Vacuum pumping and breaking tool for vacuum carrier

Abstract

The vacuum pumping and breaking tool comprises a base, a lifting mechanism and a vacuum pumping mechanism, the base is used for bearing the vacuum carrier, the lifting mechanism is arranged on the base and is in sliding connection with the base, the vacuum pumping mechanism comprises an ejector pin communicated with a vacuum gas path, the ejector pin is connected with the lifting mechanism, and the ejector pin is connected with the lifting mechanism. The lifting mechanism can slide and lift relative to the base so as to drive the ejector pin to be switched among a first position, a second position and a third position; when the ejector pin is located at the first position, the ejector pin is used for being separated from the vacuum carrier, when the ejector pin is located at the second position, the ejector pin is used for ejecting an air valve of the vacuum carrier, and when the ejector pin is located at the third position, the ejector pin is used for being in sealed connection with an air hole of the vacuum carrier. Due to the fact that the vacuum pumping and breaking tool integrates the functions of vacuum pumping and vacuum breaking, the process steps of the vacuum carrier in the working state switching process are simplified; in addition, the vacuum pumping and breaking tool can be arranged in an off-line mode, and therefore the situation that production line resources are occupied can be avoided.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum carriers, and in particular to a vacuum evacuation tooling for vacuum carriers. Background Art

[0002] In the processes of some production lines, vacuum carriers are required to adsorb and transfer the workpieces to be processed. The working state of the vacuum carrier can be switched by using the vacuum pumping station and vacuum breaking station on the production line. The vacuum pumping station is used to control the vacuum carrier to be in a vacuum state and adsorb the workpieces to be processed, and the vacuum breaking station is used to control the vacuum carrier to break the vacuum state and separate from the workpieces to be processed.

[0003] In some cases, the vacuum carrier needs to be removed from the production line. For the vacuum carrier removed from the production line, its working state also needs to be controlled. In the related art, the vacuum carrier is placed on the vacuum pumping station or the vacuum breaking station on the production line according to the required working state. The above-mentioned solutions in the related art are complicated to operate and occupy more production line resources, which has a negative impact on production efficiency. Utility Model Content

[0004] The present application discloses a vacuum breaking tool for a vacuum carrier, so as to solve the problem in the related art that when switching the working state of the vacuum carrier, the operation is relatively complicated.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] The embodiment of the present application discloses a vacuum breaking tool for a vacuum carrier, and the disclosed vacuum breaking tool comprises a base, a lifting mechanism and a vacuuming mechanism;

[0007] The base is used to carry the vacuum carrier, the lifting mechanism is disposed on the base and is slidably connected to the base, the vacuum pumping mechanism includes a pin connected to the vacuum air path, the pin is connected to the lifting mechanism, and the lifting mechanism can slide and rise relative to the base to drive the pin to switch between the first position, the second position and the third position;

[0008] When the ejector pin is in the first position, the ejector pin is used to separate from the vacuum carrier; when the ejector pin is in the second position, the ejector pin is used to push open the valve of the vacuum carrier; when the ejector pin is in the third position, the ejector pin is used to be sealed and connected to the air hole of the vacuum carrier.

[0009] Optionally, the lifting mechanism includes a lifting platform and a driving assembly;

[0010] The lifting platform is slidably connected to the base, the ejector pin is arranged on the lifting platform, the driving component is arranged on the base and is transmission-connected to the lifting platform, and the driving component is used to drive the lifting platform to slide and lift relative to the base.

[0011] Optionally, the lifting platform comprises a first surface and a second surface facing each other, the ejector pin protrudes from the first surface, the second surface is provided with a first groove and a second groove communicating with each other, the depth of the first groove is greater than the depth of the second groove, the driving assembly is slidably connected to the base, and can slide relative to the lifting platform along the docking direction of the first groove and the second groove;

[0012] When the driving assembly is in the first groove, the ejector pin is in the first position; when the driving assembly slides to the second groove, the lifting platform is lifted to drive the ejector pin to the second position; when the driving assembly slides out of the second groove and contacts the second surface, the lifting platform is lifted to drive the ejector pin to the third position.

[0013] Optionally, a guide structure is provided between the first groove and the second groove, and between the second groove and the second surface.

[0014] Optionally, the driving assembly includes a slider, a connecting rod and a support wheel, the slider is slidably connected to the base, the connecting rod is connected to the slider to pull the slider to slide relative to the base, and the support wheel is rotatably connected to the slider. When the slider slides relative to the base, the support wheel moves relative to the lifting platform along the docking direction of the first groove and the second groove to drive the ejector pin to switch between the first position, the second position and the third position.

[0015] Optionally, the driving assembly further comprises a gripping portion, wherein the gripping portion is rotatably connected to the base and the connecting rod respectively, and when the gripping portion rotates around the base, the gripping portion pulls the slider to slide relative to the base via the connecting rod.

[0016] Optionally, the lifting platform is provided with a guide hole, and the base is provided with a guide rod, and the guide rod extends into the guide hole and slidably cooperates with the guide hole.

[0017] Optionally, the lifting mechanism further comprises a sliding support block, wherein the sliding support block is disposed on at least one side of the lifting platform and is slidably connected to the base.

[0018] Optionally, the base includes a base body, a carrier and a baffle, the base body is connected to the carrier, the carrier is used to carry the vacuum carrier, the carrier is provided with a through hole, and the through hole is arranged opposite to the ejector pin;

[0019] The baffle is protrudingly arranged on the table surface of the carrier, and is used for limiting cooperation with the vacuum carrier.

[0020] Optionally, the vacuum pumping mechanism further includes an air source and a control device, wherein the control device is disposed on the base, the air source is connected to the ejector pin via the control device, and the control device is used to control the on / off of the air path between the air source and the ejector pin.

[0021] The technical solution adopted in this application can achieve the following technical effects:

[0022] The vacuum-breaking tooling disclosed in the embodiment of the present application improves the related technology. The disclosed vacuum-breaking tooling includes a base, a lifting mechanism and a vacuum-extracting mechanism; the base is used to carry a vacuum carrier, the lifting mechanism is arranged on the base and is slidably connected to the base, the vacuum-extracting mechanism includes a pin connected to a vacuum air path, the pin is connected to the lifting mechanism, and the lifting mechanism can slide and rise relative to the base to drive the pin to switch between a first position, a second position and a third position; when the pin is in the first position, the pin is used to separate from the vacuum carrier, when the pin is in the second position, the pin is used to push open the valve of the vacuum carrier to break the vacuum of the vacuum carrier, and when the pin is in the third position, the pin is used to seal and connect with the air hole of the vacuum carrier to evacuate the vacuum carrier. Since the above-mentioned vacuum-breaking tooling integrates the functions of vacuuming and breaking the vacuum, the process steps of the vacuum carrier when switching the working state are simplified; and the above-mentioned vacuum-breaking tooling can be set offline, so as to avoid occupying production line resources, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is one of the structural schematic diagrams of the vacuum evacuation tooling disclosed in the embodiment of the present application;

[0024] Figure 2 This is the second structural schematic diagram of the vacuum evacuation tooling disclosed in the embodiment of the present application;

[0025] Figure 3 This is one of the exploded views of the vacuum evacuation tooling disclosed in the embodiment of the present application;

[0026] Figure 4 This is the second exploded view of the vacuum evacuation tooling disclosed in the embodiment of the present application;

[0027] Figure 5 This is a schematic diagram of the structure of the lifting platform disclosed in the embodiment of the present application;

[0028] Figure 6 This is one of the structural schematic diagrams of the lifting mechanism disclosed in the embodiment of the present application;

[0029] Figure 7 This is the second structural schematic diagram of the lifting mechanism disclosed in the embodiment of the present application;

[0030] Figure 8 This is the third structural schematic diagram of the lifting mechanism disclosed in the embodiment of the present application.

[0031] Description of reference numerals:

[0032] 110-base, 111-guide rod, 112-base body, 113-carrier, 1131-through hole, 114-baffle, 120-lifting mechanism, 121-lifting platform, 1211-first surface, 1212-second surface, 1213-first groove, 1214-second groove, 1215-guide structure, 1216-guide hole, 122-driving assembly, 1221-slider, 1222-connecting rod, 1223-support wheel, 1224-gripping part, 123-sliding support block, 130-vacuum extraction mechanism, 131-thrust pin, 132-control device, 140-vacuum carrier, 150-sealing pad, 160-vacuum gauge. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0034] The terms "first", "second", etc. in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally of the same type, and the number of objects is not limited. For example, the first object can be one or more.

[0035] The technical solutions disclosed in various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0036] Please refer to Figures 1 to 8The embodiment of the present application discloses a vacuum-breaking tool for a vacuum carrier 140. The vacuum carrier 140 is used to absorb the workpiece to be processed. The workpiece to be processed may include a lithium battery, a solar cell, etc. The vacuum carrier 140 is provided with a chamber and an air hole connecting the inside and the outside of the chamber. The air hole is provided with an air valve. The air valve and the air hole can be sealed and connected, or can be separated from each other. The chamber of the vacuum carrier 140 can be evacuated by using a vacuum gas source so that the vacuum carrier 140 can absorb the workpiece to be processed; when the vacuum carrier 140 needs to release the workpiece to be processed, the air valve of the vacuum carrier 140 can be pushed open to separate the air valve from the air hole at least partially, so that the outside air can enter the chamber of the vacuum carrier 140 through the air hole, and the vacuum state of the vacuum carrier 140 can be broken.

[0037] The above-mentioned vacuum breaking tooling can be arranged on the production line, or can be arranged separately outside the production line. The vacuum breaking tooling can specifically include a base 110, a lifting mechanism 120 and a vacuum pumping mechanism 130. The base 110 is the structural foundation of the vacuum breaking tooling, and is used to install and support components such as the lifting mechanism 120 and the vacuum pumping mechanism 130. The base 110 is used to carry the vacuum carrier 140. The lifting mechanism 120 is arranged on the base 110 and is slidably connected to the base 110. The sliding connection between the lifting mechanism 120 and the base 110 can be achieved through the sliding cooperation between the slide groove and the slider, or through the sliding cooperation between the sleeve and the shaft rod, which is not limited in the embodiment of the present application. The relative sliding direction between the lifting mechanism 120 and the base 110 can be along the vertical direction.

[0038] The vacuum mechanism 130 includes a pin 131 connected to the vacuum air path. The pin 131 has a hollow structure and is connected to the lifting mechanism 120. Specifically, the pin 131 and the lifting mechanism 120 may be connected by bonding, clamping, bolting, etc. When the lifting mechanism 120 is slid and lifted relative to the base 110, the pin 131 may be driven to switch between the first position, the second position, and the third position, wherein the first position, the second position, and the third position may be raised in sequence along the vertical direction.

[0039] The ejector pin 131 has two functions. On the one hand, it can apply thrust to the valve of the vacuum carrier 140 under the drive of the lifting mechanism 120 to push open the valve and separate the valve from the air hole, thereby breaking the vacuum state of the vacuum carrier 140 and allowing the vacuum carrier to release the workpiece to be processed. On the other hand, the ejector pin 131 can pass through the air hole and extend into the chamber of the vacuum carrier 140. The ejector pin 131 replaces the valve and is sealed and connected to the air hole. With the vacuum gas source, the chamber of the vacuum carrier 140 is evacuated. It should be noted that the valve of the vacuum carrier 140 needs to cooperate with the air hole. When the valve blocks the air hole, the air hole is in a closed state. When the valve is separated from the air hole, the air hole is in an open state. The thrust applied by the ejector pin 131 can act on the valve. The valve can be a sealing plug, a sealing valve or other structures.

[0040] The working states corresponding to the above three positions of the ejector pin 131 are explained as follows: when the ejector pin 131 is in the first position, the first position is the lowest position among the three positions. Since the position of the vacuum carrier 140 on the base 110 is relatively fixed, the ejector pin 131 is separated from the vacuum carrier 140 when in the first position, and will not affect the vacuum state of the vacuum carrier 140. When the lifting mechanism 120 is lifted and drives the ejector pin 131 to be in the second position, the ejector pin 131 will push open the valve of the vacuum carrier 140, so that the outside air enters the chamber of the vacuum carrier 140 through the air hole, and the vacuum state is broken; when the lifting mechanism 120 continues to lift and drives the ejector pin 131 to be in the third position, the third position is the highest position among the three positions, and the ejector pin 131 can extend into the chamber of the vacuum carrier 140. The ejector pin 131 replaces the valve and is sealed and connected to the air hole, thereby blocking the air hole. The vacuum carrier 140 can be evacuated with a vacuum air source. In order to improve the sealing effect between the ejector pin 131 and the air hole, a sealing pad 150 can be provided on the side of the ejector pin 131. After the vacuum operation is completed, the lifting mechanism 120 descends and drives the ejector pin 131 to return to the first position. At this time, the air valve blocks the air hole again, so that the air hole returns to a closed state to maintain the vacuum state of the vacuum carrier 140.

[0041] From the above description, it can be seen that the vacuum breaking tooling disclosed in the embodiment of the present application improves the relevant technology. Since the vacuum breaking tooling integrates the functions of vacuuming and vacuum breaking, only one set of tooling is needed to simultaneously realize the adsorption or separation of the vacuum carrier 140 and the workpiece to be processed, thereby simplifying the process steps of the vacuum carrier 140 when switching the working state; and the above-mentioned vacuum breaking tooling can be set offline (set outside the production line), so as to avoid occupying production line resources and thereby improve production efficiency.

[0042] like Figures 1 to 8As shown, the lifting mechanism 120 may include a lifting platform 121 and a driving assembly 122. The lifting platform 121 is slidably connected to the base 110, and the relative sliding direction of the lifting platform 121 and the base 110 may be along the vertical direction. The ejector pin 131 is provided on the lifting platform 121 and protrudes from the table surface of the lifting platform 121. The ejector pin 131 may be inserted into the lifting platform 121 through an opening on the lifting platform 121. The driving assembly 122 is provided on the base 110 and is transmission-connected to the lifting platform 121. The driving assembly 122 is used to drive the lifting platform 121 to slide and lift relative to the base 110. The driving mode of the driving assembly 122 for the lifting platform 121 may be automatic driving or manual driving. Taking automatic driving as an example, the driving assembly 122 may include a motor, a cylinder and other devices.

[0043] like Figure 5 As shown, the lifting platform 121 may include a first surface 1211 and a second surface 1212 facing each other, the ejector pin 131 protrudes from the first surface 1211, and the second surface 1212 is provided with a first groove 1213 and a second groove 1214 that are interconnected, the depth of the first groove 1213 is greater than the depth of the second groove 1214, and the driving component 122 is slidably connected to the base 110, and can slide relative to the lifting platform 121 along the docking direction of the first groove 1213 and the second groove 1214. It should be noted that when the driving component 122 slides relative to the lifting platform 121, at least part of the driving component 122 contacts the bottom of the first groove 1213, the bottom of the second groove 1214, and the second surface 1212 of the lifting platform 121.

[0044] like Figures 5 to 8As shown, the driving assembly 122 can slide relative to the base 110 in the horizontal direction. When the driving assembly 122 slides in the horizontal direction, the height in the vertical direction does not change. When the driving assembly 122 is in the first groove 1213, the driving assembly 122 contacts the bottom of the first groove 1213. Since the first groove 1213 is deep, the combined height of the driving assembly 122 and the lifting platform 121 in the vertical direction is small. At this time, the ejector pin 131 is in the first position, and the ejector pin 131 and the vacuum carrier 140 are separated from each other. When the driving assembly 122 slides to the second groove 1214, the driving assembly 122 contacts the bottom of the second groove 1214. Since the second groove 1214 is shallow, the combined height of the driving assembly 122 and the lifting platform 121 in the vertical direction increases, which is equivalent to lifting the lifting platform 121, thereby driving the ejector pin 131 to move to the second position, and the ejector pin 131 pushes open the valve of the vacuum carrier 140. When the driving assembly 122 slides out of the second groove 1214 and contacts the second surface 1212 , the combined height of the driving assembly 122 and the lifting platform 121 in the vertical direction continues to increase, and the lifting platform 121 continues to rise, thereby driving the ejector pin 131 to move to the third position, and the ejector pin 131 is sealed and connected to the air hole of the vacuum carrier 140 .

[0045] The lifting platform 121 adopts the above-mentioned stepped groove design, which has a simple structure and is easy to process and manufacture. It can also reduce the probability of failure and improve the durability of the tooling. It should be added that, by setting an inclined surface on the second surface 1212 of the lifting platform 121, when the driving component 122 slides relative to the lifting platform 121 along the inclined surface, the combined height along the vertical direction will change with the inclined surface, thereby realizing the sliding lifting of the lifting platform 121.

[0046] like Figure 5 As shown, in order to enable the driving component 122 to slide smoothly between the first groove 1213, the second groove 1214 and the second surface 1212, a guide structure 1215 is provided between the first groove 1213 and the second groove 1214, and between the second groove 1214 and the second surface 1212. The guide structure 1215 can be a guide slope, a guide arc surface, a guide pulley, etc.

[0047] like Figures 1 to 8As shown, the driving assembly 122 may specifically include a slider 1221, a connecting rod 1222 and a supporting wheel 1223. The slider 1221 is slidably connected to the base 110. The slider 1221 and the base 110 can slide relative to each other in the horizontal direction. In order to improve the smoothness of the sliding of the slider 1221 and the base 110, a linear bearing may be provided between the slider 1221 and the base 110. One end of the connecting rod 1222 is connected to the slider 1221, and can pull the slider 1221 to slide relative to the base 110. The driving force of the connecting rod 1222 may come from a driving source such as a motor or a cylinder, or a force may be applied to the connecting rod 1222 manually. The supporting wheel 1223 is rotatably connected to the slider 1221. When the slider 1221 slides relative to the base 110, the supporting wheel 1223 moves relative to the lifting platform 121 along the docking direction of the first groove 1213 and the second groove 1214, so as to drive the ejector pin 131 to switch between the first position, the second position and the third position. Since the supporting wheel 1223 is in rolling contact with the bottom of the first groove 1213 , the bottom of the second groove 1214 , and the second surface 1212 of the lifting platform 121 , the smoothness can be further improved.

[0048] like Figures 6 to 8 As shown, a force can be applied to the connecting rod 1222 and the slider 1221 manually, and the driving assembly 122 can also include a gripping portion 1224, and two protrusions are provided at the lower part of the gripping portion 1224, and the two protrusions are respectively connected to the base 110 and the connecting rod 1222 for rotation, and the rotation center of the gripping portion 1224 is located on the base 110. When the gripping portion 1224 rotates around the base 110, the gripping portion 1224 can pull the slider 1221 to slide relative to the base 110 through the connecting rod 1222, thereby driving the support wheel 1223 to move relative to the lifting platform 121 along the docking direction of the first groove 1213 and the second groove 1214. An anti-slip structure can also be provided on the gripping portion 1224 for the convenience of users.

[0049] like Figures 1 to 4 As shown, in order to improve the stability of the lifting platform 121 during sliding and lifting, and to avoid the problem of inaccurate docking between the ejector pin 131 and the valve and air hole of the vacuum carrier 140, a guide hole 1216 can be provided on the lifting platform 121, and a guide rod 111 can be provided on the base 110. The guide rod 111 extends into the guide hole 1216 and slides with the guide hole 1216, thereby constraining the movement of the lifting platform 121. The number of guide holes 1216 can be one, two, or more than two, and the number of guide rods 111 and guide holes 1216 is equal and one-to-one corresponding. In addition, in order to improve the smoothness of sliding between the guide rod 111 and the guide hole 1216, a bearing can be provided between the guide rod 111 and the guide hole 1216.

[0050] like Figure 4As shown, in order to further improve the stability of the lifting platform 121 when it slides and rises, the lifting mechanism 120 may further include a sliding support block 123. The sliding support block 123 may be arranged on at least one side of the lifting platform 121. For example, the sliding support blocks 123 may be respectively arranged on two opposite sides of the lifting platform 121. The connection relationship between the sliding support block 123 and the lifting platform 121 may be a snap connection, a bolt connection, etc. The side of the sliding support block 123 facing away from the lifting platform 121 is slidably connected to the base 110. When the lifting platform 121 slides and rises, the sliding support block 123 and the base 110 also slide relatively.

[0051] like Figures 1 to 4 As shown, the base 110 may specifically include a base body 112, a carrier 113 and a baffle 114. The base body 112 is connected to the carrier 113 by welding, bolt connection, etc. The carrier 113 is used to carry the vacuum carrier 140. The carrier 113 is provided with a through hole 1131. The through hole 1131 is arranged opposite to the ejector pin 131. The ejector pin 131 can pass through the through hole 1131 to cooperate with the valve and air hole of the vacuum carrier 140.

[0052] To improve the stability of the vacuum carrier 140 on the stage 113, a baffle 114 may be provided on the stage 113. The baffle 114 protrudes from the surface of the stage 113, and a limiting space is formed between the baffle 114 and the stage 113, so that the vacuum carrier 140 can be constrained in the limiting space. Figure 4 Two structural forms of the baffle 114 are shown, one of which adopts a folded edge design to limit the vacuum carrier 140 in at least two directions, and the other adopts a boss design to limit the vacuum carrier 140 in one direction.

[0053] like Figures 1 to 4 As shown, the vacuum mechanism 130 may include an air source, a control device 132 and an ejector pin 131. The control device 132 is disposed on the base 110. The air source is connected to the ejector pin 131 through the control device 132, and may be connected through a pipeline. The control device 132 may control the opening and closing of the air path between the air source and the ejector pin 131 to enhance the flexibility of use. For example, when the ejector pin 131 moves to the third position and is sealed with the air hole of the vacuum carrier 140, the control device 132 may be used to control the opening of the air path between the air source and the ejector pin 131, so that the vacuum carrier 140 may be vacuumed. The control device 132 may be an electromagnetic valve, a mechanical valve, etc. In addition, in order to monitor the pressure state of the vacuum carrier 140 and the air source, a vacuum gauge 160 may be provided on the vacuum mechanism 130.

[0054] The above embodiments of the present application focus on describing the differences between the various embodiments. As long as the different technical features between the various embodiments are not contradictory, they can be combined to form more specific embodiments. Considering the simplicity of the text, they will not be repeated here.

[0055] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A vacuum breaking tool for a vacuum carrier, characterized in that: It comprises a base (110), a lifting mechanism (120) and a vacuum extraction mechanism (130); The base (110) is used to carry the vacuum carrier (140); the lifting mechanism (120) is disposed on the base (110) and is slidably connected to the base (110); the vacuum pumping mechanism (130) comprises a pin (131) connected to the vacuum air path; the pin (131) is connected to the lifting mechanism (120); the lifting mechanism (120) can be slidably raised and lowered relative to the base (110) to drive the pin (131) to switch between a first position, a second position and a third position; When the ejector pin (131) is in the first position, the ejector pin (131) is used to separate from the vacuum carrier (140); when the ejector pin (131) is in the second position, the ejector pin (131) is used to push open the valve of the vacuum carrier (140); and when the ejector pin (131) is in the third position, the ejector pin (131) is used to be sealed and connected to the air hole of the vacuum carrier (140).

2. The vacuum breaking tool according to claim 1, characterized in that: The lifting mechanism (120) comprises a lifting platform (121) and a driving assembly (122); The lifting platform (121) is slidably connected to the base (110), the ejector pin (131) is disposed on the lifting platform (121), the driving component (122) is disposed on the base (110) and is transmission-connected to the lifting platform (121), and the driving component (122) is used to drive the lifting platform (121) to slide and rise relative to the base (110).

3. The vacuum breaking tool according to claim 2, characterized in that: The lifting platform (121) comprises a first surface (1211) and a second surface (1212) facing each other, the ejector pin (131) protrudes from the first surface (1211), the second surface (1212) is provided with a first groove (1213) and a second groove (1214) which are connected to each other, the depth of the first groove (1213) is greater than the depth of the second groove (1214), the driving component (122) is slidably connected to the base (110), and can slide relative to the lifting platform (121) along the docking direction of the first groove (1213) and the second groove (1214); When the driving component (122) is in the first groove (1213), the ejector pin (131) is in the first position; when the driving component (122) slides to the second groove (1214), the lifting platform (121) is lifted to drive the ejector pin (131) to move to the second position; when the driving component (122) slides out of the second groove (1214) and contacts the second surface (1212), the lifting platform (121) is lifted to drive the ejector pin (131) to move to the third position.

4. The vacuum breaking tool according to claim 3, characterized in that: A guide structure (1215) is provided between the first groove (1213) and the second groove (1214), and between the second groove (1214) and the second surface (1212).

5. The vacuum breaking tool according to claim 3, characterized in that: The driving assembly (122) comprises a slider (1221), a connecting rod (1222) and a supporting wheel (1223); the slider (1221) is slidably connected to the base (110); the connecting rod (1222) is connected to the slider (1221) to pull the slider (1221) to slide relative to the base (110); the supporting wheel (1223) is rotatably connected to the slider (1221); when the slider (1221) slides relative to the base (110), the supporting wheel (1223) moves relative to the lifting platform (121) along the docking direction of the first groove (1213) and the second groove (1214) to drive the ejector pin (131) to switch between the first position, the second position and the third position.

6. The vacuum breaking tool according to claim 5, characterized in that: The driving assembly (122) further comprises a gripping portion (1224), wherein the gripping portion (1224) is rotatably connected to the base (110) and the connecting rod (1222) respectively, and when the gripping portion (1224) rotates around the base (110) on a fixed axis, the gripping portion (1224) pulls the slider (1221) to slide relative to the base (110) via the connecting rod (1222).

7. The vacuum breaking tool according to claim 2, characterized in that: The lifting platform (121) is provided with a guide hole (1216), and the base (110) is provided with a guide rod (111). The guide rod (111) extends into the guide hole (1216) and is slidably matched with the guide hole (1216).

8. The vacuum breaking tool according to claim 2, characterized in that: The lifting mechanism (120) further comprises a sliding support block (123), wherein the sliding support block (123) is arranged on at least one side of the lifting platform (121) and is slidably connected to the base (110).

9. The vacuum breaking tool according to claim 1, characterized in that: The base (110) comprises a base body (112), a carrier (113) and a baffle (114); the base body (112) is connected to the carrier (113); the carrier (113) is used to carry the vacuum carrier (140); the carrier (113) is provided with a through hole (1131); the through hole (1131) is arranged opposite to the ejector pin (131); The baffle (114) is protrudingly arranged on the surface of the carrier (113) and is used for limiting cooperation with the vacuum carrier (140).

10. The vacuum breaking tool according to claim 1, characterized in that: The vacuum extraction mechanism (130) further comprises an air source and a control device (132); the control device (132) is arranged on the base (110); the air source is connected to the ejector pin (131) via the control device (132); the control device (132) is used to control the on / off of the air path between the air source and the ejector pin (131).

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