Graphite boat piece loading and unloading equipment and photovoltaic cell piece preparation system

Abstract

The utility model discloses graphite boat sheet loading and unloading equipment and a photovoltaic cell sheet preparation system. According to the graphite boat sheet loading and unloading equipment, graphite boat groups entering the sheet loading and unloading space from the inlet and outlet are received through the first transverse moving mechanism and the first conveying mechanism, and circulation of graphite boats in the sheet loading and unloading space is achieved through cooperation of the first conveying mechanism, the second conveying mechanism, the third conveying mechanism, the first transverse moving mechanism and the second transverse moving mechanism; the wafer loading and unloading robot can load and unload wafers by utilizing the circulation time of the graphite boat, the wafer loading and unloading efficiency and the equipment productivity are improved, the wafer loading and unloading robot does not occupy the position of the wafer loading and unloading space in the horizontal direction, the occupied area of the equipment is reduced, and an enough caching station is provided for the graphite boat for caching; and high-efficiency circulation of the graphite boat in a wafer loading and unloading space is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to a graphite boat sheet loading and unloading device and a photovoltaic cell sheet preparation system. Background Art

[0002] Before and after the PECVD (plasma enhanced chemical vapor deposition) process, solar cell wafers (such as silicon wafers) need to be loaded into a graphite boat, or unloaded from the graphite boat to other carriers. By automating the loading and unloading of silicon wafers, the contact pollution between humans and silicon wafers can be reduced, the stability of wafer placement can be increased, and production efficiency can be improved. In the related art, the graphite boat flows from the upstream into the wafer loading and unloading equipment through the docking equipment, and the wafers are loaded and unloaded to the graphite boat by a robot equipped with an adsorption component. When the graphite boat is circulating in the wafer loading and unloading equipment, the robot is in a waiting state, the loading and unloading efficiency is low, which affects the production capacity, and the equipment occupies a large production area. Summary of the invention

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a graphite boat loading and unloading device, which can improve the loading and unloading efficiency of the robot and reduce the equipment footprint.

[0004] The utility model also provides a photovoltaic cell sheet preparation system with the graphite boat sheet loading and unloading device.

[0005] According to the first aspect of the present invention, the graphite boat loading and unloading device is used for circulating a graphite boat group, each of which includes two graphite boats arranged in a direction, and the graphite boat loading and unloading device is used for loading and unloading substrates into the graphite boat, and the graphite boat loading and unloading device includes:

[0006] A loading and unloading sheet body is provided with a loading and unloading sheet space and an inlet and outlet connected to the loading and unloading sheet space, the inlet and outlet are used for the graphite boat group to enter and exit the loading and unloading sheet space, the loading and unloading sheet space is provided with a conveying station, a first cache station group, a second cache station group and a loading and unloading station group, the first cache station group includes two first cache stations and a second cache station arranged along the second direction, the loading and unloading station group includes a first loading and unloading station and a second loading and unloading station arranged along the second direction, the conveying station, the first cache station and the first loading and unloading station are arranged in sequence along the first direction, the second cache station and the second loading and unloading station are arranged along the first direction, the second cache station group includes a third cache station and a fourth cache station, the third cache station is located between the first cache station and the second cache station in the second direction, the fourth cache station is located between the first loading and unloading station and the second loading and unloading station in the second direction, the first direction is perpendicular to the second direction, and the first direction is the direction in which the graphite boat group enters the loading and unloading sheet space;

[0007] a sheet loading and unloading robot, located between the first loading and unloading station and the second loading and unloading station in the second direction and above the fourth buffer station, for loading and unloading sheets from the graphite boat located at the first loading and unloading station or the second loading and unloading station;

[0008] A first transverse movement mechanism is located at a side of the first buffer station opposite to the first direction, and the first transverse movement mechanism is used to transfer the graphite boat located at the first buffer station, the second buffer station and the third buffer station along the second direction;

[0009] a second transverse movement mechanism, located at one side of the first loading and unloading station in the first direction, the second transverse movement mechanism comprising a first transverse movement line and a second transverse movement line arranged along the second direction, the first transverse movement line being used to receive the graphite boat output from the fourth buffer station and transfer the graphite boat to the first loading and unloading station along the second direction, and the second transverse movement line being used to receive the graphite boat output from the fourth buffer station and transfer the graphite boat to the second loading and unloading station along the second direction;

[0010] a first conveying mechanism, used for switching the graphite boat between the first traverse mechanism and the first traverse line along the first direction;

[0011] a second conveying mechanism, used for switching the graphite boat between the second loading and unloading station and the second buffering station, receiving the graphite boat conveyed by the second traverse line, and transferring the graphite boat to the first traverse mechanism;

[0012] The third conveying mechanism is used to switch the graphite boat between the third buffer station and the fourth buffer station, and to transfer the graphite boat to the first transverse movement mechanism and the second transverse movement mechanism.

[0013] The graphite boat loading and unloading equipment according to the embodiment of the utility model has at least the following beneficial effects:

[0014] In the utility model, the graphite boat group entering the sheet loading and unloading space from the inlet and outlet is received by the first transverse movement mechanism and the first conveying mechanism, and the circulation of the graphite boat in the sheet loading and unloading space is realized through the cooperation of the first conveying mechanism, the second conveying mechanism, the third conveying mechanism, the first transverse movement mechanism and the second transverse movement mechanism. The sheet loading and unloading robot can use the circulation time of the graphite boat to load and unload sheets, thereby improving the sheet loading and unloading efficiency and equipment capacity, and the sheet loading and unloading robot does not occupy the position in the horizontal direction of the sheet loading and unloading space, thereby reducing the equipment footprint, and provides sufficient cache stations for the graphite boat for caching, thereby realizing efficient circulation of the graphite boat in the sheet loading and unloading space.

[0015] According to some embodiments of the present invention, the spacing between the first lateral shift line and the second lateral shift line in the second direction, the spacing between the first conveying mechanism and the second conveying mechanism in the second direction, and the spacing between the second conveying mechanism and the third conveying mechanism in the second direction are the same.

[0016] According to some embodiments of the utility model, the second transverse movement mechanism includes a sliding frame, the first transverse movement line and the second transverse movement line are arranged side by side and installed on the sliding frame, the distance between the first transverse movement line and the second transverse line in the second direction is smaller than the distance between the first conveying mechanism and the second conveying mechanism, or the distance between the first transverse movement line and the second transverse line in the second direction is smaller than the distance between the second conveying mechanism and the third conveying mechanism.

[0017] According to some embodiments of the present invention, a supporting platform is further included, a portion of which is erected above the third conveying mechanism and is used to install the sheet loading and unloading robot.

[0018] According to some embodiments of the present utility model, the first conveying mechanism includes a first conveying line and a second conveying line, the first conveying line is located at the first buffer station, the second conveying line is located at the first loading and unloading station, and the first conveying line and the second conveying line are connected along the first direction.

[0019] According to some embodiments of the present utility model, the second conveying mechanism includes a third conveying line and a fourth conveying line, the third conveying line is located at the second cache station, the fourth conveying line is located at the second loading and unloading station, and the third conveying line and the fourth conveying line are connected along the first direction.

[0020] According to some embodiments of the present utility model, the third conveying mechanism includes a fifth conveying line and a sixth conveying line, the fifth conveying line is located at the third cache station, the sixth conveying line is located at the fourth cache station, and the fifth conveying line and the sixth conveying line are connected along the first direction.

[0021] According to some embodiments of the present invention, the first transverse movement mechanism includes a third transverse movement line and a first guide rail, the first guide rail extends along the second direction, the third transverse movement line transports the graphite boat along the first direction and in the opposite direction of the first direction, and the third transverse line is slidably connected to the first guide rail; the second transverse movement mechanism includes a second guide rail, the second guide rail extends along the second direction, the first transverse line and the second transverse line transport the graphite boat along the first direction and in the opposite direction of the first direction, and the first transverse line and the second transverse line are slidably connected to the second guide rail.

[0022] According to some embodiments of the present invention, the first direction is parallel to the length direction of the graphite boat.

[0023] A photovoltaic cell preparation system according to a second aspect of the present invention includes:

[0024] Graphite boat loading and unloading equipment according to the first embodiment;

[0025] The graphite boat conveying device is used for conveying the empty or fully loaded graphite boat group to the inlet and outlet, and receiving the empty or fully loaded graphite boat group outputted from the inlet and outlet.

[0026] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0028] Figure 1 It is a workstation distribution diagram in one embodiment of the loading and unloading sheet body;

[0029] Figure 2 It is a schematic diagram of an embodiment of the graphite boat loading and unloading equipment of the utility model;

[0030] Figure 3 for Figure 2 Schematic diagram of the other direction of the film loading and unloading equipment of the Zhongmo boat;

[0031] Figure 4 It is a schematic diagram of the partial circulation process of the graphite boat;

[0032] Figure 5 Schematic diagram of the flow process of the graphite boat (with Figure 4 (e) connected);

[0033] Figure 6 Schematic diagram of the flow process of the graphite boat (with Figure 5 (i) connected).

[0034] Reference numerals:

[0035] The sheet loading and unloading body 100, the sheet loading and unloading space 110, the inlet and outlet 120, the conveying station 130, the first buffering station group 140, the first buffering station 141, the second buffering station 142, the second buffering station group 150, the third buffering station 151, the fourth buffering station 152, the loading and unloading station group 160, the first loading and unloading station 161, the second loading and unloading station 162;

[0036] Tablet loading and unloading robot 200;

[0037] A first traverse mechanism 300, a third traverse line 310, and a first guide rail 320;

[0038] A second traverse mechanism 400, a first traverse line 410, a second traverse line 420, a sliding frame 430, and a second guide rail 440;

[0039] A first conveying mechanism 500, a first conveying line 510, and a second conveying line 520;

[0040] A second conveying mechanism 600, a third conveying line 610, and a fourth conveying line 620;

[0041] A third conveying mechanism 700, a fifth conveying line 710, and a sixth conveying line 720;

[0042] Support platform 800. DETAILED DESCRIPTION

[0043] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0044] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0045] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0046] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0047] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0048] Reference Figures 1 to 3 In an embodiment of the utility model, a graphite boat loading and unloading device (hereinafter referred to as the loading and unloading device) is provided, which is used to circulate a graphite boat group and load and unload substrates into the graphite boat when the graphite boat is circulated to a corresponding workstation. Each graphite boat group includes two directionally arranged graphite boats, and the two graphite boats synchronously enter the loading and unloading device for circulation and loading and unloading of substrates, and synchronously flow out of the loading and unloading device after completing the loading and unloading of substrates, that is, the two graphite boats synchronously enter and exit the loading and unloading device in the form of a graphite boat group.

[0049] The loading and unloading equipment includes a loading and unloading body 100 , in which a loading and unloading space 110 is arranged. The loading and unloading body 100 has an inlet and outlet 120 , which is connected to the loading and unloading space 110 , and is used for allowing the graphite boat group to enter and exit the loading and unloading space 110 . The sheet loading and unloading space 110 is provided with a conveying station 130, a first cache station group 140, a second cache station group 150 and a loading and unloading station group 160. The first cache station group 140 includes two first cache stations 141 and a second cache station 142 arranged along the second direction. The loading and unloading station group 160 includes a first loading and unloading station 161 and a second loading and unloading station 162 arranged along the second direction. The conveying station 130, the first cache station 141 and the first loading and unloading station 161 are arranged in sequence along the first direction. The first loading and unloading station 161 is located on one side of the first cache station 141 in the first direction. The first cache station 141 is located on one side of the conveying station 130 in the first direction. The second cache station 150 is located on one side of the conveying station 130 in the first direction. The station 142 and the second loading and unloading station 162 are arranged along the first direction, the second loading and unloading station 162 is located on one side of the second cache station 142 in the first direction, the second cache station group 150 includes a third cache station 151 and a fourth cache station 152, the third cache station 151 is located between the first cache station 141 and the second cache station 142 in the second direction, the fourth cache station 152 is located between the first loading and unloading station 161 and the second loading and unloading station 162 in the second direction, the first direction is perpendicular to the second direction, the first direction is the direction in which the graphite boat group enters the loading and unloading space 110, and the graphite boat group exits the loading and unloading space 110 from the inlet and outlet 120 in the opposite direction of the first direction.

[0050] The loading and unloading equipment also includes a loading and unloading robot 200, which is located between the first loading and unloading station 161 and the second loading and unloading station 162 in the second direction, and is used to load and unload substrates from the graphite boat located at the first loading and unloading station 161 and the second loading and unloading station 162. Since the first loading and unloading station 161 and the second loading and unloading station 162 are respectively arranged on both sides of the loading and unloading robot 200, the loading and unloading robot 200 can take into account the loading and unloading of substrates from the graphite boats at the two loading and unloading stations, and the loading and unloading robot 200 has a high utilization rate. In addition, the loading and unloading robot 200 is located above the fourth buffer station 152, and the loading and unloading robot 200 does not occupy the position of the loading and unloading space 110 in the horizontal direction. The space below the loading and unloading robot 200 can be used for caching the graphite boat, which is conducive to improving the circulation of the graphite boat in the loading and unloading space 110 and improving the efficiency of loading and unloading.

[0051] The sheet loading and unloading equipment includes a first transverse movement mechanism 300 and a second transverse movement mechanism 400. The first transverse movement mechanism 300 is located on the side of the first cache station 141 opposite to the first direction. The first transverse movement mechanism 300 is used to transfer the graphite boat located at the first cache station 141, the second cache station 142 and the third cache station 151 along the second direction, so that the graphite boat that has not been loaded and unloaded enters the third cache station 151 for cache, or transfers the graphite boat that has completed the loading and unloading and is located at the second cache station 142 toward the inlet and outlet 120, or transfers the graphite boat that has completed the loading and unloading to the first cache station 141, waiting to exit the loading and unloading space 110 from the inlet and outlet 120. The second transverse movement mechanism 400 is located on one side of the first loading and unloading station 161 in the first direction. The second transverse movement mechanism 400 includes a first transverse movement line 410 and a second transverse movement line 420 arranged along the second direction. The first transverse movement line 410 is used to receive the graphite boat output from the fourth buffer station 152, and transfer the graphite boat to the first loading and unloading station 161 along the second direction. The second transverse movement line 420 is used to receive the graphite boat output from the fourth buffer station 152, and transfer the graphite boat to the second loading and unloading station 162 along the second direction. The first transverse movement line 410 transfers the graphite boat to the first loading and unloading station 161 for loading and unloading, and the second transverse movement line 420 transfers the graphite boat to the second loading and unloading station 162 for loading and unloading, thereby realizing the flow of the graphite boat to be loaded and unloaded to the loading and unloading station group. It should be noted that when the graphite boat in one of the graphite boat groups is in the state of loading and unloading sheets, the graphite boat in the other graphite boat group can utilize the first transverse movement mechanism 300 to transfer the graphite boat to the second cache position group 150, and the second transverse movement can receive the graphite boat cached by the fourth cache station 152. The sheet loading and unloading robot 200 can utilize the circulation time of the graphite boat to load and unload sheets, thereby shortening the waiting time of the sheet loading and unloading robot 200 and improving the sheet loading and unloading efficiency of the sheet loading and unloading robot 200.

[0052] The sheet loading and unloading equipment further includes a first conveying mechanism 500, a second conveying mechanism 600 and a third conveying mechanism 700 arranged along the second direction. The first conveying mechanism 500 is adjacent to the inlet and outlet 120 and is used to switch the graphite boat between the first transverse movement mechanism 300 and the first transverse movement line 410 along the first direction. For example, the graphite boat group entering the sheet loading and unloading space 110 from the inlet and outlet 120 is docked with the first conveying mechanism 500 along the first direction through the first transverse movement mechanism 300, and one of the graphite boats is received by the first conveying mechanism 500. And is located at the conveying station 130, another graphite boat is received by the first transverse movement mechanism 300 and is located at the first cache station 141, the graphite boat located at the first cache station 141 can continue to be conveyed by the first conveying mechanism 500 and moved to the first loading and unloading station 161, and is loaded and unloaded by the loading and unloading robot 200, the graphite boat located at the conveying station 130 is conveyed by the first transverse movement mechanism 300 to the second cache station group 150, and is further transferred to the second loading and unloading station 162 through the second transverse movement mechanism 400 for loading and unloading.

[0053] The second conveying mechanism 600 is used to switch the graphite boat between the second loading and unloading station 162 and the second buffer station 142, and receive the graphite boat transported by the second transverse line 420, and transfer the graphite boat to the first transverse mechanism 300. The second transverse line 420 can dock with the second conveying mechanism 600 in the reverse direction of the first direction, and transfer the graphite boat to the second loading and unloading station 162. The graphite boat that has completed loading and unloading is transported by the second conveying mechanism 600 and transferred to the second buffer station 142 in the reverse direction of the first direction. The first transverse mechanism 300 docks with the second conveying mechanism 600 in the reverse direction of the first direction. The first transverse mechanism 300 receives the graphite boat at the second buffer station 142 and transfers the graphite boat to the inlet and outlet 120, so that the second transverse line 420 transfers the graphite boat to the second loading and unloading station 162, and the first transverse mechanism 300 receives the graphite boat that has completed loading and unloading.

[0054] The third conveying mechanism 700 is used to switch the graphite boat between the third buffer station 151 and the fourth buffer station 152, and transfer the graphite boat to the first transverse mechanism 300 and the second transverse mechanism. The third conveying mechanism 700 is located between the first conveying mechanism 500 and the second conveying mechanism 600. The third conveying mechanism 700 can dock with the first transverse mechanism 300 along the first direction, transfer the graphite boat to the second buffer station group 150, and move the graphite boat from the third buffer station 151 to the fourth buffer station 152. The third conveying mechanism 700 can dock with the second transverse line 420 along the first direction. The second transverse line 420 receives the graphite boat at the fourth buffer station 152 and transfers the graphite boat to the second loading and unloading station 162 for loading and unloading.

[0055] In the utility model, the first transverse movement mechanism 300 and the first conveying mechanism 500 receive the graphite boat group entering the loading and unloading space 110 from the inlet and outlet 120, and the first conveying mechanism 500, the second conveying mechanism 600, the third conveying mechanism 700, the first transverse movement mechanism 300 and the second transverse movement mechanism 400 cooperate to realize the circulation of the graphite boat in the loading and unloading space 110, and the loading and unloading robot 200 can use the circulation time of the graphite boat to load and unload the sheets, thereby improving the loading and unloading efficiency and equipment capacity, and the loading and unloading robot 200 does not occupy the horizontal position of the loading and unloading space 110, thereby reducing the equipment footprint, and provides sufficient cache stations for the graphite boat to cache, thereby realizing the efficient circulation of the graphite boat in the loading and unloading space 110.

[0056] In addition, in one embodiment, the spacing between the first lateral line 410 and the second lateral line 420 in the second direction, the spacing between the first conveying mechanism 500 and the second conveying mechanism 600 in the second direction, and the spacing between the second conveying mechanism 600 and the third conveying mechanism 700 in the second direction are the same, so that the first lateral line 410 can dock with the first conveying mechanism 500 while the second lateral line 420 can dock with the third conveying mechanism 700, or the first lateral line 410 can dock with the third conveying mechanism 700 while the second lateral line 420 can dock with the second conveying mechanism 600, thereby improving the circulation efficiency of the graphite boat in the loading and unloading space 110.

[0057] In another embodiment, the spacing between the first transverse line 410 and the second transverse line 420 in the second direction is smaller than the spacing between the first conveying mechanism 500 and the second conveying mechanism 600 in the second direction, or the spacing between the first transverse line 410 and the second transverse line 420 in the second direction is smaller than the spacing between the second conveying mechanism 600 and the third conveying mechanism 700 in the second direction. In this way, the arrangement of the first transverse line 410 and the second transverse line 420 in the second direction is more compact, and the movement of the second transverse mechanism 400 is more stable.

[0058] Furthermore, the second transverse movement mechanism 400 includes a sliding frame 430, the first transverse movement line 410 and the second transverse movement line 420 are arranged side by side and installed on the sliding frame 430, and the sliding frame 430 simultaneously drives the first transverse movement line 410 and the second transverse movement line 420 to move in the second direction or in the reverse direction.

[0059] The first transverse movement mechanism 300 includes a third transverse movement line 310 and a first guide rail 320. The first guide rail 320 extends along the second direction. The third transverse movement line 310 transports the graphite boat along the first direction and in the reverse direction of the first direction. The third transverse movement line 310 is slidably connected to the first guide rail 320. The first guide rail 320 guides the movement of the third transverse movement line 310 to make the movement of the third transverse line 310 more stable. Similarly, the second transverse movement mechanism 400 includes a second guide rail 440, which extends along the second direction. The first transverse line 410 and the second transverse line 420 transport the graphite boat along the first direction or the reverse direction of the first direction. The first transverse line 410 and the second transverse line 420 are slidably connected to the second guide rail 440, or the first transverse line 410 and the second transverse line 420 are slidably connected to the second guide rail 440 through a sliding frame 430. The second guide rail 440 guides the movement of the first transverse line 410 and the second transverse line 420, so that the movement of the first transverse line 410 and the second transverse line 420 is smoother.

[0060] It can be understood that the first lateral movement mechanism 300 and the second lateral movement mechanism 400 should be provided with a power component to drive the first lateral movement line 410, the second lateral movement line 420 or the third lateral movement line 310 to move along the second direction, and the power component is not limited to a combination of a screw mechanism and a rotary motor, a linear motor, etc. In addition, the first lateral movement line 410, the second lateral movement line 420 and the third lateral movement line 310 are all belt conveyor lines.

[0061] The first conveying mechanism 500 includes a first conveying line 510 and a second conveying line 520. The first conveying line 510 is located at the first buffer station 141, and the second conveying line 520 is located at the first loading and unloading station 161. The first conveying line 510 and the second conveying line 520 are connected in a first direction, so that the graphite boat moves from the first buffer station 141 to the first loading and unloading station 161 for loading and unloading, or is transferred from the first loading and unloading station 161 to the first buffer station 141, and then exits the loading and unloading space 110 from the inlet and outlet 120. The second conveying mechanism 600 includes a third conveying line 610 and a fourth conveying line 620. The third conveying line 610 is located at the second buffer station 142, and the fourth conveying line 620 is located at the second loading and unloading station 162. The third conveying line 610 and the fourth conveying line 620 are connected along the first direction, so that the graphite boat after the loading and unloading of the sheets is transferred from the second loading and unloading station 162 to the second buffer station 142. The fourth conveying line 620 and the second transverse line 420 are connected along the first direction, so that the second transverse line 420 transfers the graphite boat to the second loading and unloading station 162 for loading and unloading of the sheets. The third conveying mechanism 700 includes a fifth conveying line 710 and a sixth conveying line 720. The fifth conveying line 710 is located at the third buffer station 151, and the sixth conveying line 720 is located at the fourth buffer station 152. The fifth conveying line 710 and the sixth conveying line 720 are connected along the first direction; the fifth conveying line 710 receives the graphite boat conveyed by the first transverse movement mechanism 300, transfers the graphite boat to the third buffer station 151 for buffering, and transfers the graphite boat to the fourth buffer station 152 by connecting with the sixth conveying line 720 along the first direction, the sixth conveying line 720 is connected with the first transverse movement line 410 along the first direction, and the graphite boat is transferred to the first loading and unloading station 161 for loading and unloading by the first transverse movement line 410, or the sixth conveying line 720 is connected with the second transverse movement line 420 along the first direction, and the graphite boat is transferred to the second loading and unloading station 162 for loading and unloading by the second transverse line 420.

[0062] The wafer loading and unloading equipment also includes a support platform 800, a part of which is erected above the third conveying mechanism 700 and is used to install the wafer loading and unloading robot 200. The support platform 800 provides an installation position for the wafer loading and unloading robot 200 and avoids the third conveying mechanism 700, so that the wafer loading and unloading action of the wafer loading and unloading robot 200 and the conveying action of the third conveying mechanism 700 on the graphite boat do not affect each other. The wafer loading and unloading robot 200 includes a mechanical arm and a wafer picking and placing mechanism. The wafer picking and placing mechanism can use a vacuum adsorption or Bernoulli adsorption structure to reduce damage to the substrate during the wafer picking and placing process. The wafer picking and placing mechanism is connected to one end of the mechanical arm, such as the free end of the mechanical arm. The mechanical arm has a multi-directional rotational freedom, so that the wafer loading and unloading robot 200 can take into account the picking and placing of the graphite boat at different positions.

[0063] For example, a group of conveying stations 130, a first buffering station group 140, a second buffering station group 150, and a loading and unloading station group 160 are provided in the loading and unloading space 110, and three groups of graphite boat groups are circulated in the loading and unloading space 110. The first group of graphite boat groups entering the loading and unloading space 110 is defined as group A graphite boat group, wherein the graphite boat that enters the loading and unloading space 110 first in the graphite boat group is A1, and the graphite boat that enters the loading and unloading space 110 later is A 2; define the second group of graphite boats entering the loading and unloading space 110 as group B graphite boat group, wherein the graphite boat that enters the loading and unloading space 110 first in the graphite boat group is B1, and the graphite boat that enters the loading and unloading space 110 later is B2; define the third group of graphite boats entering the loading and unloading space 110 as group C graphite boat group, wherein the graphite boat that enters the loading and unloading space 110 first in the graphite boat group is C1, and the graphite boat that enters the loading and unloading space 110 later is C2.

[0064] In one embodiment, the flow process of the graphite boat in the loading and unloading space 110 is as follows: Figure 4 In FIG. (a), the graphite boats of group A first enter the loading and unloading space 110, wherein the graphite boat A1 is in front and the graphite boat A2 is in the back. The graphite boat group A is transported by the first transverse mechanism 300 and the first transport mechanism 500, and the graphite boat A1 is transferred to the first buffer station 141, and the graphite boat A2 is transferred to the transport station 130; Figure 4 In FIG. (b), the graphite boat A1 is transported by the first transport mechanism 500 and moves from the first buffer station 141 to the first loading and unloading station 161, and the graphite boat A2 is transported by the first transverse mechanism 300 and the second transport mechanism 600 and moves from the transport station 130 to the second buffer station 142 to the second loading and unloading station; Figure 4 In FIG. (c), the loading and unloading robot 200 performs double-sided loading and unloading of the graphite boat A1 located at the first loading and unloading station 161, and the graphite boat group B enters the loading and unloading space 110 through the inlet and outlet 120, wherein the graphite boat B1 is in front and the graphite boat B2 is in the back. The graphite boat group B is transported by the first transverse movement mechanism 300 and the first conveying mechanism 500, and the graphite boat B1 is transferred to the first buffer station 141, and the graphite boat B2 is transferred to the conveying station 130; refer to FIG. Figure 4 In Figure (d), the graphite boat B2 is transported by the first transverse mechanism 300 and the third conveying mechanism 700, and moves from the conveying station 130 to the fourth buffer station 152 via the third buffer station 151. At the same time, the second transverse line 420 in the second transverse mechanism 400 is docked with the third conveying mechanism 700, and the graphite boat B2 at the fourth buffer station 152 is transferred to the second transverse line 420. During this process, the loading and unloading robot 200 continues to load and unload the graphite boat A1 at the first loading and unloading station 161; refer to Figure 4In Figure (e), the graphite boat B1 is transported by the first transverse movement mechanism 300 and the third conveying mechanism 700, and moves from the conveying station 130 to the fourth cache station 152 via the third buffer station 151. At the same time, the first transverse movement line 410 in the second transverse movement mechanism 400 is docked with the third conveying mechanism 700, and the graphite boat B1 at the fourth cache station 152 is transferred to the first transverse movement line 410.

[0065] Reference Figure 5 In FIG. (f), the graphite boat group C enters the sheet loading and unloading space 110 through the inlet and outlet 120, wherein the graphite boat C1 is in front and the graphite boat C2 is in the back. The graphite boat group C is transported by the first transverse movement mechanism 300 and the first conveying mechanism 500, and the graphite boat C1 is transferred to the first buffer station 141, and the graphite boat C2 is transferred to the conveying station 130. During this process, the sheet loading and unloading robot 200 loads and unloads sheets from the graphite boat A2 located at the second loading and unloading station 162; refer to FIG. Figure 5 In FIG. (g), the graphite boat C2 is transported by the first transverse movement mechanism 300 and the third conveying mechanism 700, and is moved from the conveying station 130 to the fourth buffer station 152 via the third buffer station 151. The graphite boat C1 is transported by the first transverse movement mechanism 300, the first conveying mechanism 500 and the third conveying mechanism 700, and is transferred from the first buffer station 141 to the third buffer station 151 via the conveying station 130. During this process, the loading and unloading robot 200 continuously loads and unloads the graphite boat A2 located at the second loading and unloading station 162; refer to FIG. Figure 5 In Figure (h), the graphite boat A1 is transported by the first conveying mechanism 500 and moves from the first loading and unloading station 161 to the first buffer station 141. The first transverse line 410 is docked with the first conveying mechanism 500. The graphite boat B1 on the first transverse line 410 is transferred to the first loading and unloading station to wait for loading and unloading. Figure 5 In Figure (i), the sheet loading and unloading robot 200 performs double-sided sheet loading and unloading on the graphite boat B1. The graphite boat A2 is transported by the second conveying mechanism 600 from the second loading and unloading station 162 and transferred to the first transverse movement mechanism 300 via the second buffer station 142. During this process, the sheet loading and unloading robot 200 continues to load and unload sheets on the graphite boat B1 located at the second loading and unloading station 162.

[0066] Reference Figure 6 In FIG. (j), the graphite boat A2 is transferred to the conveying station 130 by the first transverse movement mechanism 300, and the graphite boat B2 is transferred to the second loading and unloading station 162 to wait for loading and unloading of sheets by the second transverse movement line 420 and the second conveying mechanism 600. The loading and unloading robot 200 continues to load and unload sheets from the graphite boat B1 at the second loading and unloading station 162; Figure 6In Figure (k), the third conveying mechanism 700 first docks with the second transverse line 420 of the second transverse structure, and transfers the graphite boat C2 at the fourth buffer station 152 to the second transverse mechanism 400, and the graphite boat C1 at the third buffer station 151 is transferred to the fourth buffer station 152, and then the third conveying mechanism 700 docks with the first transverse line 410 of the second transverse mechanism 400, and transfers the graphite boat C1 to the first transverse line 410, with the graphite boat A1 in front and the graphite boat A2 in the back, and the graphite boat group A exits the loading and unloading space 110 from the inlet and outlet 120, and the loading and unloading robot 200 continues to load and unload the graphite boat B1 at the second loading and unloading station 162; the graphite boat group A enters the loading and unloading space 110 from the inlet and outlet 120 again, and at this time, the graphite boat B1 completes the loading and unloading, and the loading and unloading robot 200 starts to load and unload the graphite boat B2; refer to Figure 6 Figure (l) in which the positions of the two graphite boats in the graphite boat group C are Figure 5 In FIG. (f), the positions of the two graphite boats in the graphite boat group B are the same. Figure 5 In FIG. (f), the positions of the two graphite boats in the graphite boat group A are the same. Figure 5 In Figure (f), the positions of the two graphite boats in the graphite boat group C are the same. Figure 6 In the figure (l), the graphite boat group A enters the loading and unloading space 110 again through the inlet and outlet 120, and the loading and unloading robot 200 continues to load and unload the graphite boat B2; and then refer to Figure 5 In the figure (g), the position of the graphite boat group C in the figure is equivalent to the position of the newly entered graphite boat group A, the position of the graphite boat in the graphite boat group A in the figure is equivalent to the position of the two graphite boats in the graphite boat group B in the current process, and the position of each graphite boat in the graphite boat group B in the figure is equivalent to the position of the two graphite boats in the graphite boat group C in the current process. The circulation process of the graphite boats can continue to refer to Figure 5 and Figure 6 The subsequent process steps are carried out to realize the circulation and loading and unloading of the three groups of graphite boats in the loading and unloading space 110.

[0067] In the utility model, the first direction is parallel to the length direction of the graphite boat, that is, the ends of the two graphite boats in each graphite boat group are connected. When the graphite boat flows to the first loading and unloading station or the second loading and unloading station, the side of the graphite boat faces the loading and unloading robot, which can reduce the moving path of the loading and unloading robot during the process of taking and placing the sheets, thereby improving the loading and unloading efficiency.

[0068] The utility model also provides a photovoltaic cell preparation system, including the above-mentioned graphite boat loading and unloading device, and also including a graphite boat conveying device, the graphite boat conveying device is used to convey an empty or fully loaded graphite boat group to the inlet and outlet 120 of the loading and unloading body 100, and receive an empty or fully loaded graphite boat group output from the inlet and outlet 120. Exemplarily, the graphite boat conveying device is arranged between the PECVD reactor and the loading and unloading device, and can convey the graphite boat group output from the PECVD reactor to the loading and unloading device, and convey the graphite boat group flowing out of the loading and unloading device to the PECVD reactor.

[0069] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Graphite boat loading and unloading equipment, characterized in that: Used for circulating graphite boat groups, each of which includes two graphite boats arranged in a direction, and the graphite boat loading and unloading device is used for loading and unloading substrates to the graphite boats, and the graphite boat loading and unloading device includes: A loading and unloading sheet body is provided with a loading and unloading sheet space and an inlet and outlet connected to the loading and unloading sheet space, the inlet and outlet are used for the graphite boat group to enter and exit the loading and unloading sheet space, the loading and unloading sheet space is provided with a conveying station, a first cache station group, a second cache station group and a loading and unloading station group, the first cache station group includes two first cache stations and a second cache station arranged along the second direction, the loading and unloading station group includes a first loading and unloading station and a second loading and unloading station arranged along the second direction, the conveying station, the first cache station and the first loading and unloading station are arranged in sequence along the first direction, the second cache station and the second loading and unloading station are arranged along the first direction, the second cache station group includes a third cache station and a fourth cache station, the third cache station is located between the first cache station and the second cache station in the second direction, the fourth cache station is located between the first loading and unloading station and the second loading and unloading station in the second direction, the first direction is perpendicular to the second direction, and the first direction is the direction in which the graphite boat group enters the loading and unloading sheet space; a sheet loading and unloading robot, located between the first loading and unloading station and the second loading and unloading station in the second direction and above the fourth buffer station, for loading and unloading sheets from the graphite boat located at the first loading and unloading station or the second loading and unloading station; A first transverse movement mechanism is located at a side of the first buffer station opposite to the first direction, and the first transverse movement mechanism is used to transfer the graphite boat located at the first buffer station, the second buffer station and the third buffer station along the second direction; a second transverse movement mechanism, located at one side of the first loading and unloading station in the first direction, the second transverse movement mechanism comprising a first transverse movement line and a second transverse movement line arranged along the second direction, the first transverse movement line being used to receive the graphite boat output from the fourth buffer station and transfer the graphite boat to the first loading and unloading station along the second direction, and the second transverse movement line being used to receive the graphite boat output from the fourth buffer station and transfer the graphite boat to the second loading and unloading station along the second direction; a first conveying mechanism, used for switching the graphite boat between the first traverse mechanism and the first traverse line along the first direction; a second conveying mechanism, used for switching the graphite boat between the second loading and unloading station and the second buffering station, receiving the graphite boat conveyed by the second traverse line, and transferring the graphite boat to the first traverse mechanism; The third conveying mechanism is used to switch the graphite boat between the third buffer station and the fourth buffer station, and to transfer the graphite boat to the first transverse movement mechanism and the second transverse movement mechanism.

2. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The spacing between the first traverse line and the second traverse line in the second direction, the spacing between the first conveying mechanism and the second conveying mechanism in the second direction, and the spacing between the second conveying mechanism and the third conveying mechanism in the second direction are the same.

3. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The second transverse movement mechanism includes a sliding frame, the first transverse movement line and the second transverse movement line are arranged side by side and installed on the sliding frame, the distance between the first transverse line and the second transverse line in the second direction is smaller than the distance between the first conveying mechanism and the second conveying mechanism, or the distance between the first transverse line and the second transverse line in the second direction is smaller than the distance between the second conveying mechanism and the third conveying mechanism.

4. The graphite boat loading and unloading equipment according to claim 1, characterized in that: It also includes a supporting platform, a part of which is erected above the third conveying mechanism and is used to install the sheet loading and unloading robot.

5. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The first conveying mechanism includes a first conveying line and a second conveying line. The first conveying line is located at the first buffer station, the second conveying line is located at the first loading and unloading station, and the first conveying line and the second conveying line are connected along the first direction.

6. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The second conveying mechanism includes a third conveying line and a fourth conveying line. The third conveying line is located at the second buffer station, the fourth conveying line is located at the second loading and unloading station, and the third conveying line and the fourth conveying line are connected along the first direction.

7. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The third conveying mechanism includes a fifth conveying line and a sixth conveying line. The fifth conveying line is located at the third buffer station, the sixth conveying line is located at the fourth buffer station, and the fifth conveying line and the sixth conveying line are connected along the first direction.

8. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The first transverse movement mechanism includes a third transverse movement line and a first guide rail, the first guide rail extends along the second direction, the third transverse movement line transports the graphite boat along the first direction and in the opposite direction of the first direction, and the third transverse movement line is slidably connected to the first guide rail; the second transverse movement mechanism includes a second guide rail, the second guide rail extends along the second direction, the first transverse line and the second transverse line transport the graphite boat along the first direction and in the opposite direction of the first direction, and the first transverse line and the second transverse line are slidably connected to the second guide rail.

9. The graphite boat loading and unloading equipment according to claim 1, characterized in that: The first direction is parallel to the length direction of the graphite boat.

10. Photovoltaic cell preparation system, characterized in that: include: The graphite boat loading and unloading equipment according to any one of claims 1 to 9; The graphite boat conveying device is used for conveying the empty or fully loaded graphite boat group to the inlet and outlet, and receiving the empty or fully loaded graphite boat group outputted from the inlet and outlet.

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