Efficient cold trap device for chemical vapor deposition equipment
By designing cleaning doors and pressure relief devices for efficient cold trap devices, multiple problems existing in the cleaning and maintenance process of existing cold trap devices are solved, and faster and safer cleaning and maintenance processes are achieved, and equipment efficiency and reliability are improved.
Patent Information
- Application Number
- CN202421811561.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-07-30
AI Technical Summary
There are many problems in the cleaning and maintenance process of existing cold trap devices, including the residual gas not being completely captured, the cleaning time is long, the flange sealing ring is prone to slag inclusion, the hose is prone to breakage, and the operator needs to have a high height and physical fitness.
An efficient cold trap device is designed, using cold trap cleaning doors and pressure relief devices, which simplifies the cleaning process, avoids disassembly of flange screws and frequent lifting of the evaporator, ensuring sealing and gas trapping efficiency.
It effectively shortens the cleaning time of the cold trap evaporator, reduces the cooling time after re-start, avoids air leakage and equipment damage, and improves production efficiency and equipment reliability.
Smart Images
Figure CN222861625U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of parylene vacuum coating, and more specifically to a high-efficiency cold trap device for chemical meteorological deposition equipment. Background Art
[0002] In the application scenario of parylene coating, the cold trap is located between the vacuum pump and the deposition chamber. It is a standing barrel-shaped structure. Its main function is to capture the residual parylene molecules (gas) after the parylene molecules (gas) are cracked during the coating process and pass through the deposition chamber to prevent them from entering the vacuum pump and causing the pump to get stuck and damaged. On the other hand, it is to capture water vapor in the air and water molecules released from the product to obtain a higher vacuum.
[0003] Since the cold trap is used to capture the residual parylene and water vapor molecules, it needs to be cleaned frequently. The current method of cleaning the cold trap is to shut down the cold trap first, then disassemble the evaporator of the cold trap, lift the evaporator of the cold trap above the flange port, take it out and put it on the external ground or bracket for cleaning. After cleaning, wait for the evaporator to return to the temperature and there is no moisture on the surface before installing it back, and then perform a leak test. After confirming that there is no leak, start the cold trap from room temperature to working temperature.
[0004] However, the existing cold trap device has the following defects:
[0005] 1. The air inlet and outlet of the cold trap have different angles and orientations, which will cause the residual molecules (gas) to not be completely captured and enter the vacuum pump body. Over time, it will cause the vacuum pump to operate abnormally or be damaged.
[0006] 2. The cycle time during the cold trap cleaning process takes at least 40 minutes to more than 1 hour. It takes more than 30 minutes to restart the cold trap and cool it down from a temperature close to room temperature to below -80°C, which is too time-consuming.
[0007] 3. The disassembled flange sealing ring is prone to slag inclusion and cause air leakage.
[0008] 4. The disassembly process may easily cause the hose connecting the main unit to the evaporator to break, causing air or liquid leakage, resulting in the equipment being unable to operate normally.
[0009] 5. Since the evaporator of the cold trap needs to be lifted to a certain height during the disassembly process, there are certain requirements for the height and physical fitness of the operator.
[0010] The above problems will have a great impact on production efficiency, personnel working time and cost in urgent periods. Utility Model Content
[0011] In view of this, the utility model proposes a high-efficiency cold trap device for chemical vapor deposition equipment, and its specific technical solution is as follows:
[0012] A high-efficiency cold trap device for chemical meteorological deposition equipment comprises a cold trap barrel body and a cold trap evaporator. A cold trap flange cover is mounted on the upper part of the cold trap barrel body, and a mounting hole communicating with the inner cavity of the cold trap barrel body is provided on the cold trap flange cover plate. The cold trap evaporator is sealed from top to bottom and passes through the mounting hole and extends into the cold trap barrel body. The upper end of the cold trap evaporator is connected to an external compressor through a cold trap host connecting hose. A cold trap inlet connected to an external deposition chamber, a cold trap outlet connected to an external vacuum pump group and a pressure relief port connected to an external pressure relief device are provided on the side wall of the cold trap barrel body. A cleaning port is integrally formed on the middle and lower side walls of the cold trap barrel body, and a cold trap cleaning door capable of opening or sealing the cleaning port is installed at the cleaning port.
[0013] By adopting the above technical solution, the utility model effectively shortens the cleaning and maintenance time of the cold trap evaporator, is easy to operate, and will not be inoperable due to people's height and physical fitness, thereby improving equipment efficiency, reducing labor costs, and avoiding the risk of damaging the cold trap.
[0014] Preferably, the cold trap inlet is arranged on the lower side wall of the cold trap barrel body, the cold trap outlet is arranged on the upper side wall of the cold trap barrel body, and the cold trap inlet and the cold trap outlet are respectively arranged on both sides of the cold trap barrel body.
[0015] Preferably, the cold trap inlet, the cold trap outlet, the pressure relief port and the cleaning port do not interfere with each other.
[0016] Preferably, a distance is left between the lower end of the cold trap evaporator and the inner bottom of the cold trap barrel.
[0017] Preferably, the cold trap evaporator located in the cold trap barrel is columnar as a whole.
[0018] Preferably, a sensor is also installed at the cleaning port to detect whether the cold trap cleaning door completely seals the cleaning port after the cold trap cleaning door is closed.
[0019] Compared with the prior art, the utility model of a high-efficiency cold trap device for chemical meteorological deposition equipment has the following beneficial effects:
[0020] 1) The entire cleaning process is simplified, thereby shortening the cleaning time of the cold trap evaporator.
[0021] 2) Shorten the cooling time of the cold trap evaporator after restarting.
[0022] 3) There is no need to remove the flange screws of the cold trap evaporator to prevent the cold trap host connecting hose from breaking due to frequent lifting of the evaporator.
[0023] 4) The problem of air leakage caused by slag inclusion on the flange sealing surface and sealing ring is solved.
[0024] 5) The machine will not be unable to operate due to the height and physical fitness of the personnel.
[0025] 6) Ensure that the residual molecules (gas) can be completely captured to avoid abnormal operation or damage of the vacuum pump.
[0026] 7) The operation is simple and quick, which improves the overall production efficiency, shortens the operation time of personnel, and avoids damage to the cold trap. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.
[0028] Figure 1 The utility model is a schematic diagram of the overall structure of a high-efficiency cold trap device for chemical meteorological deposition equipment.
[0029] Figure 2 This is a schematic diagram of the installation of the cold trap evaporator in the utility model.
[0030] Figure 3 It is a schematic structural diagram of the cold trap barrel body in the utility model.
[0031] In the figure: 1-cold trap barrel, 2-cold trap evaporator, 3-cold trap flange cover, 4-cold trap host connecting hose, 5-cold trap inlet, 6-cold trap outlet, 7-cleaning port, 8-cold trap cleaning door. DETAILED DESCRIPTION
[0032] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.
[0033] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0035] Example:
[0036] The utility model provides a high-efficiency cold trap device for capturing residual parylene molecules (gas) in chemical vapor deposition coating equipment. The device is located between a deposition chamber and a vacuum pump group. On the one hand, the purpose is to collect residual parylene molecules (gas) after cracking during the coating process and passing through the deposition chamber through the cold trap device of the utility model to prevent the residual parylene molecules (gas) from entering the vacuum pump and causing the pump to be stuck and damaged. On the other hand, the purpose is to capture water vapor in the air and water molecules released in the product, thereby obtaining a higher vacuum.
[0037] Specifically, the utility model is a high-efficiency cold trap device for chemical meteorological deposition equipment, which includes a cold trap barrel body 1 and a cold trap evaporator 2. A cold trap flange cover plate 3 is installed on the upper part of the cold trap barrel body 1, and the cold trap flange cover plate 3 is connected to the top flange of the cold trap barrel body 1 through flange screws.
[0038] To ensure the sealing performance, a sealing ring is correspondingly installed between the bottom sealing surface of the cold trap flange cover plate 3 and the top sealing surface of the cold trap barrel body 1 .
[0039] The cold trap flange cover 3 is provided with a mounting hole which is in communication with the inner cavity of the cold trap barrel body. The mounting hole is generally arranged at the center of the cold trap flange cover 3. The cold trap evaporator 2 is sealed from top to bottom and passes through the mounting hole and extends into the cold trap barrel body 1. The upper end of the cold trap evaporator 2 is connected to the external compressor through the cold trap main unit connecting hose 4.
[0040] In a further specific embodiment, a gap is left between the lower end of the cold trap evaporator 2 and the inner bottom of the cold trap barrel 1. In addition, the cold trap evaporator 2 located in the cold trap barrel 1 is columnar as a whole, so as to effectively capture the undeposited parylene gas and water vapor inside the cold trap barrel, and to facilitate the staff to quickly clean the cold trap evaporator 2.
[0041] The side wall of the cold trap barrel 1 is provided with a cold trap inlet 5 connected to the deposition chamber, a cold trap outlet 6 connected to the vacuum pump group, and a pressure relief port (not shown) connected to the pressure relief device.
[0042] A cleaning opening 7 is integrally formed in the middle and lower side walls of the cold trap barrel body 1 , and a cold trap cleaning door 8 is installed at the cleaning opening 7 , which can open or seal the cleaning opening 7 .
[0043] According to the utility model, when the cold trap evaporator 2 needs to be cleaned, it is no longer necessary to remove the flange screws of the cold trap evaporator 2, lift the cold trap evaporator 2 to a position higher than the flange opening, and then take it out and place it on the external ground or bracket for cleaning. Instead, the pressure in the inner cavity of the cold trap barrel is first relieved by the pressure relief device, and then the cold trap cleaning door 8 is opened to directly clean and maintain the cold trap evaporator 2 in the cavity. This operation greatly simplifies the entire cleaning process, thereby shortening the time. Moreover, since the cleaning process is greatly shortened, the temperature of the cold trap evaporator 2 will not rise too high, thereby effectively shortening the cooling time of the cold trap evaporator 2 after restarting. At the same time, since it is no longer necessary to remove the flange screws of the cold trap evaporator 2, the breakage of the cold trap main unit connecting hose 4 caused by frequent lifting of the evaporator is eliminated, and the problem of air leakage caused by slag inclusion on the flange sealing surface and the sealing ring, as well as the problem of inoperability caused by the height and physical fitness of the personnel are solved.
[0044] Therefore, the utility model provides the cold trap cleaning door 8, so that the cleaning operation of the cold trap evaporator 2 becomes simple and quick, improves the overall production efficiency, shortens the operation time of personnel, and avoids damage to the cold trap.
[0045] In a further specific embodiment, the cold trap inlet 5 is arranged on the lower side wall of the cold trap barrel 1, the cold trap outlet 6 is arranged on the upper side wall of the cold trap barrel 1, and the cold trap inlet 5 and the cold trap outlet 6 are arranged on both sides of the cold trap barrel 1. At the same time, the cold trap inlet 5, the cold trap outlet 6, the pressure relief port and the cleaning port 7 do not interfere with each other.
[0046] The utility model makes the cold trap inlet at the bottom and the cold trap outlet at the top, and the two are arranged on both sides of the cold trap barrel 1, so that the gas flows in from the bottom of one side of the cold trap barrel 1 and flows out from the top of the other side. This airflow structure prolongs the gas flow route to the greatest extent, thereby increasing the retention time of the gas inside the cold trap barrel, and realizes the cold trap evaporator 2 to fully capture the undeposited parylene gas and water vapor inside the cold trap barrel, so as to avoid abnormal operation or damage of the vacuum pump.
[0047] In a further specific embodiment, the utility model further installs a sensor at the cleaning port to detect whether the cold trap cleaning door 8 completely seals the cleaning port 7 after the cold trap cleaning door 8 is closed, so as to ensure the normal operation of the device.
[0048] Compared with traditional cold trap devices, the utility model can ensure the complete capture of residual molecules (gases). At the same time, its convenient cleaning and maintenance method effectively shortens the cleaning and maintenance time, and will not cause inoperability due to human height and physical fitness, thereby improving equipment efficiency, reducing labor costs, and avoiding the risk of damaging the cold trap.
[0049] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.
[0050] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A high-efficiency cold trap device for chemical vapor deposition equipment, characterized in that: It includes a cold trap barrel body and a cold trap evaporator. A cold trap flange cover is installed on the upper part of the cold trap barrel body. A mounting hole communicating with the inner cavity of the cold trap barrel body is provided on the cold trap flange cover plate. The cold trap evaporator is sealed from top to bottom and passes through the mounting hole and extends into the cold trap barrel body. The upper end of the cold trap evaporator is connected to an external compressor through a cold trap host connecting hose. A cold trap inlet connected to an external deposition chamber, a cold trap outlet connected to an external vacuum pump group, and a pressure relief port connected to an external pressure relief device are provided on the side wall of the cold trap barrel body. A cleaning port is integrally opened on the middle and lower side walls of the cold trap barrel body, and a cold trap cleaning door capable of opening or sealing the cleaning port is installed at the cleaning port.
2. The high-efficiency cold trap device for chemical vapor deposition equipment according to claim 1, characterized in that: The cold trap inlet is arranged on the lower side wall of the cold trap barrel body, the cold trap outlet is arranged on the upper side wall of the cold trap barrel body, and the cold trap inlet and the cold trap outlet are respectively arranged on both sides of the cold trap barrel body.
3. The high-efficiency cold trap device for chemical vapor deposition equipment according to claim 1, characterized in that: The cold trap inlet, the cold trap outlet, the pressure relief port and the cleaning port do not interfere with each other.
4. The high-efficiency cold trap device for chemical vapor deposition equipment according to claim 1, characterized in that: A distance is left between the lower end of the cold trap evaporator and the inner bottom of the cold trap barrel.
5. A high-efficiency cold trap device for chemical vapor deposition equipment according to claim 1 or 4, characterized in that: The cold trap evaporator located in the cold trap barrel is columnar in shape as a whole.
6. The high-efficiency cold trap device for chemical vapor deposition equipment according to claim 1, characterized in that: A sensor is also installed at the cleaning port to detect whether the cold trap cleaning door completely seals the cleaning port after the cold trap cleaning door is closed.