Gas supply device for vacuum coating equipment based on uninterrupted gas transmission

Abstract

The utility model relates to a vacuum coating technology, in particular to a gas supply device for vacuum coating equipment based on uninterrupted gas transmission, which comprises a motor, pressure pumps mounted on two sides of the motor, an exhaust pipe for exhausting argon and a gas supply bottle for storing the argon, sealing pipes connected with the gas supply bottle, pump wheels coaxially connected with the motor and branch pipes used for pressurizing argon are arranged on the pressurizing pumps, the two pressurizing pumps are installed on the two sides of the motor respectively, the exhaust pipe is connected with the tops of the two pressurizing pumps and inserted into the vacuum chamber, and the sealing pipes are installed on the side faces of the pressurizing pumps and connected with the gas supply bottle. The pump wheel is rotationally arranged in the pressure pump, and the branch pipe is installed on the top of the pressure pump and connected with the exhaust pipe. The sealing ring is used for rotationally mounting and dismounting the gas supply bottle, the gas tightness is ensured while simplicity and convenience are achieved, residual argon in the gas supply bottle is pumped out through the pressure pump, waste of materials is avoided, and argon is prevented from flowing back when the gas supply bottle is replaced through the ball valve and the one-way valve.

Description

Technical Field

[0001] The utility model relates to a vacuum coating technology, in particular to a gas supply device for vacuum coating equipment based on uninterrupted gas transmission. Background Art

[0002] Vacuum coating is a technology that deposits materials onto the surface of a substrate to form a thin film by physical or chemical methods under high vacuum conditions. This technology is widely used in industrial production and scientific research to improve the performance of materials, such as wear resistance, corrosion resistance, optical properties, etc. Sputtering coating requires filling an inert gas in a vacuum chamber, ionizing the gas by applying a high voltage, and the generated ions bombard the solid target material. The sputtered target atoms are deposited on the substrate to form a thin film. However, the traditional gas supply device requires manual replacement of the gas supply bottle and the coating reaction needs to be suspended during replacement. Intermittent vacuum coating can easily affect the coating quality, so a gas supply device for vacuum coating equipment with uninterrupted gas supply is needed.

[0003] Chinese patent CN217809623U discloses a gas supply device for vacuum coating equipment, including: a base, a second positioning plate, an adjustment groove, a positioning plate, a positioning hole, a positioning pin, a protective shell, a positioning plate, a hinge column, a second positioning hole, a hinge block, a fixing plate, a positioning block, a gas supply bottle, an air pressure valve, and an air supply pipe; the beneficial effect is: when the gas in a gas supply bottle is used up, the corresponding air pressure valve is closed, and another set of air pressure valves is opened, so that the other gas supply bottle supplies gas to the vacuum coating equipment, and the gas enters the air supply pipe through the air pressure valve to realize gas supply to the vacuum coating equipment. The two gas supply bottles are connected to the air pressure valve and the air supply pipe, which effectively realizes uninterrupted gas supply to the vacuum coating equipment and effectively increases the use effect of the vacuum coating equipment.

[0004] There are still several points for improvement in the above scheme: the replacement steps of the gas supply bottle are relatively cumbersome, which affects the efficiency of manual replacement; the argon gas in the gas supply bottle cannot completely enter the exhaust pipe, and the residual argon gas causes pollution and waste. Utility Model Content

[0005] To solve the problems of the prior art, the utility model provides a gas supply device for vacuum coating equipment based on uninterrupted gas supply, including a motor and a pressure pump installed on both sides of the motor, an exhaust pipe for discharging argon and a gas supply bottle for storing argon, the pressure pump is provided with a sealing pipe connected to the gas supply bottle, a pump wheel coaxially connected to the motor and a branch pipe for pressurizing argon, two pressure pumps are respectively installed on both sides of the motor, the exhaust pipe is connected to the top of the two pressure pumps and inserted into the vacuum chamber, the sealing pipe is installed on the side of the pressure pump and connected to the gas supply bottle, the pump wheel is rotatably arranged in the pressure pump, and the branch pipe is installed on the top of the pressure pump and connected to the exhaust pipe.

[0006] Preferably, a connecting tube, a ball valve and a sealing ring are provided on the sealing tube, one end of the connecting tube is connected to the gas supply bottle, and the other end is connected to the pipe mouth of the sealing tube, the sealing ring is arranged at the connection between the connecting tube and the sealing tube, and the ball valve is arranged at the connection between the sealing tube and the pressure pump.

[0007] Preferably, a rotating shaft and a handle are connected to the ball valve. The rotating shaft is installed at the center of the ball valve and passes through the tube wall of the sealing tube to be fixedly connected to the handle. The handle is arranged above the sealing tube.

[0008] Preferably, a gasket is provided in the sealing ring, and threaded interfaces are provided at both ends of the sealing ring.

[0009] Preferably, a drive shaft, a connecting rod, a connecting rod and a piston are provided in the pump wheel. The drive shaft passes through the center of the pump wheel and is connected to the motor. One end of the connecting rod is rotatably set on the pump wheel, and the other end is rotatably connected to the connecting rod. The piston is set in the branch pipe and connected to the connecting rod.

[0010] Preferably, a gas pipeline, a cover and a one-way valve are provided on the branch pipe. The cover is installed on the top of the branch pipe. One end of the gas pipeline is connected to the side of the cover and the other end is connected to the exhaust pipe. The one-way valve is arranged in the gas pipeline and close to one end of the exhaust pipe.

[0011] Preferably, a positioning platform, a spring and a top ball are provided on the one-way valve. The positioning platform is fixedly installed in the gas pipeline. One end of the spring is connected to the top ball, and the other end is connected to the center of the positioning platform. The top ball fits the one-way valve.

[0012] Preferably, a gas-combining joint, a flowmeter and a cross pipe are connected to the exhaust pipe, one end of the gas-combining joint is connected to the exhaust pipe, and the other end is connected to two branch pipes, the flowmeter is arranged on the top of the gas-combining joint, and the cross pipe is arranged in the gas-combining joint.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. The utility model uses a sealing ring to rotate and install and disassemble the gas supply bottle, which is simple and ensures air tightness. Specifically, the gasket is used to increase air tightness and reduce the possibility of argon leakage. The threaded interface allows the threaded cover to be pulled into the distance between the connecting pipe and the sealing pipe by rotation.

[0015] 2. The utility model uses a pressure pump to extract the residual argon gas in the gas supply bottle, thereby avoiding waste of materials. Specifically, since the argon gas pressure in the gas supply bottle gradually decreases with the gas supply time, a pressure pump is used to extract the residual argon gas in the gas supply bottle into the exhaust pipe to avoid waste.

[0016] 3. The utility model uses a ball valve and a one-way valve to prevent the argon gas from flowing back when the gas supply bottle is replaced. Specifically, when the gas supply bottle is replaced, the ball valve is closed to prevent the pressure pump from pressurizing the air into the exhaust pipe. The pressurized argon gas is sent into the exhaust pipe through the gas pipeline. The one-way valve is used to prevent the argon gas from flowing back from the exhaust pipe to the gas pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0018] Figure 2 The present invention is a three-dimensional diagram of a pressure pump in a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0019] Figure 3 The present invention is a three-dimensional diagram of a sealing tube in a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0020] Figure 4 The present invention is a three-dimensional diagram of a ball valve in a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0021] Figure 5 The present invention is a cross-sectional view of a pressure pump in a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0022] Figure 6 The present invention is a three-dimensional diagram of a one-way valve in a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0023] Figure 7 The present invention is a three-dimensional diagram of a gas joint in a gas supply device for vacuum coating equipment based on uninterrupted gas transmission.

[0024] The numbers in the figure are: 1. Motor; 2. Pressure pump; 3. Sealing pipe; 31. Connecting pipe; 32. Ball valve; 321. Rotating shaft; 322. Handle; 33. Sealing ring; 331. Gasket; 332. Threaded interface; 4. Pump wheel; 41. Transmission shaft; 42. Connecting rod; 43. Connecting rod; 44. Piston; 5. Branch pipe; 51. Gas pipeline; 52. Sealing cover; 53. One-way valve; 531. Spring; 532. Top ball; 533. Positioning table; 6. Exhaust pipe; 61. Gas joint; 62. Flow meter; 63. Cross pipe; 7. Gas supply bottle. DETAILED DESCRIPTION

[0025] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0026] See also Figure 1 to Figure 7As shown, a gas supply device for vacuum coating equipment based on uninterrupted gas supply includes a motor 1 and a booster pump 2 installed on both sides of the motor 1, an exhaust pipe 6 for discharging argon and a gas supply bottle 7 for storing argon. The booster pump 2 is provided with a sealing tube 3 connected to the gas supply bottle 7, a pump wheel 4 coaxially connected to the motor 1 and a branch pipe 5 for pressurizing argon. Two booster pumps 2 are respectively installed on both sides of the motor 1, the exhaust pipe 6 is connected to the top of the two booster pumps 2 and inserted into the vacuum chamber, the sealing tube 3 is installed on the side of the booster pump 2 and connected to the gas supply bottle 7, the pump wheel 4 is rotatably set in the booster pump 2, and the branch pipe 5 is installed on the top of the booster pump 2 and connected to the exhaust pipe 6.

[0027] The device is provided with two gas supply bottles 7 on both sides of the motor 1 and argon is transported into the vacuum chamber in turn through the exhaust pipe 6 to ensure that when one gas supply bottle 7 is emptied of argon, the other gas supply bottle 7 can be replenished with argon in time to achieve the purpose of uninterrupted gas supply. The sealing tube 3 is used for quickly installing and disassembling the gas supply bottle 7 while providing good sealing, which is convenient for replacing the gas supply bottle 7 and ensuring that argon will not leak from the connection between the gas supply bottle 7 and the booster pump 2. Since the pressure of the argon in the gas supply bottle 7 gradually decreases with the length of gas supply, the booster pump 2 is used to pump the residual argon in the gas supply bottle 7 into the exhaust pipe 6 to avoid waste. A one-way valve 53 structure is provided in the branch pipe 5 to prevent the argon in the exhaust pipe 6 from flowing back into the branch pipe 5.

[0028] See also Figure 1 to Figure 3 As shown, the sealing tube 3 is provided with a connecting tube 31, a ball valve 32 and a sealing ring 33. One end of the connecting tube 31 is connected to the gas supply bottle 7, and the other end is connected to the pipe mouth of the sealing tube 3. The sealing ring 33 is arranged at the connection between the connecting tube 31 and the sealing tube 3, and the ball valve 32 is arranged at the connection between the sealing tube 3 and the pressure pump 2.

[0029] The connecting pipe 31 is used to deliver the argon gas in the gas supply bottle 7 into the sealing pipe 3 . The sealing ring 33 increases the connection firmness between the sealing pipe 3 and the connecting pipe 31 by rotating. The ball valve 32 is used to control the circulation of the argon gas in the sealing pipe 3 .

[0030] See also Figure 4 As shown, the ball valve 32 is connected with a rotating shaft 321 and a handle 322 . The rotating shaft 321 is installed at the center of the ball valve 32 and passes through the tube wall of the sealing tube 3 to be fixedly connected to the handle 322 . The handle 322 is arranged above the sealing tube 3 .

[0031] The rotation of the rotating shaft 321 is controlled by turning the handle 322 and the opening and closing of the ball valve 32 in the sealing tube 3 are adjusted. When the gas supply bottle 7 is replaced, the ball valve 32 is closed to prevent the pressure pump 2 from pressurizing the air into the exhaust pipe 6.

[0032] See also Figure 3As shown, a gasket 331 is provided in the sealing ring 33 , and threaded interfaces 332 are provided at both ends of the sealing ring 33 .

[0033] The gasket 331 is used to increase air tightness and reduce the possibility of argon leakage. The threaded interface 332 allows the threaded cover to shorten the distance between the connecting tube 31 and the sealing tube 3 by rotation. When the connecting tube 31 and the sealing tube 3 completely clamp the gasket 331, the sealing ring 33 completely seals the connection.

[0034] See also Figure 1 to Figure 5 As shown, a transmission shaft 41, a connecting rod 42, a connecting rod 43 and a piston 44 are provided in the pump wheel 4. The transmission shaft 41 passes through the center of the pump wheel 4 and is connected to the motor 1. One end of the connecting rod 42 is rotatably set on the pump wheel 4, and the other end is rotatably connected to the connecting rod 43. The piston 44 is set in the branch pipe 5 and connected to the connecting rod 43.

[0035] The transmission shaft 41 is driven by the motor 1 to drive the pump wheel 4 to rotate. The pump wheel 4 rotates and drives the connecting rod 42 and the connecting rod 43 to perform a crank rocker movement, thereby driving the piston 44 to perform a linear up and down reciprocating motion in the branch pipe 5. The piston 44 moves up and down to pressurize the argon gas and send it into the exhaust pipe 6.

[0036] See also Figure 1 and Figure 2 As shown, the branch pipe 5 is provided with a gas pipeline 51, a cover 52 and a one-way valve 53. The cover 52 is installed on the top of the branch pipe 5. One end of the gas pipeline 51 is connected to the side of the cover 52, and the other end is connected to the exhaust pipe 6. The one-way valve 53 is arranged in the gas pipeline 51 and close to one end of the exhaust pipe 6.

[0037] The cover 52 is used to seal the top of the branch pipe 5 to ensure the pressurization effect of the booster pump 2. The pressurized argon gas is sent into the exhaust pipe 6 through the gas pipeline 51. The one-way valve 53 is used to prevent the argon gas from flowing back from the exhaust pipe 6 to the gas pipeline 51.

[0038] See also Figure 6 As shown, a positioning platform 533, a spring 531 and a top ball 532 are provided on the one-way valve 53. The positioning platform 533 is fixedly installed in the gas pipeline 51. One end of the spring 531 is connected to the top ball 532, and the other end is connected to the center of the positioning platform 533. The top ball 532 fits the one-way valve 53.

[0039] When the booster pump 2 is operating normally, argon is pressurized in the gas pipeline 51 and enters the exhaust pipe 6. At this time, the top ball 532 is pushed away from the one-way valve 53 by the argon, and the spring 531 is stretched. When the gas supply bottle 7 is replaced, the ball valve 32 and the booster pump 2 are closed. The air pressure in the gas pipeline 51 is lower than the air pressure in the exhaust pipe 6. At this time, the spring 531 is reset to re-attach the top ball 532 to the one-way valve 53 to prevent the argon in the exhaust pipe 6 from entering the gas pipeline 51 in reverse.

[0040] See also Figure 1 to Figure 7 As shown, the exhaust pipe 6 is connected with a gas-combining joint 61, a flow meter 62 and a cross pipe 63. One end of the gas-combining joint 61 is connected to the exhaust pipe 6, and the other end is connected to two branch pipes 5. The flow meter 62 is arranged on the top of the gas-combining joint 61, and the cross pipe 63 is arranged in the gas-combining joint 61.

[0041] The gas combining joint 61 is used to combine the argon gas in the gas pipelines 51 on the two branch pipes 5 through the cross pipe 63 and send it into the exhaust pipe 6. The flow meter 62 is used to display the gas flow passing through the gas combining joint 61. When the flow is too low, the output power of the motor 1 is increased to enhance the pressurization effect of the booster pump 2, thereby ensuring that the argon gas delivery amount will not decrease.

[0042] The above embodiments only express one or several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the attached claims.

Claims

1. A gas supply device for vacuum coating equipment based on uninterrupted gas transmission, comprising a motor (1), a pressure pump (2) installed on both sides of the motor (1), an exhaust pipe (6) for discharging argon gas, and a gas supply bottle (7) for storing argon gas; It is characterized in that The booster pump (2) is provided with a sealing tube (3) connected to a gas supply bottle (7), a pump wheel (4) coaxially connected to the motor (1), and a branch pipe (5) for pressurizing argon gas. The two booster pumps (2) are respectively installed on both sides of the motor (1). The exhaust pipe (6) is connected to the tops of the two booster pumps (2) and inserted into the vacuum chamber. The sealing tube (3) is installed on the side of the booster pump (2) and connected to the gas supply bottle (7). The pump wheel (4) is rotatably arranged in the booster pump (2). The branch pipe (5) is installed on the top of the booster pump (2) and connected to the exhaust pipe (6).

2. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 1, characterized in that: The sealing tube (3) is provided with a connecting tube (31), a ball valve (32) and a sealing ring (33); one end of the connecting tube (31) is connected to the gas supply bottle (7), and the other end is connected to the pipe mouth of the sealing tube (3); the sealing ring (33) is arranged at the connection between the connecting tube (31) and the sealing tube (3); and the ball valve (32) is arranged at the connection between the sealing tube (3) and the pressure pump (2).

3. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 2, characterized in that: The ball valve (32) is connected to a rotating shaft (321) and a handle (322). The rotating shaft (321) is installed at the center of the ball valve (32) and passes through the wall of the sealing tube (3) to be fixedly connected to the handle (322). The handle (322) is arranged above the sealing tube (3).

4. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 2, characterized in that: A gasket (331) is arranged in the sealing ring (33), and threaded interfaces (332) are arranged at both ends of the sealing ring (33).

5. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 1, characterized in that: The pump wheel (4) is provided with a transmission shaft (41), a connecting rod (42), a connecting rod (43) and a piston (44); the transmission shaft (41) passes through the center of the pump wheel (4) and is connected to the motor (1); one end of the connecting rod (42) is rotatably arranged on the pump wheel (4) and the other end is rotatably connected to the connecting rod (43); the piston (44) is arranged in the branch pipe (5) and is connected to the connecting rod (43).

6. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 1, characterized in that: The branch pipe (5) is provided with a gas pipeline (51), a sealing cover (52) and a one-way valve (53); the sealing cover (52) is installed on the top of the branch pipe (5); one end of the gas pipeline (51) is connected to the side of the sealing cover (52) and the other end is connected to the exhaust pipe (6); the one-way valve (53) is arranged in the gas pipeline (51) and close to one end of the exhaust pipe (6).

7. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 6, characterized in that: The one-way valve (53) is provided with a positioning platform (533), a spring (531) and a top ball (532); the positioning platform (533) is fixedly installed in the gas transmission pipeline (51); one end of the spring (531) is connected to the top ball (532), and the other end is connected to the center of the positioning platform (533); the top ball (532) is fitted to the one-way valve (53).

8. The gas supply device for vacuum coating equipment based on uninterrupted gas transmission according to claim 1, characterized in that: The exhaust pipe (6) is connected to a gas connection joint (61), a flow meter (62) and a cross pipe (63); one end of the gas connection joint (61) is connected to the exhaust pipe (6), and the other end is connected to two branch pipes (5); the flow meter (62) is arranged on the top of the gas connection joint (61), and the cross pipe (63) is arranged in the gas connection joint (61).

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