Anode bar matched with rotating cathode

Abstract

The utility model discloses an anode bar matched with a rotating cathode, which comprises a cavity, a metal block and the rotating cathode, the metal block is arranged on the outer side of the rotating cathode, the metal block is connected with the cavity through a first insulating block, a metal tube is arranged in the cavity in a penetrating manner, the metal tube is connected with the cavity through a second insulating block, and the rotating cathode is arranged in the cavity. The metal pipe is communicated with the interior of the metal block and externally connected with cooling water, and the cooling water flows through the metal pipe and enters the interior of the metal block. According to the anode bar, a traditional hollow bar body structure is replaced by a novel anode structure formed by combining the metal pipe and the metal block internally integrated with the cooling water channel, the metal block and the cavity are effectively isolated through the first insulating block, and electrical safety is ensured. The design not only increases the distribution area of the current, so that the current can flow through the whole anode surface more uniformly, but also realizes effective cooling of the anode structure through the internal cooling water channel, and further reduces the influence of heat generated by electron bombardment on the temperature of the substrate.

Description

Technical Field

[0001] The utility model relates to an anode rod, in particular to an anode rod matched with a rotary cathode. Background Art

[0002] In the field of material surface treatment technology, especially in the vacuum coating process, the rotary cathode system is widely used because it can uniformly deposit a thin film on a substrate. The traditional rotary cathode system is usually equipped with an anode rod composed of a hollow rod body, which structurally includes an insulating sleeve and an internal conductive copper assembly. The insulating sleeve is installed at the end of the hollow rod body to ensure electrical isolation, while the conductive copper assembly is usually composed of a conductive rod and a fixed seat. The conductive rod is firmly installed on the fixed seat to achieve current conduction. This design meets the basic requirements of the coating process to a certain extent, but there are still limitations in improving the coating efficiency, reducing the substrate temperature rise, and achieving a more uniform current distribution.

[0003] Specifically, in the design of the traditional anode rod, the current is mainly conducted through the conductive copper rod, and its distribution range is relatively limited, resulting in uneven current density distribution in the cathode coating area, which in turn affects the electron adsorption efficiency and uniformity. In addition, when a large number of electrons directly bombard the substrate, it will not only cause a significant increase in the substrate temperature, but also may cause substrate damage or a decrease in coating quality. These problems limit the application of the coating process in high-precision and high-requirement fields. Summary of the Utility Model

[0004] In order to solve the above technical problems, the utility model provides an anode rod matched with a rotary cathode. The anode rod replaces the traditional hollow rod body structure with a new anode structure composed of a metal tube and a metal block with an integrated cooling water channel inside. The metal block and the cavity are effectively isolated by a first insulating block to ensure electrical safety. This design not only increases the current distribution area, enabling the current to flow more uniformly through the entire anode surface, but also effectively cools the anode structure through the internal cooling water channel, further reducing the influence of the heat generated by electron bombardment on the substrate temperature.

[0005] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0006] An anode rod matched with a rotary cathode, comprising a cavity, a metal block, and a rotary cathode. The metal block is arranged outside the rotary cathode. The metal block and the cavity are connected through a first insulating block. A metal tube passes through the cavity, and the metal tube and the cavity are connected through a second insulating block. The metal tube is internally connected to the metal block. The metal tube is externally connected with cooling water, and the cooling water flows through the metal tube and enters the interior of the metal block.

[0007] In an embodiment of the present utility model, a shielding plate is provided inside the metal block, and the rotating cathode is located inside the shielding plate.

[0008] In an embodiment of the present utility model, a current lead-in wire is further provided on the cavity.

[0009] In an embodiment of the present utility model, a cooling water joint is connected to the end of the metal tube.

[0010] In an embodiment of the present utility model, the metal tube is located on one side of the metal block.

[0011] The beneficial effects of the present utility model are as follows:

[0012] An anode rod provided by the present utility model and matching with a rotating cathode changes a hollow rod body into a structure composed of a metal tube and a metal block with a cooling water channel internally connected. The metal block and the cavity are insulated by a first insulating block to form a new anode rod structure. By increasing the distribution area of the current within the cathode coating range, this anode rod enhances the electron adsorption ability, thereby effectively reducing the number of electrons hitting the substrate, and further effectively reducing the temperature rise of the substrate.

[0013] Therefore, by optimizing the design of the anode rod, the present utility model significantly improves the current distribution uniformity and electron adsorption efficiency during the cathode coating process. Specifically, the present utility model replaces the traditional hollow rod body structure with a new anode structure composed of a combination of a metal tube and a metal block with a cooling water channel integrated internally. The metal block and the cavity are effectively isolated by a first insulating block to ensure electrical safety. This design not only increases the distribution area of the current, enabling the current to flow more evenly through the entire anode surface, but also realizes effective cooling of the anode structure through the internal cooling water channel, further reducing the influence of the heat generated by electron bombardment on the substrate temperature.

[0014] In summary, the anode rod proposed by the present utility model effectively solves the deficiencies of the traditional anode rod in terms of current distribution, electron adsorption efficiency, and substrate temperature rise control through the optimization of the physical structure, providing strong support for improving the overall performance and product quality of the coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic structural diagram of an anode rod provided by the present utility model and matching with a rotating cathode.

[0016] Figure 2 It is Figure 1 the sectional view taken along the line A-A in

[0017] Figure 3 It is Figure 2 a schematic diagram of a partial structure of the anode rod in

[0018] In the figure: 1, cavity; 2, first insulating block; 3, metal block; 4, anti-sputtering plate; 5, rotary cathode; 6, metal tube; 7, second insulating block; 8, current lead-in wire; 9, cooling water joint. Specific embodiments

[0019] The present utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. Additionally, it should be noted that for the sake of description, only the parts related to the present utility model rather than all the structures are shown in the drawings.

[0020] In the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0021] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "beneath", and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0022] Please refer to Figures 1-3 As shown, an anode rod for supporting a rotary cathode includes a cavity 1, a metal block 3, and a rotary cathode 5. The metal block 3 is disposed outside the rotary cathode 5. The metal block 3 is connected to the cavity 1 through a first insulating block 2. A metal tube 6 penetrates through the cavity 1. The metal tube 6 is connected to the cavity 1 through a second insulating block 7. The interior of the metal tube 6 is in communication with the interior of the metal block 3. The metal tube 6 is externally connected to cooling water, and the cooling water flows through the metal tube 6 and enters the interior of the metal block 3.

[0023] In some embodiments, an anti-sputtering plate 4 is disposed inside the metal block 3, and the rotary cathode 5 is located inside the anti-sputtering plate 4.

[0024] In some embodiments, a current introduction wire 8 is further provided on the cavity 1.

[0025] In some embodiments, a cooling water joint 9 is connected to the end of the metal tube 6. A cooling water pipe is externally connected through the cooling water joint 9 to deliver cooling water into the metal tube 6.

[0026] In some embodiments, the metal tube 6 is located on one side of the metal block 3.

[0027] An anode rod provided by the present utility model and matched with a rotary cathode changes a hollow rod body into a structure composed of a metal tube and a metal block with a cooling water channel communicated inside. The metal block and the cavity are insulated by a first insulating block to form a new anode rod structure. By increasing the distribution area of the current within the cathode coating range, this anode rod enhances the electron adsorption ability, thereby effectively reducing the number of electrons hitting the substrate, and thus more effectively reducing the temperature rise of the substrate.

[0028] Therefore, by optimizing the design of the anode rod, the present utility model significantly improves the current distribution uniformity and electron adsorption efficiency during the cathode coating process. Specifically, the present utility model replaces the traditional hollow rod body structure with a new anode structure composed of a metal tube and a metal block integrated with a cooling water channel inside. The metal block and the cavity are effectively isolated by a first insulating block to ensure electrical safety. This design not only increases the distribution area of the current, enabling the current to flow more evenly through the entire anode surface, but also realizes effective cooling of the anode structure through the internal cooling water channel, further reducing the influence of the heat generated by electron bombardment on the substrate temperature.

[0029] In summary, the anode rod proposed by the present utility model effectively solves the deficiencies of the traditional anode rod in terms of current distribution, electron adsorption efficiency, and substrate temperature rise control through the optimization of the physical structure, providing strong support for improving the overall performance and product quality of the coating process.

[0030] The technical features of the above embodiments can be combined arbitrarily. For the sake of brief description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0031] The above embodiments only represent several implementation manners of the present utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model.

[0032] In this article, specific embodiments are used to elaborate on the principle and implementation manner of the present utility model. The description of the above embodiments is only used to help understand the method and its core idea of the present utility model. It should be noted that for those of ordinary skill in the art of this technology, without departing from the principle of the present utility model, several improvements and modifications can still be made to the present utility model, and these improvements and modifications also fall within the protection scope of the claims of the present utility model. Therefore, the protection scope of the patent of the present utility model shall be subject to the appended claims.

Claims

1. An anode rod matched with a rotating cathode, characterized in that: It includes a cavity, a metal block and a rotating cathode, the metal block is arranged on the outside of the rotating cathode, the metal block and the cavity are connected by a first insulating block, a metal tube is passed through the cavity, the metal tube and the cavity are connected by a second insulating block, the metal tube is communicated with the inside of the metal block, the metal tube is externally connected to cooling water, and the cooling water flows through the metal tube into the inside of the metal block.

2. The anode rod matched with the rotating cathode according to claim 1, characterized in that: An anti-seizure plate is arranged on the inner side of the metal block, and the rotating cathode is located inside the anti-seizure plate.

3. The anode rod matched with the rotating cathode according to claim 2, characterized in that: The cavity is also provided with a current introduction line.

4. The anode rod matched with the rotating cathode according to claim 1, characterized in that: The end of the metal pipe is connected with a cooling water joint.

5. The anode rod matched with the rotating cathode according to claim 4, characterized in that: The metal tube is located at one side of the metal block.

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