Hydraulic clamping system for workbench of multi-wire cutting machine

Abstract

A hydraulic clamping system for a workbench of a multi-wire cutting machine comprises a machine frame, a clamping oil cylinder, a hydraulic synchronous motor and a hydraulic station, a locking material base is arranged at the bottom of the machine frame, the clamping oil cylinder is arranged on the locking material base, the hydraulic synchronous motor is arranged at the upper end of the clamping oil cylinder, and the output end of the hydraulic synchronous motor is connected with the clamping oil cylinder. The hydraulic station is arranged on one side of the machine frame, the output end of the hydraulic station is connected with the hydraulic synchronous motor through an oil pipe, a sliding seat is arranged on the locking material seat and arranged above the clamping oil cylinder, a fixed laser sensor is arranged on the sliding seat, and a laser distance measuring sensor is arranged on one side of the fixed laser sensor. According to the utility model, the measuring scale is arranged on the oil cylinder, the operation scale of the scale is accurately measured by laser ranging, and then the fixed laser sensor is used for detection, so that flexible belt feedback and actual monitoring can be realized, the real-time oil transportation quantity of each oil path can be controlled, and each oil cylinder is stable and reliable during overall operation; and a foundation is laid for later fine lines and thin sheets.

Description

Technical Field

[0001] The utility model relates to the technical field of multi-wire cutting machine equipment, in particular to a hydraulic clamping system for a multi-wire cutting machine workbench. Background Art

[0002] With the continuous update and iteration of multi-wire cutting machines, and the requirement that a device can be compatible with one or more silicon wafers of different specifications and sizes, the requirements for cutting accuracy are getting higher and higher. At the same time, various manufacturers are also pursuing the ultimate thin slices. Therefore, it is necessary to conduct new research and development and design of the clamping system of the workbench in the multi-wire cutting machine. In the existing multi-wire cutting machines, the clamping system in the workbench uses a single oil block to drive multiple cylinders for clamping operations at the same time. The structural defect is that due to the different lengths of the oil circuits, the driving cylinders will have inconsistent speeds, and the force acting on the crystal drag will be inconsistent, resulting in multiple defects such as clamping cracks and deformation of a certain area of ​​the clamping plate in the clamping of small-sized crystal rods; thus causing huge losses and waste of silicon materials. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a hydraulic clamping system for a multi-wire cutting machine workbench that can solve the synchronization function when the workbench oil cylinder is clamped, ensure that the clamping oil cylinders move and operate at the same time, and avoid the problem of crystal rod clamping cracking caused by inconsistent speed of the oil cylinder operation during the working process.

[0004] The technical solution adopted by the utility model to solve its technical problems is: a hydraulic clamping system for a multi-wire cutting machine workbench, including a frame, a clamping cylinder, a hydraulic synchronous motor and a hydraulic station, a locking material seat is arranged at the bottom of the frame, the clamping cylinder is arranged on the locking material seat, the hydraulic synchronous motor is arranged at the upper end of the clamping cylinder and the output end of the hydraulic synchronous motor is connected to the clamping cylinder, the hydraulic station is arranged on one side of the frame, and the output end of the hydraulic station is connected to the hydraulic synchronous motor through an oil pipe.

[0005] Furthermore, a sliding seat is provided on the locking material seat, the sliding seat is provided above the clamping cylinder, a fixed laser sensor is provided on the sliding seat, and a laser ranging sensor is provided on one side of the fixed laser sensor.

[0006] Furthermore, a measuring scale is provided on the top of the clamping cylinder.

[0007] Furthermore, a material clamping plate is provided at the bottom of the frame, and a pressure sensor fixedly connected by screws is provided on the material clamping plate.

[0008] Furthermore, three locking material seats are arranged at the bottom of the frame, and clamping cylinders are arranged correspondingly on the three locking material seats.

[0009] Furthermore, the fixed laser sensor, laser ranging sensor and pressure sensor are all electrically connected via PLC.

[0010] Compared with the prior art, the beneficial effects of the utility model are: by setting a measuring scale on the oil cylinder, the laser distance sensor can be used to accurately run its scale, and then through the detection of the fixed laser sensor, the three data can be fed back to the PLC for position matching, and the error is calculated and the hydraulic synchronous motor is accurately controlled to control the oil output of a single oil pipeline in real time. Then, the pressure sensor data is used to judge the downward position of the hydraulic clamping system, making the clamping process more stable, accurate and reliable, changing the traditional single drive execution action. At present, flexible belt feedback can be realized and actually monitored, the real-time oil output of each oil circuit can be controlled, and each oil cylinder can be stable and reliable during the overall operation, laying the foundation for future fine wires and thin sheets. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic diagram of the structure of an embodiment of the utility model;

[0012] Figure 2 for Figure 1 Schematic diagram of the structure of the middle locking material seat;

[0013] Figure 3 for Figure 1 Bottom view of the

[0014] In the figure: 1. Frame, 2. Fixed laser sensor, 3. Laser distance sensor, 4. Measuring scale, 5. Pressure sensor, 6. Hydraulic synchronous motor, 7. Hydraulic station, 8. Oil pipe, 9. Clamping cylinder, 10. Locking material seat, 11. Material clamping plate, 12. Sliding seat. DETAILED DESCRIPTION

[0015] The present invention is further explained below in conjunction with the accompanying drawings and specific implementation methods.

[0016] See attached Figure 1 The present embodiment includes a frame 1, three locking material seats 10 are arranged at the bottom of the frame 1, and clamping cylinders 9 are arranged on the locking material seats 10. A hydraulic synchronous motor 6 is arranged above the locking material seats 10, and the output end of the hydraulic synchronous motor 6 is connected to the input end of each clamping cylinder 9 through an oil distribution pipe. A hydraulic station 7 is fixedly arranged on the right side of the frame 1, and the hydraulic station 7 is connected to the hydraulic synchronous motor 6 through an oil pipe 8, so as to provide power support to the hydraulic synchronous motor 6 through the hydraulic station 7.

[0017] See attached Figure 2A sliding seat 12 is provided on each of the three locking material seats 10, and the sliding seat 12 is located at the upper end of the clamping cylinder 9, a fixed laser sensor 2 is provided on the sliding seat 12, a laser ranging sensor 3 is provided on one side of the fixed laser sensor 2, a measuring scale 4 is provided on the top of the clamping cylinder 9, and the position of the measuring scale 4 is opposite to the laser ranging sensor 3, so that the clamping efficiency of the clamping cylinder 9 can be judged by the data of the measuring scale 4 on the clamping cylinder 9.

[0018] See attached Figure 3 A material clamping plate 11 is provided at the bottom of the frame 1, and a pressure sensor 5 fixedly connected by screws is provided on the material clamping plate 11. Like the fixed laser sensor 2 and the laser ranging sensor 3, the pressure sensor 5 is also connected and controlled by the PLC system.

[0019] In actual use, the hydraulic station 7 is used to supply oil, which is executed by the hydraulic synchronous motor 6 and transported through the oil pipe 8 to the clamping cylinder 9. The piston rod of the clamping cylinder 9 moves downward to achieve the feeding action; when the hydraulic station 7 stops, the clamping cylinder 9 itself is used to return to the inside of the hydraulic station through the oil pipe 8 and the hydraulic synchronous motor 6 to achieve the clamping action; and because the clamping principle is the tension clamping of the disc spring inside the cylinder, a single cylinder is 1.8T, and because relative synchronization is required during the clamping process, its purpose is to ensure smooth and uniform force. During the process of the clamping cylinder 9 returning oil, the measuring scale 4 on the clamping cylinder 9 will accurately Run its scale on it, three kinds of data can be fed back to PLC for position matching, and the error can be accurately controlled after calculation to control the hydraulic synchronous motor 6 to control the oil output of a single oil pipeline in real time. In the clamping process, a pressure sensor 5 is installed between the crystal drag and the material clamping plate 11, and the four-point force can be fed back to PLC. After calculation, the hydraulic synchronous motor 6 can be controlled to realize the clamping force of each point in reality. In this way, the pressure and position can be checked to make the clamping process more stable, accurate and reliable, changing the traditional single drive execution action, thereby controlling the real-time oil output of each oil circuit, and ensuring that each oil cylinder is stable and reliable during the overall operation, laying the foundation for future fine wires and thin sheets.

Claims

1. A hydraulic clamping system for a multi-wire cutting machine workbench, characterized in that: It includes a frame, a clamping cylinder, a hydraulic synchronous motor and a hydraulic station. A locking material seat is arranged at the bottom of the frame, the clamping cylinder is arranged on the locking material seat, the hydraulic synchronous motor is arranged at the upper end of the clamping cylinder and the output end of the hydraulic synchronous motor is connected to the clamping cylinder, the hydraulic station is arranged on one side of the frame, the output end of the hydraulic station is connected to the hydraulic synchronous motor through an oil pipe, a sliding seat is arranged on the locking material seat, the sliding seat is arranged above the clamping cylinder, a fixed laser sensor is arranged on the sliding seat, a laser ranging sensor is arranged on one side of the fixed laser sensor, and a measuring scale is arranged on the top of the clamping cylinder.

2. The hydraulic clamping system for a multi-wire cutting machine workbench according to claim 1, characterized in that: A material clamping plate is arranged at the bottom of the frame, and a pressure sensor fixedly connected by screws is arranged on the material clamping plate.

3. The hydraulic clamping system for a multi-wire cutting machine workbench according to claim 2, characterized in that: Three locking material seats are arranged at the bottom of the frame, and clamping cylinders are arranged correspondingly on the three locking material seats.

4. The hydraulic clamping system for a multi-wire cutting machine workbench according to claim 3, characterized in that: The fixed laser sensor, the laser distance sensor and the pressure sensor are all electrically connected via a PLC.

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