Heating carrier and processing equipment

Abstract

The utility model provides a heating carrier and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of low heating efficiency of a traditional reaction furnace. The heating carrier comprises at least two boat sheets which are arranged at intervals along a first direction and are configured to bear sheet materials; the connecting piece is configured to connect the at least two boat pieces; the at least one heating assembly is arranged on the side, away from the last boat piece, of the first boat piece, and / or the heating assembly is arranged on the side, away from the first boat piece, of the last boat piece, so that the first boat piece and / or the last boat piece form a heating boat piece; the heating assembly is configured to transfer heat to the sheet material by heating the boat sheet. As the heating assembly is arranged on one side or two sides of the at least two boat pieces, the distance between the heating assembly and the sheet-shaped material is small, and the heating efficiency and the heating uniformity are improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, and particularly to a heating carrier and a processing device. Background Art

[0002] In the field of semiconductor or photovoltaic material processing, chemical vapor deposition (CVD) technology or diffusion process is usually used to process sheet materials (such as silicon wafers). When processing sheet materials, the sheet materials need to be placed in a carrier first, and then the carrier is sent into a reaction furnace for high-temperature processing.

[0003] In related technologies, reaction furnaces usually use heating wires for heating. Specifically, a traditional reaction furnace generally includes, from the outside to the inside: a shell, a heat insulation layer, heating wires, and a vacuum chamber. The carrier carrying the sheet material is placed in the vacuum chamber. When heating, the heating wires generate heat after being energized, and the heat is transmitted through the vacuum chamber to the carrier and the sheet material in the reaction furnace, so that the sheet material reaches the temperature required for the reaction. Among them, since the transparent quartz material has strong light transmittance and the heat transfer speed is faster, the vacuum chamber is usually made of quartz. However, due to the relatively long distance between the heating wires and the sheet material, problems such as slow heating speed and large thermal hysteresis will occur. And after long-term use, the quartz vacuum chamber will be coated with a film, resulting in a decrease in the light transmittance of the quartz vacuum chamber, thereby reducing the heating efficiency and heating speed. In addition, the quartz vacuum chamber is prone to tube explosion and fragmentation at high temperatures, and the residues are difficult to clean on the heating wires, which will cause the scrapping of the reaction furnace. Therefore, how to improve the heating efficiency of the reaction furnace and avoid the explosion of the vacuum chamber has become an urgent problem to be solved. Summary of the Utility Model

[0004] In order to solve the above technical problems, this application is proposed. An embodiment of this application provides a heating carrier and a processing device.

[0005] In a first aspect, an embodiment of this application provides a heating carrier, including: at least two boat plates arranged at intervals along a first direction, the boat plates being configured to carry sheet materials; a connecting member configured to connect at least two boat plates; at least one heating component, the heating component being disposed on a side of the first boat plate away from the last boat plate, and / or the heating component being disposed on a side of the last boat plate away from the first boat plate, so that the first boat plate and / or the last boat plate form a heating boat plate, and the heating component is configured to transfer heat to the sheet material through the heating boat plate.

[0006] In some embodiments, the heating component includes a heating wire; wherein, along the extending direction of the heating boat plate, the heating boat plate has a first end and a second end, and the heating wire extends from the first end of the heating boat plate to the second end of the heating boat plate.

[0007] In some embodiments, the heating carrier further includes: a plurality of stoppers, respectively disposed at the first end and the second end of the heating boat, configured to fix the heating wire to the heating boat.

[0008] In some embodiments, the heating boat has a first symmetry plane and a second symmetry plane that are cross-set, and a plurality of stoppers are symmetrically arranged relative to the first symmetry plane, and / or a plurality of stoppers are symmetrically arranged relative to the second symmetry plane.

[0009] In some embodiments, the heating wire includes: a plurality of straight segments, which are arranged at intervals along the second direction, and the second direction is perpendicular to the extension direction of the boat sheet and the first direction; and a plurality of curved segments, where two adjacent straight segments are connected by a curved segment.

[0010] In some embodiments, the surface of the heating boat where the heating wire is arranged includes a central area and an edge area surrounding the central area; wherein the heating wire is arranged in the central area and the edge area.

[0011] In some embodiments, the heating carrier further includes: a temperature measuring device, wherein the detection end of the temperature measuring device is arranged in the central area.

[0012] In some embodiments, the heating carrier further includes: a radio frequency electrode assembly electrically connected to the boat sheet and configured to supply power to the boat sheet; and a shielding member disposed between the heating assembly and the heating boat sheet and configured to isolate the heating assembly from the radio frequency electrode assembly.

[0013] In some embodiments, the heating carrier further includes: at least one fixing plate, which is disposed on a side of each heating component away from the heating boat, and the connecting member is further configured to connect the fixing plate and the heating boat.

[0014] In a second aspect, an embodiment of the present application provides a processing device, including: a reaction furnace having a reaction chamber, configured to process a sheet material; any heating carrier of the above first aspect, which can be placed in the reaction chamber, configured to carry the sheet material and heat the sheet material.

[0015] The heating carrier and processing equipment proposed in the embodiments of the present application have the following advantages: First, since the heating component is arranged on one or both sides of at least two boat plates, the distance between the heating component and the sheet material is relatively close, which improves the heating efficiency and uniformity. Second, the heat generated by the heating component is first transferred to the boat plate and then to the sheet material without passing through the vacuum chamber. Therefore, even if the vacuum chamber is coated after long-term use, it will not affect the heating speed. Third, since there is no need to set up a thermal field outside the vacuum chamber for heating, the equipment cost is saved. Moreover, the vacuum chamber can use a metal or silicon carbide material instead of a transparent quartz material with a faster heat transfer speed. Since the metal material has stronger toughness and the silicon carbide material has higher strength, using a vacuum chamber made of metal or silicon carbide can extend the service life of the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other objects, features, and advantages of the present application will become more apparent. The drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The top view of the heating carrier provided by an exemplary embodiment of the present application is shown.

[0018] Figure 2 The side view of the heating carrier provided by an exemplary embodiment of the present application is shown.

[0019] Figure 3 The structural schematic diagram of the heating carrier provided by an exemplary embodiment of the present application is shown.

[0020] Figure 4 The structural schematic diagram of the heating carrier provided by another exemplary embodiment of the present application is shown.

[0021] Figure 5 The top view of the heating carrier provided by another exemplary embodiment of the present application is shown.

[0022] Figure 6 The structural schematic diagram of the processing equipment provided by an exemplary embodiment of the present application is shown.

[0023] Reference Numerals:

[0024] 100, Heating carrier; 101, Boat piece; 102, Connecting piece; 103, Heating component; 1031, Heating wire; 104, Heated boat piece; 105, Limiting piece; 106, Temperature measuring device; 107, Fixed plate; 108, Radio frequency electrode assembly; 1081, First radio frequency electrode assembly; 10811, First current delivery structure; 10812, First electrode plate; 1082, Second radio frequency electrode assembly; 10821, Second current delivery structure; 10822, Second electrode plate; 109, First cushion block; 110, Second cushion block; 111, Heating vacuum electrode flange; 200, Processing equipment; 210, Reaction furnace. Detailed implementation manners

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0026] Application Overview

[0027] Semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductor and photovoltaic materials usually need to be chemically processed before they can be applied to products. Chemical Vapor Deposition (CVD) technology is one of the processing methods. CVD technology has currently been widely used in the processing of semiconductor or photovoltaic materials. Common processing equipment includes Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment, Low Pressure Chemical Vapor Deposition (LPCVD) equipment, Atmospheric Pressure Chemical Vapor Deposition (APCVD) equipment, etc. In addition to CVD, there are also diffusion processes, such as phosphorus diffusion, boron diffusion, etc., which can all process raw materials by means of gas diffusion.

[0028] At present, there are already many related devices in the industry, and corresponding devices can be selected for processing according to specific processing requirements. When processing semiconductor or photovoltaic materials, sheet materials are usually fed into a furnace and reacted under certain temperature and pressure conditions. In the industry, this kind of furnace is usually called a thermal field, a heating furnace or a reaction furnace, and some devices are usually used to load or move the materials to be processed, being processed or processed. In the industry, this kind of loading or moving device is usually called a carrier, a boat, a graphite boat, a small boat or a flower basket.

[0029] In a traditional reaction furnace, heat is generated by heating wires outside the vacuum chamber, and the heat is transmitted through the vacuum chamber to the carrier in the vacuum chamber to heat the sheet material. Since the heating wires are far from the sheet material and the heat needs to pass through the vacuum chamber, the heating speed is slow and the thermal hysteresis is large; moreover, after long-term use, the quartz vacuum chamber will be coated with a film, and the light transmittance will be reduced, thus reducing the heating efficiency and heating speed; in addition, the quartz vacuum chamber is prone to tube explosion and fragmentation at high temperatures, and the residues are difficult to clean on the heating wires, which will cause the scrapping of the reaction furnace. Therefore, how to improve the heating efficiency of the reaction furnace and avoid the explosion of the vacuum chamber has become an urgent problem to be solved.

[0030] In view of this, the present application proposes a heating carrier with the following technical effects.

[0031] First, since the heating components are arranged on one side or both sides of at least two boat plates, the distance between the heating components and the sheet material is relatively close, which improves the heating efficiency and heating uniformity; second, the heat generated by the heating components will be transmitted to the boat plates first and then to the sheet material, without passing through the vacuum chamber. Therefore, even if the vacuum chamber is coated after long-term use, it will not affect the heating speed; third, since there is no need to set up a thermal field outside the vacuum chamber for heating, the equipment cost is saved, and the vacuum chamber can use a metal or silicon carbide vacuum chamber instead of a transparent quartz material with a faster heat transfer speed. Since the metal material has stronger toughness and the silicon carbide material has higher strength, using a metal or silicon carbide vacuum chamber can improve the service life of the vacuum chamber.

[0032] Exemplary Device

[0033] Figure 1 The figure shows a top view of the heating carrier provided by an exemplary embodiment of the present application. Figure 2 The figure shows a side view of the heating carrier provided by an exemplary embodiment of the present application.

[0034] As Figure 1 and Figure 2As shown in the figure, an embodiment of the present application provides a heating carrier 100, which includes at least two boat plates 101, a connecting member 102, and at least one heating component 103. At least two boat plates 101 are arranged at intervals in a first direction, and the boat plates 101 are configured to carry sheet materials; the connecting member 102 is configured to connect at least two boat plates 101; the heating component 103 is disposed on a side of the first boat plate 101 away from the last boat plate 101, and / or the heating component 103 is disposed on a side of the last boat plate 101 away from the first boat plate 101, so that the first boat plate 101 and / or the last boat plate 101 form a heating boat plate 104, and the heating component 103 is configured to transfer heat to the sheet material through the heating boat plate 104.

[0035] Specifically, the first direction can be, for example, the vertical direction or the horizontal direction. The boat plate 101 is, for example, made of graphite, and the heating carrier 100 can be a vertical graphite boat or a horizontal graphite boat. The sheet material can be, for example, a silicon wafer or a glass substrate. The heating component 120 can include, for example, a heating wire 1031 (also known as an electric heating wire or a resistance wire), and the heating wire 1031 can be, for example, an armored heating wire or a resistance wire with an insulating coating. The heating component 103 can be fixed to the surface of the first boat plate 101 away from the last boat plate 101, and / or the heating component 103 can be fixed to the surface of the last boat plate 101 away from the first boat plate 101. Since process gas needs to enter between adjacent boat plates 101 during the processing of the sheet material, by disposing the heating component 103 outside at least two boat plates 101 instead of between adjacent boat plates 101, the heating component 103 will not block the process gas from entering between adjacent boat plates 101.

[0036] With this structure, the heat generated by the heating component 103 will first be transferred to the heating boat plate 104, and then transferred to other boat plates 101 and the sheet material through the heating boat plate 104. First, since the heating component 103 is disposed on one side or both sides of at least two boat plates 101, the distance between the heating component 103 and the sheet material is relatively close, improving the heating efficiency and heating uniformity; second, the heat generated by the heating component 103 will first be transferred to the boat plate 101 and then to the sheet material, without passing through the vacuum chamber. Therefore, even if the vacuum chamber is coated after long-term use, it will not affect the heating speed; third, since there is no need to set up a heat field outside the vacuum chamber for heating, the equipment cost is saved, and the vacuum chamber can use a metal or silicon carbide material instead of a transparent quartz material with a faster heat transfer speed. Since the metal material has stronger toughness and the silicon carbide material has higher strength, using a metal or silicon carbide material for the vacuum chamber can extend the service life of the vacuum chamber.

[0037] In some embodiments, the heating assembly 103 includes a heating wire 1031. The heating wire 1031 extends along the extension direction of the heating boat 104. The heating boat 104 has a first end and a second end, and the heating wire 1031 extends from the first end of the heating boat 104 to the second end of the heating boat 104. With this structure, the heating wire 1031 can uniformly heat the first end, the second end, and the area between the first end and the second end of the heating boat 104, improving the thermal uniformity and heating efficiency.

[0038] In some embodiments, the heating carrier 100 further includes a plurality of limiting members 105. The plurality of limiting members 105 are respectively disposed at the first end and the second end of the heating boat 104 and are configured to fix the heating wire 1031 to the heating boat 104. Specifically, the limiting member 105 may include a bolt or a stud, and the heating boat 104 may have a first threaded hole. The limiting member 105 is screwed with the threaded portion of the first threaded hole. In practical applications, the heating wire 1031 can be first attached to the surface of the heating boat 104, and then the heating wire is fixed to the surface of the heating boat 104 by the limiting member 105. By providing the limiting member 105, the heating wire 1031 can be firmly fixed to the heating boat 104, and the limiting member 105 can also limit the heating wire 1031 in the extension direction of the heating boat 104, that is, maintain the length of the heating wire 1031 in the extension direction of the heating boat 104, so that the heating wire 1031 can uniformly heat the heating boat 104.

[0039] In some embodiments, the heating boat 104 has a first symmetry plane and a second symmetry plane that are cross - arranged. The plurality of limiting members 105 are symmetrically arranged with respect to the first symmetry plane, and / or the plurality of limiting members 105 are symmetrically arranged with respect to the second symmetry plane. Among them, the first symmetry plane may be located in the extension direction of the heating boat 104 and perpendicular to the heating boat 104, and the second symmetry plane may be a plane perpendicular to the first symmetry plane. Exemplarily, if the surface of the heating boat 104 is rectangular, a limiting member 105 can be installed at each of the four corners of the surface of the heating boat 104. With this structure, the heating wire 1031 can be firmly fixed to the surface of the heating boat 104.

[0040] In some embodiments, as Figure 1 and Figure 2 shown, the heating wire 1031 includes a plurality of straight segments and a plurality of bent segments. Among them, the plurality of straight segments are arranged at intervals in a second direction, and the second direction is perpendicular to the extension direction of the boat 101 and the first direction. Two adjacent straight segments are connected by a bent segment. With this structure, the heating wire 1031 can be densely laid on the surface of the heating boat 104, improving the thermal uniformity and heating efficiency.

[0041] In some embodiments, the surface of the heating boat 104 where the heating wire 1031 is disposed includes a central region and an edge region surrounding the central region; wherein, the heating wire 1031 is disposed in the central region and the edge region, that is, the heating wire 1031 can cover the entire surface of the heating boat 104, thereby improving thermal uniformity and heating efficiency.

[0042] In some embodiments, such as Figure 1 and Figure 2 shown, the heating carrier 100 further includes a temperature measuring device 106, and the detection end of the temperature measuring device 106 is disposed in the central region. Among them, the temperature measuring device 106 is exemplarily a thermocouple. By disposing the detection end of the temperature measuring device 106 in the central region, the temperature measuring device 106 can accurately detect the heating temperature.

[0043] In some embodiments, the heating carrier 100 further includes a radio frequency electrode assembly 108 and a shielding member. The radio frequency electrode assembly 108 is electrically connected to the boat 101 and is configured to supply power to the boat 101; the shielding member (not shown in the figure) is disposed between the heating assembly 103 and the heating boat 104 and is configured to isolate the heating assembly 103 from the radio frequency electrode assembly 108. Since the electromagnetic field generated by the radio frequency electrode assembly 108 may interfere with the heating assembly 103, thereby affecting the process effect, by providing the shielding member, the electromagnetic field of the radio frequency electrode assembly 108 can be isolated from interfering with the heating assembly 103. Among them, the shielding member is exemplarily a metal plate, and the heating assembly 103 is fixed to the surface of the shielding member away from the heating boat 104.

[0044] In some embodiments, when a shielding member is disposed between the heating assembly 103 and the heating boat 104, the limiting member 105 is disposed on the shielding member and is used to fix the heating assembly 103 to the surface of the shielding member away from the heating boat 104. Exemplarily, the shielding member has a second threaded hole, and the limiting member 105 is screwed to the threaded portion of the second threaded hole.

[0045] In some embodiments, such as Figure 1 and Figure 2 shown, the boat 101 has a first through hole extending in the first direction, and the connecting member 102 includes: a ceramic rod, a ceramic sleeve, a first nut, a second nut, a first gasket and a second gasket. Specifically, the ceramic rod passes through the first through holes of at least two boats 101, the ceramic sleeve is sleeved on the ceramic rod and is located between adjacent boats 101, the first nut is screwed to the first end of the ceramic rod and is located on the side of the first boat 101 away from the last boat 101, the second nut is screwed to the second end of the ceramic rod and is located on the side of the last boat 101 away from the first boat 101; the first gasket is sleeved on the ceramic rod and is disposed between the first nut and the first boat 101; the second gasket is sleeved on the ceramic rod and is disposed between the second nut and the last boat 101.

[0046] The ceramic rod can connect at least two boats 101, the ceramic sleeve can maintain the interval between the boats 101, and the first nut, the first washer, the second nut, and the second washer can lock the boat 101 and the ceramic sleeve. Therefore, through this structure, at least two boats 101 can be firmly connected.

[0047] Figure 3 Shown is a schematic diagram of the structure of a heating carrier provided by an exemplary embodiment of the present application, Figure 4 Shown is a schematic structural diagram of a heating carrier provided by another exemplary embodiment of the present application.

[0048] In some embodiments, such as Figure 3 and Figure 4 As shown, there are at least four boats 101; wherein the heating carrier 100 further includes at least one first pad 109 and at least one second pad 110. wherein at least one first pad 109 is connected between adjacent even-numbered boats 101, and at least one second pad 110 is connected between adjacent odd-numbered boats 101. there are two RF electrode assemblies 108, for ease of description, the two RF electrode assemblies 108 are respectively referred to as the first RF electrode assembly 1081 and the second RF electrode assembly 1082, the first RF electrode assembly 1081 is electrically connected to any first pad 109, and the second RF electrode assembly 1082 is electrically connected to any second pad 110. wherein the first pad 109 and the second pad 110 can be exemplarily made of graphite.

[0049] Specifically, the first end of the first RF electrode assembly 1081 is electrically connected to a first power supply device (such as an RF power supply), and the second end of the first RF electrode assembly 1081 is electrically connected to any first pad 109, so that current can be provided to any first pad 109. Since both the first pad 109 and the boat sheet 101 are conductive, the current entering the first pad 109 can be transmitted to other first pads 109 and an even number of boat sheets 101; the first end of the second RF electrode assembly 1082 is electrically connected to a second power supply device (such as an RF power supply), and the second end of the second RF electrode assembly 1082 is electrically connected to any second The pads 110 are electrically connected, so that current can be provided to any second pad 110. Since the second pad 110 and the boat 101 are both conductive, the current entering the second pad 110 can be transmitted to other second pads 110 and odd-numbered boats 101. Therefore, if the first power supply device and the second power supply device provide different potentials to the first RF electrode assembly 1081 and the second RF electrode assembly 1082, the odd-numbered boats 101 and the even-numbered boats 101 can have different potentials, so that there is a potential difference between adjacent boats 101, so as to ionize the process gas passing between adjacent boats 101.

[0050] In some embodiments, as Figure 4 shown, the first spacer 109 has a first electrode port, the second spacer 110 has a second electrode port, the first radio frequency electrode assembly 1081 includes a rod-shaped first current delivery structure 10811, and the second radio frequency electrode assembly 1082 includes a rod-shaped second current delivery structure 10821. Among them, the first end of the first current delivery structure 10811 is electrically connected to the first power supply device, and the second end of the first current delivery structure 10811 is inserted into the first electrode port; the first end of the second current delivery structure 10821 is electrically connected to the second power supply device, and the second end of the second current delivery structure 10821 is inserted into the second electrode port.

[0051] In some embodiments, as Figure 3 shown, the first radio frequency electrode assembly 1081 includes a first current delivery structure 10811 and a first electrode plate 10812, and the second radio frequency electrode assembly 1082 includes a second current delivery structure 10821 and a second electrode plate 10822. Among them, the first electrode plate 10812 is electrically connected to any one of the first spacers 109, the first end of the first current delivery structure 10811 is electrically connected to the first power supply device, and the second end of the first current delivery structure 10811 is electrically connected to the first electrode plate 10812; the second electrode plate 10822 is electrically connected to any one of the second spacers 110, the first end of the second current delivery structure 10821 is electrically connected to the second power supply device, and the second end of the second current delivery structure 10821 is electrically connected to the second electrode plate 10822.

[0052] Figure 5 The figure shows a top view of a heating carrier provided by another exemplary embodiment of the present application.

[0053] In some embodiments, as Figures 3 - 5 shown, the heating carrier 100 further includes at least one fixing plate 107, and at least one fixing plate 107 is disposed on a side of each heating component 103 facing away from the heating boat 104. The connecting member 102 is further configured to connect the fixing plate 107 and the heating boat 104. By providing the fixing plate 107, the exposed heating component 103 can be shielded, thereby reducing the heat dissipation of the heating component 103 and improving the heating efficiency. Among them, the material of the fixing plate 107 can be exemplarily quartz, ceramic, silicon carbide, metal, etc.

[0054] Specifically, if the heating carrier 100 has two fixing plates 107, the two fixing plates 107 include a first fixing plate close to the first boat 101 and a second fixing plate close to the last boat 101. Each fixing plate 107 has a second through hole extending in the first direction. The ceramic rod passes through the first through holes of at least two boats 101 and the second through holes of each fixing plate 107. The ceramic sleeve is disposed between adjacent boats 101, and between the fixing plate 107 and the heating boat 104. The first nut is screwed to the first end of the ceramic rod and is located on the side of the first fixing plate away from the last boat 101. The second nut is screwed to the second end of the ceramic rod and is located on the side of the second fixing plate away from the first boat 101. The first gasket is sleeved on the ceramic rod and is disposed between the first nut and the first fixing plate; the second gasket is sleeved on the ceramic rod and is disposed between the second nut and the second fixing plate.

[0055] In some embodiments, as Figures 1 - 5 shown, the heating carrier 100 further includes at least one heating vacuum electrode flange 111. The heating vacuum electrode flange 111 has at least two third through holes extending in the extending direction of the boat 101 and at least one fourth through hole extending in the extending direction of the boat 101. Two ends of the heating wire 1031 respectively pass through the at least two third through holes and are connected to a third power supply device. The connection end of the temperature measuring device 106 passes through the fourth through hole and is connected to a fourth power supply device (or measuring instrument). Specifically, the heating wire 1031 in each heating assembly 103 and the temperature measuring device 106 for detecting the temperature of the heating assembly 103 may pass through one heating vacuum electrode flange 111. Or, in the case where the heating carrier 100 has two groups of heating assemblies 103, the heating wires 1031 in the two groups of heating assemblies 103 and the temperature measuring devices 106 for respectively detecting the temperatures of the two groups of heating assemblies 103 may pass through one heating vacuum electrode flange 111 and be connected to an external power supply device.

[0056] Figure 6 The figure shows a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0057] Based on the same concept, as Figure 6 shown, an embodiment of the present application further provides a processing device 200. The processing device 200 includes: a reaction furnace 210 having a reaction chamber and configured to process sheet materials; the heating carrier 100 in any of the above embodiments, which can be placed in the reaction chamber and is configured to carry sheet materials and heat the sheet materials.

[0058] In some embodiments, the reactor 210 has a vacuum chamber, and a reaction chamber is provided within the vacuum chamber. The material of the vacuum chamber can exemplarily be transparent quartz, silicon carbide, or metal, preferably metal or silicon carbide. Metal has strong toughness, and silicon carbide has good heat resistance and high strength. The vacuum chambers made of metal and silicon carbide materials are less likely to break at high temperatures.

[0059] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present application. Additionally, the above-disclosed specific details are only for illustrative and facilitating understanding purposes and are not limitations. The above details do not limit the present application to necessarily adopt the above specific details for implementation.

[0060] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended terms, meaning "including but not limited to", and can be used interchangeably with each other. The word "or" and "and" used herein refer to the word "and / or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with it.

[0061] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0062] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects are very obvious to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0063] The above description has been given for purposes of illustration and description. In addition, this description does not intend to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.

Claims

1. A heating carrier, characterized in that: include: At least two boats are arranged in a spaced relationship along a first direction, and the boats are configured to carry sheet materials; A connecting member configured to connect at least two of the boat pieces; At least one heating component is disposed on a side of the first boat sheet away from the last boat sheet, and / or the heating component is disposed on a side of the last boat sheet away from the first boat sheet, so that the first boat sheet and / or the last boat sheet form a heating boat sheet, and the heating component is configured to transfer heat to the sheet material through the heating boat sheet.

2. The heating carrier according to claim 1, characterized in that: The heating assembly includes a heating wire; Wherein, along the extension direction of the heating boat plate, the heating boat plate has a first end and a second end, and the heating wire extends from the first end of the heating boat plate to the second end of the heating boat plate.

3. The heating carrier according to claim 2, characterized in that: Also includes: A plurality of stoppers are respectively disposed at the first end and the second end of the heating boat, and are configured to fix the heating wire to the heating boat.

4. The heating carrier according to claim 3, characterized in that: The heating boat has a first symmetry plane and a second symmetry plane that are cross-arranged, and the plurality of limit members are symmetrically arranged relative to the first symmetry plane, and / or the plurality of limit members are symmetrically arranged relative to the second symmetry plane.

5. The heating carrier according to claim 2, characterized in that: The heating wire comprises: A plurality of straight line segments are arranged at intervals along a second direction, wherein the second direction is perpendicular to the extension direction of the boat piece and the first direction; A plurality of curved segments, two adjacent straight segments are connected by one of the curved segments.

6. The heating carrier according to claim 2, characterized in that: The surface of the heating boat where the heating wire is arranged includes a central area and an edge area surrounding the central area; Wherein, the heating wire is arranged in the central area and the edge area.

7. The heating carrier according to claim 6, characterized in that: Also includes: A temperature measuring device, wherein the detection end of the temperature measuring device is arranged in the central area.

8. The heating carrier according to any one of claims 1 to 7, characterized in that: Also includes: A radio frequency electrode assembly, electrically connected to the boat, and configured to supply power to the boat; The shielding member is disposed between the heating assembly and the heating boat, and is configured to isolate the heating assembly from the radio frequency electrode assembly.

9. The heating carrier according to any one of claims 1 to 7, characterized in that: Also includes: At least one fixing plate is disposed on a side of each heating assembly away from the heating boat, and the connecting member is further configured to connect the fixing plate and the heating boat.

10. A processing equipment, characterized in that: include: A reaction furnace having a reaction chamber configured to process a sheet material; The heating carrier described in any one of claims 1 to 9 can be placed in the reaction chamber and is configured to carry the sheet material and heat the sheet material.

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