Wafer position deviation detection alarm device

Abstract

The utility model discloses a wafer position deviation detection alarm device, and relates to the field of alarm devices. The device comprises a base, a side frame arranged on one side of the base, a detection camera arranged at the top in the side frame and a positioning assembly arranged on the base, the positioning assembly comprises a positioning disc and a positioning rod which are arranged on the end face of the top of the base, and an alarm unit comprises a buzzer arranged at the top in the side frame. According to the wafer position offset detection alarm device, the alarm mechanism is arranged on the basis of the detection camera, so that the alarm can be triggered under the offset connection state between the wafer main body and the positioning device except the function of triggering the alarm through detection of the detection camera; therefore, the accuracy of the position placement of the wafer main body in the transfer process can be ensured, so that the wafer main body can be accurately detected in the later period.

Description

Technical Field

[0001] The utility model relates to the technical field of alarm devices, in particular to a wafer position deviation detection alarm device. Background Art

[0002] During the processing process, the wafer needs to be transferred between various devices. For example, when identifying and detecting the notch of the wafer, the wafer will be transferred from a set of processing equipment to the detection equipment through mechanical devices such as robotic arms. Then the detection camera at the detection equipment will detect the accuracy of the wafer transfer position by the connection position between the wafer notch and the positioning rod.

[0003] Currently, a buzzer is set at the detection equipment. When the connection position between the wafer notch and the positioning rod after transfer deviates, the detection camera can activate the buzzer electrically connected to it, causing the buzzer to alarm so that the staff can adjust the wafer position in time.

[0004] When the wafer transfer is controlled by a robotic arm, when the robotic arm and the wafer are disconnected, the wafer will move down a short distance under the action of gravity. During the downward movement of the wafer, it is affected by the external environment, such as the air flow rate and the force generated by the collision between the wafer and the detection equipment, which will cause a position deviation between the wafer and the positioning rod of the detection equipment. However, when the deviation between the wafer and the positioning rod is small or the detection camera is damaged, it will affect the timeliness of the alarm device's alarm. To address the above problems, we propose a wafer position offset detection alarm device. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides an alarm device which solves the problem that when the wafer transfer is controlled by a robotic arm, when the robotic arm and the wafer are disconnected, the wafer is affected by the external environment during the downward movement, which may cause position deviation between the wafer and the positioning rod.

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: a wafer position deviation detection alarm device, comprising:

[0007] The detection unit comprises a base, a side frame arranged on one side of the base, a detection camera arranged on the top of the side frame, and a positioning component arranged on the base;

[0008] The positioning assembly includes a positioning plate and a positioning rod arranged on the top end surface of the base;

[0009] an alarm unit, including a buzzer disposed on the top of the side frame;

[0010] An alarm mechanism is provided inside the base, and the alarm mechanism comprises:

[0011] A connecting groove is provided inside the base, and the bottom end of the positioning rod is limitedly slid inside the connecting groove;

[0012] The switch is arranged inside the connecting groove, and the switch is turned on by the contact between the positioning rod and the switch.

[0013] Preferably, one end of the positioning rod extending to the inside of the connecting groove is fixedly connected to a limiting plate, and the limiting plate is limitedly slidable on the inner wall of the connecting groove.

[0014] Preferably, a spring is provided between the top end surface of the limiting plate and the inner top of the connecting groove, and the spring is sleeved on the outer wall of one end of the positioning rod.

[0015] Preferably, the bottom end surface of the limit plate is close to the top end surface of the switch, and the switch and the buzzer are adapted to each other.

[0016] Preferably, a positioning plate is fixedly connected to the top end surface of the base, and a wafer body is placed on the top end surface of the positioning plate.

[0017] Preferably, a notch is provided on the outer wall of the wafer body, and the wafer body is limitedly connected to the positioning rod through the notch.

[0018] Preferably, the detection camera is located directly above the positioning rod, and one end of the positioning rod extends to the upper part of the positioning plate.

[0019] The utility model discloses a wafer position offset detection alarm device, which has the following beneficial effects: the wafer position offset detection alarm device, by arranging an alarm mechanism on the basis of a detection camera, enables not only the function of the detection camera to trigger the alarm through detection, but also the alarm to be triggered in the offset connection state between the wafer body and the positioning device, thereby ensuring the accuracy of the position placement of the wafer body during the transportation process, so as to facilitate the accurate detection of the wafer body at a later time. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the wafer body and the notch structure of the utility model;

[0023] Figure 3 This is a schematic diagram of the positioning plate and positioning rod structure of the utility model;

[0024] Figure 4 This is a plan view of the base and positioning rod structure of the utility model.

[0025] In the figure, 1. base; 101. positioning plate; 102. positioning rod; 103. side frame; 104. detection camera; 105. buzzer; 2. wafer body; 201. notch; 301. connecting groove; 302. switch; 303. limit plate; 304. spring. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model is described clearly and completely. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] The embodiment of the present application provides an alarm device to solve the problem that when the wafer transfer is controlled by a robotic arm, when the robotic arm and the wafer are disconnected, the wafer is affected by the external environment during the downward movement, which may cause position deviation between the wafer and the positioning rod, thereby realizing timely alarm of the alarm device.

[0028] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0029] The utility model embodiment discloses a wafer position deviation detection alarm device.

[0030] According to the attached Figure 1-4 As shown, the detection unit includes a base 1, a side frame 103 arranged on one side of the base 1, a detection camera 104 arranged at the top of the side frame 103, and a positioning component arranged on the base 1, the positioning component includes a positioning plate 101 and a positioning rod 102 arranged on the top end surface of the base 1, and an alarm unit includes a buzzer 105 arranged at the top of the side frame 103.

[0031] A positioning plate 101 is fixedly connected to the top end face of the base 1, and a wafer body 2 is placed on the top end face of the positioning plate 101. A notch 201 is provided on the outer wall of the wafer body 2. The wafer body 2 is limitedly connected to the positioning rod 102 through the notch 201. The detection camera 104 is located directly above the positioning rod 102, and one end of the positioning rod 102 extends to the upper part of the positioning plate 101.

[0032] The wafer body 2 is placed on the positioning plate 101 by a robotic arm, and the notch 201 of the wafer body 2 needs to be positioned corresponding to the positioning rod 102 set on the positioning plate 101. During this process, the connection position between the notch 201 and the positioning rod 102 can be detected by the detection camera 104. When the detection camera 104 detects that the notch 201 is not positioned and connected to the positioning rod 102, the detection camera 104 will trigger the buzzer 105 electrically connected to it to perform an alarm operation, so as to adjust the placement position of the wafer body 2 in time, so as to accurately detect the wafer body 2. The robotic arm is not directly drawn in the attached figure.

[0033] An alarm mechanism is provided inside the base 1. Through the alarm mechanism, an alarm can be given to the wafer body 2 that has position displacement during the detection of the wafer body 2. The alarm mechanism includes a connecting groove 301. The connecting groove 301 is opened inside the base 1. The bottom end of the positioning rod 102 is limited and slid inside the connecting groove 301. One end of the positioning rod 102 extending to the inside of the connecting groove 301 is fixedly connected to a limiting plate 303. The limiting plate 303 is limited and slid on the inner wall of the connecting groove 301. A spring 304 is provided between the top end surface of the limiting plate 303 and the inner top of the connecting groove 301. The spring 304 is sleeved on the positioning rod 10 2, the switch 302 is arranged inside the connecting groove 301, the switch 302 is turned on by the contact between the positioning rod 102 and the switch 302, the switch 302 is adapted to the buzzer 105, the bottom end face of the limit plate 303 is close to the top end face of the switch 302, the switch 302 is a self-resetting flat head button of LAY37-11BN, when the wafer body 2 presses the positioning rod 102, the positioning rod 102 moves downward under the pressure, so that the positioning rod 102 presses the switch 302, so that the switch 302 is triggered, and when the positioning rod 102 is not in contact with the switch 302, the switch 302 is closed.

[0034] The wafer position offset detection alarm device, by providing an alarm mechanism on the basis of the detection camera 104, enables not only the function of the detection camera 104 to trigger the alarm through detection, but also the alarm to be triggered in the offset connection state between the wafer body 2 and the positioning device, thereby ensuring the accuracy of the position placement of the wafer body 2 during the transportation process, so as to facilitate the accurate detection of the wafer body 2 at a later time.

[0035] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A wafer position deviation detection alarm device, comprising: A detection unit, comprising a base (1), a side frame (103) arranged on one side of the base (1), a detection camera (104) arranged on the top of the side frame (103), and a positioning component arranged on the base (1); The positioning assembly comprises a positioning plate (101) and a positioning rod (102) arranged on the top end surface of the base (1); An alarm unit, comprising a buzzer (105) disposed on the top of the side frame (103); It is characterized in that an alarm mechanism is arranged inside the base (1), and the alarm mechanism comprises: A connecting groove (301) is provided inside the base (1), and the bottom end of the positioning rod (102) is limitedly slid inside the connecting groove (301); The switch (302) is arranged inside the connection groove (301), and the switch (302) is turned on through the contact between the positioning rod (102) and the switch (302).

2. A wafer position deviation detection alarm device according to claim 1, characterized in that: One end of the positioning rod (102) extending to the interior of the connecting groove (301) is fixedly connected to a limiting plate (303), and the limiting plate (303) is limitedly slidable on the inner wall of the connecting groove (301).

3. A wafer position deviation detection alarm device according to claim 2, characterized in that: A spring (304) is provided between the top end surface of the limiting plate (303) and the inner top of the connecting groove (301), and the spring (304) is sleeved on the outer wall of one end of the positioning rod (102).

4. The wafer position deviation detection alarm device according to claim 3, characterized in that: The bottom end surface of the limiting plate (303) is close to the top end surface of the switch (302), and the switch (302) and the buzzer (105) are adapted to each other.

5. The wafer position deviation detection alarm device according to claim 1, characterized in that: A positioning plate (101) is fixedly connected to the top end surface of the base (1), and a wafer body (2) is placed on the top end surface of the positioning plate (101).

6. The wafer position deviation detection alarm device according to claim 5, characterized in that: The outer wall of the wafer body (2) is provided with a notch (201), and the wafer body (2) is position-limitingly connected to the positioning rod (102) via the notch (201).

7. The wafer position deviation detection alarm device according to claim 1, characterized in that: The detection camera (104) is located directly above the positioning rod (102), and one end of the positioning rod (102) extends to the upper part of the positioning plate (101).

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