A material transfer storage device for a glue leveling machine with the function of loading storage or unloading storage

By designing a material transfer storage device with lifting components and a drive motor, the problem of low automation in the prior art is solved, and the rapid and efficient storage and pick-up of wafers are achieved, which is suitable for large-scale production.

CN222743514UActive Publication Date: 2025-04-11SHANDONG LABOR VOCATIONAL & TECHN COLLEGE
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Patent Information

Application Number
CN202421535610.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-01
Publication Date
2025-04-11
Estimated Expiration
2034-07-01

AI Technical Summary

Technical Problem

The storage device of existing glue uniform machines has low degree of automation, which leads to inconvenience in loading and unloading of wafers and is difficult to be suitable for large-scale production.

Method used

A material transfer storage device is designed, including a support table, a first drive motor and a lifting assembly, which drives the bracket table and the wafer storage housing to move through the lifting assembly, and realizes fast and efficient storage and pick-up and placement with the conveying device, thereby increasing the degree of automation.

Benefits of technology

It realizes fast and efficient storage and pick-up of wafers, improves the degree of automation, facilitates loading and unloading operations, and is suitable for large-scale production.

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Abstract

The utility model discloses a material transfer storage device for a glue leveling machine with the function of material loading storage or material unloading storage. The material transfer storage device includes a support platform, a first drive motor, and a lifting assembly. The first drive motor and the lifting assembly are arranged on the support platform. A support platform is provided on the lifting assembly. A wafer storage shell is provided on the support platform. The power output end of the first drive motor is connected to the lifting assembly to drive the lifting assembly to drive the support platform to move. The lifting assembly includes a support shell, a screw rod, a screw rod nut, a guide rod, a support plate and a support platform of a vertical semi-enclosed structure; the screw rod nut is screwed on the screw rod, and through holes are respectively opened at one end and the middle position of the support plate. The through hole at one end of the support plate is sleeved on the guide rod, and the support platform is arranged at the other end of the support plate. Compared with the storage device in the prior art, the present device is convenient for loading and unloading materials, and has a high degree of automation, and is suitable for large-scale production.
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Description

Technical Field

[0001] The utility model relates to the field of photolithography technology process devices, in particular to a material transfer storage device for a glue spreader with the functions of material loading storage or material unloading storage. Background Art

[0002] In the process of using a glue machine to produce and process wafers, the loading and unloading storage of wafers is a very important link, and its degree of automation directly affects the production efficiency. The storage device used in the prior art is usually an ordinary storage box, and the stacking of wafers makes it inconvenient to load and unload materials, and the degree of automation is low, which is not suitable for large-scale production.

[0003] Designing a material transfer storage device for a glue leveling machine that is easy to use and has the functions of loading storage or unloading storage is an issue that needs to be solved urgently. Utility Model Content

[0004] The purpose of the utility model is to overcome the problems existing in the prior art and to provide a material transfer storage device. The device is convenient for loading and unloading materials and taking them out, and has a high degree of automation, and is suitable for large-scale production.

[0005] The utility model proposes the following technical solutions:

[0006] A material transfer and storage device for a glue leveling machine with the function of material loading and storage or material unloading storage, the material transfer and storage device comprises a support table, a first drive motor, and a lifting assembly, the first drive motor and the lifting assembly are arranged on the support table, the lifting assembly is provided with a support table, the support table is provided with a wafer storage shell, the power output end of the first drive motor is connected to the lifting assembly, and is used to drive the lifting assembly to drive the support table to move.

[0007] The lifting assembly includes a supporting shell, a screw rod, a screw rod nut, a guide rod, a supporting plate and a supporting platform of an upright semi-enclosed structure, the supporting shell is arranged on the supporting platform, a shell cover is arranged on the upper part of the supporting shell, the guide rod is vertically arranged in the supporting shell, the screw rod is arranged at the shell opening position of the supporting shell and is located in front of the guide rod, the lower part of the screw rod is rotatably arranged on the rotating shaft support, the rotating shaft support is arranged on the supporting platform, a columnar groove is arranged at a position corresponding to the lower end of the guide rod on the supporting platform, the lower end of the guide rod is arranged in the columnar groove and can rotate in the columnar groove, and rotating shaft holes are respectively arranged at positions corresponding to the screw rod and the guide rod on the shell cover, and the upper ends of the screw rod and the guide rod are respectively matched with the rotating shaft holes;

[0008] The screw nut is screwed onto the screw, and through holes are respectively opened at one end and the middle of the support plate. The through hole at one end of the support plate is sleeved on the guide rod, and the through hole at the middle of the support plate is sleeved and fixed on the screw nut;

[0009] The support platform is arranged at the other end of the supporting plate.

[0010] The shell cover is also provided with a sensor mounting seat, and a photoelectric sensor for position detection is provided on the sensor mounting seat. The detection probe of the photoelectric sensor is extended into the wafer storage shell, and the photoelectric sensor is electrically connected to the controller of the first drive motor.

[0011] The left and right sides of the wafer storage shell are correspondingly provided with strip-shaped raised plates arranged in the up-down direction, and a storage interlayer is formed between each two adjacent raised plates.

[0012] The lower end of the screw rod passes through the bearing support and the support platform, the lower end of the screw rod is provided with a transmission wheel, the power output end of the first drive motor passes through the support platform, and the power output end of the first drive motor is connected to the transmission wheel through a belt drive.

[0013] The above-mentioned material transfer storage device for a glue-spinning machine with a loading storage or unloading storage function has at least the following

[0014] Beneficial effects:

[0015] 1. In the present invention, a lifting assembly is provided to drive the platform to move, and then drive the wafer storage housing to move, and a conveying device such as a robot conveying device can be used to achieve fast and efficient wafer storage, with a higher degree of automation. The storage height of the wafer is easy to adjust through the lifting assembly, and it is more convenient to load and unload with the conveying device.

[0016] 2. In the present invention, the setting of the guide rod can make the screw rod drive the support plate to move more stably and also play a role of limiting.

[0017] 3. In the present invention, the setting of the photoelectric sensor is of extraordinary significance. The distance information monitored by the photoelectric sensor can be fed back to the motor controller of the first drive motor, so that the first drive motor drives the lifting component to rise or fall to the set position, and is used in conjunction with a wafer storage shell with an accommodating interlayer. When loading or unloading, when the external robotic arm conveying device places the wafer in the wafer storage shell, the monitoring of the photoelectric sensor causes the first drive motor to drive the wafer storage shell to rise or fall, so that when the robotic arm conveying device is loading, there is a corresponding space for the accommodating interlayer in the wafer storage shell corresponding to the robotic arm for loading, and when unloading, it is convenient to take the material.

[0018] 4. In the utility model, the lower end of the screw rod passes through the bearing support and the support platform, the lower end of the screw rod is provided with a transmission wheel, the power output end of the first drive motor passes through the support platform, and the power output end of the first drive motor is connected to the transmission wheel through a belt drive. The belt is arranged at the lower part of the support platform, and the space utilization is more reasonable.

[0019] 5. Compared with the storage devices in the prior art, this device is convenient for loading and unloading materials and has a high degree of automation, and is suitable for large-scale production. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the position relationship between the lifting assembly and the support platform of the embodiment of the utility model;

[0021] Figure 2 This is another schematic diagram of the positional relationship between the lifting assembly and the support platform of the embodiment of the utility model;

[0022] Figure 3 It is a schematic diagram of the position of the wafer storage housing on the tray according to an embodiment of the utility model;

[0023] Figure 4 It is a schematic diagram of the overall structure of the device of the embodiment of the utility model;

[0024] Figure 5 is another schematic diagram of the position of the wafer storage housing on the tray according to an embodiment of the utility model;

[0025] Among them, 110-support platform, 111-first drive motor, 112-support platform, 113-wafer storage shell, 120-support shell, 121-screw, 122-screw nut, 123-guide rod, 124-support plate, 125-shell cover, 126-rotating shaft support, 127-through hole, 128-sensor mounting seat, 129-photoelectric sensor, 130-raised plate, 131-accommodating interlayer, 132-transmission wheel, 133-belt. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] Please refer to Figure 1-Figure 5 As shown, a material transfer and storage device for a glue leveling machine with the function of material loading and storage or material unloading storage, the material transfer and storage device includes a support platform 110, a first drive motor 111, and a lifting component. The first drive motor 111 and the lifting component are arranged on the support platform 110, and a support platform 112 is arranged on the lifting component. A wafer storage shell 113 is arranged on the support platform 112. The power output end of the first drive motor 111 is connected to the lifting component for driving the lifting component to drive the support platform 112 to move.

[0028] By setting a lifting assembly to drive the platform 112 to move, and then drive the wafer storage housing 113 to move, it can cooperate with a conveying device such as a robot transmission device to achieve fast and efficient storage of wafers, with a higher degree of automation. The storage height of the wafer is easy to adjust through the lifting assembly, and it is more convenient to load and unload with the conveying device.

[0029] The lifting assembly includes a vertical semi-enclosed support shell 120, a screw rod 121, a screw nut 122, a guide rod 123, a support plate 124 and a support platform 112. The support shell 120 is arranged on the support platform 110. A shell cover 125 is arranged on the upper part of the support shell 120. The guide rod 123 is vertically arranged in the support shell 120. The screw rod 121 is arranged at the shell opening position of the support shell 120 and is located in front of the guide rod 123. The shell opening position is the shell unclosed position of the semi-enclosed support shell, that is, the shell opening The lower part of the screw rod 121 is rotatably arranged on the shaft support 126, and the shaft support 126 is arranged on the support platform 110. A columnar groove (not shown) is arranged at a position corresponding to the lower end of the guide rod 123 on the support platform 110, and the lower end of the guide rod 123 is arranged in the columnar groove and can rotate in the columnar groove. The shell cover 125 is provided with shaft holes (not shown) at positions corresponding to the screw rod 121 and the guide rod 123, and the upper ends of the screw rod 121 and the guide rod 123 are respectively matched with the shaft holes;

[0030] The screw nut 122 is screwed onto the screw 121, and through holes 127 are respectively provided at one end and the middle of the support plate 124. The through hole 127 at one end of the support plate 124 is sleeved on the guide rod 123, and the through hole 127 at the middle of the support plate 124 is sleeved and fixed on the screw nut 122.

[0031] The support platform 112 is disposed at the other end of the support plate 124 .

[0032] The setting of the guide rod can make the support plate move more stably when the lead screw drives it, and also plays a role of limiting.

[0033] The shell cover 125 is also provided with a sensor mounting seat 128, and the sensor mounting seat 128 is provided with a photoelectric sensor 129 for position detection. The detection probe of the photoelectric sensor 129 is extended into the wafer storage shell 113, and the photoelectric sensor 129 is electrically connected to the motor controller of the first drive motor 111;

[0034] Strip-shaped raised plates 130 arranged in the up-down direction are correspondingly disposed on the left and right sides of the wafer storage housing 113 , and an accommodating interlayer 131 is formed between each two adjacent raised plates 130 .

[0035] The setting of the photoelectric sensor is of great significance. The distance information monitored by it can be fed back to the motor controller of the first drive motor, so that the first drive motor drives the lifting component to rise or fall to the set position, and is used in conjunction with a wafer storage shell with an accommodating interlayer. When loading or unloading, when the external robotic arm conveyor places the wafer in the wafer storage shell, the first drive motor drives the wafer storage shell to rise or fall through the monitoring of the photoelectric sensor, so that when the robotic arm conveyor is loading, the corresponding position of the robotic arm in the wafer storage shell has a corresponding accommodating interlayer space for loading, and when unloading, it is convenient to take the material.

[0036] The lower end of the screw rod 121 passes through the bearing support 126 and the support platform 110, and the lower end of the screw rod 121 is provided with a transmission wheel 132. The power output end of the first drive motor 111 passes through the support platform 110, and the power output end of the first drive motor is connected to the transmission wheel 132 through a belt 133.

[0037] Placing the belt at the bottom of the support table makes space utilization more reasonable.

[0038] When the device is in use, since it has both a loading and storage function and a unloading and storage function, multiple devices can be set. When it is used as a device with a loading and storage function, it cooperates with an external device for wafer transfer to load materials, and wafers are placed in the wafer storage shell. Under the monitoring of the photoelectric sensor, the servo motor, i.e., the first drive motor, drives the lifting assembly and then drives the wafer storage shell to move, so that the storage layer in the wafer storage shell corresponding to the position where the wafer is to be placed corresponding to the robot arm is in a state where the wafer can be received, i.e., no wafer is placed. When it is used as a device with an unloading and storage function, it cooperates with an external device for wafer transfer to unload materials and take away the wafer. Under the monitoring of the photoelectric sensor, the servo motor, i.e., the first drive motor, drives the lifting assembly and then drives the wafer storage shell to move, so that the storage layer in the wafer storage shell corresponding to the position where the wafer is to be taken away corresponding to the robot arm is in a state where there is a wafer.

[0039] Compared with the storage devices in the prior art, the present device is convenient for loading and unloading materials and has a high degree of automation, and is suitable for large-scale production.

[0040] In the description of the present invention, the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "vertical", "horizontal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the purpose of describing the present invention rather than requiring the present invention to be constructed or operated in a specific position, and therefore cannot be understood as a limitation on the present invention. The terms "connected" and "connected" in the present invention should be understood in a broad sense, for example, it can be a connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate component. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0041] The above is a preferred embodiment of the present invention, and the description of the specific embodiment is only used to better understand the concept of the present invention. For ordinary technicians in this technical field, several improvements or equivalent substitutions can be made according to the principle of the present invention, and these improvements or equivalent substitutions are also considered to fall within the protection scope of the present invention.

Claims

1. A material transfer storage device for a glue-spinning machine with a loading storage or unloading storage function, characterized in that: The material transfer and storage device includes a support platform, a first drive motor, and a lifting assembly. The first drive motor and the lifting assembly are arranged on the support platform. A support platform is arranged on the lifting assembly. A wafer storage shell is arranged on the support platform. The power output end of the first drive motor is connected to the lifting assembly for driving the lifting assembly to drive the support platform to move.

2. The material transfer storage device for a glue spinning machine with a loading storage or unloading storage function as claimed in claim 1, characterized in that: The lifting assembly includes a supporting shell, a screw rod, a screw rod nut, a guide rod, a supporting plate and a supporting platform of an upright semi-enclosed structure, the supporting shell is arranged on the supporting platform, a shell cover is arranged on the upper part of the supporting shell, the guide rod is vertically arranged in the supporting shell, the screw rod is arranged at the shell opening position of the supporting shell and is located in front of the guide rod, the lower part of the screw rod is rotatably arranged on the rotating shaft support, the rotating shaft support is arranged on the supporting platform, a columnar groove is arranged at a position corresponding to the lower end of the guide rod on the supporting platform, the lower end of the guide rod is arranged in the columnar groove and can rotate in the columnar groove, and rotating shaft holes are respectively arranged at positions corresponding to the screw rod and the guide rod on the shell cover, and the upper ends of the screw rod and the guide rod are respectively matched with the rotating shaft holes; The screw nut is screwed onto the screw, and through holes are respectively opened at one end and the middle of the support plate. The through hole at one end of the support plate is sleeved on the guide rod, and the through hole at the middle of the support plate is sleeved and fixed on the screw nut; The support platform is arranged at the other end of the supporting plate.

3. The material transfer storage device for a glue spinning machine with a loading storage or unloading storage function as claimed in claim 2, characterized in that: The shell cover is also provided with a sensor mounting seat, and a photoelectric sensor for position detection is provided on the sensor mounting seat. The detection probe of the photoelectric sensor is extended into the wafer storage shell, and the photoelectric sensor is electrically connected to the controller of the first drive motor.

4. The material transfer storage device for a glue spinning machine with a loading storage or unloading storage function as claimed in claim 2, characterized in that: The left and right sides of the wafer storage shell are correspondingly provided with strip-shaped raised plates arranged in the up-down direction, and a storage interlayer is formed between each two adjacent raised plates.

5. The material transfer storage device for a glue leveling machine with a loading storage or unloading storage function as claimed in claim 2, characterized in that: The lower end of the screw rod passes through the bearing support and the support platform, the lower end of the screw rod is provided with a transmission wheel, the power output end of the first drive motor passes through the support platform, and the power output end of the first drive motor is connected to the transmission wheel through a belt drive.