Furnace body for edge passivation and atomic layer deposition equipment

Abstract

The utility model provides a furnace body for edge passivation and atomic layer deposition equipment, and relates to the technical field of atomic layer deposition, the furnace body for edge passivation comprises an outer furnace body assembly, an inner furnace body and a heating assembly, the inner part of the outer furnace body assembly is provided with a furnace chamber; the inner furnace body is arranged in the furnace chamber and is provided with an inner cooling flow channel, and a liquid inlet and a liquid outlet which are communicated with the inner cooling flow channel; the inner cooling runner is used for cooling the heated inner furnace body; the heating assembly is arranged on at least one side of the inner furnace body and used for heating the inner furnace body. The inner furnace body is provided with the inner cooling flow channel, and the inner furnace body is provided with the liquid inlet and the liquid outlet which are communicated with the inner cooling flow channel, so that when the inner furnace body needs to be cooled, a working medium is input into the inner cooling flow channel through the liquid inlet, and the inner furnace body is cooled by utilizing the working medium; and the inner furnace body can be rapidly cooled, so that the process time is greatly shortened, and the yield of equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of atomic layer deposition, in particular to a furnace body and atomic layer deposition equipment for edge passivation. Background Art

[0002] With the application of half-cut cell technology in cell packaging, laser non-destructive scribing has been promoted. Laser scribing makes it easy for photogenerated carriers generated by the photoelectric effect to recombine at the edge, which has a certain impact on the electrical properties of the cell, and thus causes packaging power loss from the cell to the module.

[0003] Edge passivation of the cut edges of the battery cell can effectively compensate for the power loss of the battery cell. Currently, the mainstream edge passivation process is passivation + annealing, and the furnace tube needs to be entered and exited at room temperature, which requires cooling the inner furnace body. However, the cooling efficiency of the existing inner furnace body is low, resulting in a long process time. Utility Model Content

[0004] The utility model provides a furnace body for edge passivation, which is used to solve the problems of low cooling efficiency and long process time in the prior art.

[0005] The utility model provides a furnace body for edge passivation, comprising:

[0006] An outer furnace body assembly, wherein the outer furnace body assembly has a furnace cavity inside;

[0007] An inner furnace body is arranged in the furnace cavity, an inner furnace port is arranged at one end of the inner furnace body, the inner furnace body is provided with an inner cooling flow channel, and a liquid inlet and a liquid outlet communicated with the inner cooling flow channel; the inner cooling flow channel is used to cool the inner furnace body after being heated;

[0008] A heating component is arranged on at least one side of the inner furnace body, and the heating component is used to heat the inner furnace body.

[0009] According to a furnace body for edge passivation provided by the utility model, the inner cooling channel is arranged inside the inner furnace body or on the outer surface of the inner furnace body.

[0010] According to a furnace body for edge passivation provided by the utility model, the inner cooling channel includes a plurality of inner channel units, the plurality of inner channel units are arranged at intervals on the outer surface of the inner furnace body and extend along the length direction of the inner furnace body; the plurality of inner channel units are connected end to end in sequence.

[0011] According to a furnace body for edge passivation provided by the utility model, the distances between two adjacent inner flow channel units are equal.

[0012] According to a furnace body for edge passivation provided by the utility model, the heating assembly comprises:

[0013] A plurality of heaters are provided on the outer periphery of the inner furnace body.

[0014] According to a furnace body for edge passivation provided by the utility model, the outer furnace body assembly comprises:

[0015] An outer furnace body, wherein the furnace cavity is located inside the outer furnace body, ports are provided at both ends of the outer furnace body, and the outer furnace body is provided with an external cooling flow channel;

[0016] A transfer furnace door, the transfer furnace door is arranged at a port at one end of the outer furnace body, and the transfer furnace door is provided with an outer furnace port communicating with the furnace cavity;

[0017] A rear furnace door is arranged at a port at the other end of the outer furnace body.

[0018] According to a furnace body for edge passivation provided by the utility model, a first flange is provided at a port at one end of the outer furnace body, the transfer furnace door is connected to the first flange and seals with the first flange; a second flange is provided at a port at the other end of the outer furnace body, the rear furnace door is connected to the second flange and seals with the second flange.

[0019] According to a furnace body for edge passivation provided by the utility model, a first cooling channel is arranged inside the first flange, and the first flange is provided with an inlet and an outlet connected to the first cooling channel; a second cooling channel is arranged inside the second flange, and the second flange is provided with an inlet and an outlet connected to the second cooling channel.

[0020] According to a furnace body for edge passivation provided by the utility model, the transfer furnace door is provided with two flow channel connectors, one of the flow channel connectors is connected to the liquid inlet through a connecting pipeline, and the other flow channel connector is connected to the liquid outlet through a connecting pipeline.

[0021] The utility model also provides an atomic layer deposition device, which comprises the furnace body for edge passivation as described in any one of the above items.

[0022] The utility model provides a furnace body for edge passivation, by arranging an inner cooling channel in the inner furnace body, and arranging a liquid inlet and a liquid outlet on the inner furnace body which are connected with the inner cooling channel. When the inner furnace body needs to be cooled, a working medium is input into the inner cooling channel through the liquid inlet, and the inner furnace body is cooled by the working medium. Since the inner cooling channel is directly arranged on the inner furnace body, the inner furnace body can be cooled quickly, thereby greatly shortening the process time and improving the output of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 This is one of the three-dimensional structural schematic diagrams of a furnace body for edge passivation provided by the utility model.

[0025] Figure 2 It is a schematic diagram of the three-dimensional structure of a furnace body for edge passivation after the rear furnace door is removed provided by the utility model.

[0026] Figure 3 This is the second schematic diagram of the three-dimensional structure of the furnace body for edge passivation provided by the utility model.

[0027] Figure 4 It is a three-dimensional structural schematic diagram of the inner furnace body provided by the utility model.

[0028] Figure numerals: 10, outer furnace body assembly; 11, outer furnace body; 12, transfer furnace door; 13, outer furnace mouth; 14, rear furnace door; 15, first flange; 16, second flange; 17, outer cooling flow channel; 18, outer flow channel unit; 19, outer supporting leg; 20, inner furnace body; 21, inner furnace mouth; 22, inner cooling flow channel; 23, inner flow channel unit; 30, heating assembly; 31, heater. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0031] In the embodiments of the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] Combine the following Figure 1-Figure 4 The specific structure of the furnace body for edge passivation of the utility model is described.

[0033] Figure 1 One of the three-dimensional structural diagrams of the furnace body for edge passivation provided by the utility model is illustrated. Figure 2 The schematic diagram of the three-dimensional structure of the furnace body for edge passivation after the rear furnace door is removed provided by the utility model is illustrated. Figure 3 The second schematic diagram of the three-dimensional structure of the furnace body for edge passivation provided by the utility model is illustrated as follows: Figures 1 to 3 As shown, the furnace body for edge passivation includes an outer furnace body assembly 10, an inner furnace body 20 and a heating assembly 30. The outer furnace body assembly 10 has a furnace cavity inside; the inner furnace body 20 is arranged in the furnace cavity, and an inner furnace port 21 is arranged at one end of the inner furnace body 20. The inner furnace body 20 is provided with an inner cooling channel 22, and a liquid inlet and a liquid outlet communicated with the inner cooling channel 22; the inner cooling channel 22 is used to cool the heated inner furnace body 20. The heating assembly 30 is arranged on at least one side of the inner furnace body 20, and the heating assembly 30 is used to heat the inner furnace body 20.

[0034] The utility model provides a furnace body for edge passivation, by arranging an inner cooling channel 22 in the inner furnace body 20, and arranging a liquid inlet and a liquid outlet connected with the inner cooling channel 22 on the inner furnace body 20. When the inner furnace body 20 needs to be cooled, a working medium is input into the inner cooling channel 22 through the liquid inlet, and the inner furnace body 20 is cooled by the working medium. Since the inner cooling channel 22 is directly arranged on the inner furnace body 20, the inner furnace body 20 can be cooled quickly, which greatly shortens the process time and improves the output of the equipment.

[0035] In one embodiment of the present invention, Figure 4 The three-dimensional structure diagram of the inner furnace body provided by the utility model is illustrated as follows: Figure 4 As shown, the inner furnace body 20 is a hollow tubular structure, and the material of the inner furnace body 20 is a metal material. In this embodiment, the cross section of the inner furnace body 20 is rectangular, of course, the shape of the cross section of the inner furnace body 20 is not limited thereto, and can also be a regular polygon, a circle or other shapes.

[0036] In a preferred embodiment of the present invention, the other end of the inner furnace body 20 is tapered, and the cross-sectional area of ​​the other end of the inner furnace body 20 gradually decreases in the direction close to the rear furnace door 14. By setting the other end of the inner furnace body 20 to be tapered, the inner furnace body 20 can be easily passed through the outer furnace port 13.

[0037] In one embodiment of the present invention, Figure 4 As shown, the inner cooling channel 22 is arranged inside the inner furnace body 20 or on the outer surface of the inner furnace body 20. By directly arranging the inner cooling channel 22 in the inner furnace body 20, the heat exchange efficiency between the working medium and the inner furnace body 20 is increased, the inner furnace body 20 can be quickly cooled, the process time is greatly shortened, and the output of the equipment is improved.

[0038] It should be noted that the inner cooling channel 22 is disposed inside the inner furnace body 20 and may be disposed inside the side wall of the inner furnace body 20 or on the inner surface of the inner furnace body 20 .

[0039] In one embodiment of the present invention, Figure 4 As shown, the inner cooling channel 22 includes a plurality of inner channel units 23, which are arranged at intervals on the outer surface of the inner furnace body 20 and extend along the length direction of the inner furnace body 20. In this embodiment, the inner channel units 23 extend along a straight line, and two adjacent inner channel units 23 are arranged in parallel. Of course, the inner channel units 23 can also extend along a wavy line or a spiral line. In this embodiment, the inner channel unit 23 extends from one end of the inner furnace body 20 to the other end of the inner furnace body 20, and the length of the inner channel unit 23 is slightly less than the length of the inner furnace body 20. Of course, the length of the inner channel unit 23 can also be half or two-thirds of the length of the inner furnace body 20.

[0040] The plurality of inner flow channel units 23 are connected end to end in sequence to form the inner cooling flow channel 22. Figure 4 As shown, the left end of one of the two adjacent inner flow channel units 23 is the head end, and the right end is the tail end; the left end of the other inner flow channel unit 23 is the tail end, and the right end is the head end; by connecting the head end of one inner flow channel unit 23 with the tail end of another inner flow channel unit 23, all the inner flow channel units 23 are connected together.

[0041] Furthermore, an internal connecting channel is arranged between two adjacent internal flow channel units 23, and the internal connecting channel is arranged vertically to the two adjacent internal flow channel units 23, one end of the internal connecting channel is connected to the head end of one internal flow channel unit 23, and the other end of the internal connecting channel is connected to the tail end of another internal flow channel unit 23.

[0042] In one embodiment of the present invention, Figure 4As shown, the distance between two adjacent inner flow channel units 23 is equal, which can ensure that the inner flow channel units 23 are evenly distributed on the inner furnace body 20, ensuring uniform heat exchange between the working medium and the inner furnace body 20. Of course, the distance between two adjacent inner flow channel units 23 can also be unequal, which is determined according to actual needs.

[0043] In one embodiment of the present invention, Figure 4 As shown, the bottom of the inner furnace body 20 is provided with inner supporting legs, which are used to support the inner furnace body 20 so that there is a certain gap between the inner furnace body 20 and the outer furnace body 11, providing installation space for the heating assembly 30. In this embodiment, the bottom of the inner furnace body 20 is provided with a plurality of inner supporting legs, which are arranged at intervals along the length direction of the inner furnace body 20.

[0044] Preferably, a bracket is provided inside the outer furnace body 11 , and the bracket is located below the inner furnace body 20 , and the inner supporting legs abut against the bracket, so that a certain distance is maintained between the inner furnace body 20 and the outer furnace body 11 .

[0045] In one embodiment of the present invention, Figure 4 As shown, the heating assembly 30 includes a plurality of heaters 31, and the plurality of heaters 31 are arranged on the outer periphery of the inner furnace body 20. Specifically, in this embodiment, the heating assembly 30 includes four heaters 31, and the heaters 31 are in a plate-like structure. The four heaters 31 are arranged one by one on the upper surface, the lower surface and the two side surfaces of the inner furnace body 20, and the heaters 31 are in contact with the surface of the inner furnace body 20.

[0046] Furthermore, the heater 31 is connected to the inner furnace body 20 via fasteners, and the fasteners may be screws or other fasteners.

[0047] In one embodiment of the present invention, Figures 1 to 3 As shown, the outer furnace body assembly 10 includes an outer furnace body 11, a transfer furnace door 12 and a rear furnace door 14. The furnace cavity is located inside the outer furnace body 11. In this embodiment, the outer furnace body 11 is a tubular structure, and the cross section of the outer furnace body 11 is circular. Of course, the cross section of the outer furnace body 11 can also be rectangular, regular polygonal or other shapes. Ports are provided at both ends of the outer furnace body 11, and the inner diameters of the two ports of the outer furnace body 11 can be the same or different. The outer furnace body 11 is provided with an external cooling channel 17, which is used to cool the outer furnace body 11 so that the temperature of the outer furnace body 11 is kept low to avoid scalding or other safety accidents.

[0048] The transfer furnace door 12 is arranged at a port at one end of the outer furnace body 11, and the transfer furnace door 12 is provided with an outer furnace port 13 communicating with the furnace cavity, and the shape of the outer furnace port 13 is adapted to the shape of the cross section of the inner furnace body 20. In this embodiment, the outer furnace port 13 is rectangular, and the cross-sectional area of ​​the outer furnace port 13 is larger than the cross-sectional area of ​​the inner furnace body 20, so that the inner furnace body 20 can freely pass through the outer furnace port 13. The rear furnace door 14 is arranged at a port at the other end of the outer furnace body 11, and the rear furnace door 14, the transfer furnace door 12 and the outer furnace body 11 cooperate to surround the sealed furnace cavity.

[0049] In one embodiment of the present invention, the outer cooling channel 17 is disposed inside the outer furnace body 11 or on the outer surface of the outer furnace body 11. By directly disposing the outer cooling channel 17 on the outer furnace body 11, the heat exchange efficiency between the working medium and the outer furnace body 11 is increased, and the outer furnace body 11 can be quickly cooled.

[0050] It should be noted that the outer cooling channel 17 is disposed inside the outer furnace body 11 , and may be inside the side wall of the outer furnace body 11 , or may be the inner surface of the outer furnace body 11 .

[0051] In one embodiment of the present invention, Figures 1 to 3 As shown, the outer cooling channel 17 includes a plurality of outer channel units 18, which are arranged at intervals on the outer surface of the outer furnace body 11 and extend along the length direction of the outer furnace body 11. In this embodiment, the outer channel unit 18 extends along a straight line, and two adjacent outer channel units 18 are arranged in parallel. Of course, the outer channel unit 18 can also extend along a wavy line or a spiral line. In this embodiment, the outer channel unit 18 extends from one end of the outer furnace body 11 to the other end of the outer furnace body 11, and the length of the outer channel unit 18 is slightly less than the length of the outer furnace body 11. Of course, the length of the outer channel unit 18 can also be half or two-thirds of the length of the outer furnace body 11.

[0052] The plurality of outer flow channel units 18 are connected end to end in sequence to form the outer cooling flow channel 17. Figure 2 As shown, the left end of one of the two adjacent outer flow channel units 18 is the head end, and the right end is the tail end; the left end of the other outer flow channel unit 18 is the tail end, and the right end is the head end; by connecting the head end of one outer flow channel unit 18 with the tail end of another outer flow channel unit 18, all the outer flow channel units 18 are connected together.

[0053] Furthermore, an external connecting channel is arranged between two adjacent external flow channel units 18 , and the external connecting channel is arranged vertically to the two adjacent external flow channel units 18 , one end of the external connecting channel is connected to the head end of one external flow channel unit 18 , and the other end of the external connecting channel is connected to the tail end of another external flow channel unit 18 .

[0054] In one embodiment of the present invention, Figures 1 to 3As shown, the outer furnace body 11 is provided with a connection inlet and a connection outlet, the connection inlet is communicated with the outer flow channel unit 18 located at the head end of the outer cooling flow channel 17, and the connection outlet is communicated with the outer flow channel unit 18 located at the tail end of the outer cooling flow channel 17. The working fluid enters the outer cooling flow channel 17 through the connection inlet, exchanges heat with the outer furnace body 11 in the outer cooling flow channel 17, and then flows out through the connection outlet.

[0055] In one embodiment of the present invention, Figures 1 to 3 As shown, a first flange 15 is provided at a port at one end of the outer furnace body 11, and the transfer furnace door 12 is connected to the first flange 15 and is sealed with the first flange 15. Specifically, the first flange 15 is welded to the port at one end of the outer furnace body 11, or is integrally formed. The transfer furnace door 12 and the first flange 15 are both provided with a plurality of through holes, and the transfer furnace door 12 and the first flange 15 are connected by bolts in the through holes. A sealing ring is provided between the transfer furnace door 12 and the first flange 15, and the sealing ring is sealed with the transfer furnace door 12 and the first flange 15.

[0056] The port at the other end of the outer furnace body 11 is provided with a second flange 16, and the rear furnace door 14 is connected to the second flange 16 and is sealed with the second flange 16. Specifically, the second flange 16 is welded to the port at the other end of the outer furnace body 11, or is integrally formed. The rear furnace door 14 and the second flange 16 are both provided with a plurality of through holes, and the rear furnace door 14 and the second flange 16 are connected by bolts in the through holes. A sealing ring is provided between the rear furnace door 14 and the second flange 16, and the sealing ring is sealed with the rear furnace door 14 and the second flange 16.

[0057] In one embodiment of the present invention, Figures 1 to 3 As shown, the first flange 15 is provided with a first cooling channel inside, the first cooling channel is annular, and the first flange 15 is provided with an inlet and an outlet connected to the first cooling channel; preferably, the inlet and outlet of the first cooling channel are arranged on the side of the first flange 15 facing the second flange 16, so that the first flange 15 can be used to protect the inlet and outlet of the first cooling channel from external impact, and the pipeline connected to the inlet and outlet can be prevented from affecting the movement of the inner furnace door and the outer furnace door. During operation, the first flange 15 can be cooled by inputting working fluid into the first cooling channel to prevent the sealing ring from being damaged due to excessive temperature of the first flange 15.

[0058] A second cooling channel is provided inside the second flange 16. The second cooling channel is annular, and the second flange 16 is provided with an inlet and an outlet connected to the second cooling channel. Preferably, the inlet and the outlet of the second cooling channel are provided on the side of the second flange 16 facing the first flange 15. During operation, the second flange 16 can be cooled by inputting working fluid into the second cooling channel to prevent the sealing ring from being damaged due to excessive temperature of the second flange 16.

[0059] It should be noted that the temperature of the first flange 15, the second cooling channel and the outer cooling channel 17 are continuously fed with working fluid to cool down the furnace during operation, and the inner cooling channel 22 is fed with working fluid after the inner furnace body 20 is heated.

[0060] In one embodiment of the present invention, Figures 1 to 3 As shown, an outer supporting leg 19 is provided at the bottom of the outer furnace body 11, and the outer supporting leg 19 is used to support the outer furnace body 11. In this embodiment, a plurality of outer supporting legs 19 are provided at the bottom of the outer furnace body 11, and the plurality of outer supporting legs 19 are arranged at intervals along the length direction of the outer furnace body 11.

[0061] In one embodiment of the utility model, the transfer furnace door 12 is provided with two flow channel connectors, one flow channel connector is connected to the liquid inlet through a connecting pipeline, and the other flow channel connector is connected to the liquid outlet through a connecting pipeline. When in use, the flow channel connector is connected to the external inner cavity water cooling system through an external pipeline, and the inner cavity water cooling system provides power for the inner cooling flow channel 22 to circulate the working medium. By providing a flow channel connector, it is convenient to connect with the inner cavity water cooling system, thereby improving assembly efficiency. In this embodiment, the connecting pipeline is a flexible water pipe. Of course, the specific type of the connecting pipeline is not limited to this, and it can also be other types of pipelines.

[0062] In a preferred embodiment of the present invention, the liquid inlet and the liquid outlet are arranged below one end of the inner furnace body 20, and there is a certain gap between the inner furnace port 21 and the transfer furnace door 12 to facilitate checking whether the flow channel connector and the connecting pipeline are leaking.

[0063] In a preferred embodiment of the present invention, the external pipeline is provided with a high-temperature electromagnetic valve, a pressure relief valve and a pressure gauge, and the water cooling state of the inner cooling channel 22 can be detected and controlled by the cooperation of the above devices.

[0064] The utility model also provides an atomic layer deposition device, which comprises the furnace body for edge passivation described in any one of the above embodiments.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A furnace for edge passivation, characterized in that: include: An outer furnace body component (10), wherein the outer furnace body component (10) has a furnace cavity inside; An inner furnace body (20) is arranged in the furnace cavity, an inner furnace opening (21) is arranged at one end of the inner furnace body (20), the inner furnace body (20) is provided with an inner cooling flow channel (22), and a liquid inlet and a liquid outlet communicated with the inner cooling flow channel (22); the inner cooling flow channel (22) is used to cool the inner furnace body (20) after being heated; A heating component (30) is arranged on at least one side of the inner furnace body (20), and the heating component (30) is used to heat the inner furnace body (20).

2. The furnace for edge passivation according to claim 1, characterized in that: The inner cooling channel (22) is arranged inside the inner furnace body (20) or on the outer surface of the inner furnace body (20).

3. The furnace body for edge passivation according to claim 1, characterized in that: The inner cooling channel (22) comprises a plurality of inner channel units (23), wherein the plurality of inner channel units (23) are arranged at intervals on the outer surface of the inner furnace body (20) and extend along the length direction of the inner furnace body (20); and the plurality of inner channel units (23) are connected end to end in sequence.

4. The furnace for edge passivation according to claim 3, characterized in that: The distance between two adjacent inner flow channel units (23) is equal.

5. The furnace body for edge passivation according to any one of claims 1 to 4, characterized in that: The heating assembly (30) comprises: A plurality of heaters (31) are provided on the outer periphery of the inner furnace body (20).

6. The furnace for edge passivation according to any one of claims 1 to 4, characterized in that: The outer furnace body assembly (10) comprises: An outer furnace body (11), the furnace cavity being located inside the outer furnace body (11), ports being provided at both ends of the outer furnace body (11), and an outer cooling flow channel (17) being provided on the outer furnace body (11); A transfer furnace door (12), the transfer furnace door (12) being arranged at a port at one end of the outer furnace body (11), the transfer furnace door (12) being provided with an outer furnace opening (13) communicating with the furnace cavity; A rear furnace door (14) is arranged at a port at the other end of the outer furnace body (11).

7. The furnace for edge passivation according to claim 6, characterized in that: A first flange (15) is provided at a port at one end of the outer furnace body (11), and the transfer furnace door (12) is connected to the first flange (15) and is sealed with the first flange (15); a second flange (16) is provided at a port at the other end of the outer furnace body (11), and the rear furnace door (14) is connected to the second flange (16) and is sealed with the second flange (16).

8. The furnace for edge passivation according to claim 7, characterized in that: A first cooling channel is disposed inside the first flange (15), and the first flange (15) is provided with an inlet and an outlet communicating with the first cooling channel; A second cooling channel is arranged inside the second flange (16), and the second flange (16) is provided with an inlet and an outlet which are in communication with the second cooling channel.

9. The furnace for edge passivation according to claim 6, characterized in that: The transfer furnace door (12) is provided with two flow channel connectors, one of the flow channel connectors is connected to the liquid inlet via a connecting pipeline, and the other of the flow channel connectors is connected to the liquid outlet via a connecting pipeline.

10. An atomic layer deposition device, characterized in that: The atomic layer deposition equipment comprises the furnace body for edge passivation according to any one of claims 1 to 9.

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