Coating equipment, system and product

Abstract

According to the system and the product provided by the utility model, coating equipment comprises a winding part, an evaporation source and a vacuum chamber, the winding part and the evaporation source are arranged in the vacuum chamber, the winding part is arranged at the upper part of the vacuum chamber and is positioned above the evaporation source, the evaporation source is arranged at the lower part of the vacuum chamber and is positioned below the winding part, and the vacuum chamber is arranged in the vacuum chamber. The vacuum chamber is provided with a first vacuum set used for vacuumizing the evaporation source and a second vacuum set used for vacuumizing the winding part, the first vacuum set is arranged on the lower portion of the vacuum chamber, and the second vacuum set is arranged on the upper portion of the vacuum chamber. According to the utility model, the vacuum chamber is vacuumized by adopting the two sets of vacuumizing systems, the first vacuum group is used for vacuumizing the evaporation source, and the second vacuum group is used for vacuumizing the winding system, so that the two sets of vacuumizing systems can ensure that the vacuum value in the vacuum chamber well reaches a preset level, and a high-quality coating product is obtained.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a coating device, a system and a product. Background Art

[0002] Vacuum coating refers to a technology that evaporates or sputters materials into gaseous atoms or molecules in a vacuum environment and condenses them on the surface of the substrate to form a thin film. Its working principle mainly involves reducing the density of gas molecules in a vacuum environment, thereby reducing the interference of air molecules on the coating process and improving the coating quality and accuracy. Before vacuum coating begins, the vacuum chamber needs to be evacuated so that the vacuum chamber maintains a stable vacuum to form a good coating effect. However, the current vacuum chamber is difficult to maintain a good vacuum coating. Therefore, the existing technology needs to be improved and enhanced. Utility Model Content

[0003] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a coating device, system and product.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] The utility model provides a coating device, comprising a winding part, an evaporation source and a vacuum chamber, wherein the winding part and the evaporation source are arranged in the vacuum chamber, the winding part is arranged at the upper part of the vacuum chamber and is located above the evaporation source, and the evaporation source is arranged at the lower part of the vacuum chamber and is located below the winding part, and the vacuum chamber is provided with a first vacuum group for evacuating the evaporation source and a second vacuum group for evacuating the winding part, the first vacuum group is arranged at the lower part of the vacuum chamber, and the second vacuum group is arranged at the upper part of the vacuum chamber.

[0006] Furthermore, in the coating equipment, the first vacuum group includes a screw pump, a Roots pump, a maintenance pump and a diffusion pump, the screw pump is connected to the Roots pump, the Roots pump is connected to the diffusion pump, the diffusion pump is connected to the lower part of the vacuum chamber, and the maintenance pump is connected to the pipeline between the Roots pump and the diffusion pump.

[0007] Furthermore, in the coating equipment, the first vacuum group also includes a diffusion pump, which is connected to the Roots pump and to the lower part of the vacuum chamber.

[0008] Furthermore, in the coating equipment, the second vacuum group includes a screw pump, a first Roots pump, a second Roots pump and a first molecular pump, the screw pump is connected to the first Roots pump, the first Roots pump is connected to the second Roots pump, the second Roots pump is connected to the first molecular pump, and the first molecular pump is connected to the upper part of the vacuum chamber. The second vacuum group also includes a third Roots pump and a second molecular pump, the third Roots pump is connected to the first Roots pump connected to the screw pump, the second molecular pump is connected to the third Roots pump and connected to the upper part of the vacuum chamber.

[0009] Furthermore, the coating equipment comprises a first cryogenic refrigerator and a second cryogenic refrigerator, wherein the first cryogenic refrigerator is connected to the vacuum chamber, and the second cryogenic refrigerator is connected to the winding portion.

[0010] Furthermore, the coating equipment also includes a general cooling machine, which is connected to the main roller of the winding part.

[0011] The utility model provides a coating system, comprising the coating equipment as described above and a water electroplating equipment for performing water electroplating on a workpiece of the coating equipment, wherein the water electroplating equipment is arranged on one side of the coating equipment.

[0012] The utility model also provides a coating product made by the coating system, including a support film, wherein the upper surface of the support film is coated with a first coating, and the lower surface of the support film is coated with a second coating. When the first coating and the second coating are metal coatings, the thickness of the first coating and the second coating is 800nm-1500nm; when the first coating and the second coating are non-metallic coatings, the thickness of the first coating and the second coating is 30nm-100nm.

[0013] Furthermore, in the coated product made by the coating system, when the first coating and the second coating are non-metallic coatings, a third coating is coated on the surface of the first coating and the second coating, and the thickness of the third coating is 800-950nm.

[0014] Furthermore, for the coated product made by the coating system, when the first coating and the second coating are metal coatings, the shape of the surface particles thereof is an inclined columnar structure, and the inclination angle with the support film surface is 45°-90°; when the first coating and the second coating are non-metallic coatings, the shape of the surface particles of the third coating is an inclined columnar structure, and the inclination angle with the support film surface is 45°-90°.

[0015] Compared with the prior art, the utility model provides a coating device, system and product, the coating device includes a winding part, an evaporation source and a vacuum chamber, the winding part and the evaporation source are arranged in the vacuum chamber, the winding part is arranged at the upper part of the vacuum chamber, above the evaporation source, the evaporation source is arranged at the lower part of the vacuum chamber, below the winding part, the vacuum chamber is provided with a first vacuum group for vacuuming the evaporation source and a second vacuum group for vacuuming the winding part, the first vacuum group is arranged at the lower part of the vacuum chamber, and the second vacuum group is arranged at the upper part of the vacuum chamber. The utility model adopts two vacuum pumping systems, namely a first vacuum combination and a second vacuum group, to evacuate a vacuum chamber. A winding part and an evaporation source are arranged in the vacuum chamber. The evaporation source is mainly used to melt the metal material to be plated and evaporate it. The winding part is used to unfold the film so that it passes over the evaporation source so that the metal particles formed by vapor deposition in the evaporation source adhere to the unfolded film. The first vacuum group of the utility model is used to evacuate the evaporation source, and the second vacuum group of the utility model is used to evacuate the winding system. In this way, the two vacuum pumping systems can ensure that the vacuum value in the vacuum chamber reaches a predetermined level well, so as to obtain high-quality film-coated products. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 This is a structural block diagram of the coating equipment provided by the utility model.

[0018] Figure 2 This is a schematic structural diagram of the coating equipment provided by the utility model.

[0019] Figure 3 This is a schematic structural diagram of a film-coated product made by the film-coating system provided by the utility model.

[0020] Description of Figure Numbers:

[0021] Winding section 10

[0022] Evaporation source 20

[0023] Vacuum chamber 30

[0024] First vacuum group 41

[0025] Second vacuum group 42

[0026] Screw pump 43

[0027] Roots pump 44

[0028] The first roots pump 441

[0029] Second Roots pump 442

[0030] The third roots pump 443

[0031] Maintaining pump 45

[0032] Diffusion pump 46

[0033] The first molecular pump 471

[0034] Second molecular pump 472

[0035] First cryogenic machine 501

[0036] Second cryogenic machine 502

[0037] General cooling machine 60

[0038] Support layer 100

[0039] First coating 110

[0040] Second coating 120

[0041] The third coating 130 DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0043] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0044] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0045] like Figure 1 , Figure 2 As shown, a coating device provided by the utility model includes a winding portion 10, an evaporation source 20 and a vacuum chamber 30, wherein the winding portion 10 and the evaporation source 20 are arranged in the vacuum chamber 30, the winding portion 10 is arranged at the upper part of the vacuum chamber 30, above the evaporation source 20, and the evaporation source 20 is arranged at the lower part of the vacuum chamber 30, below the winding portion 10, and a first vacuum group 41 for evacuating the evaporation source 20 and a second vacuum group 42 for evacuating the winding portion 10 are arranged on the vacuum chamber 30, the first vacuum group 41 is arranged at the lower part of the vacuum chamber 30, and the second vacuum group 42 is arranged at the upper part of the vacuum chamber 30. The utility model adopts two vacuum pumping systems, namely the first vacuum group 41 and the second vacuum group 42, to evacuate the vacuum chamber 30. A winding part 10 and an evaporation source 20 are arranged in the vacuum chamber 30. The evaporation source 20 is mainly used to melt the metal material to be plated and evaporate it. The winding part 10 is used to unfold the film so that it passes over the evaporation source 20 and the metal particles formed by the vapor deposition in the evaporation source 20 are attached to the unfolded film. The first vacuum group 41 of the utility model is used to evacuate the evaporation source 20, and the second vacuum group 42 of the utility model is used to evacuate the winding system. In this way, the two vacuum pumping systems can ensure that the vacuum value in the vacuum chamber 30 reaches the predetermined level well, so as to obtain high-quality coated products. The winding part 10 is arranged in the vacuum chamber 30 and can be freely taken out and put back from the vacuum chamber 30. Figure 2That is, the winding part 10 is moved out of the vacuum chamber 30 and unfolded. The evaporation source 20 is a device such as an evaporation boat used to evaporate the metal material to be plated. The winding part 10 and the evaporation source 20 are both prior arts. For example, the patent with publication number CN117721434A discloses an evaporation winding mechanism and a vacuum coating machine, one of which includes: an electron beam evaporation source 20, used to evaporate the target film material to generate a coating gas; and a winding roller group, used to convey a flexible coating member with a coating surface, and arranged above the electron beam evaporation source 20; the winding roller group includes at least two coating rollers, each coating roller is distributed in sequence along the circumferential direction with the electron beam evaporation source 20 as the center, and each coating roller can make the coating surface of the flexible coating member wound thereon face the electron beam evaporation source 20, so that during coating, the coating surface of the flexible coating member wound around each coating roller is at least partially exposed to the atmosphere formed by the coating gas.

[0046] The first vacuum group 41 is connected to the vacuum chamber 30 through a pipeline, and the second vacuum group 42 is also connected to the vacuum chamber 30 through a pipeline. The second vacuum group 42 is arranged at the upper part of the vacuum chamber 30. Such an arrangement can facilitate the vacuuming of the winding system on the one hand, and can facilitate installation on the other hand, so that the structure of the coating equipment of the utility model is simpler and more compact, which is conducive to reducing the occupied space and is also convenient for operators to maintain.

[0047] Further, in the coating equipment provided by the present invention, the first vacuum group 41 includes a screw pump 43, a roots pump 44, a maintenance pump 45 and a diffusion pump 46, the screw pump 43 is connected to the roots pump 44, the roots pump 44 is connected to the diffusion pump 46, the diffusion pump 46 is connected to the lower part of the vacuum chamber 30, and the maintenance pump 45 is connected to the pipeline between the roots pump 44 and the diffusion pump 46. Further, in the coating equipment provided by the present invention, the first vacuum group 41 also includes a diffusion pump 46, which is connected to the roots pump 44 and the lower part of the vacuum chamber 30. The screw pump 43 is first turned on to make the area where the evaporation boat is located in the vacuum chamber 30 reach a certain vacuum value, and then the roots pump 44 and the diffusion pump 46 are used in turn, and finally the maintenance pump 45 is used to maintain the vacuum. The advantage of doing so is that according to the working range of each pump, each pump body is maximized, so that the above pump body reaches the maximum efficiency. This is because different pumps have different working efficiencies in different situations. For example, the reason why the screw pump 43 is used before the Roots pump 44 is that the compression ratio of the Roots pump 44 is too low and cannot be used alone.

[0048] Furthermore, in the coating equipment provided by the utility model, the second vacuum group 42 includes a screw pump 43, a first Roots pump 441, a second Roots pump 442 and a first molecular pump 471, the screw pump 43 is connected to the first Roots pump 441, the first Roots pump 441 is connected to the second Roots pump 442, the second Roots pump 442 is connected to the first molecular pump 471, and the first molecular pump 471 is connected to the upper part of the vacuum chamber 30. The second vacuum group 42 also includes a third Roots pump 443 and a second molecular pump 472, the third Roots pump 443 is connected to the first Roots pump 441 connected to the screw pump 43, the second molecular pump 472 is connected to the third Roots pump 443 and is connected to the upper part of the vacuum chamber 30. When evacuating the vacuum, according to Figure 1 The directions of the middle arrows are opened in sequence, so that the characteristics of each pump body can be better utilized, so that they complement each other and achieve a better vacuuming effect. In the second vacuum system, the advantage of using two Roots pumps is that the gas in the winding part 10 can be quickly evacuated, because there is still air in the film, and two Roots pumps are required to evacuate the air and maintain stable vacuum plating. The vacuuming system of the utility model can be multiple, but there should be at least two, and the number of each pump can be multiple, but the arrangement order of the pumps remains unchanged.

[0049] Furthermore, the coating equipment provided by the utility model also includes a first cryogenic machine 501 and a second cryogenic machine 502. The first cryogenic machine 501 is connected to the vacuum chamber 30, and the second cryogenic machine 502 is connected to the winding part 10. One cryogenic machine is arranged in front of the vacuum chamber 30 and is connected to the vacuum chamber 30 through a pipe. The pipe is a copper pipe with fast heat conduction. The copper pipe extends into the inner surface of the vacuum chamber 30. The cryogenic machine 50 is mainly used to cool down, so that the water vapor in the vacuum chamber 30 condenses and then is drawn away by vacuuming. The deep cold setting is conducive to vacuuming. Similarly, a cryogenic machine is also arranged outside the winding part 10. The winding part 10 is located in the winding chamber. The copper pipe of the cryogenic machine is also arranged in the winding chamber for cooling. Thus, two cryogenic machines are arranged separately, which is conducive to reaching the predetermined vacuum value more quickly, is conducive to coating, and improves efficiency.

[0050] Deep cooling is not suitable for cooling components such as the cooling main roller due to the low cooling temperature. Further, the coating equipment provided by the utility model further includes a general cooling machine 60 , which is connected to the main roller of the winding part 10 .

[0051] The utility model provides a coating system, including the coating equipment provided by the utility model as above and the water electroplating equipment for water electroplating the processed object of the coating equipment, and the water electroplating equipment is arranged on one side of the coating equipment. The film material to be plated can be placed in the above coating equipment to form a material to be plated with a certain thickness. The material to be plated can be a metal or a metal oxide. If it is a metal, it can be cut after the metal is plated by the above coating equipment, and then sent to the water electroplating equipment through a conveyor belt or manually for water electroplating. The purpose of cutting is to fit the width of the water electroplating tank. If it is a metal oxide, such as aluminum oxide, after the above coating, the above equipment can also be used to form aluminum on the aluminum oxide. Then the subsequent water electroplating can be unnecessary.

[0052] like Figure 3 As shown, the utility model also provides a coating product made by the coating system, including a support film, the upper surface of the support film is coated with a first coating 110, and the lower surface of the support film is coated with a second coating 120, wherein the support film can be a film made of polyamide, polyterephthalate, polyimide, polyethylene, polypropylene, polystyrene, polyvinyl chloride, acrylonitrile-butadiene-styrene copolymer, polybutylene terephthalate, poly(p-phenylene terephthalamide), polypropylene, polyoxymethylene, epoxy resin, phenolic resin, polytetrafluoroethylene, polyvinylidene fluoride, silicone rubber, polycarbonate and other materials.

[0053] When the first coating 110 and the second coating 120 are metal coatings, the thickness of the first coating 110 and the second coating 120 is 800nm-1500nm, and when the first coating 110 and the second coating 120 are non-metallic coatings, the thickness of the first coating 110 and the second coating 120 is 30nm-100nm. Further, in the coating product made by the coating system provided by the utility model, when the first coating 110 and the second coating 120 are non-metallic coatings, the surfaces of the first coating 110 and the second coating 120 are plated with a third coating 130, and the thickness of the third coating 130 is 800-950nm. The material of the first coating 110 and the second coating 120 can be metal or non-metal. When the first coating 110 is metal. It can be copper metal, aluminum metal, titanium metal, nickel metal, etc. At this time, the thickness of the first coating 110 and the second coating 120 is 800nm-1500nm. When the first coating 110 and the second coating 120 are non-metallic, the material of the first coating 110 and the second metal can be aluminum oxide, silicon nitride and the like. At this time, the thickness of the first coating 110 and the second coating 120 are both 30nm-100nm. At this time, a third coating 130 is formed on the first coating 110 and the second coating 120. The material of the third coating 130 is metal, which can be copper metal, aluminum metal, titanium metal, nickel metal and the like. The thickness of the third coating 130 is 800-950nm.

[0054] Further, the coating product made of the coating system provided by the utility model, when the first coating 110 and the second coating 120 are metal coatings, the shape of the surface particles is an inclined columnar structure, and the angle of inclination with the support film surface is 45°-90°; when the first coating 110 and the second coating 120 are non-metallic coatings, the shape of the surface particles of the third coating 130 is an inclined columnar structure, and the angle of inclination with the support film surface is 45°-90°. In this way, compared with the metal coating particles being vertically arranged on the support film, when used in a battery, the electrolyte will not easily contact the support film through the gaps between the metal coating particles, thereby improving the life of the composite current collector of the utility model. In the utility model, a PP film is preferably used as the support layer 100, because it is more acid and alkali resistant, and can greatly improve the service life of the current collector of the utility model together with the coating structure of the utility model. The PP film of the utility model is preferably 3um-8um, which can reduce the mass of the current collector of the utility model and improve the energy density of the battery.

[0055] In summary, the utility model adopts two vacuum pumping systems, namely the first vacuum combination and the second vacuum group, to evacuate the vacuum chamber. A winding part and an evaporation source are arranged in the vacuum chamber. The evaporation source is mainly used to melt the metal material to be plated and evaporate it. The winding part is used to unfold the film so that it passes over the evaporation source so that the metal particles formed by vapor deposition in the evaporation source adhere to the unfolded film. The first vacuum group of the utility model is used to evacuate the evaporation source, and the second vacuum group of the utility model is used to evacuate the winding system. In this way, the two vacuum pumping systems can ensure that the vacuum value in the vacuum chamber reaches a predetermined level well, thereby obtaining high-quality coated products.

[0056] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A coating device, comprising a winding portion, an evaporation source and a vacuum chamber, characterized in that: The winding portion and the evaporation source are arranged in the vacuum chamber, the winding portion is arranged at the upper part of the vacuum chamber and above the evaporation source, the evaporation source is arranged at the lower part of the vacuum chamber and below the winding portion, and the vacuum chamber is provided with a first vacuum group for evacuating the evaporation source and a second vacuum group for evacuating the winding portion, the first vacuum group is arranged at the lower part of the vacuum chamber, and the second vacuum group is arranged at the upper part of the vacuum chamber.

2. The coating device according to claim 1, characterized in that: The first vacuum group includes a screw pump, a Roots pump, a maintenance pump and a diffusion pump, the screw pump is connected to the Roots pump, the Roots pump is connected to the diffusion pump, the diffusion pump is connected to the lower part of the vacuum chamber, and the maintenance pump is connected to the pipeline between the Roots pump and the diffusion pump.

3. The coating device according to claim 2, characterized in that: The first vacuum group further includes a diffusion pump, which is communicated with the Roots pump and with the lower part of the vacuum chamber.

4. The coating device according to claim 1, characterized in that: The second vacuum group includes a screw pump, a first Roots pump, a second Roots pump and a first molecular pump, the screw pump is connected to the first Roots pump, the first Roots pump is connected to the second Roots pump, the second Roots pump is connected to the first molecular pump, and the first molecular pump is connected to the upper part of the vacuum chamber.

5. The coating device according to claim 4, characterized in that: The second vacuum group further includes a third Roots pump and a second molecular pump, the third Roots pump is connected to the first Roots pump connected to the screw pump, and the second molecular pump is connected to the third Roots pump and to the upper part of the vacuum chamber.

6. The coating device according to claim 1, characterized in that: It also includes a general cooling machine, a first deep cooling machine and a second deep cooling machine, wherein the first deep cooling machine is connected to the vacuum chamber, the second deep cooling machine is connected to the winding part, and the general cooling machine is connected to the main roller of the winding part.

7. A coating system, characterized in that: It comprises a coating device as described in any one of claims 1 to 6 and a water electroplating device for performing water electroplating on a workpiece of the coating device, wherein the water electroplating device is arranged on one side of the coating device.

8. A coated product made by a coating system, characterized in that: It includes a supporting film, the upper surface of the supporting film is coated with a first coating, the lower surface of the supporting film is coated with a second coating, when the first coating and the second coating are metal coatings, the thickness of the first coating and the second coating is 800nm-1500nm, when the first coating and the second coating are non-metallic coatings, the thickness of the first coating and the second coating is 30nm-100nm.

9. The coated product made by the coating system according to claim 8, characterized in that: When the first coating layer and the second coating layer are non-metallic coating layers, a third coating layer is plated on the surfaces of the first coating layer and the second coating layer, and the thickness of the third coating layer is 800-950 nm.

10. The coated product made by the coating system according to claim 9, characterized in that: When the first coating and the second coating are metal coatings, the shape of the surface particles is an inclined columnar structure, and the inclination angle with the support film surface is 45°-90°; when the first coating and the second coating are non-metallic coatings, the shape of the surface particles of the third coating is an inclined columnar structure, and the inclination angle with the support film surface is 45°-90°.

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