Air source protection device and thinning machine

Abstract

The utility model discloses an air source protection device and a thinning machine, and relates to the semiconductor processing technology field, the air source protection device comprises a machine case, a first air source, a reversing valve and a first air pressure detection assembly, the first air source is arranged in the machine case, the reversing valve is arranged in the machine case, and the first air pressure detection assembly is arranged in the machine case. The reversing valve is provided with at least two inlet ends and an outlet end, one inlet end of the reversing valve is communicated with the first air source, the other inlet end of the reversing valve is communicated with a second air source, and the outlet end of the reversing valve is used for being communicated with an air main shaft; the first air pressure detection assembly is arranged on the machine box, communicates with the outlet end of the reversing valve and is used for detecting the air pressure of air supplied to the air main shaft. According to the technical scheme provided by the utility model, the technical effects of carrying out air pressure protection on the air main shaft, preventing the main shaft from being locked, avoiding the damage of the air main shaft and guaranteeing the machining precision of the air main shaft can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a gas source protection device and a thinning machine. Background Art

[0002] An air spindle is used in thinning operations. The air spindle generally uses an air bearing to support the rotation of the spindle. When there is no ventilation, the spindle and the air bearing are in contact. When gas of a specified pressure is introduced, the spindle and the air bearing will be separated by an air film. Continuous and stable ventilation is required to achieve the normal operation of the air spindle. If the air supply to the air spindle is suddenly stopped due to an air supply failure, the spindle will be locked, which will cause damage to the air spindle and affect the machining accuracy of the air spindle. Utility Model Content

[0003] The main purpose of the utility model is to provide an air source protection device and a thinning machine, which are intended to perform air pressure protection on an air spindle, prevent the spindle from locking, avoid damage to the air spindle, and ensure the processing accuracy of the air spindle.

[0004] To achieve the above-mentioned purpose, the air source protection device proposed in the utility model includes a chassis, a first air source, a reversing valve and a first air pressure detection component, the first air source is arranged in the chassis, the reversing valve is arranged in the chassis, the reversing valve has at least two inlet ends and one outlet end, one of the inlet ends of the reversing valve is connected to the first air source, and the other inlet end is connected to the second air source, and the outlet end of the reversing valve is used to connect to the air spindle; the first air pressure detection component is arranged on the chassis and is connected to the outlet end of the reversing valve to detect the air pressure supplied to the air spindle.

[0005] In one embodiment, the gas source protection device further includes a vacuum pump, which is disposed in the chassis to generate a vacuum.

[0006] In one embodiment, the air source protection device further includes a second air pressure detection component, which is disposed on the chassis and connected to the air inlet of the vacuum pump to detect the vacuum value generated by the vacuum pump.

[0007] In one embodiment, the gas source protection device also includes a vacuum adapter block, which is arranged in the chassis. The vacuum adapter block has at least two inlet ends and one outlet end, and the outlet end of the vacuum adapter block is connected to the air inlet of the vacuum pump.

[0008] In one embodiment, the air source protection device also includes a drainage air box, which is arranged in the chassis, and the water inlet of the drainage air box is connected to the drainage port of the vacuum pump, and the air inlet of the drainage air box is connected to the exhaust port of the vacuum pump.

[0009] In one embodiment, the air source protection device further includes a solenoid valve, which is disposed in the chassis and on the water inlet pipeline of the vacuum pump.

[0010] In one embodiment, the flow meter is disposed on the chassis and on the water inlet pipeline of the vacuum pump, and the flow meter is located between the solenoid valve and the vacuum pump.

[0011] In one embodiment, the gas source protection device further includes an electric control box, and the electric control box is disposed in the chassis.

[0012] In one embodiment, a cooling fan is disposed on the top of the chassis.

[0013] The utility model also provides a thinning machine, comprising the above-mentioned gas source protection device.

[0014] In the technical solution provided by the utility model, when in use, one of the inlet ends of the reversing valve is connected to the outlet end, and the other inlet end is not connected to the outlet end. At this time, the first air source supplies air to the air spindle. When the first air pressure detection component detects that the air pressure supplied by the first air source to the air spindle is lower than the preset air pressure (the first air source is insufficient in air supply), the other inlet end of the reversing valve is connected to the outlet end, and the second air source supplies air to the air spindle. The utility model sets a steering valve in the chassis. When the first air source is insufficient in air supply, the second air source is used to assist in air supply, which can provide air pressure protection for the air spindle, prevent the spindle from locking, avoid damage to the air spindle, and ensure the processing accuracy of the air spindle. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0016] Figure 1 A three-dimensional diagram of an embodiment of the gas source protection device provided by the utility model;

[0017] Figure 2 for Figure 1 A three-dimensional image from another angle;

[0018] Figure 3 A schematic diagram of the structure of an embodiment of the chassis provided by the utility model;

[0019] Figure 4 for Figure 3A schematic diagram of the structure from another angle;

[0020] Figure 5 A schematic structural diagram of an embodiment of a reversing valve provided by the utility model;

[0021] Figure 6 A schematic structural diagram of an embodiment of a vacuum pump provided by the utility model;

[0022] Figure 7 A schematic structural diagram of an embodiment of an air pressure detection assembly provided by the utility model;

[0023] Figure 8 A structural schematic diagram of an embodiment of a vacuum adapter block provided by the utility model;

[0024] Fig. 9 A schematic diagram of the structure of an embodiment of a solenoid valve provided by the utility model;

[0025] Fig.10 A schematic structural diagram of an embodiment of a flow meter provided by the utility model;

[0026] Fig.11 This is a structural schematic diagram of an embodiment of an electric control box provided by the utility model.

[0027] Description of Figure Numbers:

[0028] 100. Air source protection device; 1. Chassis; 11. External connector; 12. Cable interface; 13. Universal wheel; 2. First air source; 21. Reversing valve; 22. First air pressure detection assembly; 3. Vacuum pump; 31. Vacuum adapter block; 32. Second air pressure detection assembly; 33. Solenoid valve; 34. Flow meter; 4. Drain air box; 41. Drain pipe; 42. Exhaust pipe; 5. Electric control box; 6. Cooling fan.

[0029] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0032] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0033] An air spindle is used in thinning operations. The air spindle generally uses an air bearing to support the rotation of the spindle. When there is no ventilation, the spindle and the air bearing are in contact. When gas of a specified pressure is introduced, the spindle and the air bearing will be separated by an air film. Continuous and stable ventilation is required to achieve the normal operation of the air spindle. If the air supply to the air spindle is suddenly stopped due to an air supply failure, the spindle will be locked, which will cause damage to the air spindle and affect the machining accuracy of the air spindle.

[0034] Based on this, the utility model proposes an air source protection device and a thinning machine, which can perform air pressure protection on the air spindle, prevent the spindle from locking, avoid damage to the air spindle, and ensure the processing accuracy of the air spindle. Figure 1 A three-dimensional diagram of an embodiment of the gas source protection device provided by the utility model; Figure 2 for Figure 1 A three-dimensional image from another angle; Figure 3 A schematic diagram of the structure of an embodiment of the interior of a chassis provided by the utility model;

[0035] Figure 4 for Figure 3 A schematic diagram of the structure from another angle; Figure 5 A schematic structural diagram of an embodiment of a reversing valve provided by the utility model; Figure 6 A schematic structural diagram of an embodiment of a vacuum pump provided by the utility model; Figure 7 A schematic structural diagram of an embodiment of an air pressure detection assembly provided by the utility model; Figure 8A structural schematic diagram of an embodiment of a vacuum adapter block provided by the utility model; Fig. 9 A schematic diagram of the structure of an embodiment of a solenoid valve provided by the utility model; Fig.10 A schematic structural diagram of an embodiment of a flow meter provided by the utility model; Fig.11 This is a structural schematic diagram of an embodiment of an electric control box provided by the utility model.

[0036] See also Figure 3 to Figure 4 In one embodiment of the utility model, the air source protection device 100 includes a chassis 1, a first air source 2, a reversing valve 21 and a first air pressure detection component 22, the first air source 2 is arranged in the chassis 1, the reversing valve 21 is arranged in the chassis 1, the reversing valve 21 has at least two inlet ends and one outlet end, one of the inlet ends of the reversing valve 21 is connected to the first air source 2, and the other inlet end is connected to the second air source, and the outlet end of the reversing valve 21 is used to connect to the air spindle; the first air pressure detection component 22 is arranged on the chassis 1 and is connected to the outlet end of the reversing valve 21 to detect the air pressure supplied to the air spindle.

[0037] In the technical solution provided by the utility model, when in use, one of the inlet ends of the reversing valve 21 is connected to the outlet end, and the other inlet end is not connected to the outlet end. At this time, the first air source 2 supplies air to the air spindle. When the first air pressure detection component 22 detects that the air pressure supplied by the first air source 2 to the air spindle is lower than the preset air pressure (the first air source 2 is insufficient in air supply), the other inlet end of the reversing valve 21 is connected to the outlet end, and the second air source supplies air to the air spindle. The utility model sets a steering valve in the chassis 1. When the first air source 2 is insufficient in air supply, the second air source is used to assist in air supply, which can provide air pressure protection for the air spindle, prevent the spindle from locking, avoid damage to the air spindle, and ensure the processing accuracy of the air spindle.

[0038] It can be understood that the air source protection device 100 further includes a controller, and the controller is connected to both the first air pressure detection component 22 and the reversing valve 21 , so as to realize automatic control of the reversing valve 21 .

[0039] For further information, see Figure 5 The reversing valve 21 is a two-position five-way solenoid valve 33, which can realize the gas supply reversal between the first gas source 2 and the second gas source, and is also convenient for realizing automatic control; please refer to Figure 7 The first air pressure detection component 22 is an air pressure detection meter, which can detect the air pressure of the air supply and can also alarm when the detected air pressure is lower than the preset air pressure, so as to facilitate automatic control.

[0040] In the embodiments of the present invention, please refer to Figure 3 , Figure 4 and Figure 6 The air source protection device 100 further includes a vacuum pump 3, which is disposed in the chassis 1 to generate a vacuum. The air inlet of the vacuum pump 3 can be connected to a device to be evacuated to generate a vacuum. The vacuum pump 3 is integrated into the chassis 1, which has a compact structure and can protect the vacuum pump 3.

[0041] In the embodiments of the present invention, please refer to Figure 1 , Figure 3 and Figure 7 The air source protection device 100 further includes a second air pressure detection component 32, which is disposed on the chassis 1 and is connected to the air inlet of the vacuum pump 3 to detect the vacuum value generated by the vacuum pump 3. When the air inlet of the vacuum pump 3 is connected to the equipment to be evacuated to generate a vacuum, the second air pressure detection component detects the vacuum value generated by the vacuum pump 3, which is convenient for monitoring the working state of the vacuum pump 3. Furthermore, the second air pressure detection component 32 is an air pressure detection meter, which can detect the vacuum value generated by the vacuum pump 3, and can also alarm when the detected vacuum value is lower than the preset vacuum value, which is convenient for realizing automatic control.

[0042] In the embodiments of the present invention, please refer to Figure 4 and Figure 8 The air source protection device 100 further includes a vacuum adapter block 31, which is disposed in the chassis 1. The vacuum adapter block 31 has at least two inlet ends and one outlet end, and the outlet end of the vacuum adapter block 31 is connected to the air inlet of the vacuum pump 3. The vacuum generated by the vacuum pump 3 can be diverted through the vacuum adapter block 31 to supply multiple devices. It can be understood that each inlet end of the vacuum adapter block 31 is connected to the outlet end, and the inlet end of the vacuum adapter block 31 can be two, three or four.

[0043] For further information, see Figure 2, the chassis 1 is provided with a plurality of external joints 11, and the plurality of external joints 11 are used to communicate with the outlet end of the steering valve, the other inlet end of the steering valve, and the inlet end of the vacuum adapter block 31. The internal communication port is led to the outside of the chassis 1 through the plurality of external joints 11, so as to facilitate the communication with external equipment. In the embodiment of the utility model, the vacuum adapter block 31 has three inlet ends, and the chassis 1 is provided with five external joints 11, which are respectively the first external joint, the second external joint, the third external joint, the fourth external joint and the fifth external joint. The plurality of external joints 11 can be connected with the steering valve and the vacuum adapter block 31 in the following manner: the first external joint is connected with the other inlet end of the reversing valve 21, and is connected with the second air source arranged outside the chassis 1 through the first external joint; the second external joint is connected with the outlet end of the reversing valve 21, and is connected with the air main shaft through the second external joint; the third external joint, the fourth external joint and the fifth external joint are respectively connected with the three inlet ends of the vacuum adapter block 31, so as to connect with external equipment and generate vacuum. It can be understood that when the vacuum pump 3 is in use, the third external connector, the fourth external connector and the fifth external connector that are not connected to equipment can be blocked with a plug.

[0044] In the embodiments of the present invention, please refer to Figure 3 The air source protection device 100 further includes a drainage air box 4, which is disposed in the chassis 1. The water inlet of the drainage air box 4 is connected to the drainage port of the vacuum pump 3, and the air inlet of the drainage air box 4 is connected to the exhaust port of the vacuum pump 3. The drainage air box 4 is used to collect and discharge waste water and waste gas generated during the use of the vacuum pump 3. For understanding, please refer to Figure 2 The drainage air box 4 has a drainage pipe 41 and an exhaust pipe 42 for discharging the waste water and exhaust gas collected in the drainage air box 4. The chassis 1 may be provided with mounting holes corresponding to the drainage pipe 41 and the exhaust pipe 42, so as to facilitate leading the outlet ends of the drainage pipe 41 and the exhaust pipe 42 to the outside of the chassis 1.

[0045] In the embodiments of the present invention, please refer to Figure 3 and Fig. 9 The air source protection device 100 further includes a solenoid valve 33, which is disposed in the chassis 1 and on the water inlet pipeline of the vacuum pump 3. The solenoid valve 33 is used to control the connection and disconnection of the water inlet pipeline of the vacuum pump 3, so as to facilitate the control of the water supply of the vacuum pump 3.

[0046] In the embodiment of the present utility model, please refer to Figure 1 , Figure 3 and Fig.10The flow meter 34 is arranged on the chassis 1 and on the water inlet pipeline of the vacuum pump 3. The flow meter 34 is located between the solenoid valve 33 and the vacuum pump 3. The flow meter 34 can detect the flow rate of water supplied to the vacuum pump 3 for startup and cooling, and can also give an alarm when the detected water flow rate is lower than the preset flow rate, so as to realize automatic control.

[0047] In the embodiments of the present invention, please refer to Figure 3 , Figure 4 and Fig.11 The gas source protection device 100 further includes an electric control box 5, which is disposed in the chassis 1. The electric control box 5 is used to realize automatic control of the gas source protection device 100. It can be understood that the electric control box 5 includes a relay, which can play the role of automatic adjustment, safety protection, and circuit conversion in the circuit; please refer to Figure 2 The chassis 1 may be provided with a cable interface 12 for connecting with an external cable.

[0048] In the embodiments of the present invention, please refer to Figure 3 and Figure 4 , a cooling fan 6 is provided on the top of the chassis 1. The cooling fan 6 plays a role in dissipating heat and reducing the temperature in the chassis 1. It can be understood that the chassis 1 is provided with cooling holes corresponding to the cooling fan 6 to discharge the heat in the chassis 1; there can be multiple cooling fans 6. Further, a plurality of universal wheels 13 are provided at the bottom of the chassis 1 to facilitate the movement of the chassis 1.

[0049] The utility model also proposes a thinning machine, which includes an air source protection device 100. The specific structure of the air source protection device 100 refers to the above embodiment. Since the thinning machine adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.

[0050] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A gas source protection device, characterized in that: include: Chassis; a first gas source, the first gas source being disposed in the chassis; a reversing valve, the reversing valve being arranged in the chassis, the reversing valve having at least two inlet ends and one outlet end, one inlet end of the reversing valve being connected to the first air source, the other inlet end being connected to the second air source, and the outlet end of the reversing valve being connected to the air spindle; and, A first air pressure detection component is arranged on the chassis and is connected to the outlet end of the reversing valve to detect the air pressure supplied to the air spindle.

2. The gas source protection device according to claim 1, characterized in that: The gas source protection device also includes a vacuum pump, which is arranged in the chassis and is used to generate a vacuum.

3. The gas source protection device according to claim 2, characterized in that: The air source protection device also includes a second air pressure detection component, which is arranged on the chassis and communicated with the air inlet of the vacuum pump to detect the vacuum value generated by the vacuum pump.

4. The gas source protection device according to claim 2, characterized in that: The gas source protection device also includes a vacuum adapter block, which is arranged in the chassis. The vacuum adapter block has at least two inlet ends and one outlet end, and the outlet end of the vacuum adapter block is connected to the air inlet of the vacuum pump.

5. The gas source protection device according to claim 2, characterized in that: The air source protection device also includes a drainage air box, which is arranged in the chassis, the water inlet of the drainage air box is connected to the drainage port of the vacuum pump, and the air inlet of the drainage air box is connected to the exhaust port of the vacuum pump.

6. The gas source protection device according to claim 2, characterized in that: The air source protection device also includes a solenoid valve, which is arranged in the chassis and on the water inlet pipeline of the vacuum pump.

7. The gas source protection device according to claim 6, characterized in that: The air source protection device also includes a flow meter, which is arranged on the chassis and on the water inlet pipeline of the vacuum pump. The flow meter is located between the solenoid valve and the vacuum pump.

8. The gas source protection device according to claim 1, characterized in that: The gas source protection device also includes an electric control box, which is arranged in the chassis.

9. The gas source protection device according to claim 1, characterized in that: A heat dissipation fan is arranged on the top of the chassis.

10. A thinning machine, characterized in that: It comprises the gas source protection device as claimed in any one of claims 1 to 9.

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