Silicon nitride ceramic substrate single-face polishing wandering star wheel

Abstract

The utility model provides a silicon nitride ceramic substrate single face polishing wandering star wheel which comprises a first wandering star wheel, a base plate and a second wandering star wheel, the base plate is connected with the upper end face of the first wandering star wheel in a bonding mode, the second wandering star wheel is laid on the base plate, and the first wandering star wheel and the second wandering star wheel are the same in size. Teeth matched with a polishing machine are arranged on the outer circumference of the first wandering star wheel and the outer circumference of the second wandering star wheel, the diameter of the base plate is the same as that of the root circle of the first wandering star wheel, and a plurality of clamping grooves matched with a ceramic substrate are formed in the second wandering star wheel. According to the silicon nitride ceramic substrate single-face polishing wandering star wheel, the wandering star wheel is divided into the first wandering star wheel, the base plate and the second wandering star wheel, in the polishing process, the first wandering star wheel and the base plate serve as universal parts and do not need to be replaced, and silicon nitride ceramic substrates of different specifications can be machined only by replacing different second wandering star wheels; and when the second wandering star wheel is damaged or warped, only the second wandering star wheel needs to be replaced independently, so that the production cost of an enterprise is greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of planetary wheels, in particular to a single-sided polished planetary wheel on a silicon nitride ceramic substrate. Background Art

[0002] In the production process of silicon nitride ceramic substrates, a polishing machine is usually used in conjunction with a planetary wheel to polish the surface of the silicon nitride ceramic substrate. In the prior art, the planetary wheel is generally made of stainless steel, fiberglass or epoxy resin, and the selection of these materials is based on their respective physical and chemical properties to meet different industrial needs. However, silicon nitride ceramic substrates have a variety of specifications, sizes and thicknesses, and planetary wheels of various specifications need to be produced for use with them. If the planetary wheel is worn or warped during use, the entire thing needs to be scrapped, which increases the production cost of the enterprise. Utility Model Content

[0003] The technical problem to be solved by the utility model is: in order to overcome the shortcomings of the prior art that the planetary wheel is processed in one piece and has high production cost and needs to be scrapped as a whole after being worn or warped, the utility model provides a single-sided polished planetary wheel on a silicon nitride ceramic substrate.

[0004] The utility model adopts the following technical solution to solve the technical problem: a single-sided polished planetary wheel on a silicon nitride ceramic substrate, comprising a first planetary wheel, a pad and a second planetary wheel, the pad being adhesively connected to the upper end surface of the first planetary wheel, the second planetary wheel being laid on the pad, the axes of the first planetary wheel, the pad and the second planetary wheel being coincident, the first planetary wheel and the second planetary wheel being the same size, teeth matching the polishing machine being arranged on the outer circumferences of the first planetary wheel and the second planetary wheel, the diameter of the pad being the same as the diameter of the root circle of the first planetary wheel, and the second planetary wheel being provided with a plurality of slots matching the ceramic substrate.

[0005] The first planetary wheel serves as a bottom tray, and the pad is bonded to the first planetary wheel to form a whole. When the first planetary wheel, the pad and the second planetary wheel are placed on the polishing machine, the ceramic substrate can be effectively embedded in the slot, and the pad is placed under the ceramic substrate to protect the ceramic substrate. The first planetary wheel is directly placed on the pad, and there is no connection between the first planetary wheel and the second planetary wheel. The teeth on the outer circumference of the first planetary wheel and the second planetary wheel engage with the central gear and the gear ring on the polishing machine to ensure the synchronous operation of the first planetary wheel and the second planetary wheel. The ceramic substrate has different specifications and thicknesses, and the thickness of the second planetary wheel can be customized according to the thickness of the ceramic substrate, which can be slightly lower than the thickness of the ceramic substrate. When polishing ceramic substrates of different thicknesses, second planetary wheels of different thicknesses can be replaced. The diameter of the pad is the same as the root circle diameter of the first and second planetary gears, and it has a certain supporting and protecting effect on the first and second planetary gears. Since the pad is adhesively connected to the first planetary gear, the pad has a greater supporting and protecting effect on the first planetary gear. When the second planetary gear warps after long-term use, the second planetary gear can be replaced alone.

[0006] Furthermore, the slots are arranged and distributed on the second planetary wheel, the gap between the slots and the ceramic substrate is no more than 0.3 mm, and a plurality of structural holes are also distributed on the second planetary wheel.

[0007] The gap between the ceramic substrate and the slot is no more than 0.3mm, which prevents the ceramic substrate from shaking in the slot and facilitates the removal of the ceramic substrate without getting stuck or damaged. The setting of the structural hole reduces the weight of the second planetary wheel. During the polishing process of the ceramic substrate, the structural hole also has the function of draining and exhausting.

[0008] Furthermore, the first planetary wheel is a resin plain plate planetary wheel.

[0009] Furthermore, the pad is a polyurethane pad.

[0010] Furthermore, the second planetary wheel is a stainless steel planetary wheel, and the thickness of the second planetary wheel is 75% to 80% of the thickness of the ceramic substrate.

[0011] Furthermore, in order to enable the teeth on the first planetary gear and the second planetary gear to be quickly aligned when the second planetary gear is assembled to the first planetary gear and the backing plate, at least two limiting protrusions are provided on the backing plate, and the limiting protrusions correspond to the positions of the structural holes.

[0012] The beneficial effects of the utility model are as follows: the utility model provides a single-sided polishing planetary wheel for a silicon nitride ceramic substrate, wherein the planetary wheel is divided into three parts: a first planetary wheel, a pad and a second planetary wheel, and a slot matching the silicon nitride ceramic substrate is provided on the second planetary wheel. During the polishing process, the first planetary wheel and the pad do not need to be replaced as universal parts, and only different second planetary wheels need to be replaced to process silicon nitride ceramic substrates of different specifications. When the second planetary wheel is damaged or warped, only the second planetary wheel needs to be replaced separately, thereby greatly reducing the production cost of the enterprise. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0014] Figure 1 It is a structural schematic diagram of the best embodiment of the utility model;

[0015] Figure 2 yes Figure 1 Schematic diagram of the cross section of AA;

[0016] Figure 3 This is a schematic diagram of the structure of the first planetary wheel;

[0017] Figure 4 It is a structural diagram of the pad.

[0018] In the figure: 1, first planetary wheel, 2, pad, 21, limiting protrusion, 3, second planetary wheel, 31, slot, 32, structural hole. DETAILED DESCRIPTION

[0019] Now the utility model is described in detail with reference to the accompanying drawings. This figure is a simplified schematic diagram, which only illustrates the basic structure of the utility model in a schematic manner, so it only shows the components related to the utility model.

[0020] like Figure 1-4 As shown, the utility model is a single-sided polished planetary wheel of a silicon nitride ceramic substrate, comprising a first planetary wheel 1, a pad 2 and a second planetary wheel 3, wherein the first planetary wheel 1 is a resin smooth plate planetary wheel, the pad 2 is a polyurethane pad, the second planetary wheel 3 is a stainless steel planetary wheel, and the thickness of the second planetary wheel 3 is 75% to 80% of the thickness of the ceramic substrate.

[0021] The pad 2 is bonded to the upper end surface of the first planetary wheel 1 by adhesive, and the second planetary wheel 3 is directly placed on the upper surface of the pad 2. The axes of the first planetary wheel 1, the pad 2 and the second planetary wheel 3 coincide, and the first planetary wheel 1 and the second planetary wheel 3 are the same size. Teeth matching the polishing machine are arranged on the outer circumference of the first planetary wheel 1 and the second planetary wheel 3. The diameter of the pad 2 is the same as the diameter of the root circle of the first planetary wheel 1, and the second planetary wheel 3 is provided with a plurality of slots 31 matching the ceramic substrate.

[0022] The clamping slots 31 are arranged and distributed on the second planetary wheel 3 , and the gap between the clamping slots 31 and the ceramic substrate is no more than 0.3 mm. A plurality of structural holes 32 are also distributed on the second planetary wheel 3 .

[0023] At least two limiting protrusions 21 are disposed on the pad 2 , and the positions of the limiting protrusions 21 correspond to the positions of the structural holes 32 .

[0024] Working process:

[0025] The pad 2 is bonded to the first planetary wheel 1 by adhesive, and the second planetary wheel 3 corresponds to the limiting protrusion 21 at the corresponding position on the pad 2 through the structural hole 32, so that the axes of the first planetary wheel 1 and the second planetary wheel 3 coincide, and at the same time, the teeth on the outer circumference of the first planetary wheel 1 and the second planetary wheel 3 are quickly aligned. The planetary wheel as a whole is assembled on the polishing machine through the teeth on the outer circumference meshing with the center gear and the gear ring on the polishing machine. The staff inserts the ceramic substrate into the slot 31 and then starts the polishing machine, thereby realizing single-sided polishing of the ceramic substrate.

[0026] Directions and references (e.g., up, down, left, right, etc.) in the present invention may only be used to assist in the description of features in the accompanying drawings. Therefore, the following detailed description is not to be taken in a limiting sense, and the scope of the subject matter claimed is limited only by the attached claims and their equivalents.

[0027] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without departing from the scope of the utility model through the above description. The technical scope of this utility model is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A single-sided polished planetary wheel on a silicon nitride ceramic substrate, characterized in that: The invention comprises a first planetary wheel (1), a backing plate (2) and a second planetary wheel (3), wherein the backing plate (2) is bonded to the upper end surface of the first planetary wheel (1), the second planetary wheel (3) is laid on the backing plate (2), the axes of the first planetary wheel (1), the backing plate (2) and the second planetary wheel (3) coincide with each other, the first planetary wheel (1) and the second planetary wheel (3) are of the same size, teeth matching a polishing machine are arranged on the outer circumference of the first planetary wheel (1) and the second planetary wheel (3), the diameter of the backing plate (2) is the same as the diameter of the tooth root circle of the first planetary wheel (1), and the second planetary wheel (3) is provided with a plurality of slots (31) matching with a ceramic substrate.

2. A single-sided polished planetary wheel on a silicon nitride ceramic substrate as claimed in claim 1, characterized in that: The clamping slots (31) are arranged and distributed on the second planetary wheel (3); the gap between the clamping slots (31) and the ceramic substrate is no greater than 0.3 mm; and a plurality of structural holes (32) are also distributed on the second planetary wheel (3).

3. A single-sided polished planetary wheel on a silicon nitride ceramic substrate as claimed in claim 1, characterized in that: The first planetary wheel (1) is a resin plain plate planetary wheel.

4. A single-sided polished planetary wheel on a silicon nitride ceramic substrate as claimed in claim 1, characterized in that: The pad (2) is a polyurethane pad.

5. The single-sided polished planetary wheel of silicon nitride ceramic substrate according to claim 1, characterized in that: The second planetary wheel (3) is a stainless steel planetary wheel, and the thickness of the second planetary wheel (3) is 75% to 80% of the thickness of the ceramic substrate.

6. A single-sided polished planetary wheel on a silicon nitride ceramic substrate as claimed in claim 2, characterized in that: At least two limiting protrusions (21) are provided on the pad (2), and the limiting protrusions (21) correspond to the positions of the structural holes (32).

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