Air inlet structure and graphene preparation device

Abstract

The utility model provides an air inlet structure and a graphene preparation device, and relates to the technical field of graphene production and manufacturing. The air inlet structure comprises a fixing assembly, an air inlet assembly, an air outlet pipe and a rectifying assembly. The air inlet assembly is arranged on the fixing assembly in a penetrating mode and provided with an air inlet. The air outlet pipe penetrates through the fixing assembly, and the air outlet pipe and the air inlet assembly are arranged on the two sides of the fixing assembly in the axial direction of the fixing assembly correspondingly. One end of the rectifying assembly is connected to the air inlet assembly and communicates with the air inlet assembly, and the other end of the rectifying assembly is provided with an air outlet; the rectification assembly is configured to move in the axial direction of the fixing assembly and used for adjusting the position of the air outlet relative to the air outlet pipe. The rectifying assembly can move relative to the position of the fixing assembly, and the position of the air outlet can be freely adjusted, so that the adjustability of the microwave reflecting surface is realized, the length of the plasma torch and the local plasma density can be adjusted, and the purpose of enhancing the microwave plasma torch is achieved.

Description

Technical Field

[0001] The utility model generally relates to the technical field of graphene production and manufacturing, and specifically relates to an air intake structure and a graphene preparation device. Background Art

[0002] Microwave plasma torch is a special plasma generator that converts gas into high-temperature, high-energy plasma through the high-frequency oscillation of microwave electromagnetic field. This generator can be widely used in physics, chemistry, materials science and other fields, such as plasma treatment, surface modification, material synthesis, etc. With the increasing application of microwave plasma torches, higher requirements are also placed on plasma torches.

[0003] The existing gas inlet structure of plasma torches is single, and under the condition of certain equipment power, gas inlet adjustment cannot be achieved, making it difficult to meet diversified requirements such as different lengths and strengths of plasma torches. Utility Model Content

[0004] The utility model provides an air intake structure and a graphene preparation device to enhance a microwave plasma torch.

[0005] According to a first aspect of the utility model, an air intake structure is provided, comprising:

[0006] Fixing components;

[0007] An air intake component is inserted into the fixed component, and the air intake component is provided with an air intake port;

[0008] An air outlet pipe is provided through the fixed component, and the air outlet pipe and the air inlet component are respectively provided on both sides of the fixed component along the axial direction of the fixed component;

[0009] A rectifying assembly is arranged in the air outlet pipe, one end of the rectifying assembly is connected to the air inlet assembly and communicates with the air inlet assembly, and the other end is provided with an air outlet;

[0010] The rectification assembly is configured to be movable along the axial direction of the fixing assembly, so as to adjust the position of the air outlet relative to the air outlet pipe.

[0011] In some embodiments, the rectification assembly is detachably connected to the air intake assembly.

[0012] In some embodiments, the air inlet includes a first air inlet;

[0013] The air intake assembly comprises a first air intake pipe, which is passed through the fixed assembly. Along the axial direction of the fixed assembly, one end of the first air intake pipe is provided with the first air intake port, and the other end of the first air intake pipe is threadedly matched with the rectifying assembly and communicated with the rectifying assembly;

[0014] Wherein, the first air inlet pipe is configured to rotate relative to the fixing component and drive the rectification component to move along the axial direction of the fixing component.

[0015] In some embodiments, the air inlet includes a second air inlet;

[0016] The air intake assembly also includes an air intake seat and a second air intake pipe. The air intake seat is connected to the fixed assembly. The first air intake pipe is inserted into the air intake seat along the axial direction of the fixed assembly. Along the radial direction of the fixed assembly, one end of the second air intake pipe is provided with the second air inlet port, and the other end is connected to the air intake seat and communicated with the air intake seat. The air intake seat is communicated with the rectification assembly.

[0017] In some embodiments, the air intake assembly further includes a limiting member, which is sleeved on the outside of the first air intake pipe and is used for limiting the position between the first air intake pipe and the air intake seat.

[0018] In some embodiments, the rectifying assembly comprises:

[0019] A mounting portion, the air intake assembly being detachably connected to the mounting portion and capable of driving the mounting portion to move in an axial direction relative to the fixing assembly;

[0020] A rectifying part is arranged along the axial direction of the fixing assembly, one end of the rectifying part is connected to the mounting part and communicated with the air inlet assembly, and the other end is provided with the air outlet, and the rectifying part is used to change the flow direction of the gas.

[0021] In some embodiments, the rectification portion is provided with a first through hole and a plurality of second through holes, and along the circumferential direction of the fixing component, a plurality of second through holes are arranged around the first through hole, the inner diameters of the first through hole and the second through hole are different, and the air outlet is arranged on a side of the first through hole and the second through hole away from the mounting portion.

[0022] In some embodiments, a spiral groove is provided on an outer peripheral wall of the rectifying portion, and the air outlet is provided on a side of the spiral groove away from the mounting portion.

[0023] In some of the embodiments, a gap is provided between the fairing assembly and the air outlet pipe.

[0024] In some embodiments, the rectifying assembly further comprises:

[0025] A connecting rod is arranged along the axial direction of the fixing assembly, one end of the connecting rod is connected to the mounting portion, and the other end of the connecting rod is connected to the rectifying portion.

[0026] In some embodiments, a sealing member is further included, wherein the sealing member is sleeved on the outside of the air outlet pipe and is arranged between the air outlet pipe, the air inlet assembly and the fixing assembly.

[0027] According to the second aspect of the utility model, an embodiment of the utility model further provides a graphene preparation device including the above-mentioned air intake structure.

[0028] An embodiment of the utility model has the following advantages or beneficial effects:

[0029] The air intake structure and graphene preparation device provided in this embodiment, the air outlet pipe and the air intake assembly are respectively arranged on both sides of the fixed assembly along the axial direction of the fixed assembly, so that the air intake process and the air outlet process do not affect or interfere with each other. The rectifying assembly is connected to the air intake assembly, and the rectifying assembly is used to guide and change the gas flow direction to meet the needs of different ventilation angles. Since the position of the rectifying assembly relative to the fixed assembly is not fixed, but can be moved relative to the position of the fixed assembly, the position of the air outlet can be freely adjusted to achieve the adjustability of the microwave reflecting surface, so that the function of adjusting the length of the plasma torch and the local plasma density can be adjusted to achieve the purpose of enhancing the microwave plasma torch. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to better understand the utility model, reference may be made to the embodiments shown in the following drawings. The components in the drawings are not necessarily to scale, and related elements may be omitted in order to emphasize and clearly illustrate the technical features of the utility model. In addition, related elements or components may have different settings as known in the art. In addition, in the drawings, the same reference numerals represent the same or similar components in each of the drawings. By describing its example embodiments in detail with reference to the drawings, the above and other features and advantages of the utility model will become more apparent.

[0031] in:

[0032] Figure 1 Shown is a perspective view of an air intake structure of a first embodiment of the utility model;

[0033] Figure 2 The figure shows a schematic structural diagram of an air intake structure of a first embodiment of the utility model;

[0034] Figure 3 The figure shows a schematic structural diagram of a first air intake pipe and a stopper in an air intake structure according to a first embodiment of the utility model;

[0035] Figure 4 The figure shows a partial exploded schematic diagram of the air intake structure showing the air intake seat and the second air intake pipe in the first embodiment of the utility model;

[0036] Figure 5 The structure diagram of the rectifying assembly in the air intake structure of the first embodiment of the utility model is shown;

[0037] Figure 6 The figure shows a schematic diagram of the air intake structure of the second embodiment of the utility model;

[0038] Figure 7 Shown is a structural schematic diagram of a rectifying component in an air intake structure of a second embodiment of the present utility model.

[0039] The reference numerals are described as follows:

[0040] 1. Fixing assembly; 2. Air intake assembly; 3. Air outlet pipe; 4. Rectification assembly; 5. Sealing element;

[0041] 11. first sleeve; 12. second sleeve;

[0042] 20, air inlet; 201, first air inlet; 202, second air inlet;

[0043] 21. first air intake pipe; 22. air intake seat; 23. second air intake pipe; 24. stopper;

[0044] 40. Air outlet; 41. Mounting portion; 42. Rectification portion; 421. First through hole; 422. Second through hole; 423. Spiral groove; 43. Connecting rod. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the example embodiments of the utility model to clearly and completely describe the technical solutions in the example embodiments of the utility model. The example embodiments described herein are only for illustrative purposes and are not intended to limit the scope of protection of the utility model. Therefore, it should be understood that various modifications and changes can be made to the example embodiments without departing from the scope of protection of the utility model.

[0046] In the description of the present invention, unless otherwise clearly specified and limited, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance; the term "plurality" refers to two or more; the term "and / or" includes any and all combinations of one or more associated listed items. In particular, reference to "the / the" object or "an" object is also intended to indicate one of a possible plurality of such objects.

[0047] Unless otherwise specified or explained, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, an integral connection, an electrical connection, or a signal connection; "connection" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0048] Further, in the description of the present invention, it should be understood that the directional words such as "upper", "lower", "inner", "outer" and the like described in the exemplary embodiments of the present invention are described at the angles shown in the accompanying drawings and should not be understood as limitations on the exemplary embodiments of the present invention. It should also be understood that, in the context, when it is mentioned that an element or feature is connected to another element (one or more) "upper", "lower", or "inner", "outer", it can not only be directly connected to the other (one or more) elements "upper", "lower", or "inner", "outer", but can also be indirectly connected to the other (one or more) elements "upper", "lower", "inner", "outer" through an intermediate element.

[0049] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that the present invention will be comprehensive and complete and fully convey the concepts of the example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their detailed description will be omitted.

[0050] Embodiment 1

[0051] This embodiment provides an air intake structure suitable for devices or equipment that require air intake, especially graphene production and manufacturing equipment. Figure 1 As shown, the air intake structure includes a fixed component 1, an air intake component 2, an air outlet pipe 3 and a rectifying component 4. The air intake component 2 is arranged through the fixed component 1, and the air intake component 2 is provided with an air inlet 20. The air outlet pipe 3 is arranged through the fixed component 1, and the air outlet pipe 3 and the air intake component 2 are respectively arranged on both sides of the fixed component 1 along the axial direction of the fixed component 1. The rectifying component 4 is arranged in the air outlet pipe 3, one end of the rectifying component 4 is connected to the air intake component 2 and communicates with the air intake component 2, and the other end is provided with an air outlet 40.

[0052] Among them, the fixed component 1 can be installed on the air inlet interface of the plasma generating chamber, and the fixed component 1 provides a fixed installation position for the air inlet component 2 and the air outlet pipe 3. The air inlet 20 of the air inlet component 2 is used to introduce gas. The air inlet component 2 is connected with the air outlet pipe 3 through the rectifying component 4, so that the gas flowing out of the air inlet component 2 is transported to the air outlet pipe 3 through the rectifying component 4. The air outlet pipe 3 is used to provide gas for the plasma reaction chamber.

[0053] The gas can be an inert gas capable of generating plasma, the inert gas is selected from one or more of argon, krypton and xenon, and the inert gas flow rate is (1.2SLM~20SLM, SLM, standard liter per minute), and the gas can also be a carbon source gas, the carbon source gas can be selected from one or more of hydrocarbons, alcohols, ethers, ketones and phenols, wherein the carbon source gas flow rate is 2sccm~100sccm (sccm, standard milliliters per minute). The concentration of the carbon source affects the discharge stability of the system, the quality and morphology of graphene, and the generation rate of graphene.

[0054] In a microwave plasma chemical vapor deposition system, inert gas can be directly ionized in the microwave reaction chamber at normal pressure or low pressure to generate plasma. The generated plasma and high temperature will promote the cracking of the carbon source and the formation of graphene. The reaction process does not require any catalyst or substrate. Graphene can be directly generated in the gas phase and collected after it floats out of the system with the gas flow.

[0055] In the air intake structure provided in this embodiment, the air outlet pipe 3 and the air intake assembly 2 are respectively arranged on both sides of the fixed assembly 1 along the axial direction of the fixed assembly 1, so that the air intake process and the air outlet process do not affect or interfere with each other. The rectifying assembly 4 is connected to the air intake assembly 2, and the rectifying assembly 4 is used to guide and change the gas flow direction to meet the needs of different ventilation angles.

[0056] The rectifying assembly 4 is configured to be movable along the axial direction of the fixing assembly 1 , so as to adjust the position of the air outlet 40 relative to the air outlet pipe 3 .

[0057] Since the position of the rectifying component 4 relative to the fixed component 1 is not fixed but can be moved relative to the fixed component 1, the position of the gas outlet 40 can be freely adjusted, so that the reflecting surface where the microwave and the gas are in contact has adjustable properties, thereby realizing the function of adjusting the length of the plasma torch and the local plasma density, thereby achieving the purpose of enhancing the microwave plasma torch.

[0058] In one embodiment, Figure 1 and Figure 4 As shown, the fixing assembly 1 includes a first sleeve 11, and the shape of the first sleeve 11 is a cylindrical structure. The first sleeve 11 is a hollow structure, and a first mounting through hole is provided at the center of the first sleeve 11, and the first mounting through hole is used to install the air intake assembly 2. Exemplarily, the air intake assembly 2 is detachably connected to the first sleeve 11, which facilitates the installation and removal of the air intake assembly 2. Specifically, the inner wall of the first mounting through hole is provided with an internal thread, and the air intake assembly 2 is provided with an external thread corresponding to the internal thread, and the external thread of the air intake assembly 2 is threadedly connected to the internal thread of the first mounting through hole.

[0059] The fixing assembly 1 also includes a second sleeve 12. The second sleeve 12 and the first sleeve 11 are coaxially arranged and sleeved with each other. The axial direction of the fixing assembly 1 is the axial direction of the first sleeve 11 and / or the second sleeve 12, and the radial direction of the fixing assembly 1 is the radial direction of the first sleeve 11 and / or the second sleeve 12.

[0060] Exemplarily, along the axial direction of the fixing assembly 1, one of the ends of the first sleeve 11 and the second sleeve 12 close to each other is provided with an annular groove, and the other is provided with an annular protrusion. For example, the inner wall of the first sleeve 11 is provided with an annular groove, and the outer wall of the end of the second sleeve 12 is provided with an annular protrusion. The cross section of the second sleeve 12 is a T-shaped structure, and the annular protrusion is provided in the annular groove. While realizing the position limiting of the two sleeves, the connection between the two sleeves is also realized. The second sleeve 12 is a hollow structure, and a second mounting through hole is provided at the center of the second sleeve 12. The second mounting through hole is used to install the air outlet pipe 3, and the air outlet pipe 3 is passed through the second mounting through hole.

[0061] In one embodiment, the rectification assembly 4 is detachably connected to the air intake assembly 2 .

[0062] That is, the rectifier assembly 4 and the air intake assembly 2 are not completely fixed, but are movably connected, which is convenient for installation and removal of the rectifier assembly 4. If the rectifier assembly 4 is damaged, the rectifier assembly 4 can be removed and replaced separately, which is convenient for subsequent maintenance, or when different types of rectifier assemblies 4 need to be replaced, different types of rectifier assemblies 4 can be freely switched, which has strong versatility and good flexibility.

[0063] In one embodiment, Figure 1-Figure 3 As shown, the air inlet 20 includes a first air inlet 201, and the air inlet component 2 includes a first air inlet pipe 21. The first air inlet pipe 21 is passed through the fixed component 1. Along the axial direction of the fixed component 1, one end of the first air inlet pipe 21 is provided with the first air inlet 201, and the other end of the first air inlet pipe 21 is connected to the rectification component 4.

[0064] The first air inlet pipe 21 is a straight pipe structure, and the gas introduced from the first air inlet port 201 is transported to the rectifying assembly 4 through the first air inlet pipe 21 . The first air inlet pipe 21 plays the role of guiding the gas and transporting the gas.

[0065] Furthermore, the other end of the first air inlet pipe 21 is threadedly engaged with the rectification assembly 4 , and the first air inlet pipe 21 is configured to rotate relative to the fixing assembly 1 and drive the rectification assembly 4 to move along the axial direction of the fixing assembly 1 .

[0066] Specifically, the outer wall of the first air inlet pipe 21 is provided with an external thread, and the first air inlet pipe 21 is substantially a lead screw structure, and the first air inlet pipe 21 and the rectifying assembly 4 are threadedly matched. When the user rotates the first air inlet pipe 21 relative to the fixed assembly 1, the rectifying assembly 4 will move in the axial direction relative to the fixed assembly 1. While the first air inlet pipe 21 plays the role of air delivery, the first air inlet pipe 21 also plays the role of a driving source for the movement of the rectifying assembly 4. It has multiple uses and strong functionality, and there is no need to set up other driving parts separately, saving production costs.

[0067] In one embodiment, Figure 1-Figure 4 As shown, the air intake assembly 2 also includes an air intake seat 22, which is connected to the fixed assembly 1. Specifically, the air intake seat 22 is detachably connected to the first sleeve 11 of the fixed assembly 1, that is, the outer wall of the air intake seat 22 is provided with an external thread, and the inner wall of the first sleeve 11 is provided with an internal thread. The external thread of the air intake seat 22 is threadedly connected to the internal thread of the first sleeve 11 (such as Figure 4 The first air inlet pipe 21 is provided in the air inlet seat 22 along the axial direction of the fixing component 1. Specifically, the air inlet seat 22 is provided with a center hole along the axial direction of the fixing component 1. The first air inlet pipe 21 is provided in the center hole, and the center hole guides the first air inlet pipe 21.

[0068] It is understandable that the size of the center hole is larger than the outer diameter of the first air inlet pipe 21 , and a receiving chamber is formed between the inner wall of the air inlet seat 22 and the first air inlet pipe 21 , and the receiving chamber is connected to the rectifying assembly 4 for conveying gas to the rectifying assembly 4 .

[0069] The air intake assembly 2 further includes a second air intake pipe 23, wherein the second air intake pipe 23 is a straight pipe structure, and the air intake port 20 includes a second air intake port 202. Along the radial direction of the fixed assembly 1, one end of the second air intake pipe 23 is provided with the second air intake port 202, and the other end is connected to the air intake seat 22 and communicates with the accommodating chamber of the air intake seat 22. The gas introduced from the second air intake port 202 is transported to the accommodating chamber of the air intake seat 22 through the second air intake pipe 23, and then transported to the rectifying assembly 4.

[0070] It is understandable that the gases introduced into the first gas inlet 201 and the second gas inlet 202 can be the same or different. For example, both can be introduced with inert gas, both can be introduced with carbon source gas, or one can be introduced with inert gas and the other with carbon source gas.

[0071] When the air intake component 2 has a first air intake pipe 21, an air intake seat 22 and a second air intake pipe 23, the first air intake pipe 21 corresponds to one gas delivery channel, the air intake seat 22 and the second air intake pipe 23 correspond to another gas delivery channel, and the air intake component 2 actually has two air intake delivery channels, which play a role in isolating gas delivery to a certain extent, and the gas delivery does not interfere with each other, does not affect each other, and has good independence.

[0072] It is understandable that there are multiple second air intake pipes 23, for example, there are two second air intake pipes 23, and the two second air intake pipes 23 are respectively arranged on both sides of the air intake seat 22 along the radial direction of the fixing component 1 to achieve a double-sided air intake effect and improve the air intake efficiency.

[0073] In one embodiment, the air intake assembly 2 further includes a stopper 24 (eg Figure 3 As shown in the figure, the limiting member 24 is sleeved on the outside of the first air inlet pipe 21 and is used for limiting the position between the first air inlet pipe 21 and the air inlet seat 22.

[0074] Specifically, the cross-section of the limit member 24 can be circular, rectangular or other irregular structures. The size of the limit member 24 is larger than the size of the center hole of the air intake seat 22. The limit member 24 and the first air intake pipe 21 are fixedly arranged. When the first air intake pipe 21 rotates relative to the air intake seat 22, under the limiting action of the limit member 24, the first air intake pipe 21 will not be completely rotated into the interior of the air intake seat 22, and the effect of stopping the rotation of the first air intake pipe 21 can also be achieved.

[0075] In one embodiment, the air intake structure further comprises a sealing member 5 (such as Figure 1 As shown), the sealing member 5 is sleeved on the outside of the air outlet pipe 3 and is arranged between the air outlet pipe 3, the air inlet component 2 and the fixed component 1.

[0076] Among them, the seal 5 can be selected as a sealing ring. Along the radial direction of the fixed component 1, the inner ring of the seal 5 is sleeved on the outside of the outlet pipe 3, and the outer ring of the seal 5 abuts against the inner wall of the first sleeve 11 of the fixed component 1. Along the axial direction of the fixed component 1, the upper end face of the seal 5 abuts against the air intake seat 22 of the air intake component 2, and the lower end face of the seal 5 abuts against the end face of the second sleeve 12.

[0077] In this way, under the isolation effect of the seal 5, the accommodating chamber of the air inlet seat 22 is communicated with the rectifying assembly 4 in the air outlet pipe 3, and the accommodating chamber of the air inlet seat 22 is isolated from the inner cavity of the second sleeve 12, so that the gas in the air inlet seat 22 will not leak out of the air outlet pipe 3, thereby improving the sealing effect and isolating the air from entering the air outlet pipe 3. At the same time, since the seal 5 has a certain elasticity, the seal 5 also plays a role in fixing the air outlet pipe 3 to a certain extent.

[0078] In one embodiment, Figure 1 , Figure 2 and Figure 5As shown, the rectifier assembly 4 includes a mounting portion 41, the mounting portion 41 has a cylindrical structure, and the outer diameter of the mounting portion 41 is smaller than the inner diameter of the outlet pipe 3, so that the rectifier assembly 4 can be installed in the outlet pipe 3. The air intake assembly 2 is detachably connected to the mounting portion 41, which is convenient for the installation and removal of the rectifier assembly 4 and is conducive to the subsequent maintenance and type replacement of the rectifier assembly 4.

[0079] Specifically, the external thread of the first intake pipe 21 in the intake assembly 2 is threadedly connected to the internal thread of the mounting portion 41. As the first intake pipe 21 rotates relative to the intake seat 22, the first intake pipe 21 can drive the mounting portion 41 to move in the axial direction relative to the fixed assembly 1, thereby realizing the overall position adjustment function of the rectifier assembly 4.

[0080] In one embodiment, the rectifying assembly 4 further includes a rectifying portion 42, the shape of which is a cylindrical structure, the outer diameter of which is smaller than the inner diameter of the outlet pipe 3, and the size of the rectifying portion 42 and the mounting portion 41 are substantially the same, so that the rectifying assembly 4 as a whole is similar to a cylindrical structure. Along the axial direction of the fixing assembly 1, one end of the rectifying portion 42 is connected to the mounting portion 41 and communicates with the air inlet assembly 2, and the other end is provided with an outlet 40, and the rectifying portion 42 is used to change the flow direction of the gas.

[0081] It can be understood that the rectifying part 42 can be connected to the first intake pipe 21 of the intake assembly 2, the rectifying part 42 can also be connected to the accommodating chamber of the intake seat 22 in the intake assembly 2, or the rectifying part 42 can be connected to the first intake pipe 21 of the intake assembly 2 and the accommodating chamber of the intake seat 22 at the same time.

[0082] In one embodiment, the outer diameter of the mounting portion 41 is smaller than the inner diameter of the outlet pipe 3, and the outer diameter of the rectifying portion 42 is smaller than the inner diameter of the outlet pipe 3, that is, there is a certain gap between the rectifying component 4 and the outlet pipe 3, and the gap is less than or equal to 2 mm. The gas discharged from the air intake component 2 can be transported to the rectifying portion 42 through the gap, and the gap acts as a gas delivery channel.

[0083] In one embodiment, Figure 5 As shown, the rectifying portion 42 is provided with a first through hole 421 and a plurality of second through holes 422 . Along the circumferential direction of the fixing assembly 1 , the plurality of second through holes 422 are arranged around the first through hole 421 , and the air outlet 40 is arranged on a side of the first through hole 421 and the second through hole 422 away from the mounting portion 41 .

[0084] The first through hole 421 and the second through hole 422 play a role in gas diversion. A plurality of second through holes 422 are arranged around the first through hole 421 to realize a multi-porous air intake channel. Since the first through hole 421 and the second through hole 422 extend in the same direction, a laminar air intake effect is achieved.

[0085] The inner diameters of the first through hole 421 and the second through hole 422 are different. Specifically, the diameter of the first through hole 421 is 2 mm to 10 mm. For example, the diameter of the first through hole 421 can be 2 mm, 5 mm, 10 mm, preferably 5 mm. The diameter of the second through hole 422 is 1 mm to 5 mm. The diameter of the second through hole 422 can be 1 mm, 2 mm, 5 mm, etc., preferably 2 mm.

[0086] In one embodiment, the rectifying assembly 4 further includes a connecting rod 43 , and along the axial direction of the fixing assembly 1 , one end of the connecting rod 43 is connected to the mounting portion 41 , and the other end is connected to the rectifying portion 42 .

[0087] The connecting rod 43 is used to connect the mounting portion 41 and the rectifying portion 42 to form an integral structure. Meanwhile, the connecting rod 43 occupies a relatively small space, so that the space between the mounting portion 41 and the rectifying portion 42 is relatively large, thereby increasing the temporary storage space for the gas.

[0088] This embodiment also provides a graphene preparation device, including the above-mentioned air intake structure. The graphene preparation device can also be called a microwave plasma torch device.

[0089] The graphene preparation device also includes a microwave device and a reaction chamber. The reaction chamber is specifically a plasma generating chamber. The microwave device is connected to the reaction chamber and is used to emit microwaves to the reaction chamber. The air intake structure is connected to the reaction chamber and is used to transport gas to the reaction chamber to generate a plasma torch in the reaction chamber.

[0090] The operation process of the graphene preparation device provided in this embodiment is as follows:

[0091] After installing the rectifying assembly 4 on the first air inlet pipe 21 of the air inlet assembly 2, the entire air inlet structure is installed on the reaction chamber. Open the first air inlet 201, close the second air inlet 202, and set the gas flow rate to 10SLM. After ventilation, start the microwave equipment with a power of 1KW to form a plasma torch. At this time, the length of the plasma torch is 22.5cm;

[0092] Close the microwave equipment and the first air inlet 201, rotate the first air inlet pipe 21, move the rectifying component 4 downward by 2 cm away from the fixed component 1, install the air inlet structure on the reaction chamber, open the first air inlet 201, close the second air inlet 202, and set the air flow rate to 10 SLM. After ventilation, start the microwave equipment with a power of 1 kW to form a plasma torch. At this time, the length of the plasma torch is 27.5 cm.

[0093] Embodiment 2

[0094] This embodiment is similar to the first embodiment, and the only difference is the detailed structure of the rectifier assembly 4.

[0095] like Figure 6-Figure 7 As shown, the outer peripheral wall of the rectifying portion 42 provided in this embodiment is provided with a spiral groove 423, which is arranged in a spiral line manner on the outer peripheral wall of the rectifying portion 42, and the gas outlet 40 is arranged on the side of the spiral groove 423 away from the mounting portion 41. After the gas discharged from the air intake assembly 2 enters the spiral groove 423, the spiral groove 423 is used to guide and change the flow direction of the gas, so that the gas outlet 40 forms a rotating vortex effect.

[0096] There may be two spiral grooves 423 , which are evenly distributed to form a double spiral groove structure. The groove width and groove depth of the spiral groove 423 may be 2 mm to 10 mm, preferably 5 mm.

[0097] It is understandable that when the air intake assembly 2 has two second air intake pipes 23, using the two second air intake pipes 23 as a double air intake tangential mode can better cooperate with the rotating air intake rectification structure to form a gas rotation effect.

[0098] It can be understood that the mounting portion 41 of the rectifying assembly 4 provided in this embodiment can be the same as that in the first embodiment. Different types of rectifying assemblies 4 can be replaced according to different usage requirements, thereby solving the problem of the current single air intake structure of the plasma torch and realizing the free switching between rotary air intake and laminar air intake, which is simpler and more practical.

[0099] The operation process of the graphene preparation device provided in this embodiment is as follows:

[0100] After installing the rectifying assembly 4 on the first air inlet pipe 21 of the air inlet assembly 2, the entire air inlet structure is installed on the reaction chamber. Open the second air inlet 202, close the first air inlet 201, and set the gas flow rate to 10SLM. After ventilation, start the microwave equipment with a power of 1KW to form a plasma torch. At this time, the length of the plasma torch is 25.5cm;

[0101] Close the microwave equipment and the second air inlet 202, rotate the first air inlet pipe 21, move the rectifying component 4 downward by 2 cm away from the fixed component 1, install the air inlet structure on the reaction chamber, open the first air inlet 201, close the second air inlet 202, and set the gas flow rate to 10 SLM. After ventilation, start the microwave equipment with a power of 1 kW to form a plasma torch. At this time, the length of the plasma torch is 31.0 cm.

[0102] It should be noted that the embodiments of the present invention are shown in the drawings and described in this specification is only an example of the principle of the present invention. It should be clearly understood by those skilled in the art that the principle of the present invention is not limited to any details or any components of the device shown in the drawings or described in the specification.

[0103] It should be understood that the utility model does not limit its application to the detailed structure and arrangement of the components proposed in this specification. The utility model can have other embodiments and can be implemented and executed in a variety of ways. The aforementioned deformation forms and modified forms fall within the scope of the utility model. It should be understood that the utility model disclosed and defined in this specification extends to all alternative combinations of two or more individual features mentioned or evident in the text and / or the drawings. All these different combinations constitute multiple alternative aspects of the utility model. The embodiments described in this specification illustrate the best known methods for implementing the utility model and will enable those skilled in the art to utilize the utility model.

[0104] Those skilled in the art will readily come up with other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. The present invention is intended to cover any variation, use, or adaptation of the present invention, which follows the general principles of the present invention and includes common knowledge or customary technical means in the art that are not disclosed in the present invention. The specification and example embodiments are to be considered as exemplary only, and the true scope and spirit of the present invention are indicated by the appended claims.

[0105] It should be understood that the present invention is not limited to the precise structure described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of protection of the present invention is limited only by the appended claims.

Claims

1. An air intake structure, characterized in that: include: Fixing components; An air intake component is inserted into the fixed component, and the air intake component is provided with an air intake port; An air outlet pipe is provided through the fixed component, and the air outlet pipe and the air inlet component are respectively provided on both sides of the fixed component along the axial direction of the fixed component; A rectifying assembly is arranged in the air outlet pipe, one end of the rectifying assembly is connected to the air inlet assembly and communicates with the air inlet assembly, and the other end is provided with an air outlet; The rectification assembly is configured to be movable along the axial direction of the fixing assembly, so as to adjust the position of the air outlet relative to the air outlet pipe.

2. The air intake structure according to claim 1, characterized in that: The rectifying assembly is detachably connected to the air intake assembly.

3. The air intake structure according to claim 1, characterized in that: The air inlet comprises a first air inlet; The air intake assembly comprises a first air intake pipe, which is passed through the fixed assembly. Along the axial direction of the fixed assembly, one end of the first air intake pipe is provided with the first air intake port, and the other end of the first air intake pipe is threadedly matched with the rectifying assembly and communicated with the rectifying assembly; Wherein, the first air inlet pipe is configured to rotate relative to the fixing component and drive the rectification component to move along the axial direction of the fixing component.

4. The air intake structure according to claim 3, characterized in that: The air inlet includes a second air inlet; The air intake assembly also includes an air intake seat and a second air intake pipe. The air intake seat is connected to the fixed assembly. The first air intake pipe is inserted into the air intake seat along the axial direction of the fixed assembly. Along the radial direction of the fixed assembly, one end of the second air intake pipe is provided with the second air inlet port, and the other end is connected to the air intake seat and communicated with the air intake seat. The air intake seat is communicated with the rectification assembly.

5. The air intake structure according to claim 4, characterized in that: The air intake assembly further includes a limiting member, which is sleeved on the outside of the first air intake pipe and is used for limiting the position between the first air intake pipe and the air intake seat.

6. The air intake structure according to claim 1, characterized in that: The rectifier assembly comprises: A mounting portion, the air intake assembly being detachably connected to the mounting portion and capable of driving the mounting portion to move in an axial direction relative to the fixing assembly; A rectifying part is arranged along the axial direction of the fixing assembly, one end of the rectifying part is connected to the mounting part and communicated with the air inlet assembly, and the other end is provided with the air outlet, and the rectifying part is used to change the flow direction of the gas.

7. The air intake structure according to claim 6, characterized in that: The rectifying portion is provided with a first through hole and a plurality of second through holes. Along the circumferential direction of the fixing assembly, a plurality of second through holes are arranged around the first through hole. The inner diameters of the first through hole and the second through hole are different. The air outlet is arranged on a side of the first through hole and the second through hole away from the mounting portion.

8. The air intake structure according to claim 6, characterized in that: The outer peripheral wall of the rectifying portion is provided with a spiral groove, and the air outlet is provided at a side of the spiral groove away from the mounting portion.

9. The air intake structure according to claim 6, characterized in that: The rectifier assembly also includes: A connecting rod is arranged along the axial direction of the fixing assembly, one end of the connecting rod is connected to the mounting portion, and the other end of the connecting rod is connected to the rectifying portion.

10. The air intake structure according to any one of claims 1 to 9, characterized in that: A gap is arranged between the rectifying assembly and the air outlet pipe.

11. The air intake structure according to any one of claims 1 to 9, characterized in that: It also includes a sealing component, which is sleeved on the outside of the air outlet pipe and arranged between the air outlet pipe, the air inlet component and the fixing component.

12. A graphene preparation device, characterized in that: Comprising the air intake structure according to any one of claims 1 to 11.

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