Sealing assembly and industrial processing equipment

Abstract

The utility model provides a sealing assembly and industrial processing equipment, relates to the technical field of organic metal chemical vapor deposition, and aims to solve the problem that a rectangular or double-dovetail sealing groove is poor in sealing effect. The sealing assembly comprises a cylindrical sealing piece, wherein the diameter of the bottom surface of the sealing piece is R1; a sealing groove is formed in the first sealed part, and the sealing part can be placed in the sealing groove to seal the first sealed part and the second sealed part; the sealing groove comprises a first side face, a second side face and a groove bottom face, the first side face is perpendicular to the groove bottom face, the included angle between the second side face and the groove bottom face is larger than or equal to 70 degrees and smaller than or equal to 80 degrees, the minimum width of the sealing groove is W1, the ratio of W1 to R1 is larger than or equal to 1 and smaller than or equal to 1.1, the depth of the sealing groove is H, and the ratio of H to R1 is larger than or equal to 0.6 and smaller than or equal to 0.8. A conventional double-dovetail sealing groove is replaced by the single-dovetail sealing groove, and the sealing performance between two sealed parts is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of organic metal chemical gaseous deposition, in particular to a sealing component and industrial processing equipment. Background Art

[0002] The structure of the sealing groove of conventional metal organic chemical vapor deposition equipment is usually a rectangular structure or a double dovetail structure. For the rectangular structure, when the two sealed parts are disassembled, the seals are easy to fall off the sealing groove, and the fixing effect is not good. For the double dovetail structure, for seals of the same specification, since the groove gap of the sealing groove of the double dovetail structure is larger than the groove gap of the single-sided dovetail structure, and the seal is smaller, the sealing effect is not good. If a larger-sized seal is replaced, then since the width of the groove is the same, it will cause difficulty in installation of the seal, and the surface of the seal is easily scratched, thereby reducing the service life. Utility Model Content

[0003] The utility model aims to solve the technical problem that the sealing effect of the sealing groove of the rectangular structure or the double dovetail structure of the organic metal chemical vapor deposition equipment existing in the prior art or the related art is not good.

[0004] A first aspect of the utility model provides a sealing assembly.

[0005] A second aspect of the utility model provides an industrial processing equipment.

[0006] The sealing assembly provided by the technical solution of the first aspect of the utility model includes: a sealing member, which is a cylinder and has a bottom diameter of R1; a first sealed member, on which a sealing groove is provided, and the sealing member can be placed in the sealing groove to seal the first sealed member and the second sealed member; the sealing groove includes a first side surface, a second side surface and a groove bottom surface, the first side surface and the groove bottom surface are perpendicular, an angle between the second side surface and the groove bottom surface is greater than or equal to 70° and less than or equal to 80°, a minimum width of the sealing groove is W1, a ratio of W1 to R1 is greater than or equal to 1 and less than or equal to 1.1, a depth of the sealing groove is H, a ratio of H to R1 is greater than or equal to 0.6 and less than or equal to 0.8.

[0007] The sealing groove of the single-sided dovetail structure of the utility model replaces the conventional sealing groove of the double-dovetail structure, and reduces the gap in the groove of the sealing groove, so that the sealing member can fill the sealing groove as much as possible, thereby increasing the sealing between the two sealed members. Compared with the sealing groove of the rectangular structure, when disassembling one of the sealed members, the sealing member is not easy to fall off due to the existence of the single dovetail groove. It can be understood that the sealing structure of the utility model is particularly suitable for equipment that needs to be opened frequently, such as the sealing between the lid and the body of the organic metal chemical vapor deposition equipment. In the conventional rectangular sealing groove, the sealing member is easy to be separated from the sealing groove together with the lid during the opening process, so that it needs to be reassembled. The utility model designs a single-sided dovetail structure. In the process of covering the lid, the sealing member can slide to the inner side of the inclined surface and be engaged in the inclined surface. In this way, when opening the lid, due to the existence of the single dovetail groove, the sealing member will not be separated from the sealing groove together with the lid, and there is no need for repeated assembly. At the same time, compared with the sealing groove of the double dovetail structure, the gap in the groove is not so large, which can improve the sealing effect of the first sealed member and the second sealed member.

[0008] It should be noted that, for the conventional sealing groove of the double dovetail structure, according to the relevant standards, the width of the groove is slightly smaller than the diameter of the seal. This is because the sealing groove of the double dovetail structure itself has a larger space inside the groove. If the width of the groove is designed to be larger, the space inside the groove will be larger. In this way, after the seal is placed in the sealing groove, the sealing effect is greatly reduced. Therefore, under normal circumstances, the width of the groove is slightly smaller than the diameter of the seal. However, there is a problem in this way. When installing the seal, the seal needs to be forced in, which can easily damage the seal. The utility model adjusts the double dovetail to a single dovetail and expands the spacing between the grooves. This overcomes the problem of large space inside the groove and poor sealing effect, and also overcomes the problem of easy damage to the seal.

[0009] In some technical solutions, optionally, the ratio of W1 to R1 is equal to 1.05.

[0010] In this technical solution, the minimum width of the sealing groove is slightly larger than the bottom diameter of the seal, which ensures that the seal can be smoothly placed in the sealing groove and that the seal is not easy to fall off from the sealing groove when the two sealed components are disassembled.

[0011] In some technical solutions, optionally, the ratio of H to R1 is greater than or equal to 0.67 and less than or equal to 0.73.

[0012] In this technical solution, the ratio of the depth of the sealing groove to the bottom diameter of the seal is greater than or equal to 0.67 and less than or equal to 0.73, for example, 0.7. In this way, the seal will not fall off due to the shallow depth of the sealing groove, nor will the seal completely enter the sealing groove due to the deepness of the sealing groove, resulting in loss of sealing effect.

[0013] In some technical solutions, optionally, an angle included by the second side surface and the groove bottom surface is equal to 75°.

[0014] In this technical solution, if the angle between the second side surface and the groove bottom surface is too large, it means that the gap in the sealing groove is relatively large, so that the seal is easily completely inserted into the sealing groove after being pressed, resulting in loss of sealing effect. If the angle between the second side surface and the groove bottom surface is too small, it means that the gap in the sealing groove is relatively small, so that the seal is easily dropped from the sealing groove, which is not conducive to installation.

[0015] In some technical schemes, optionally, the shape of the sealing groove is a right prism, the bottom surface of the right prism is a right trapezoid, the sum of the lower base, height and waist length of the right trapezoid is M1, the bottom circumference of the seal is M2, and the ratio of M1 to M2 is greater than or equal to 1 and less than or equal to 1.11, for example 1.06.

[0016] In this technical solution, because there is an inclination angle of 15° in the sealing groove, by limiting the ratio of M1 to M2, the sealing member can be fixed on the inner inclined surface of the sealing groove and will not fall off naturally.

[0017] In some technical solutions, optionally, the seal includes one of the following or a combination thereof: a fluororubber seal, a nitrile seal, a vinyl chloride seal, and a perfluoroether seal.

[0018] In this technical solution, fluororubber seals, nitrile seals, vinyl chloride seals or perfluoroether seals all have good deformation ability, are not easy to corrode, and have good sealing effect. Among them, the seal can be a rubber ring.

[0019] In some technical solutions, optionally, R1 is greater than or equal to 3 cm.

[0020] A second aspect of the present invention provides an industrial processing equipment, comprising: a sealing assembly as in any technical solution of the first aspect of the present invention.

[0021] Since the industrial processing equipment of the utility model comprises the sealing assembly of any technical solution of the first aspect of the utility model, it has all the beneficial effects of the sealing assembly of any technical solution of the first aspect.

[0022] In some technical solutions, optionally, the industrial processing equipment also includes: a main body; an upper cover, which is covered on the main body; a sealing groove is provided on the contact surface of the main body and the upper cover, and a sealing member is placed in the sealing groove for sealing the main body and the upper cover.

[0023] In this technical solution, since the upper cover needs to be opened frequently, through the sealing assembly of the utility model, when the upper cover is opened, the sealing member will not be separated from the sealing groove.

[0024] In some technical solutions, optionally, the shape of the sealing groove is square or polygonal.

[0025] In this technical solution, when the shape of the sealing groove is square or polygonal, that is, the body is square or polygonal, the number of sealing members is multiple, and the number is the same as the number of sides of the sealing groove. Of course, the shape of the sealing groove can also be circular. When the shape of the sealing groove is circular, the body is circular, so that the sealing member can be bent to form a circle that matches the shape of the sealing groove.

[0026] In some technical solutions, optionally, the industrial processing equipment includes one or a combination of the following: organic metal chemical vapor deposition equipment, vacuum equipment and pressure equipment.

[0027] In some technical solutions, optionally, the thickness of the body is D, and the ratio of R1 to D is greater than or equal to 1 / 4 and less than or equal to 1 / 2.

[0028] In this technical solution, by controlling the ratio of the thickness of the body to the diameter of the seal, a better sealing effect can be ensured between the two sealed parts.

[0029] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0031] Figure 1 A schematic structural diagram of a sealing assembly for a rectangular groove in the related art is shown;

[0032] Figure 2 A schematic structural diagram of a double dovetail groove sealing assembly of the related art is shown;

[0033] Figure 3 One of the structural schematic diagrams of the sealing assembly of a single dovetail groove of the utility model is shown;

[0034] Figure 4The second structural schematic diagram of the sealing assembly of a single dovetail groove of the utility model is shown;

[0035] Figure 5 The third structural schematic diagram of the sealing assembly of a single dovetail groove of the utility model is shown;

[0036] Figure 6 The schematic diagram of the structure of the industrial processing equipment of the utility model is shown;

[0037] Figure 7 The structure diagram of the valve of the utility model is shown;

[0038] Figure 8 The schematic diagram of the structure of the liquid storage device of the utility model is shown.

[0039] in, Figure 1 and Figure 2 The corresponding relationship between the reference numerals and the component names is as follows:

[0040] 12' rectangular slot, 14' double dovetail slot.

[0041] Figures 3 to 8 The corresponding relationship between the reference numerals and the component names is as follows:

[0042] 1 sealing assembly, 11 sealing member, 12 first sealed member, 13 second sealed member, 14 sealing groove, 142 first side surface, 144 second side surface, 146 groove bottom surface, 2 valve, 21 valve housing, 214 notch, 216 liquid flow channel, 22 valve seat, 23 valve core, 24 driving member, 25 sensor, 26 controller, 27 U-shaped groove, 28 power supply, 29 power switch, 3 liquid storage device, 4 industrial processing equipment, 42 body, 44 upper cover. DETAILED DESCRIPTION

[0043] In order to more clearly understand the above-mentioned purposes, features and advantages of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0044] In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present application is not limited to the specific embodiments disclosed below.

[0045] like Figure 3 , Figure 4 , Figure 5 and Figure 6As shown, the sealing assembly 1 provided by the embodiment of the first aspect of the utility model includes: a sealing member 11, which is a cylinder, and the bottom diameter of the sealing member 11 is R1; a first sealed member 12, and a sealing groove 14 is provided on the first sealed member 12, and the sealing member 11 can be placed in the sealing groove 14 to seal the first sealed member 12 and the second sealed member 13; the sealing groove 14 includes a first side surface 142, a second side surface 144 and a groove bottom surface 146, the first side surface 142 and the groove bottom surface 146 are perpendicular, and the angle between the second side surface 144 and the groove bottom surface 146 is greater than or equal to 70° and less than or equal to 80°, the minimum width of the sealing groove 14 is W1, the ratio of W1 to R1 is greater than or equal to 1, and less than or equal to 1.1, and the depth of the sealing groove 14 is H, and the ratio of H to R1 is greater than or equal to 0.6 and less than or equal to 0.8.

[0046] The sealing groove of the single-sided dovetail structure of the utility model replaces the conventional double-dovetail structure sealing groove, and reduces the gap in the sealing groove 14, so that the sealing member 11 can fill the sealing groove 14 as much as possible, thereby increasing the sealing performance between the two sealed parts. Compared with the sealing groove of the rectangular structure, when disassembling one of the sealed parts, the sealing member 11 is not easy to fall off due to the existence of the single dovetail groove structure.

[0047] In some embodiments, optionally, the ratio of W1 to R1 is equal to 1.05.

[0048] In this embodiment, the minimum width of the sealing groove 14 is slightly larger than the bottom diameter of the sealing member 11, so that the sealing member 11 can be smoothly placed in the sealing groove 14 and the sealing member 11 is not easy to fall off from the sealing groove 14 when the two sealed members are disassembled.

[0049] In some embodiments, optionally, the ratio of H to R1 is greater than or equal to 0.67 and less than or equal to 0.73.

[0050] In this embodiment, the ratio of the depth of the sealing groove 14 to the bottom diameter of the sealing member 11 is greater than or equal to 0.67 and less than or equal to 0.73, for example, 0.7. In this way, the sealing member 11 will not fall off due to the shallow depth of the sealing groove 14, nor will the sealing member 11 completely enter the sealing groove 14 due to the deep depth of the sealing groove 14, resulting in loss of sealing effect.

[0051] In some embodiments, optionally, an angle between the second side surface 144 and the groove bottom surface 146 is equal to 75°.

[0052] In this embodiment, if the angle between the second side surface 144 and the groove bottom surface 146 is too large, it means that the gap in the sealing groove 14 is relatively large, so that the sealing member 11 is easily completely inserted into the sealing groove 14 after being pressed, resulting in loss of sealing effect. If the angle between the second side surface 144 and the groove bottom surface 146 is too small, it means that the gap in the sealing groove 14 is relatively small, so that the sealing member 11 is easily dropped from the sealing groove 14, which is not conducive to installation.

[0053] In some embodiments, optionally, Figure 3 As shown, the shape of the sealing groove 14 can be a right prism with a right-angled trapezoidal bottom, the sum of the lower base A, height H, and waist length B of the right-angled trapezoid is M1, the bottom circumference πR1 of the sealing member 11 is M2, and the ratio of M1 to M2 is greater than or equal to 1 and less than or equal to 1.11, for example, 1.06.

[0054] In this embodiment, because there is an inclined angle of 15° in the sealing groove 14, by limiting the ratio of M1 to M2, the sealing member 11 can be fixed on the inner inclined surface of the sealing groove 14 and will not fall off naturally.

[0055] In some embodiments, optionally, the seal 11 includes one of the following or a combination thereof: a fluororubber seal, a nitrile seal, a vinyl chloride seal, and a perfluoroether seal.

[0056] In this embodiment, the fluororubber seal, the nitrile seal, the vinyl chloride seal and the perfluoroether seal all have good deformation ability, are not easy to corrode, and have good sealing effect.

[0057] In some embodiments, optionally, R1 is greater than or equal to 3 cm.

[0058] like Figure 6 As shown, the second aspect of the utility model provides an industrial processing equipment 4, comprising: a sealing assembly 1 as any embodiment of the first aspect of the utility model.

[0059] Since the industrial processing equipment 4 of the utility model comprises the sealing assembly 1 of any embodiment of the first aspect of the utility model, it has all the beneficial effects of the sealing assembly 1 of any embodiment of the first aspect.

[0060] In some embodiments, optionally, the industrial processing equipment 4 also includes: a main body 42; an upper cover 44, which covers the main body 42; a sealing groove 14 is provided on the contact surface of the main body 42 and the upper cover 44, and the seal 11 is placed in the sealing groove 14 for sealing the main body 42 and the upper cover 44.

[0061] In this embodiment, since the upper cover 44 needs to be opened frequently, through the sealing assembly 1 of the present invention, when the upper cover 44 is opened, the sealing member 11 will not be separated from the sealing groove 14.

[0062] In some embodiments, optionally, the sealing groove 14 has a square or polygonal shape, such as a rectangle, a square, a pentagon or a hexagon.

[0063] In this embodiment, when the shape of the sealing groove 14 is square or polygonal, that is, the horizontal cross section of the body 42 is square or polygonal, the number of the sealing members 11 is multiple, and the number is the same as the number of sides of the sealing groove 14. Of course, the shape of the sealing groove 14 can also be circular. When the shape of the sealing groove 14 is circular, the horizontal cross section of the body 42 is circular, so that the sealing member 11 can be formed into a circle matching the shape of the sealing groove 14 by bending.

[0064] In some embodiments, optionally, the industrial processing equipment 4 includes one or a combination of the following: organic metal chemical vapor deposition equipment, vacuum equipment and pressure equipment.

[0065] In some embodiments, optionally, Figure 6 As shown, the thickness of the body 42 is D, and the ratio of R1 to D is greater than or equal to 1 / 4 and less than or equal to 1 / 2.

[0066] In this embodiment, the ratio of the thickness of the main body 42 to the diameter of the sealing member 11 is controlled to ensure a good sealing effect between the two sealed members.

[0067] like Figure 7 As shown, an embodiment of the third aspect of the utility model provides a valve 2, comprising: a sealing assembly 1 as in any embodiment of the first aspect of the utility model.

[0068] Since the valve 2 of the utility model comprises the sealing assembly 1 of any embodiment of the first aspect of the utility model, it has all the beneficial effects of the sealing assembly 1 of any embodiment of the first aspect.

[0069] In some embodiments, optionally, Figure 7 As shown, the valve 2 also includes: a valve housing 21, the first sealed component 12 is the valve housing 21, a notch 214 is provided on the valve housing 21, and a liquid flow channel 216 is provided inside the valve housing 21; a valve seat 22 is provided at the notch 214, the second sealed component 13 is the valve seat 22, and the sealing component 11 is provided between the valve seat 22 and the valve housing 21; a valve core 23, one end of which is provided on the outside of the valve housing 21, and the other end passes through the valve seat 22 and is provided in the valve housing 21.

[0070] In this embodiment, the sealing assembly 1 is arranged between the valve seat 22 and the valve housing 21 , so that sealing between the valve seat 22 and the valve housing 21 can be achieved.

[0071] In some embodiments, optionally, the valve 2 also includes: a driving member 24, connected to the valve core 23, for driving the valve core 23 to be in a first position to open the liquid flow channel 216, or driving the valve core 23 to be in a second position to close the liquid flow channel 216; a sensor 25, disposed in the valve housing 21, connected to the driving member 24; a controller 26, connected to the driving member 24 and the sensor 25; wherein, after the sensor 25 senses two touches within a preset time period, it can send a first signal to the controller 26, and after receiving the first signal, the controller 26 can control the driving member 24 to work and drive the valve core 23 to be in the first position.

[0072] In this embodiment, the sensor 25 is provided. After the sensor 25 senses two touches within the preset time, it indicates that the staff needs to open the valve 2. At this time, the driving member 24 drives the valve core 23 to the first position to allow liquid to pass. This design can prevent the user from accidentally touching the valve 2, causing corrosive liquid to flow out and endanger human health. The preset time can be any time between 3 seconds and 5 seconds, for example, 3 seconds, 4 seconds or 5 seconds.

[0073] In some embodiments, optionally, the valve housing 21 includes: a U-shaped groove 27, the opening of the U-shaped groove 27 faces downward; a power supply 28, connected to the driving member 24 and the sensor 25, for supplying power to the driving member 24 and the sensor 25; a power switch 29, disposed in the U-shaped groove 27, and disposed between the power supply 28 and the driving member 24, and between the power supply 28 and the sensor 25.

[0074] In this embodiment, the power switch 29 is disposed inside the U-shaped groove 27, so that the power switch 29 can be hidden to prevent non-staff members from accidentally touching it and causing the corrosive liquid to flow out, thereby achieving double protection. That is, only after the power supply 28 is connected and the sensor 25 senses two touches within a preset time, the liquid is allowed to flow out, thereby improving safety.

[0075] like Figure 8 As shown, an embodiment of the fourth aspect of the utility model provides a liquid storage device 3, comprising: a valve 2 as in any embodiment of the third aspect of the utility model.

[0076] Since the liquid storage device 3 of the utility model comprises the valve 2 of any embodiment of the third aspect of the utility model, it has all the beneficial effects of the valve 2 of any embodiment of the third aspect.

[0077] Another embodiment of the utility model provides a single dovetail sealing groove, which aims to solve the problem that the conventional sealing groove has a poor sealing effect.

[0078] Specifically, sealing a vacuum component with a rubber ring is a common method and a very mature method in technology.

[0079] like Figure 1 As shown, the rectangular groove 12' is the most commonly used sealing groove for the rubber ring. If the rectangular groove 12' is used, the rubber ring is easy to install, but the rubber ring is easy to fall out of the rectangular groove 12' when the flange is opened, especially when the flange needs to be opened frequently. Once the rubber ring falls off, it needs to be reinstalled.

[0080] like Figure 2 As shown, for the double dovetail groove 14' of the double dovetail structure with an included angle of 30°, the double dovetail groove 14' is not easy to fall off, but it is very difficult to install. The reason is that according to national standards, the width of the groove is generally only 0.9 times the cross-sectional diameter of the rubber ring. In other words, the cross-sectional diameter of the rubber ring is larger than the groove diameter, and the rubber ring can only be squeezed into the double dovetail groove 14'. In the process of squeezing it in, the rubber ring is also easily damaged, affecting the sealing effect.

[0081] The utility model is designed to solve the above problems and is a single dovetail sealing groove that is designed in a different way. Specifically, the key points of the sealing groove structure of the utility model are: 1. The width of the groove is 1.0 to 1.1 times the diameter of the rubber ring, for example, 1.05 times; 2. The depth of the groove is 67% to 75% of the diameter of the rubber ring, optionally, 67% to 73%, for example, 70%; 3. It is tilted inward by 15° on the inner side of the rubber ring, but not tilted on the outer side of the rubber ring, forming a single dovetail structure; 4. The sum of the bottom edge, height and waist length of the cross section of the sealing groove 14 is 100% to 111% of the circumference of the rubber ring in a free state, for example, 106%. In other words, the circumference of the rubber ring in a free state is only 90% to 100%, for example, 95%, of the circumference of the sealing groove 14.

[0082] Optionally, the sealing groove 14 may be circular, square, or various convex polygonal shapes. If one corner is concave, such a sealing groove is not suitable.

[0083] Optionally, the sealing groove 14 can be suitable for rubber rings of various materials, such as fluororubber, nitrile butadiene rubber, vinyl chloride, perfluoroether, etc.

[0084] Optionally, the sealing groove 14 can be suitable for a rubber ring with a cross-sectional diameter of 3 cm or more.

[0085] This kind of sealing groove has the following characteristics: first, it can ensure normal sealing requirements; second, it can be easily put in and taken out; third, the rubber ring is not easy to fall off under normal circumstances, and it is suitable for sealing and using flange surfaces that need to be opened frequently. Figure 3 As shown in FIG. 1 , since the groove width W1 is larger than the cross-sectional diameter of the rubber ring, the rubber ring can be easily put in. On the contrary, Figure 2Because the width of the slot is smaller than the cross-sectional diameter of the rubber ring, the rubber ring can only be squeezed into the slot. In the process of squeezing it in, the rubber ring is easily damaged, affecting the sealing effect. Figure 3 After the rubber ring is put in, it can also slide easily in the direction parallel to the flange. Figure 4 As shown in the figure, the rubber ring will not have bulges and protrusions. Figure 2 In the process, after the rubber ring is put in, both sides are crowded. The rubber ring cannot slide in the direction parallel to the flange. The rubber ring is prone to bulging and protrusions, affecting the sealing effect.

[0086] like Figure 3 As shown in FIG. 1 , because there is a 15° inclination angle on the inner side of the rubber ring, and the circumference of the bottom surface of the rubber ring is shorter than the sum of the bottom side, height and waist length of the cross section of the sealing groove, the rubber ring is tied to the inner side slope of the sealing groove 14 and will not fall off naturally. Once used once, the rubber ring will be subjected to positive pressure, and the cross section of the rubber ring will change from a circle to an ellipse, with an increase in width and a decrease in height, as shown in FIG. Figure 5 As shown, it is more difficult to fall off.

[0087] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0088] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A sealing assembly, characterized in that: include: A sealing member, wherein the sealing member is a cylinder, and the bottom diameter of the sealing member is R1; a first sealed member, wherein a sealing groove is provided on the first sealed member, and the sealing member can be placed in the sealing groove to seal the first sealed member and the second sealed member; The sealing groove includes a first side surface, a second side surface and a groove bottom surface, the first side surface is perpendicular to the groove bottom surface, the angle between the second side surface and the groove bottom surface is greater than or equal to 70° and less than or equal to 80°, the minimum width of the sealing groove is W1, the ratio of W1 to R1 is greater than or equal to 1 and less than or equal to 1.1, the depth of the sealing groove is H, and the ratio of H to R1 is greater than or equal to 0.6 and less than or equal to 0.

8.

2. The sealing assembly according to claim 1, characterized in that The ratio of W1 to R1 is equal to 1.05; and / or The ratio of H to R1 is greater than or equal to 0.67 and less than or equal to 0.73; and / or An angle between the second side surface and the groove bottom surface is equal to 75°.

3. The sealing assembly according to claim 1, characterized in that: The sealing groove is in the shape of a right prism, the bottom surface of the right prism is a right trapezoid, the sum of the lower base, height and waist length of the right trapezoid is M1, the bottom perimeter of the sealing member is M2, and the ratio of M1 to M2 is greater than or equal to 1 and less than or equal to 1.

11.

4. The sealing assembly according to claim 1, characterized in that: The sealing element comprises one of the following or a combination thereof: a fluororubber sealing element, a nitrile sealing element, a vinyl chloride sealing element and a perfluoroether sealing element.

5. The sealing assembly according to claim 1, characterized in that: The R1 is greater than or equal to 3 cm.

6. An industrial processing equipment, characterized in that: include: A sealing assembly as claimed in any one of claims 1 to 5.

7. The industrial processing equipment according to claim 6, characterized in that Also includes: ontology; An upper cover, covering the main body; The sealing groove is arranged on the surface where the body contacts the upper cover, and the sealing member is placed in the sealing groove to seal the body and the upper cover.

8. The industrial processing equipment according to claim 7, characterized in that The shape of the sealing groove is square or polygonal.

9. The industrial processing equipment according to claim 6, characterized in that The industrial processing equipment includes one or a combination of the following: Metal organic chemical vapor deposition equipment, vacuum equipment and pressure equipment.

10. The industrial processing equipment according to claim 7, characterized in that The thickness of the body is D, and the ratio of R1 to D is greater than or equal to 1 / 4 and less than or equal to 1 / 2.

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