Single crystal furnace cover convenient for cleaning water cooling channel

Abstract

The utility model relates to the field of single crystal furnaces, in particular to a single crystal furnace cover convenient for cleaning a water cooling channel, which comprises a furnace cover main body, the bottom of the furnace cover main body is fixedly connected with a sealing strip, the top of the furnace cover main body is provided with the water cooling channel, and the water cooling channel is fixedly connected with a fixed seat. When the furnace neck is used, the pulling plate can be pulled to drive the spring to contract, the sliding rod slides in the rectangular opening and slides out of the rectangular groove, the first connecting furnace neck and the second connecting furnace neck are taken out of the sliding groove, and the first connecting furnace neck and the second connecting furnace neck are separated. The water cooling channel is convenient to clean while the inner walls of the first connecting furnace neck and the second connecting furnace neck are convenient to clean, substances obtained after materials are molten are prevented from being attached to the water cooling channel, water flow can generally flow into the single crystal furnace, and the influence on the water cooling effect of the single crystal furnace is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace cover that is convenient for cleaning a water cooling channel. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals by the Czochralski method.

[0003] The furnace cover of a single crystal furnace often has a water cooling channel for convenient water cooling. After the single crystal furnace is used for a period of time, the water cooling channel on the furnace cover of the single crystal furnace is often affected by the substances attached after the material is melted, which affects the water cooling effect of the single crystal furnace and is inconvenient to clean. Therefore, a single crystal furnace cover that is convenient for cleaning the water cooling channel is proposed. Content of the Utility Model

[0004] The purpose of the utility model is to solve the defect that the water cooling channel on the existing single crystal furnace cover is often affected by the substances attached after the material is melted, which affects the water cooling effect of the single crystal furnace and is inconvenient to clean, and to propose a single crystal furnace cover that is convenient for cleaning the water cooling channel.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A single crystal furnace cover that is convenient for cleaning a water cooling channel, including a furnace cover body, a sealing strip is fixedly connected to the bottom of the furnace cover body, a water cooling channel is opened at the top of the furnace cover body, and a fixing seat is fixedly connected at the water cooling channel.

[0007] Preferably, rectangular frames are fixedly connected to both sides of the fixing seat, springs are fixedly connected to both sides of the fixing seat, one end of each spring is fixedly connected to a pulling plate, and a sliding rod is fixedly connected to one side of the pulling plate.

[0008] Preferably, a sliding groove is opened in the fixing seat, a first connecting furnace neck and a second connecting furnace neck are slidably connected in the sliding groove, rectangular grooves are opened on one side of the first connecting furnace neck and the second connecting furnace neck, rectangular openings are opened on both sides of the fixing seat, the sliding rod is slidably connected to the rectangular opening, and the sliding rod is slidably connected to the rectangular groove.

[0009] Preferably, a fixing plate is fixedly connected to one side of the first connecting furnace neck, a fixing groove is opened on one side of the second connecting furnace neck, and the fixing plate is slidably connected to the fixing groove.

[0010] Preferably, a limiting seat is fixedly connected to the top of the rectangular frame, limiting plates are fixedly connected to one side of the first connecting furnace neck and the second connecting furnace neck, and the limiting plates are slidably connected to the limiting seat.

[0011] Preferably, a connecting flange is fixedly connected to the tops of the first connecting furnace neck and the second connecting furnace neck, and fixing screw holes are formed in the connecting flange.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. When the device is in use, by pulling the pull plate, the pull plate drives the spring to contract, the sliding rod slides in the rectangular opening and slides out from the rectangular groove, the first connecting furnace neck and the second connecting furnace neck are taken out from the sliding groove, and the first connecting furnace neck and the second connecting furnace neck are separated, which is convenient for cleaning the inner walls of the first connecting furnace neck and the second connecting furnace neck, and at the same time is convenient for cleaning the water cooling channels, avoiding the substances after the material melts from adhering to the water cooling channels, enabling the water to flow smoothly into the single crystal furnace, and avoiding affecting the water cooling effect of the single crystal furnace.

[0014] 2. When the device is in use, the first connecting furnace neck and the second connecting furnace neck can be limited by the limiting plate and the limiting seat, so that the rectangular groove can correspond to the rectangular opening, which is convenient for installation. Description of the Drawings

[0015] Figure 1 It is an overall three-dimensional structure diagram of the single crystal furnace cover convenient for cleaning the water cooling channel proposed by the present utility model;

[0016] Figure 2 It is a sectional three-dimensional structure diagram of the single crystal furnace cover convenient for cleaning the water cooling channel proposed by the present utility model;

[0017] Figure 3 It is a three-dimensional structure diagram of the spring of the single crystal furnace cover convenient for cleaning the water cooling channel proposed by the present utility model;

[0018] Figure 4 It is a three-dimensional structure diagram of the fixing plate of the single crystal furnace cover convenient for cleaning the water cooling channel proposed by the present utility model;

[0019] Figure 5 It is a three-dimensional structure diagram of the fixing groove of the single crystal furnace cover convenient for cleaning the water cooling channel proposed by the present utility model.

[0020] In the figure: 1. Furnace cover main body; 2. Sealing strip; 3. Water cooling channel; 4. Fixed seat; 5. Rectangular frame; 6. Spring; 7. Pull plate; 8. Sliding rod; 9. Sliding groove; 10. First connecting furnace neck; 11. Second connecting furnace neck; 12. Rectangular groove; 13. Rectangular opening; 14. Fixing plate; 15. Fixing groove; 16. Limiting seat; 17. Limiting plate; 18. Connecting flange; 19. Fixing screw hole. Detailed Embodiments

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0022] Referring to Figures 1-5 , a single crystal furnace cover facilitating the cleaning of a water cooling channel includes a furnace cover main body 1. A sealing strip 2 is fixedly connected to the bottom of the furnace cover main body 1. A water cooling channel 3 is opened at the top of the furnace cover main body 1, and a fixing seat 4 is fixedly connected at the water cooling channel 3.

[0023] Wherein, when the furnace cover main body 1 covers the single crystal furnace, the sealing strip 2 seals the gap between the furnace cover main body 1 and the single crystal furnace.

[0024] Furthermore, rectangular frames 5 are fixedly connected to both sides of the fixing seat 4. Springs 6 are fixedly connected to both sides of the fixing seat 4. One end of each spring 6 is fixedly connected to a pulling plate 7, and a sliding rod 8 is fixedly connected to one side of the pulling plate 7.

[0025] Wherein, by pulling the pulling plate 7, the pulling plate 7 drives the springs 6 to contract. The sliding rod 8 slides in the rectangular opening 13 and slides out from the rectangular groove 12, taking out the first connecting furnace neck 10 and the second connecting furnace neck 11 and separating the first connecting furnace neck 10 and the second connecting furnace neck 11, facilitating the cleaning of the inner walls of the first connecting furnace neck 10 and the second connecting furnace neck 11.

[0026] Furthermore, a sliding groove 9 is opened in the fixing seat 4. The first connecting furnace neck 10 and the second connecting furnace neck 11 are slidably connected in the sliding groove 9. A rectangular groove 12 is opened on one side of the first connecting furnace neck 10 and the second connecting furnace neck 11. Rectangular openings 13 are opened on both sides of the fixing seat 4. The sliding rod 8 is slidably connected to the rectangular opening 13 and is slidably connected to the rectangular groove 12.

[0027] Wherein, the sliding rod 8 limits and fixes the first connecting furnace neck 10 and the second connecting furnace neck 11 in the sliding groove 9, preventing the first connecting furnace neck 10 and the second connecting furnace neck 11 from sliding out of the fixing seat 4.

[0028] Furthermore, a fixing plate 14 is fixedly connected to one side of the first connecting furnace neck 10. A fixing groove 15 is opened on one side of the second connecting furnace neck 11. The fixing plate 14 is slidably connected to the fixing groove 15.

[0029] Wherein, the fixing plate 14 and the fixing groove 15 facilitate the combination of the first connecting furnace neck 10 and the second connecting furnace neck 11. While facilitating separate cleaning, the combination does not affect normal use.

[0030] Furthermore, a limiting seat 16 is fixedly connected to the top of the rectangular frame 5, and a limiting plate 17 is fixedly connected to one side of the first connecting furnace neck 10 and the second connecting furnace neck 11. The limiting plate 17 is slidably connected to the limiting seat 16.

[0031] Among them, the limiting plate 17 and the limiting seat 16 limit the first connecting furnace neck 10 and the second connecting furnace neck 11, so that the rectangular groove 12 can correspond to the rectangular opening 13, which is convenient for installation.

[0032] Furthermore, connecting flanges 18 are fixedly connected to the tops of the first connecting furnace neck 10 and the second connecting furnace neck 11, and fixing screw holes 19 are formed in the connecting flanges 18.

[0033] Among them, through the fixing screw holes 19, the connecting flanges 18 are connected to the external water supply equipment by using fixing bolts.

[0034] The working principle of the present utility model:

[0035] When it is necessary to clean the water cooling channel 3, pull the pull plate 7. The pull plate 7 drives the spring 6 to contract. The sliding rod 8 slides in the rectangular opening 13 and slides out from the rectangular groove 12. The first connecting furnace neck 10 and the second connecting furnace neck 11 are taken out from the sliding groove 9, and the first connecting furnace neck 10 and the second connecting furnace neck 11 are separated. This is convenient for cleaning the inner walls of the first connecting furnace neck 10 and the second connecting furnace neck 11, and at the same time convenient for cleaning the water cooling channel 3, avoiding the attachment of the substances after the material melts on the water cooling channel 3, enabling the water to flow smoothly into the single crystal furnace, and avoiding affecting the water cooling effect of the single crystal furnace.

[0036] The limiting plate 17 and the limiting seat 16 limit the first connecting furnace neck 10 and the second connecting furnace neck 11, so that the rectangular groove 12 can correspond to the rectangular opening 13, which is convenient for installation.

[0037] The above is only a preferred specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution and the inventive concept of the present utility model, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present utility model.

Claims

1. A single crystal furnace cover for convenient cleaning of a water cooling channel, comprising a furnace cover body (1), characterized in that: A sealing strip (2) is fixedly connected to the bottom of the furnace cover body (1), a water cooling channel (3) is provided on the top of the furnace cover body (1), a fixing seat (4) is fixedly connected to the water cooling channel (3), rectangular frames (5) are fixedly connected to both sides of the fixing seat (4), springs (6) are fixedly connected to both sides of the fixing seat (4), a pull plate (7) is fixedly connected to one end of the spring (6), a sliding rod (8) is fixedly connected to one side of the pull plate (7), a sliding groove (9) is provided on the fixing seat (4), a first connecting furnace neck (10) and a second connecting furnace neck (11) are slidably connected in the sliding groove (9), a rectangular groove (12) is provided on one side of the first connecting furnace neck (10) and the second connecting furnace neck (11), rectangular openings (13) are provided on both sides of the fixing seat (4), the sliding rod (8) is slidably connected to the rectangular opening (13), and the sliding rod (8) is slidably connected to the rectangular groove (12).

2. The single crystal furnace cover with convenient cleaning of water cooling channel according to claim 1 is characterized in that: A fixing plate (14) is fixedly connected to one side of the first connecting furnace neck (10), a fixing groove (15) is provided on one side of the second connecting furnace neck (11), and the fixing plate (14) is slidably connected to the fixing groove (15).

3. The single crystal furnace cover with convenient cleaning of water cooling channel according to claim 1, characterized in that: The top of the rectangular frame (5) is fixedly connected to a limiting seat (16), one side of the first connecting furnace neck (10) and the second connecting furnace neck (11) is fixedly connected to a limiting plate (17), and the limiting plate (17) is slidably connected to the limiting seat (16).

4. The single crystal furnace cover with convenient cleaning of water cooling channel according to claim 1, characterized in that: A connecting flange (18) is fixedly connected to the top of the first connecting furnace neck (10) and the second connecting furnace neck (11), and a fixing screw hole (19) is provided on the connecting flange (18).

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