Reloading device

Abstract

The utility model discloses a material changing device, which relates to the technical field of semiconductor production and comprises a material storage table and a working table, the material storage table comprises a material storage bin and a support, the material storage table is provided with an inner cavity, a plurality of first supporting wheels are arranged in the inner cavity, a channel is arranged at the bottom of the material storage bin on the support, and a plurality of guide wheels are arranged on the inner side of the channel. Supporting pieces are arranged on the two sides of an inlet of the inner cavity. The workbench comprises a bearing frame slidably inserted into the storage bin and a bottom frame slidably inserted into the channel, the bearing frame is provided with a fixed end fixedly installed on the bottom frame and a suspension end opposite to the fixed end, the first supporting wheels can support the bearing frame, and the guiding wheels abut against the outer side of the bottom frame to achieve moving guiding of the workbench. The bearing frame can be pulled out of the inner cavity, and meanwhile, the supporting piece can support the suspension end, so that the bearing frame can move stably, the suspension end is prevented from deforming due to loading, the bearing frame can be inserted into the inner cavity accurately after material changing is completed, the operation convenience is improved, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a material changing device. Background Art

[0002] In the coating process of semiconductor devices, magnetron sputtering coating technology is commonly used. Magnetron sputtering coating equipment includes anti-film plates and target materials, both of which need to be replaced according to a certain maintenance cycle. At present, when replacing the target material and anti-film plate, the workshop needs to be equipped with a crane, which can lift the cover plate and target material together, and then use a special reversal fixture to complete the material replacement. For the clean room of vacuum coating, some equipment manufacturers do not have the conditions to install a dust-free crane, making it difficult to achieve replacement. In addition, the anti-film plate in the current industry is installed on the cavity, and the space inside the cavity is small, which is inconvenient to disassemble, and has an adverse effect on production efficiency. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a material changing device, which can improve the convenience of material changing operation and improve production efficiency.

[0004] A material changing device according to an embodiment of the utility model includes:

[0005] The material storage platform comprises a material storage bin and a bracket, wherein the material storage bin has an inner cavity, a plurality of first support wheels are arranged in the inner cavity, a channel is arranged at the bottom of the material storage bin on the bracket, a plurality of guide wheels are arranged on the inner side of the channel, and support members are arranged on both sides of the entrance of the inner cavity;

[0006] The workbench comprises a carrier frame slidably plugged into the storage bin and a bottom frame slidably plugged into the channel, the carrier frame has a fixed end fixedly mounted on the bottom frame and a suspension end opposite to the fixed end, the first support wheel can support the carrier frame, and the guide wheel abuts against the outer side of the bottom frame to realize the movement and guidance of the workbench;

[0007] When changing materials, the carrier can be withdrawn from the inner cavity, and the support member can support the suspended end.

[0008] A material changing device according to an embodiment of the utility model has at least the following beneficial effects: this embodiment is provided with a material storage table and a workbench, the material storage table includes a material storage bin and a bracket, the material storage table has an inner cavity, a plurality of first support wheels are provided in the inner cavity, a channel is provided on the bracket at the bottom of the material storage bin, a plurality of guide wheels are provided on the inner side of the channel, and support members are provided on both sides of the entrance of the inner cavity; the workbench includes a load-bearing frame slidably inserted in the material storage bin and a base frame slidably inserted in the channel, the load-bearing frame has a fixed end fixedly mounted on the base frame and a suspension end opposite to the fixed end, the first support wheel can support the load-bearing frame, and the guide wheel abuts against the outer side of the base frame to realize the movement and guidance of the workbench, when changing materials, the load-bearing frame can be pulled out of the inner cavity, and at the same time the support member can support the suspension end, so that the load-bearing frame can move stably, avoiding the displacement of the workpiece due to deformation of the suspension end after the load, which is conducive to the accurate insertion of the load-bearing frame into the inner cavity after the material change is completed, and convenient loading or material changing operations can be achieved without driving, thereby improving the operational convenience and helping to improve production efficiency.

[0009] According to some embodiments of the utility model, a second supporting wheel is provided on the supporting member, and the supporting member can be raised and lowered on the material storage table.

[0010] According to some embodiments of the utility model, first guide rails are provided on both sides of the carrier, and the first support wheel is supported on the first guide rails when the carrier is inserted into the inner cavity.

[0011] According to some embodiments of the present invention, second guide rails are provided on both sides of the base frame, and when the base frame is inserted into the channel, the guide wheels abut against the outer side of the second guide rails away from the base frame.

[0012] According to some embodiments of the present invention, the channel includes a guide section extending toward the workbench, and a plurality of guide wheels are provided on both sides of the guide section.

[0013] According to some embodiments of the present invention, both sides of the bracket are provided with extension parts extending toward the workbench, the two extension parts constitute a guide section, and the guide wheels are installed on the extension parts.

[0014] According to some embodiments of the present invention, when the chassis is in the guide section, the support member is supported at the suspension end.

[0015] According to some embodiments of the utility model, a lifting cylinder is provided on the storage bin, and the lifting cylinder is used to push the support member to support the carrier frame.

[0016] According to some embodiments of the utility model, a sensor is provided on the base frame, and a sensing sheet is provided in the channel. When the base frame moves so that the sensor detects the sensing sheet, the lifting cylinder drives the support member to perform lifting activities.

[0017] According to some embodiments of the present invention, second supporting wheels are provided at both ends of the supporting member along the moving direction of the workbench.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0020] Figure 1 This is an axonometric view of a material changing device in an embodiment of the utility model;

[0021] Figure 2 for Figure 1 A magnified view of center A;

[0022] Figure 3 This is an axonometric view of the first working table inserted into the material storage table in the embodiment of the utility model;

[0023] Figure 4 for Figure 5 Magnified view of middle B;

[0024] Figure 5 This is an axonometric view of a workbench in an embodiment of the utility model;

[0025] Figure 6 This is an axonometric view of the material storage platform in the embodiment of the utility model;

[0026] Figure 7 It is an axonometric view of the lifting cylinder and the support member in the embodiment of the utility model.

[0027] Reference numerals:

[0028] Material storage platform 100; material storage bin 101; bracket 102; inner cavity 103; first support wheel 104; channel 105; guide section 106; extension 107; support member 108; second support wheel 109; lifting cylinder 110; induction sheet 111; guide wheel 112; workpiece 113; mounting block 114; caster 115; cover plate 116;

[0029] Workbench 120 ; support frame 121 ; bottom frame 122 ; fixed end 123 ; suspension end 124 ; first guide rail 125 ; second guide rail 126 ; sensor 127 ; mounting plate 128 . DETAILED DESCRIPTION

[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0031] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0033] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0034] Reference Figure 1A material changing device in an embodiment of the first aspect of the utility model includes a material storage table 100 and a workbench 120. The material storage table 100 includes a material storage bin 101 and a bracket 102. The material storage bin 101 has an inner cavity 103. It can be understood that the material storage bin 101 can accommodate workpieces 113. A plurality of first support wheels 104 are provided on the side wall of the inner cavity 103. The bracket 102 has a channel 105 at the bottom of the material storage bin 101. A plurality of guide wheels 112 are provided on the inner side of the channel 105. Support members 108 are provided on both sides of the entrance of the inner cavity 103. The workbench 120 is slidably inserted in the storage bin 100, and the workbench 120 includes a carrier frame 121 slidably inserted in the storage bin 101 and a base frame 122 slidably inserted in the channel 105. The carrier frame 121 has a fixed end 123 fixedly mounted on the base frame 122 and a suspension end 124 opposite to the fixed end 123. It can be understood that the suspension end 124 is suspended. The workpiece 113 is in the shape of a long strip. When replacing the workpiece 113, the workpiece 113 enters and exits the storage bin 101 along its length direction, which can facilitate manual loading and unloading. At the same time, the suspended end 124 is suspended to improve the compactness of the structure of the workbench 120 and save space. It can be understood that multiple workpieces 113 can be placed on the carrier 121 at the same time. The workpiece 113 has a certain weight. Therefore, when the carrier 121 is in a free state, the suspension end 124 will sag due to the load. The height of the suspension end 124 is lower than the height of the fixed end 123. Therefore, the position of the workpiece 113 in the storage bin 101 is not accurate enough, and errors will occur in the production process. Therefore, the first support wheel 104 can support the carrier 121 so that the carrier 121 can move in the horizontal direction to keep the position of the workpiece 113 stable.

[0035] The guide wheels 112 abut against the outer side of the base frame 122 to realize the movement and guidance of the workbench 120, that is, the guide wheels 112 in the channel 105 are used to realize the positioning between the workbench 120 and the storage table 100 along the width direction. When changing materials, the carrier 121 is pulled out of the inner cavity 103, and the base frame 122 moves in a straight line under the guidance of the guide wheels 112, so that the carrier 121 drives the workpiece 113 to be pulled out in a straight line. At this time, the first support wheel 104 is supported on the carrier 121, which can keep the workpiece 113 moving horizontally. As the carrier 121 continues to move outward, the support member 108 can support the suspension end 124, which is conducive to the stable movement of the carrier 121 and maintaining the height of the workpiece 113. After replacing the workpiece 113, the carrier 121 can be directly inserted into the storage bin 101 to complete the loading. In this process, convenient loading or material changing operations can be achieved without driving, which improves the operational convenience and helps to improve production efficiency.

[0036] Reference Figure 5, first guide rails 125 are provided on both sides of the carrier frame 121, and when the carrier frame 121 is inserted into the inner cavity 103, the first support wheel 104 is supported on the first guide rails 125. It can be understood that the first support wheel 104 is located on the two side walls of the inner cavity 103, and the first guide rails 125 are located on both sides of the carrier frame 121 and protrude outward. When the carrier frame 121 is inserted into the storage bin 101, the first support wheel 104 can be supported on the bottom wall of the first guide rails 125, thereby realizing the horizontal movement of the carrier frame 121.

[0037] Reference Figure 3 , Figure 4 , Figure 6 and Figure 7 The support member 108 is provided with a second support wheel 109, which can rotate on the support member 108, so as to support the carrier 121 while reducing the movement resistance. Furthermore, along the moving direction of the workbench 120, the second support wheels 109 are provided at both ends of the support member 108, which helps to increase the support stability.

[0038] Reference Figure 2 and Figure 5 , second guide rails 126 are provided on both sides of the base frame 122. When the base frame 122 is inserted into the channel 105, the guide wheel 112 abuts against the outer side of the second guide rail 126 away from the base frame 122. It can be understood that the guide wheel 112 can rotate on the bracket 102. A plurality of guide wheels 112 are provided along the length direction of the channel 105. When the workbench 120 moves in the material storage table 100, the plurality of guide wheels 112 can keep the base frame 122 moving along the length direction of the channel 105 to ensure the stability of loading and unloading. Further, a plurality of mounting blocks 114 are provided on the bracket 102, the guide wheel 112 is mounted on the mounting blocks 114, and the mounting blocks 114 can adjust the position on the bracket 102, which is conducive to the individual adjustment of the guide wheel 112.

[0039] Further, both sides of the bracket 102 are provided with extensions 107 extending toward the workbench 120, and the two extensions 107 constitute a guide section 106, which is a part of the channel 105 extending toward the workbench 120, and the guide section 106 protrudes from the end of the bracket 102, and a plurality of guide wheels 112 are provided on both sides of the guide section 106, and the guide wheels 112 are mounted on the extensions 107. It can be understood that when the carrier 121 is drawn out of the outside of the storage bin 101, the bottom frame 122 is located in the guide section 106, and the guide wheels 112 of the extension 107 abut against the outer side of the second guide rail 126, so that the position between the workbench 120 and the storage table 100 does not deviate when the material is unloaded, and it can be ensured that the workpiece 113 can accurately enter from the entrance of the storage bin 101 after the material change is completed, thereby facilitating the improvement of the material change efficiency. Furthermore, when the base frame 122 is in the guide section 106 , the support member 108 is supported on the suspension end 124 , which can prevent the workpiece 113 from being unable to enter the storage bin 101 due to the suspension end 124 sagging.

[0040] Reference Figure 2Furthermore, the support member 108 can be lifted and lowered on the material storage platform 100. Specifically, a lifting cylinder 110 is provided on the material storage bin 101. The lifting cylinder 110 is used to push the support member 108 to support the carrier 121. Correspondingly, a sensor 127 is provided on the base frame 122, and a sensing sheet 111 is provided in the passage 105. When the base frame 122 moves so that the sensor 127 detects the sensing sheet 111, the lifting cylinder 110 drives the support member 108 to be lifted and lowered. Specifically, the sensor 127 is installed on the second guide rail 126. The sensor 127 can be a photoelectric sensor 127 or an inductive sensor 127. The sensing sheet 111 is installed on the bracket 102 and is located on one side of the passage 105. It can be understood that when material replacement is required, the carrier 121 is pulled out from the storage bin 101 until the carrier 121 is completely separated from the storage bin 101. At this time, the first support wheel 104 in the storage bin 101 is separated from the first guide rail 125, and the suspension end 124 will lose support and sag. Therefore, when the base frame 122 moves to a certain position away from the storage bin 101, the sensor 127 can detect the sensor sheet 111, so that the lifting cylinder 110 drives the support member 108 to move upward, so that the second support wheel 109 on the support member 108 presses against the bottom wall of the second guide rail 126 to support the carrier 121. When the workpiece 113 is completely separated from the storage bin 101, the height of the suspension end 124 can be maintained, which is convenient for loading operations after material replacement. After the material change is completed, the carrier 121 moves into the material storage bin 101. When the base frame 122 moves to a certain position in the direction of entering the material storage bin 101, the sensor 127 can detect the induction sheet 111, so that the lifting cylinder 110 drives the support member 108 to move downward, so that the second support wheel 109 is out of contact with the second guide rail 126, thereby ensuring the position stability of the carrier 121 during the material change process, thereby ensuring the stability of loading and unloading materials.

[0041] Reference Figure 3 and Figure 5 A mounting plate 128 for mounting the workpiece 113 is provided on the carrier 121, and a plurality of workpieces 113 are mounted on the mounting plate 128 at the same time, and a cover plate 116 is provided on the top of the storage bin 101. When the equipment is working, the semiconductor material is coated in a vacuum state, and the carrier 121 is plugged into the storage bin 101, and the mounting plate 128 is sealed with the end of the storage bin 101 to achieve a sealed state of the inner cavity 103.

[0042] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A material changing device, characterized in that: include: A material storage platform, comprising a material storage bin and a bracket, wherein the material storage bin has an inner cavity, a plurality of first support wheels are arranged in the inner cavity, a channel is arranged on the bracket at the bottom of the material storage bin, a plurality of guide wheels are arranged on the inner side of the channel, and support members are arranged on both sides of the entrance of the inner cavity; A workbench, comprising a carrier frame slidably plugged into the storage bin and a base frame slidably plugged into the channel, the carrier frame having a fixed end fixedly mounted on the base frame and a suspended end opposite to the fixed end, the first supporting wheel being able to support the carrier frame, and the guide wheel abutting against the outer side of the base frame to realize the movement and guidance of the workbench; During material replacement, the carrier can be withdrawn from the inner cavity, and the support member can support the suspended end.

2. A material changing device according to claim 1, characterized in that: The support member is provided with a second support wheel, and the support member can be raised and lowered on the material storage platform.

3. A material changing device according to claim 1, characterized in that: First guide rails are provided on both sides of the carrier, and the first supporting wheel is supported on the first guide rails when the carrier is inserted into the inner cavity.

4. A material changing device according to claim 1, characterized in that: Second guide rails are arranged on both sides of the base frame. When the base frame is inserted into the channel, the guide wheels abut against the outer side of the second guide rails away from the base frame.

5. A material changing device according to claim 1, characterized in that: The channel comprises a guide section extending toward the workbench, and a plurality of guide wheels are arranged on both sides of the guide section.

6. A material changing device according to claim 5, characterized in that: Both sides of the bracket are provided with extension parts extending toward the workbench, the two extension parts constitute the guide section, and the guide wheel is installed on the extension parts.

7. A material changing device according to claim 5, characterized in that: When the base frame is in the guide section, the support member is supported on the suspension end.

8. A material changing device according to claim 1, characterized in that: The storage bin is provided with a lifting cylinder, and the lifting cylinder is used to push the supporting member to support the supporting frame.

9. A material changing device according to claim 8, characterized in that: The base frame is provided with a sensor, and the passage is provided with a sensing sheet. When the base frame moves so that the sensor detects the sensing sheet, the lifting cylinder drives the support member to perform lifting activities.

10. A material changing device according to claim 2, characterized in that: The second supporting wheels are provided at both ends of the supporting member along the moving direction of the workbench.

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