energy and other industries. In the process of preparing semiconductor or photovoltaic products, the semiconductor or photovoltaic materials need to be processed by chemical processing equipment, such as Chemical Vapor Deposition (CVD) equipment, which is one of the chemical processing equipment and can also be called a CVD tube furnace.
[0003] At present, the furnace core structure of the CVD tube furnace is prepared and formed in one piece with the furnace core and the electric heating wire. In the one-piece forming process, the preparation process is cumbersome, and different process steps need to match different processing equipment. The whole process requires more processing equipment and processing personnel, a longer cycle, and higher processing difficulty and processing cost. Utility Model Content
[0004] In view of this, the embodiments of the present disclosure provide a furnace core assembly and processing equipment to solve the problem in the related art that the processing is complicated and difficult due to the integrated molding of the heating wire and the furnace core.
[0005] In a first aspect, an embodiment of the present disclosure provides a furnace chamber assembly, comprising: a furnace chamber, which is configured as a cylindrical structure extending along a first direction; a heat-insulating body, which is arranged on the inner wall of the furnace chamber, the heat-insulating body having a receiving space extending along the first direction, the heat-insulating body being provided with a plurality of installation cavities and a plurality of installation openings, the plurality of installation openings being connected to the plurality of installation cavities in a one-to-one correspondence, each installation cavity being extended along the first direction, and the plurality of installation cavities being arranged at intervals in a circumferential direction around the furnace chamber; a heat-generating element, the heat-generating element being at least partially inserted into the installation cavity, the cross-sectional area of the portion of the heat-generating element located in the installation cavity being less than or equal to the cross-sectional area of the installation opening, and less than or equal to the cross-sectional area of the installation cavity.
[0006] In some embodiments, the furnace core assembly also includes at least one end cover; along the first direction, at least one end of the insulation body is provided with a recess connected to a plurality of mounting cavities, the recess is configured to accommodate at least part of the end cover, and a mounting opening is formed at a position where the bottom surface of the recess is connected to the mounting cavity, and the end cover at least covers the mounting opening.
[0007] In some embodiments, the heating element includes at least one group of heating wire groups, and the heating wire group includes: multiple main heating segments, which are inserted into the installation cavity one by one through the installation opening, and the cross-sectional area of the main heating segment is less than or equal to the cross-sectional area of the installation opening, and less than or equal to the cross-sectional area of the installation cavity; multiple connecting segments, which connect the multiple main heating segments located in the installation cavity in sequence end to end through the installation opening, and the connecting segments are located in the recess.
[0008] In some embodiments, the heat-insulating body is provided with heat transfer openings corresponding to the installation cavities one by one, and the heat transfer openings connect the installation cavity with the receiving space.
[0009] In some embodiments, the heat transfer opening extends along a first direction and is connected to a recess at at least one end of the insulation body. The heat transfer opening is configured to be perpendicular to the first direction, and there is a first distance between the two side walls of the insulation body forming the heat transfer opening. The first distance is less than or equal to the radial dimension of the main heating section perpendicular to the first direction.
[0010] In some embodiments, the difference between the radial dimension of the main heating section perpendicular to the first direction and the first distance is greater than or equal to 1 mm.
[0011] In some embodiments, the bottom surface of the recess is provided with a guide surface extending along a first direction into the installation cavity to form an installation opening, the cross-sectional area of the installation opening is larger than the cross-sectional area of the installation cavity, and the guide surface is configured to guide the main heating section to be inserted into the installation cavity from the installation opening.
[0012] In some embodiments, the heating wire group further includes: a plurality of lead segments connected to the main heating segment or the connecting segment, the heat preservation body is provided with at least one through hole, and the lead segments pass through the through hole to be electrically connected to an external power source.
[0013] In some embodiments, the material of the lead segment is a flexible material having conductive capability.
[0014] In some embodiments, it also includes: a support member, which is sleeved on the outer peripheral side of the thermal insulation body; wherein the support member includes: a first support portion; a second support portion, which is detachably connected to the outer peripheral side of the thermal insulation body with the first support portion, and the first support portion and / or the second support portion are provided with a through hole corresponding to the through hole.
[0015] In some embodiments, it also includes: a wiring terminal, which is arranged on the first supporting part or the second supporting part, and the lead segment passes through the through hole and the through hole and is detachably connected to the wiring terminal.
[0016] In a second aspect, an embodiment of the present disclosure provides a processing device, which includes: a main body; and a furnace core assembly as described in any one of the above embodiments, wherein the furnace core assembly is installed on the main body.
[0017] The furnace chamber assembly and processing equipment provided by the embodiment of the present disclosure shorten the overall preparation cycle of the furnace chamber assembly, reduce the preparation difficulty, and thus reduce the processing cost by separately forming the insulation body and the heating resistance wire and then assembling them. In addition, when the insulation body is formed separately, an installation port and an installation cavity are reserved, and the heating resistance wire can be directly inserted through the installation port and the installation cavity, avoiding the possibility of misoperation during the assembly of the heating resistance wire and the insulation body, which may cause damage to the insulation body, thereby reducing the difficulty of assembling the heating resistance wire and the insulation body.
[0018] In addition, in the assembly method of inserting the heating resistance wire through the installation port and the installation cavity after the insulation body is formed separately, in the matching structure of the heating resistance wire, the installation port and the installation cavity after insertion, the cross-sectional area of the heating resistance wire is less than or equal to the cross-sectional area of the installation port and the installation cavity. On the one hand, it is convenient for the heating resistance wire to be inserted from the installation port and move along the installation cavity, avoiding the collision of the heating resistance wire with the insulation body and damaging the insulation body. On the other hand, the setting of the heating resistance wire being less than or equal to the cross-sectional area of the installation port and the installation cavity avoids the situation that when the insulation body is integrally formed with the heating resistance wire, part of the insulation body extends into the interior of the spiral heating resistance wire, making the coverage area too large, thereby reducing the area of the heating resistance wire covered by the insulation body, increasing the heating area of the heating resistance wire, and reducing energy consumption at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the accompanying drawings, the same reference numerals generally represent the same components or steps.
[0020] Figure 1 Shown is an exploded front view of a furnace core and a heat-insulating body in a furnace core assembly provided in one embodiment of the present disclosure.
[0021] Figure 2 Shown is an exploded front view of a heat preservation body in a furnace assembly provided in one embodiment of the present disclosure.
[0022] Figure 3 Shown is a schematic diagram of a partial explosion of a heat preservation body in a furnace assembly provided in an embodiment of the present disclosure.
[0023] Figure 4 Shown Figure 3 A partial enlarged view of the insulation body of the furnace assembly shown in area A.
[0024] Figure 5 Shown Figure 4 A partial enlarged view of the insulation body of the furnace assembly shown in area B.
[0025] Figure 6 The figure shows a cross-sectional view of the heating element in the furnace assembly when it is inserted into a mounting cavity of the heat preservation body.
[0026] Figure 7 Shown is a schematic diagram of a heat generating component in a furnace assembly provided in an embodiment of the present disclosure.
[0027] Figure 8 The figure shows a left side view of the cooperation between the heat preservation body and the heat generating element in the furnace assembly provided by one embodiment of the present disclosure.
[0028] Fig. 9 Shown Figure 8 A partial enlarged view of area C in the furnace assembly shown.
[0029] Fig.10 Shown is a left view of the cooperation between the heat preservation body and the heat generating element in the furnace assembly provided by another embodiment of the present disclosure.
[0030] Fig.11 Shown Fig.10 A partial enlarged view of area D in the furnace assembly is shown.
[0031] Fig.12 Shown is a left view of a heat preservation body in a furnace assembly provided in one embodiment of the present disclosure.
[0032] Fig.13 The figure shows a schematic diagram of the cooperation between the heat preservation body and the heat generating element in the furnace assembly provided in one embodiment of the present disclosure.
[0033] Fig.14 Shown is a partial schematic diagram of a heat preservation body in a furnace assembly provided in one embodiment of the present disclosure.
[0034] Reference numerals:
[0035] 10. Furnace core assembly; 1. Insulation body; 11. Accommodation space; 12. Inner wall; 121. Installation cavity; 122. Installation port; 13. Recess; 131. Bottom surface; 14. Heat transfer opening; 15. Through hole; 2. Furnace core; 21. Inner wall; 3. Heat-generating element; 31. Main heating section; 32. Connecting section; 33. Lead section; 4. End cover; 41. Protrusion; 5. Support member; 51. First support portion; 52. Second support portion; 6. Terminal block; X, first direction; Q, insertion direction; M1, first area; M2, second area; L1, first distance. DETAILED DESCRIPTION
[0036] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0037] The present disclosure provides a furnace component, such as Figures 1 to 6 The furnace core assembly 10 includes a furnace core 2, a heat preservation body 1 and a heating element 3. The furnace core 2 is configured as a cylindrical structure extending along a first direction X. The heat preservation body 1 is arranged on the inner wall 21 of the furnace core 2. The heat preservation body 1 has a receiving space 11 extending along the first direction X.
[0038] It should be emphasized that the direction indicated by the single arrow X in the figure is the first direction, which is also the axial direction of the furnace, and the direction indicated by the double arrow Q is the insertion direction of the heating element 3. The first direction X is parallel to the insertion direction Q and will not be emphasized separately later.
[0039] It is understood that the raw materials of the heat-insulating body 1 can be obtained by mixing high-temperature resistant, corrosion-resistant, and heat-insulating ceramic fibers with other raw materials in a certain ratio, and the ceramic fibers can include, for example, alumina fibers, aluminum silicate fibers, etc., without specific limitation. The process steps of forming the heat-insulating body 1 include mold making, raw material mixing, pressing and forming, and high-temperature sintering.
[0040] Optionally, the cylindrical structure of the furnace 2 can be, for example, a circular cylinder, a square cylinder, an elliptical cylinder, etc., and the shape of the inner wall enclosing the furnace 2 corresponds to the shape of the cylinder. The shape of the heat preservation body 1 arranged on the inner wall of the furnace 2 matches the shape of the inner wall, and the side wall of the heat preservation body 1 enclosing the receiving space 11 can also be enclosed in a shape matching the shape of the cylinder of the furnace 2, for example, enclosed in a circular side wall, a square side wall, an elliptical side wall, etc., without specific limitation. In the disclosed embodiment, the furnace 2 is configured as a circular cylindrical structure, and the side wall of the heat preservation body 1 encloses a circular structure.
[0041] In some embodiments, Figure 2 and Figure 3, the furnace assembly 10 also includes at least one end cover 4. The end cover 4 can be set as one, and the insulation body 1 has a bottom wall at one end in the first direction X, and the bottom wall and the side wall of the insulation body 1 are enclosed to form a concave structure with an opening, and the opening is located at the other end of the insulation body 1 opposite to the bottom wall, and the opening is connected to the receiving space 11. The end cover 4 is used to cover the opening, and the cooperation of the end cover 4 and the insulation body 1 forms the receiving space 11 into a closed space. Alternatively, the end cover 4 can be set as two, and the insulation body 1 is penetrated at both ends in the first direction X, so that both ends of the insulation body 1 have openings connected to the receiving space 11, and the two end covers 4 are respectively used to cover the two openings, and the cooperation of the two end covers 4 and the insulation body 1 forms the receiving space 11 into a closed space. The number of end covers 4 can be adaptively adjusted according to needs and is not specifically limited. In the embodiment of the present disclosure, two end covers 4 are set to cover the openings of the insulation body 1 on both sides in the first direction X.
[0042] like Figure 4 and Figure 5 The furnace assembly 10 also includes a heating element 3. The heat preservation body 1 is provided with a plurality of installation cavities 121 and a plurality of installation openings 122, the plurality of installation openings 122 are connected to the plurality of installation cavities 121 in a one-to-one correspondence, each installation cavity 121 is extended along the first direction X, and the plurality of installation cavities 121 are arranged at intervals in the circumferential direction around the furnace 2, the heating element 3 is at least partially inserted in the installation cavity 121, and the cross-sectional area of the portion of the heating element 3 located in the installation cavity 121 is less than or equal to the cross-sectional area of the installation opening 122, and is less than or equal to the cross-sectional area of the installation cavity 121.
[0043] It is understandable that the material of the heating element 3 may include silicon aluminum rods, heating resistance wires, etc., without specific limitation. For ease of understanding, the following description will take the heating element 3 as a heating resistance wire as an example.
[0044] Optionally, in order to improve the heating performance and strength of the heating element 3, when the heating element 3 is set as a heating resistance wire, the heating resistance wire is generally wound into a spiral columnar structure so that more heating resistance wires can be arranged in a unit area.
[0045] It can be understood that the heat preservation body 1 has an inner wall 12 enclosing a mounting cavity 121, and at least one end of the inner wall 12 along the first direction X is provided with an opening penetrating the heat preservation body 1 and communicating with the outside, and the inner wall 12 at the opening encloses a mounting opening 122, and the cross-sectional area of the mounting opening 122 is the cross-sectional area of the space enclosed by the inner wall 12 at the opening position, and the cross-sectional area of the mounting cavity 121 is the cross-sectional area of the space enclosed by the inner wall 12 at other positions of the heat preservation body 1. Figure 6, the outer edge of the heating resistance wire encloses a first area M1, and the area of the first area M1 is the cross-sectional area of the heating resistance wire. The inner side wall 12 set in the thermal insulation body 1 encloses a second area M2 as the installation cavity 121, and the area of the second area M2 is the cross-sectional area of the installation cavity 121. The area of the first area M1 is less than or equal to the area of the second area M2, so that when the heating resistance wire is inserted into the installation cavity 121, the heating resistance wire can move along the extension direction of the installation cavity 121 without damaging the thermal insulation body 1. Similarly, the cross-sectional area of the heating resistance wire located in the installation cavity 121 is less than or equal to the cross-sectional area of the installation port 122, which can also be understood based on the above description, except that Figure 6 The installation cavity 121 in the embodiment can be replaced by the installation opening 122, which will not be described in detail.
[0046] By pre-arranging the installation cavity 121 and the installation port 122 when molding the thermal insulation body 1, after the thermal insulation body 1 is molded, at least part of the heating resistance wire can be separately inserted into the installation cavity 121 from the installation port 122, and there is no need to consider the additional process steps, process equipment or process time when molding the heating resistance wire with a different material from the thermal insulation body 1. For example, in the embodiment of the present disclosure, the thermal insulation body 1 and the heating resistance wire are separately prepared and then assembled, and the equipment used in the entire process includes molding equipment, drying equipment, engraving equipment, etc. Compared with the preparation scheme of molding the thermal insulation body 1 and the heating element 3 as a whole, there is no need to use circulation equipment, CNC machine tools (Computer Numerical Control, CNC), calcination equipment, etc. Therefore, the scheme of molding and assembling the thermal insulation body 1 and the heating resistance wire separately in the embodiment of the present disclosure can shorten the overall preparation cycle of the furnace assembly 10, reduce the difficulty of preparation, and thus reduce the processing cost. In addition, when the thermal insulation body 1 is formed separately, an installation port 122 and an installation cavity 121 are reserved, and the heating resistance wire can be directly inserted through the installation port 122 and the installation cavity 121, thereby avoiding misoperation during the assembly process of the heating resistance wire and the thermal insulation body 1, which may cause damage to the thermal insulation body 1, thereby reducing the difficulty of assembling the heating resistance wire and the thermal insulation body 1.
[0047] In addition, in the assembly method of inserting the heating resistance wire through the installation port 122 and the installation cavity 121 after the thermal insulation body 1 is formed separately, in the matching structure of the heating resistance wire, the installation port 122 and the installation cavity 121 after insertion, the cross-sectional area of the heating resistance wire is less than or equal to the cross-sectional area of the installation port 122 and the installation cavity 121. On the one hand, it is convenient for the heating resistance wire to be inserted from the installation port 122 and move along the installation cavity 121, avoiding the collision of the heating resistance wire with the thermal insulation body 1 and damaging the thermal insulation body 1. On the other hand, the setting of the cross-sectional area of the heating resistance wire being less than or equal to the installation port 122 and the installation cavity 121 avoids the situation that when the thermal insulation body 1 is integrally formed with the heating resistance wire, part of the thermal insulation body 1 extends into the interior of the spiral heating resistance wire, making the coverage area too large, thereby reducing the area of the heating resistance wire covered by the thermal insulation body 1, increasing the heating area of the heating resistance wire, and reducing energy consumption at the same time.
[0048] The following describes an exemplary structure of the heat preservation body 1 and the heating resistance wire by taking the case where the heat preservation body 1 has openings at both ends and the two end covers 4 are used to cover the openings at both ends of the heat preservation body 1 as an example.
[0049] Continue as Figures 3 to 5 Along the first direction X, recesses 13 are respectively provided at the openings at both ends of the thermal insulation body 1, and the end cover 4 used to cover the opening of the thermal insulation body 1 is provided with a protrusion 41 that cooperates with the recess 13. When the end cover 4 is matched with the thermal insulation body 1, the protrusion 41 of the end cover 4 can extend into the recess 13 and enable the protrusion 41 to abut against at least part of the bottom surface 131 of the recess 13 to close the receiving space 11.
[0050] The inner side wall 12 enclosed in the thermal insulation body 1 to form the installation cavity 121 penetrates the bottom surface 131 of at least one end of the recess 13 along the first direction X, so that the installation cavity 121 and the recess 13 are connected, and the installation opening 122 is formed at the position where the bottom surface 131 of the recess 13 is connected to the installation cavity 121, and the end cover 4 at least covers the installation opening 122. By setting the installation opening 122 on the bottom surface 131 of the recess 13 with an open end of the thermal insulation body 1, it is convenient for the staff to insert the heating resistance wire from the opening along the insertion direction Q through the installation opening 122 into the installation cavity 121, so as to realize the installation of the heating resistance wire in the thermal insulation body 1. After the installation is completed, the protrusion 41 of the end cover 4 extends into the recess 13 to cover the installation opening 122, which can prevent the heating resistance wire in the installation cavity 121 from escaping from the installation opening 122.
[0051] Optionally, the inner side wall 12 of the mounting cavity 121 enclosed in the thermal insulation body 1 may only penetrate the bottom surface 131 of the recess 13 at one end along the first direction X, so that a plurality of mounting openings 122 are only provided at one end of the thermal insulation body 1, or the bottom surfaces 131 of the recesses 13 at both ends of the thermal insulation body 1 may be penetrated, so that a plurality of mounting openings 122 are provided at both ends of the thermal insulation body 1. The staff may select the mounting opening 122 at the opening at either end according to the position of the mounting opening 122 to insert the heating resistance wire into the plurality of mounting cavities 121 along the insertion direction Q, or may select two staff members to be located at the openings at both ends of the thermal insulation body 1, respectively, and insert the heating resistance wire into different mounting cavities 121 along the insertion direction Q of the corresponding ends, so as to increase the installation speed, without specific limitation.
[0052] In some embodiments, Figures 5 to 7 The heating resistance wire includes at least one heating wire group, the heating wire group includes a plurality of main heating segments 31 and a plurality of connecting segments 32, the plurality of main heating segments 31 are inserted into the mounting cavity 121 through the mounting opening 122 one by one, the cross-sectional area of the main heating segment 31 is less than or equal to the cross-sectional area of the mounting opening 122, and is less than or equal to the cross-sectional area of the mounting cavity 121, the plurality of connecting segments 32 are respectively connected end to end of the plurality of main heating segments 31 located in the mounting cavity 121 through the mounting opening 122, and the connecting segments 32 are located in the recess 13. For example, the heating wire group is set as a group, the plurality of main heating segments 31 are respectively set as a spirally wound resistance wire structure, and the plurality of connecting segments 32 are respectively set as a linear resistance wire. When installing the heating resistor wire on the insulation body 1, you can choose to insert multiple main heating segments 31 into the installation cavity 121 from the corresponding installation ports 122 along the corresponding insertion direction Q at one end or both ends of the insulation body 1, and then connect the inserted multiple main heating segments 31 end to end through the connecting segment 32. This method can facilitate the assembly work of the staff.
[0053] In addition, when multiple connecting sections 32 connect multiple main heating sections 31 end to end in sequence, the multiple connecting sections 32 are respectively located in the recesses 13 at both ends of the insulation body 1, so that the staff can connect the connecting sections 32 with the main heating sections 31 at both ends of the insulation body 1 respectively.
[0054] In an optional embodiment, the bottom surface 131 of the depression 13 may also be provided with a groove structure communicating with the adjacent installation cavity 121 at the position corresponding to the connection section 32, so that the connection section 32 connecting two adjacent main heating sections 31 can be located in the groove structure. When the protrusion 41 of the end cover 4 extends into the depression 13 to cover the opening of the thermal insulation body 1, the protrusion 41 will not pressurize the connection section 32 when covering the installation opening 122, thereby preventing the connection section 32 from being easily broken under the pressure of the end cover 4.
[0055] Optionally, the connecting section 32 and the main heating section 31 may be connected by welding.
[0056] It can be understood that after the multiple main heating segments 31 are respectively inserted into the corresponding installation cavities 121, every several adjacent main heating segments 31 are connected end to end through the connecting segment 32 to form multiple groups of heating wire groups. The number of heating wire groups can be selected according to needs without specific limitation. In the embodiment of the present disclosure, the heating wire group is set as one group.
[0057] In an alternative embodiment, if Figure 8 and Fig. 9 , the cross section of the inner wall 12 enclosing the installation cavity 121 is a closed circular structure with a first cross-sectional area, and the main heating section 31 can be set as a spiral resistance wire with a circular cross-sectional structure and a second cross-sectional area, so that the second cross-sectional area is less than or equal to the first cross-sectional area, so that the main heating section 31 can move relative to the inner wall 12 along the insertion direction Q during the insertion process without damaging the structure of the thermal insulation body 1, and when the main heating section 31 is located in the installation cavity 121, the thermal insulation body 1 can protect the main heating section 31. Similarly, the installation opening 122 is a closed circular structure enclosed by the edge of the inner wall 12 at one end in the first direction X, and has the same cross-sectional area as the first cross-sectional area, which will not be repeated.
[0058] Optionally, the cross-section of the inner wall 12 that encloses the installation cavity 121 can also be set to a square, oval, etc., and the installation port 122 and the main heating section 31 can also be adaptively adjusted according to the shape of the cross-section of the installation cavity 121. The sizes of the cross-sectional areas of the installation cavity 121, the installation port 122 and the main heating section 31 can also be adaptively adjusted according to actual needs so that the main heating section 31 can be smoothly installed in the installation cavity 121, without specific limitation.
[0059] Optionally, the bottom surface 131 of the recess 13 is provided with a guide surface extending into the mounting cavity 121 along the first direction X to form a mounting opening 122, the cross-sectional area of the mounting opening 122 is larger than the cross-sectional area of the mounting cavity 121, and the guide surface is configured to guide the main heating section 31 to be inserted into the mounting cavity 121 from the mounting opening 122. The guide surface can be, for example, a chamfered structure provided at the edge of the inner side wall 12 of the mounting cavity 121 enclosed and formed corresponding to the bottom surface 131 of the recess 13, and is not specifically limited.
[0060] In some embodiments, Figures 10 to 12 The insulation body 1 is provided with heat transfer openings 14 corresponding to the installation cavities 121 one by one. The heat transfer openings 14 connect the installation cavity 121 with the receiving space 11, so that the main heating section 31 located in the installation cavity 121 can better transfer heat to the receiving space 11, thereby improving the heating and heat preservation effect in the insulation space.
[0061] In an alternative embodiment, if Fig.12 and Fig.13 The heat transfer opening 14 extends along the first direction X and is connected to the recesses 13 at both ends of the heat preservation body 1. The heat transfer opening 14 is configured to be perpendicular to the first direction X. There is a first distance L1 between the two side walls of the heat preservation body 1 forming the heat transfer opening 14. The first distance L1 is less than or equal to the radial dimension of the main heating section 31 perpendicular to the first direction X. The heat transfer opening 14 can maximize the heat transfer of the main heating section 31 to the receiving space 11 to achieve a better heating and heat preservation effect. At the same time, the first distance L1 of the heat transfer opening 14 is limited to prevent the main heating section 31 from escaping from the installation cavity 121 from the heat transfer opening 14, thereby ensuring the structural stability of the heating resistance wire installed in the heat preservation body 1.
[0062] Optionally, the difference between the radial dimension of the main heating section 31 perpendicular to the first direction X and the first distance L1 is greater than or equal to 1 mm.
[0063] It is understandable that the shape and size of the heat transfer opening 14 can be adaptively adjusted according to demand, as long as the main heating section 31 can be prevented from escaping from the heat transfer opening 14 , and no specific limitation is made.
[0064] In other examples, such as Fig.14 The heat transfer opening 14 can extend along the first direction X and only communicate with the recess 13 at one end of the heat preservation body 1. The length of the heat transfer opening 14 extending along the first direction X can be adaptively adjusted according to needs and is not specifically limited.
[0065] In some embodiments, Figure 7 and Fig.13 , the insulation body 1 is also provided with at least one through hole 15 reserved for connecting the receiving space 11 with the outside. The heating wire group also includes a plurality of lead segments 33, which are connected to the main heating segment 31 or the connecting segment 32, and the lead segment 33 passes through the through hole 15 to be electrically connected to the external power supply. For example, when the heating wire group is set as a group, among the multiple main heating segments 31 and the multiple connecting segments 32 connected end to end, the main heating segments 31 are located at both ends, and the two lead segments 33 are respectively connected to the main heating segments 31 at both ends and pass through the through hole 15 to be connected to the external power supply. In other examples, the connecting segments 32 are located at both ends of a group of heating wire groups, and the two lead segments 33 are respectively connected to the connecting segments 32 at both ends. Similarly, when the heating wire group is a plurality of groups, the connection between the lead segment 33 and the main heating segment 31 and the connecting segment 32 is as described above and will not be repeated.
[0066] Optionally, the material of the lead segment 33 is a flexible material with electrical conductivity to prevent the lead segment 33 from being easily broken under the bending force when connected to an external power source. It is understandable that the flexible material with electrical conductivity can be made of, for example, pure nickel, or a mixture of nickel and other materials, without specific limitation.
[0067] It can be understood that the through hole 15 can be set on the side wall of one end of the insulation body 1 close to the opening position along the first direction X, or the through hole 15 can be set on the side walls at both ends. It can be determined according to the specific position of the lead segment 33 connected to the main heating segment 31 and the connecting segment 32, without specific limitation.
[0068] In some embodiments, Fig.14 The furnace assembly 10 further includes a support member 5, which is sleeved on the outer peripheral side of the heat preservation body 1. The support member 5 can be, for example, a cylindrical structure enclosed by a steel structure, so as to be sleeved on the outer wall of the heat preservation body 1. When the furnace assembly 10 is placed on the support frame, the support member 5 is provided to prevent the heat preservation body 1 from directly contacting the support frame, thereby preventing the heat preservation body 1 from being damaged.
[0069] In an optional embodiment, the support member 5 includes a first support portion 51 and a second support portion 52, and the first support portion 51 and the second support portion 52 are detachably connected to the outer peripheral side of the heat preservation body 1. The first support portion 51 and the second support portion 52 can be configured as two semi-arc sheet metal parts that enclose a cylindrical structure to facilitate the assembly of the support member 5 and the heat preservation body 1.
[0070] Optionally, the first support portion 51 and the second support portion 52 may be connected by rivets. Alternatively, the first support portion 51 and the second support portion 52 may also be connected by welding, clamping, etc., which is not specifically limited.
[0071] In an alternative embodiment, continue as Fig.14 , through holes are provided in the first support part 51 and the second support part 52 at positions corresponding to the through holes 15 of the heat preservation body 1, and the through holes 15 are provided one by one with the through holes, so that the lead segments 33 can pass through the through holes 15 and the through holes through the heat preservation body 1 and the support member 5 to connect to the external power supply. It can be understood that the specific setting of the through holes provided in the support member 5 can be adaptively adjusted according to the position of the through holes 15 provided on the heat preservation body 1, and whether they are specifically provided in the first support part 51 or the second support part 52 or in a position between the first support part 51 and the second support part 52 depends on the position of the through holes 15 provided on the heat preservation body 1 when the support member 5 is sleeved on the outer peripheral side of the heat preservation body 1, and is not specifically limited.
[0072] In some embodiments, the furnace assembly 10 also includes a terminal 6, which is disposed on at least one of the first support portion 51 and the second support portion 52, and is electrically connected to an external power supply. The lead segment 33 passes through the through hole 15 and the through hole and is detachably connected to the terminal 6.
[0073] Optionally, one end of the lead segment 33 extending out of the heat preservation body 1 is connected to a wiring copper nose, and a nut is connected to the wiring terminal 6, and the copper nose is fixedly connected to the wiring terminal 6 through the nut.
[0074] The embodiment of the present disclosure also provides a processing device, which includes a main body and the furnace liner assembly 10 described in the above embodiments, and the furnace liner assembly 10 is installed on the main body, which will not be described in detail. The processing device can be a CVD device, which can also be called a CVD tube furnace.
[0075] It can be understood that the CVD equipment can specifically be a (Plasma Enhanced Chemical Vapor Deposition, PECVD) equipment, a low pressure chemical vapor deposition (Low Pressure Chemical Vapor Deposition, LPCVD) equipment and an atmospheric pressure chemical vapor deposition ((Atmospheric Pressure Chemical Vapor Deposition, APCVD)) equipment, etc., without specific limitation.
[0076] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the detachable form, a non-detachable connection may be made by means of welding, bonding, etc.
[0077] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limitations. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.
[0078] The block diagrams of the devices, apparatuses, equipment, and systems involved in this disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including," "comprising," "having," and the like are open words, referring to "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or," and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.
[0079] It should also be noted that in the apparatus, device and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.
[0080] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.
[0081] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.
Claims
1. A furnace component, characterized in that: include: The furnace is configured as a cylindrical structure extending along a first direction; A heat-insulating body, arranged on the inner wall of the furnace, the heat-insulating body having a receiving space extending along the first direction, the heat-insulating body having a plurality of mounting cavities and a plurality of mounting openings, the plurality of mounting openings being connected to the plurality of mounting cavities in a one-to-one correspondence, each of the mounting cavities extending along the first direction, and the plurality of mounting cavities being arranged at intervals in a circumferential direction around the furnace; A heat generating element, at least a portion of which is inserted into the mounting cavity, and a cross-sectional area of a portion of the heat generating element located in the mounting cavity is less than or equal to a cross-sectional area of the mounting opening, and is less than or equal to a cross-sectional area of the mounting cavity.
2. The furnace assembly according to claim 1, characterized in that: The furnace assembly also includes at least one end cover; Along the first direction, at least one end of the thermal insulation body is provided with a recess connected to the plurality of mounting cavities, the recess is configured to accommodate at least part of the end cover, the mounting opening is formed at a position where the bottom surface of the recess is connected to the mounting cavity, and the end cover at least covers the mounting opening.
3. The furnace assembly according to claim 2, characterized in that: The heating element includes at least one heating wire group, and the heating wire group includes: A plurality of main heating sections are inserted into the installation cavity one by one through the installation openings, and the cross-sectional area of the main heating sections is less than or equal to the cross-sectional area of the installation openings, and is less than or equal to the cross-sectional area of the installation cavity; A plurality of connecting sections are respectively connected end to end in sequence by the mounting opening to connect the plurality of main heating sections located in the mounting cavity, and the connecting sections are located in the recess.
4. The furnace assembly according to claim 3, characterized in that: The heat-insulating body is provided with heat transfer openings corresponding to the installation cavities one by one, and the heat transfer openings connect the installation cavity with the receiving space.
5. The furnace assembly according to claim 4, characterized in that: The heat transfer opening extends along the first direction and is connected to the recess at at least one end of the heat preservation body. The heat transfer opening is configured to be perpendicular to the first direction. There is a first distance between the two side walls of the heat preservation body forming the heat transfer opening. The first distance is less than or equal to the radial dimension of the main heating section perpendicular to the first direction.
6. The furnace assembly according to claim 5, characterized in that: The difference between the radial dimension of the main heating section perpendicular to the first direction and the first distance is greater than or equal to 1 mm.
7. The furnace assembly according to claim 3, characterized in that: The bottom surface of the recess is provided with a guide surface extending into the installation cavity along the first direction to form the installation opening, the cross-sectional area of the installation opening is larger than the cross-sectional area of the installation cavity, and the guide surface is configured to guide the main heating section to be inserted into the installation cavity from the installation opening.
8. The furnace assembly according to any one of claims 3 to 7, characterized in that: The heating wire group also includes: A plurality of lead segments are connected to the main heating segment or the connecting segment. The heat preservation body is provided with at least one through hole, and the lead segments pass through the through hole to be electrically connected to an external power source.
9. The furnace assembly according to claim 8, characterized in that: The lead wire segment is made of a flexible material with conductive capability.
10. The furnace assembly according to claim 9, characterized in that: Also includes: A support member, sleeved on the outer peripheral side of the heat-insulating body; Wherein, the support member comprises: a first support portion; The second supporting part is detachably connected to the outer peripheral side of the heat insulating body with the first supporting part, and the first supporting part and / or the second supporting part are provided with a through hole corresponding to the through hole.
11. The furnace assembly according to claim 10, characterized in that: Also includes: A connection terminal is arranged on the first supporting part or the second supporting part, and the lead segment passes through the through hole and the through hole to be detachably connected to the connection terminal.
12. A processing equipment, characterized in that: include: main body; The furnace chamber assembly according to any one of claims 1 to 11, wherein the furnace chamber assembly is mounted on the main body.