Single crystal furnace and single crystal furnace insulation device

Abstract

The embodiments of the present application belong to the technical field of single crystal production equipment, and specifically relate to a single crystal furnace and a heat preservation device for the single crystal furnace. The embodiments of the present application aim to solve the problem that the relevant graphite soft felt has a poor heat preservation effect on the bottom of the single crystal furnace. The single crystal furnace and the heat preservation device for the single crystal furnace of the embodiments of the present application include a heat preservation box and a graphite felt. The heat preservation box defines a closed cavity. The heat preservation box is constructed with a gas channel, an electrode channel and a support rod channel that penetrate the heat preservation box along the axial direction of the heat preservation box. The electrode channel is used for the electrode of the single crystal furnace to pass through, and the support rod channel is used for the support rod of the single crystal furnace to pass through; the graphite felt is arranged in the cavity. By arranging the graphite felt in a closed heat preservation box, the corrosive gas in the single crystal furnace is isolated from the graphite felt, the gas corrosion of the graphite felt is reduced, so as to reduce the pulverization of the graphite felt, and improve the heat preservation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace. The bottom of the heat preservation box is constructed with a concave structure to enhance the heat preservation effect of the heat preservation box on the thermal field at the bottom of the single crystal furnace.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of single crystal production equipment, and in particular, to a single crystal furnace and a heat preservation device for the single crystal furnace. Background Art

[0002] In the design and operation of a single crystal furnace, the control of the thermal field is crucial, as it directly affects the growth quality and speed of the crystal. The bottom thermal field is an important part of the single crystal furnace thermal field, and its main function is to reduce the heat loss at the bottom and provide certain support.

[0003] In the related art, the bottom heat field of the single crystal furnace is insulated by laying soft graphite felt. However, the soft graphite felt has a poor insulation effect. Utility Model Content

[0004] In view of this, the main purpose of the embodiments of the present application is to provide a single crystal furnace and a heat preservation device for the single crystal furnace to solve the technical problem that the related graphite soft felt has poor heat preservation effect on the bottom of the single crystal furnace.

[0005] To achieve the above objectives, the present application provides a single crystal furnace heat preservation device, comprising:

[0006] An insulation box, which defines a closed cavity, is configured with a gas channel, an electrode channel and a support rod channel penetrating the insulation box along the axial direction of the insulation box, the electrode channel is used for the electrode of the single crystal furnace to pass through, the support rod channel is used for the support rod of the single crystal furnace to pass through, and the bottom of the insulation box is configured with a concave structure that is concave toward the inside of the insulation box;

[0007] The graphite felt is arranged in the cavity.

[0008] In some embodiments that may include the above embodiments, the recessed structure includes a groove, the groove is annular, and the groove is arranged around the periphery of the support rod channel.

[0009] In some embodiments that may include the above embodiments, the graphite felt is a chip felt, and the chip felt is filled in the cavity.

[0010] In some embodiments that may include the above embodiments, the gas channel and the electrode channel are arranged around the periphery of the support rod channel.

[0011] In some embodiments that may include the above embodiments, the insulation box includes:

[0012] A bottom plate, wherein the bottom plate is provided with a first air guide hole, a first support rod hole and a first electrode hole;

[0013] A top cover, the top cover is arranged above the bottom plate at intervals, the top cover is structured with a second air guide hole, a second supporting rod hole and a second electrode hole, the second air guide hole corresponds to the first air guide hole, the second supporting rod hole corresponds to the first supporting rod hole, and the second electrode hole corresponds to the first electrode hole;

[0014] An outer cylinder, the outer cylinder is arranged around the circumferential edges of the top cover and the bottom plate;

[0015] The sleeve assembly includes a gas guide sleeve, a support rod sleeve and an electrode sleeve, the gas guide sleeve having the gas channel therein, the gas guide sleeve connecting the first gas guide hole and the second gas guide hole, the support rod sleeve having the support rod channel, the support rod sleeve connecting the first support rod hole and the second support rod hole, the electrode sleeve having the electrode channel, the electrode sleeve connecting the first electrode hole and the second electrode hole.

[0016] In some embodiments that may include the above embodiments, the bottom plate and the outer cylinder are detachably connected, the outer cylinder and the top cover are detachably connected, and the bottom plate and the top cover are both detachably connected to the sleeve assembly.

[0017] In some embodiments that may include the above-mentioned embodiments, an edge of the bottom plate facing the top cover is constructed with a sunken surface, the sunken surface is farther away from the top cover than the side of the bottom plate facing the top cover, and an end of the outer tube away from the top cover abuts against the sunken surface.

[0018] In some embodiments that may include the above-mentioned embodiments, a limiting ring is constructed on the side of the top cover facing the bottom plate, and a gap is provided between the outer edge of the limiting ring and the outer edge of the top cover, the outer tube is arranged outside the limiting ring, and at least part of the top cover is accommodated in the gap, and one end of the outer tube away from the bottom plate abuts against the top cover.

[0019] In some embodiments that may include the above embodiments, the aperture of the first air guide hole is larger than the outer diameter of the air guide sleeve, and the aperture of the second air guide hole is smaller than the outer diameter of the air guide sleeve;

[0020] The diameter of the first supporting rod hole is larger than the outer diameter of the supporting rod sleeve, and the diameter of the second supporting rod hole is smaller than the outer diameter of the supporting rod sleeve;

[0021] The aperture of the first electrode hole is larger than the outer diameter of the electrode sleeve, and the aperture of the second electrode hole is smaller than the outer diameter of the electrode sleeve.

[0022] An embodiment of the present application also provides a single crystal furnace, comprising the heat preservation device of the single crystal furnace described in any one of the above embodiments.

[0023] The single crystal furnace and the heat preservation device of the single crystal furnace provided in the embodiment of the present application include a heat preservation box and a graphite felt. The heat preservation box defines a closed cavity. The heat preservation box is constructed with a gas channel, an electrode channel and a support rod channel that penetrate the heat preservation box along the axial direction of the heat preservation box. The electrode channel is used for the electrode of the single crystal furnace to pass through, and the support rod channel is used for the support rod of the single crystal furnace to pass through; the graphite felt is arranged in the cavity. By arranging the graphite felt in a closed heat preservation box, the corrosive gas in the single crystal furnace is isolated from the graphite felt, the gas corrosion of the graphite felt is reduced, so as to reduce the pulverization of the graphite felt, and improve the heat preservation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace. The bottom of the heat preservation box is constructed with a concave structure that is concave to the inside of the heat preservation box, so that the bottom part of the heat preservation box is suspended, reducing the contact area between the bottom of the heat preservation box and the bottom surface of the single crystal furnace, thereby reducing the heat transfer between the bottom of the heat preservation box and the bottom surface of the single crystal furnace, improving the heat preservation effect of the heat preservation box on the thermal field at the bottom of the single crystal furnace, and thus reducing the power consumption cost of the furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 A top view of a heat preservation device for a single crystal furnace provided in an embodiment of the present application;

[0026] Figure 2 for Figure 1 Section view from the middle AA direction Figure 1 ;

[0027] Figure 3 for Figure 1 Section view from the middle AA direction Figure 2 ;

[0028] Figure 4 A schematic diagram of the structure of a heater, an electrode, a support rod and a heat preservation device of a single crystal furnace provided in an embodiment of the application;

[0029] Figure 5 for Figure 4 Top view of the .

[0030] Description of reference numerals:

[0031] 10- Insulation box;

[0032] 101-cavity;

[0033] 110-bottom plate; 111-first air guide hole;

[0034] 112-first support rod hole; 113-first electrode hole;

[0035] 114-groove; 115-sunken surface;

[0036] 120-top cover; 121-second air guide hole;

[0037] 122-second support rod hole; 123-second electrode hole;

[0038] 124-limiting ring;

[0039] 130-outer cylinder;

[0040] 140-sleeve assembly; 141-gas guide sleeve;

[0041] 142-gas channel; 143-support rod sleeve;

[0042] 144-support rod channel; 145-electrode sleeve;

[0043] 146-electrode channel;

[0044] 20- support rod;

[0045] 30-heater;

[0046] 301-ring heater; 302-bottom heater;

[0047] 40-electrode;

[0048] 401 - first electrode; 402 - second electrode. DETAILED DESCRIPTION

[0049] First, those skilled in the art should understand that these implementations are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application. Those skilled in the art can make adjustments to them as needed to adapt to specific application scenarios.

[0050] Secondly, it should be noted that in the description of the embodiments of the present application, terms such as "inside" and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. This is only for the convenience of description and does not indicate or imply that the device or component must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present application.

[0051] In addition, it should be noted that in the description of the embodiments of the present application, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0052] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0053] As described in the background technology, the single crystal furnace in the related technology has the problem of poor insulation effect of the graphite felt on the bottom of the single crystal furnace. The applicant has found through research that the reason for this problem is that when the single crystal furnace is running, a large amount of impurity gas is mixed in the argon gas in the single crystal furnace. The high-temperature gas in the single crystal furnace blows and bakes the graphite felt, which easily corrodes the graphite felt and causes the graphite felt to be pulverized. The insulation effect of the pulverized graphite felt is reduced, resulting in a reduction in the insulation effect of the thermal field at the bottom of the single crystal furnace.

[0054] In view of the above technical problems, the embodiments of the present application provide a single crystal furnace and a heat preservation device for the single crystal furnace. By placing graphite felt in a closed heat preservation box, the corrosive gas in the single crystal furnace is isolated from the graphite felt, the corrosion of the graphite felt by the gas is reduced, so as to reduce the pulverization of the graphite felt and improve the heat preservation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace. In addition, the bottom of the heat preservation box is constructed with a concave structure that is concave toward the inside of the heat preservation box, so that the bottom part of the heat preservation box is suspended, reducing the contact area between the bottom of the heat preservation box and the bottom surface of the single crystal furnace, thereby reducing the heat transfer between the bottom of the heat preservation box and the bottom surface of the single crystal furnace, improving the heat preservation effect of the heat preservation box on the thermal field at the bottom of the single crystal furnace, and thus reducing the power consumption cost of the furnace.

[0055] The principles and features of the embodiments of the present application are described below in conjunction with the accompanying drawings. The examples given are only used to explain the embodiments of the present application and are not used to limit the scope of the embodiments of the present application.

[0056] refer to Figure 1 , Figure 2 and Figure 3 This embodiment provides a heat preservation device for a single crystal furnace, including a heat preservation box 10 and graphite felt (not shown in the drawings).

[0057] The shape of the heat preservation box 10 can match the bottom thermal field of the single crystal furnace. The heat preservation box 10 can define a closed cavity 101 , and the graphite felt is arranged in the cavity 101 .

[0058] When in use, the heat preservation device of the single crystal furnace of the embodiment of the present application is arranged at the bottom of the single crystal furnace to insulate the bottom thermal field of the single crystal furnace.

[0059] The heat preservation box 10 is configured with a gas passage 142 , an electrode passage 146 , and a support rod passage 144 penetrating the heat preservation box 10 along the axial direction Y of the heat preservation box 10 .

[0060] The gas channel 142 is used to connect the gases at both ends of the heat preservation box 10.

[0061] refer to Figure 4 and Figure 5 The electrode channel 146 is used for the electrode 40 of the heater 30 in the single crystal furnace to pass through.

[0062] The supporting rod channel 144 is used for the supporting rod 20 of the crucible of the single crystal furnace to pass through.

[0063] The insulation device of the single crystal furnace in the embodiment of the present application, by arranging the graphite felt in a closed insulation box 10, isolates the corrosive gas in the single crystal furnace from the graphite felt, reduces the rate at which the gas corrodes the graphite felt, reduces the powdering rate of the graphite felt, and improves the insulation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace.

[0064] In some possible implementations of the present application, the graphite felt may be scrap felt after the graphite felt scraps are broken into pieces, and the scrap felt may be filled in the cavity 101. Using scrap felt instead of finished graphite felt can improve the utilization rate of graphite felt and reduce the cost of using graphite felt.

[0065] In some possible implementations of the embodiments of the present application, the graphite felt may be a multi-layer flaky graphite felt, which is stacked, wherein the flaky graphite felt is also a finished graphite felt, and the flaky graphite felt may be provided with through holes so that the graphite felt can be passed through the gas channel 142, the electrode channel 146 and the support rod channel 144, so as to facilitate the arrangement of the graphite felt in the cavity 101.

[0066] In some possible implementations of the embodiments of the present application, the bottom of the insulation box 10 can be constructed with a recessed structure that is recessed into the interior of the insulation box 10. In this way, after the insulation device of the single crystal furnace is set in the single crystal furnace, the bottom portion of the insulation box 10 is suspended in the air, thereby reducing the contact area between the bottom of the insulation box 10 and the bottom surface of the single crystal furnace, thereby reducing the heat transfer between the bottom of the insulation box 10 and the bottom surface of the single crystal furnace, improving the insulation effect of the insulation box 10 on the thermal field at the bottom of the single crystal furnace, and thereby reducing the power consumption cost of the furnace table.

[0067] In addition, after the insulation device of the single crystal furnace is set in the single crystal furnace, since the bottom part of the insulation box 10 is suspended in the air, there is an air layer between the bottom of the insulation box 10 and the inner bottom surface of the single crystal furnace. The heat transfer in the air layer is gas transmission. Compared with the heat transfer between the solids between the bottom of the insulation box 10 and the inner bottom surface of the single crystal furnace, the transmission rate of the gas transmission is reduced, thereby reducing the heat transfer between the bottom of the insulation box 10 and the inner bottom surface of the single crystal furnace, and improving the insulation effect of the insulation box 10 on the thermal field at the bottom of the single crystal furnace.

[0068] In some possible implementations of the embodiments of the present application, the recessed structure may be a groove 114 , which is annular and surrounds the outer periphery of the support rod channel 144 .

[0069] The structure of the annular groove 114 allows the bottom of the insulation box 10 to be partially suspended, reducing the contact area between the bottom of the insulation box 10 and the bottom surface of the single crystal furnace, thereby reducing the heat transfer between the bottom of the insulation box 10 and the bottom surface of the single crystal furnace, improving the insulation effect of the insulation box 10 on the thermal field at the bottom of the single crystal furnace, and thereby reducing the power consumption cost of the furnace.

[0070] In addition, the annular groove 114 has a simple structure and is easy to process and construct at the bottom of the heat preservation box 10 .

[0071] In some possible implementations of the embodiments of the present application, the concave structure may be a curved surface that is concave toward the interior of the heat preservation box 10. The bottom of the heat preservation box 10 is constructed with a curved surface that is concave toward the interior of the heat preservation box 10, and the curved surface can make the bottom part of the heat preservation box 10 suspended in the air, thereby reducing the contact area between the bottom of the heat preservation box 10 and the bottom surface of the single crystal furnace, thereby reducing the heat transfer between the bottom of the heat preservation box 10 and the bottom surface of the single crystal furnace, improving the heat preservation effect of the heat preservation box 10 on the thermal field at the bottom of the single crystal furnace, and thus reducing the power consumption cost of the furnace.

[0072] In some possible implementations of the embodiments of the present application, the support rod channel 144 may be disposed at the central axis of the box body so as to match the position of the support rod 20 of the crucible.

[0073] There may be a plurality of gas channels 142 , and the number of gas channels 142 may be set according to the exhaust requirements of the single crystal furnace. For example, there may be two gas channels 142 .

[0074] The number of electrode channels 146 may be an even number. Since one heater 30 of the single crystal furnace corresponds to two electrodes 40, the number of electrode channels 146 may be arranged in pairs, and the number of pairs of electrode channels 146 may correspond to the number of heaters 30 of the single crystal furnace. Exemplarily, when the number of heaters 30 of the single crystal furnace is one, the number of electrode channels 146 in the heat preservation device of the single crystal furnace is a pair, i.e., two.

[0075] refer to Figure 4 and Figure 5 When the number of heaters 30 of the single crystal furnace is two, the number of electrode channels 146 in the heat preservation device of the single crystal furnace is two pairs, that is, four.

[0076] The gas channel 142 and the electrode channel 146 can be arranged around the periphery of the support rod channel 144. When the insulation device of the single crystal furnace is installed in the single crystal furnace, the interference between the support rod 20 and the electrode 40 can be reduced, making it easier to install the insulation device of the single crystal furnace in the single crystal furnace.

[0077] In some possible implementations of the present application, reference is made to Figure 1 , Figure 2 and Figure 3 The heat preservation box 10 can be assembled from a bottom plate 110 , a top cover 120 , an outer cylinder 130 and a sleeve assembly 140 .

[0078] The bottom plate 110 may be configured with a first air guide hole 111 , a first support rod hole 112 , and a first electrode hole 113 .

[0079] The top cover 120 is arranged above the bottom plate 110 at intervals, and is constructed with a second air guide hole 121, a second support rod hole 122 and a second electrode hole 123. The second air guide hole 121 corresponds to the first air guide hole 111, the second support rod hole 122 corresponds to the first support rod hole 112, and the second electrode hole 123 corresponds to the first electrode hole 113.

[0080] The outer cylinder 130 is disposed between the top cover 120 and the bottom plate 110 . The outer cylinder 130 surrounds the circumferential edges of the top cover 120 and the bottom plate 110 to close the circumferential edges between the top cover 120 and the bottom plate 110 .

[0081] The sleeve assembly 140 includes a gas guide sleeve 141 , a support rod sleeve 143 and an electrode sleeve 145 .

[0082] The gas guide sleeve 141 defines a gas channel 142 therein, and the gas guide sleeve 141 is connected to the first gas guide hole 111 and the second gas guide hole 121 .

[0083] The supporting rod sleeve 143 has a supporting rod channel 144 , and the supporting rod sleeve 143 is connected to the first supporting rod hole 112 and the second supporting rod hole 122 .

[0084] The electrode sleeve 145 has an electrode channel 146 , and the electrode sleeve 145 communicates with the first electrode hole 113 and the second electrode hole 123 .

[0085] In some possible implementations of the embodiments of the present application, the aperture of the first air guide hole 111 may be larger than the outer diameter of the air guide sleeve 141 , and the aperture of the second air guide hole 121 may be smaller than the outer diameter of the air guide sleeve 141 .

[0086] The aperture of the first supporting rod hole 112 may be larger than the outer diameter of the supporting rod sleeve 143 , and the aperture of the second supporting rod hole 122 may be smaller than the outer diameter of the supporting rod sleeve 143 .

[0087] The aperture of the first electrode hole 113 may be larger than the outer diameter of the electrode sleeve 145 , and the aperture of the second electrode hole 123 may be smaller than the outer diameter of the electrode sleeve 145 .

[0088] The bottom plate 110, the top cover 120, the outer cylinder 130 and the sleeve assembly 140 may be assembled according to the following steps:

[0089] Step 1: placing the base plate 110;

[0090] Step 2: insert the bottom end of the air guide sleeve 141 into the first air guide hole 111, insert the bottom end of the support rod sleeve 143 into the first support rod hole 112, and insert the bottom end of the electrode sleeve 145 into the first electrode hole 113;

[0091] Step 3: Place the outer cylinder 130 on the top of the bottom plate 110;

[0092] Step 4: placing the graphite felt in the cavity 101 surrounded by the bottom plate 110, the sleeve assembly 140 and the outer cylinder 130;

[0093] Step five: Set the top cover 120 on the top of the whole formed in step four, and make the top end of the gas guide sleeve 141, the top end of the support rod sleeve 143 and the top end of the electrode sleeve 145 abut against the side of the top cover 120 facing the bottom plate 110, and make the gas guide sleeve 141 communicate with the second gas guide hole 121, the support rod sleeve 143 communicate with the second support rod hole 122, and the electrode sleeve 145 communicate with the second electrode hole 123, so as to complete the assembly of the bottom plate 110, the top cover 120, the outer cylinder 130 and the sleeve assembly 140.

[0094] The order of the above steps 2 and 3 can be exchanged, and the assembly of the bottom plate 110, the top cover 120, the outer cylinder 130 and the sleeve assembly 140 can also be achieved.

[0095] refer to Figure 2 The aperture of the first air guiding hole 111 is larger than the outer diameter of the air guiding sleeve 141, so the air guiding sleeve 141 can be inserted into the first air guiding hole 111, and the hole wall of the first air guiding hole 111 is arranged outside the air guiding sleeve 141. The hole wall of the first air guiding hole 111 limits the air guiding sleeve 141, reduces the radial movement X of the air guiding sleeve 141 relative to the bottom plate 110, and improves the stability of the cooperation between the bottom plate 110 and the air guiding sleeve 141.

[0096] The aperture of the second air guide hole 121 is smaller than the outer diameter of the air guide sleeve 141. Therefore, the top end of the air guide sleeve 141 abuts against the side of the top cover 120 facing the bottom plate 110, thereby reducing the gap between the air guide sleeve 141 and the top cover 120, making it difficult for corrosive gas to enter the cavity 101 from the gap between the air guide sleeve 141 and the top cover 120, thereby reducing the rate at which gas corrodes the graphite felt, thereby reducing the pulverization rate of the graphite felt, and improving the insulation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace.

[0097] refer to Figure 2 The hole diameter of the first support rod hole 112 is larger than the outer diameter of the support rod sleeve 143, so the support rod sleeve 143 can be inserted into the first support rod hole 112, and the hole wall of the first support rod hole 112 is surrounded by the support rod sleeve 143. The hole wall of the first support rod hole 112 limits the support rod sleeve 143, reduces the radial X movement of the support rod sleeve 143 relative to the base plate 110 along the support rod sleeve 143, and improves the stability of the cooperation between the base plate 110 and the support rod sleeve 143.

[0098] The aperture of the second support rod hole 122 is smaller than the outer diameter of the support rod sleeve 143. Therefore, the top end of the support rod sleeve 143 abuts against the side of the top cover 120 facing the bottom plate 110, thereby reducing the gap between the support rod sleeve 143 and the top cover 120, making it difficult for corrosive gas to enter the cavity 101 from the gap between the support rod sleeve 143 and the top cover 120, thereby reducing the rate at which gas corrodes the graphite felt, thereby reducing the pulverization rate of the graphite felt, and improving the insulation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace.

[0099] The hole diameter of the first electrode hole 113 is larger than the outer diameter of the electrode sleeve 145, so the electrode sleeve 145 can be inserted into the first electrode hole 113. The hole wall of the first electrode hole 113 is arranged outside the electrode sleeve 145. The hole wall of the first electrode hole 113 limits the electrode sleeve 145, reduces the radial X movement of the electrode sleeve 145 relative to the bottom plate 110 along the electrode sleeve 145, and improves the stability of the fit between the bottom plate 110 and the electrode sleeve 145.

[0100] The aperture of the second electrode hole 123 is smaller than the outer diameter of the electrode sleeve 145. Therefore, the top end of the electrode sleeve 145 abuts against the side of the top cover 120 facing the bottom plate 110, thereby reducing the gap between the electrode sleeve 145 and the top cover 120, making it difficult for corrosive gas to enter the cavity 101 from the gap between the electrode sleeve 145 and the top cover 120, thereby reducing the rate at which gas corrodes the graphite felt, thereby reducing the pulverization rate of the graphite felt, and improving the insulation effect of the graphite felt on the thermal field at the bottom of the single crystal furnace.

[0101] In some possible implementations of the embodiments of the present application, the bottom plate 110 and the outer cylinder 130 are detachably connected, the outer cylinder 130 and the top cover 120 are detachably connected, and the bottom plate 110 and the top cover 120 are both detachably connected to the sleeve assembly 140. This makes it easy to replace the bottom plate 110, the top cover 120, the outer cylinder 130 or the sleeve assembly 140, respectively, without having to replace the entire insulation box 10 at the same time, thereby saving equipment costs.

[0102] In some possible implementations of the present application, reference is made to Figure 2 and Figure 3 The edge of the bottom plate 110 on the side facing the top cover 120 may be constructed with a sunken surface 115, and the sunken surface 115 is farther away from the top cover 120 than the side of the bottom plate 110 facing the top cover 120. The end of the outer cylinder 130 away from the top cover 120 may abut against the sunken surface 115, so that the sunken surface 115 and the side of the bottom plate 110 facing the top cover 120 form a step structure, and the step structure can limit the outer cylinder 130 and the bottom plate 110, reduce the radial X movement of the outer cylinder 130 relative to the bottom plate 110 along the outer cylinder 130, and make the structure of the insulation device of the single crystal furnace more stable.

[0103] In some possible implementations of the present application, reference is made to Figure 2 and Figure 3 A limiting ring 124 may be constructed on the side of the top cover 120 facing the bottom plate 110, and a gap D is provided between the outer edge of the limiting ring 124 and the outer edge of the top cover 120. The outer cylinder 130 is arranged outside the limiting ring 124, and at least a part of the outer cylinder 130 is accommodated in the gap D, and one end of the outer cylinder 130 away from the bottom plate 110 abuts against the top cover 120.

[0104] The limiting ring 124 can limit the position between the outer cylinder 130 and the top cover 120, reduce the radial movement X of the outer cylinder 130 relative to the top cover 120, and make the structure of the heat preservation device of the single crystal furnace more stable.

[0105] refer to Figure 1-Figure 5 The embodiment of the present application further provides a single crystal furnace, comprising a heater 30, a crucible, a support rod 20, an electrode 40 and the heat preservation device of the single crystal furnace in the above embodiment.

[0106] The heater 30 and the electrode 40 are electrically connected, and the electrode 40 is used to provide power for the heater 30. The electrode 40 is disposed in the electrode channel 146.

[0107] The top of the support rod 20 is connected to the crucible, and the support rod 20 supports the crucible and rotates with the crucible. The bottom of the support rod 20 is inserted into the support rod channel 144.

[0108] The gas channel 142 is used for gas conduction, and the impurity gas in the single crystal furnace is discharged to the outside of the single crystal furnace through the gas channel 142 .

[0109] In some possible implementations of the embodiments of the present application, the heater 30 may include a ring heater 301 and a bottom heater 302 .

[0110] The annular heater 301 can be arranged around the inner cavity of the single crystal furnace to form an annular heating area, which helps to provide uniform radial X-heat distribution.

[0111] The bottom heater 302 may be disposed on the top of the heat preservation box 10 and below the annular heater 301 to form a bottom heat field of the single crystal furnace.

[0112] The electrode 40 may include a first electrode 401 and a second electrode 402 .

[0113] The first electrode 401 is electrically connected to the annular heater 301 to provide power to the annular heater 301 .

[0114] The second electrode 402 is electrically connected to the bottom heater 302 to provide power to the bottom heater 302 .

[0115] The single crystal furnace in this embodiment includes the heat preservation device of the single crystal furnace in the above embodiment, wherein the specific structure, working principle and function of the heat preservation device of the single crystal furnace have been described in detail in the above embodiment and will not be repeated here.

[0116] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A heat preservation device for a single crystal furnace, characterized in that: include: A heat preservation box (10) is defined with a closed cavity (101); the heat preservation box (10) is configured with a gas channel (142), an electrode channel (146) and a support rod channel (144) penetrating the heat preservation box (10) along the axial direction of the heat preservation box (10); the electrode channel (146) is used for allowing an electrode (40) of a single crystal furnace to pass through; the support rod channel (144) is used for allowing a support rod (20) of the single crystal furnace to pass through; and the bottom of the heat preservation box (10) is configured with a recessed structure recessed toward the inside of the heat preservation box (10); Graphite felt is arranged in the cavity (101).

2. The heat preservation device for a single crystal furnace according to claim 1, characterized in that: The recessed structure comprises a groove (114), the groove (114) is annular, and the groove (114) is arranged around the periphery of the supporting rod channel (144).

3. The heat preservation device for a single crystal furnace according to claim 1, characterized in that: The graphite felt is a crumb felt, and the crumb felt is filled in the cavity (101).

4. The heat preservation device for a single crystal furnace according to claim 1, characterized in that: The gas channel (142) and the electrode channel (146) are arranged around the periphery of the support rod channel (144).

5. The heat preservation device for a single crystal furnace according to any one of claims 1 to 4, characterized in that: The heat preservation box (10) comprises: A bottom plate (110), wherein the bottom plate (110) is configured with a first air guide hole (111), a first support rod hole (112) and a first electrode hole (113); a top cover (120), the top cover (120) being arranged above the bottom plate (110) at intervals, the top cover (120) being configured with a second air guide hole (121), a second supporting rod hole (122) and a second electrode hole (123), the second air guide hole (121) corresponding to the first air guide hole (111), the second supporting rod hole (122) corresponding to the first supporting rod hole (112), and the second electrode hole (123) corresponding to the first electrode hole (113); An outer cylinder (130), the outer cylinder (130) being arranged around the circumferential edges of the top cover (120) and the bottom plate (110); A sleeve assembly (140) comprises a gas guide sleeve (141), a support rod sleeve (143) and an electrode sleeve (145); the gas guide sleeve (141) has a gas channel (142) therein; the gas guide sleeve (141) is connected to the first gas guide hole (111) and the second gas guide hole (121); the support rod sleeve (143) has a support rod channel (144); the support rod sleeve (143) is connected to the first support rod hole (112) and the second support rod hole (122); the electrode sleeve (145) has an electrode channel (146); the electrode sleeve (145) is connected to the first electrode hole (113) and the second electrode hole (123).

6. The heat preservation device for a single crystal furnace according to claim 5, characterized in that: The bottom plate (110) and the outer cylinder (130) are detachably connected, the outer cylinder (130) and the top cover (120) are detachably connected, and both the bottom plate (110) and the top cover (120) are detachably connected to the sleeve assembly (140).

7. The heat preservation device for a single crystal furnace according to claim 5, characterized in that: The edge of the bottom plate (110) on the side facing the top cover (120) is configured with a sunken surface (115), and the sunken surface (115) is further away from the top cover (120) than the side of the bottom plate (110) facing the top cover (120), and one end of the outer tube (130) away from the top cover (120) abuts against the sunken surface (115).

8. The heat preservation device for a single crystal furnace according to claim 5, characterized in that: A limiting ring (124) is constructed on one side of the top cover (120) facing the bottom plate (110), and a gap is provided between the outer edge of the limiting ring (124) and the outer edge of the top cover (120). The outer cylinder (130) is arranged outside the limiting ring (124), and at least a portion of the top cover (120) is accommodated in the gap. An end of the outer cylinder (130) away from the bottom plate (110) abuts against the top cover (120).

9. The heat preservation device for a single crystal furnace according to claim 5, characterized in that: The aperture of the first air guide hole (111) is larger than the outer diameter of the air guide sleeve (141), and the aperture of the second air guide hole (121) is smaller than the outer diameter of the air guide sleeve (141); The diameter of the first supporting rod hole (112) is larger than the outer diameter of the supporting rod sleeve (143), and the diameter of the second supporting rod hole (122) is smaller than the outer diameter of the supporting rod sleeve (143); The aperture of the first electrode hole (113) is larger than the outer diameter of the electrode sleeve (145), and the aperture of the second electrode hole (123) is smaller than the outer diameter of the electrode sleeve (145).

10. A single crystal furnace, characterized in that: A heat preservation device for a single crystal furnace comprising the heat preservation device as described in any one of claims 1 to 9.

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