Monocrystalline silicon crucible cutting and demolding machine

Abstract

The utility model relates to the technical field of cutting demoulding machines, and discloses a monocrystalline silicon crucible cutting demoulding machine which comprises a mounting bracket, connecting support legs are fixed at the bottom of the mounting bracket, a main control box body is connected to the outer side of the mounting bracket, a connecting bracket is fixed in the main control box body, and a plurality of connecting rods are fixed on the connecting bracket. A lifting conveying column is mounted in the connecting support in a matched mode, and a limiting mounting pad is arranged at the top of the lifting conveying column. According to the working principle of the equipment, the diamond saw blade is rotated at a high speed to cut the quartz crucible, and the carbon-carbon crucible is not damaged. And a groove as deep as possible is cut in the inner arm of the quartz crucible without touching the carbon-carbon crucible. In the cutting process, a plasma arc technology is adopted to strictly control the distance between a saw blade and the inner wall of the carbon-carbon crucible, a quartz layer of 1 + / -0.5 mm is preferably reserved in the carbon-carbon crucible so as to protect the carbon-carbon crucible from being damaged, and the cut and slotted quartz crucible can be stripped from the inner wall of the carbon-carbon crucible through slight beating or prizing.

Description

Technical Field

[0001] The utility model relates to the technical field of cutting and demoulding machines, in particular to a single crystal silicon crucible cutting and demoulding machine. Background Art

[0002] After the single crystal silicon is pulled, the quartz crucible needs to be taken out from the carbon-carbon crucible. The quartz crucible is soft at high temperature, and it softens and deforms under the pressure of its own weight and the weight of the silicon melt inside, and sticks tightly to the inside of the carbon-carbon crucible, especially the middle and lower part (arc part) of the quartz crucible, which is most tightly combined with the carbon-carbon crucible.

[0003] However, in the production process of the existing single crystal silicon crucible, after cooling, the quartz crucible is tightly clamped in the carbon-carbon crucible and difficult to be taken out. The current conventional processing method is to manually knock on the quartz crucible to break the quartz crucible inside the carbon-carbon crucible, and finally achieve the purpose of separating the quartz crucible from the carbon-carbon crucible by continuously removing the broken quartz crucible pieces. The entire operation process is inefficient and labor-intensive. The knocking operation will accelerate the aging and breakage of the carbon-carbon crucible, so automated equipment is urgently needed to solve this problem. In addition, the knocking and demolding operation, in addition to the direct physical impact that causes damage to the carbon-carbon crucible, another reason for the aging of the carbon-carbon crucible is that during the knocking process, oxygen will enter the carbon-carbon crucible fibers through the micro-gaps formed by the impact deformation, causing the carbon-carbon crucible to be weathered and damaged. Therefore, those skilled in the art provide a single crystal silicon crucible cutting and demolding machine to solve the problems raised in the above background technology. Utility Model Content

[0004] The utility model aims to provide a single crystal silicon crucible cutting and demoulding machine to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The single crystal silicon crucible cutting and demoulding machine comprises a mounting bracket, a connecting support foot is fixed to the bottom of the mounting bracket, a main control box is connected to the outer side of the mounting bracket, a connecting bracket is fixed inside the main control box, a lifting and conveying column is installed in cooperation with the interior of the connecting bracket, a limited position mounting pad is arranged on the top of the lifting and conveying column, a lifting and moving frame is installed in cooperation with the outer side of the lifting and conveying column, a connecting mounting plate is fixed to the outer side of the connecting bracket, a motor is arranged on the outer side of the connecting mounting plate, and a driving gear is fixed on the outer side of the output shaft of the motor, two movable racks are meshed on the outer side of the driving gear, a movable mounting frame is fixed on the outer side of the movable rack, an anti-slip claw is installed in cooperation with the outer side of the movable mounting frame, a cutting device extending to the outer side is arranged inside the mounting bracket, a first guide rail is fixed inside the mounting bracket, and the A servo motor is installed inside the mounting bracket, a ball screw is fixed on the outside of the output shaft of the servo motor, a ball nut is threaded on the outside of the ball screw, a guide sliding sleeve is fixed on the outside of the ball nut, a movable connecting plate is arranged on the top of the guide sliding sleeve, a placement connecting seat is arranged on the top of the movable connecting plate, the inner lining of the anti-slip claw is made of non-metallic high-temperature resistant material, the front end actuator of the anti-slip claw is hydraulically driven, and the clamping action is driven by the hydraulic motor in conjunction with the positive and negative screw rods to drive the arm to clamp the crucible, the bottom of the anti-slip claw is provided with an inclined anti-falling rib on the bottom of the claw, the bottom of the placement connecting seat is connected to the bottom rotating chassis, the bottom of the bottom rotating chassis is fixed with a connecting rotating disk, the outer side of the connecting rotating disk is cooperated with an installation movable bracket, and the outer side of the installation movable bracket is cooperated with a connecting motor.

[0007] As a further solution of the utility model: the cutting device includes a metal mounting frame, a forward and reverse motor is fixed to the outside of the metal mounting frame, a connecting screw is installed on the outside of the output shaft of the forward and reverse motor, a fixed bracket is provided on the outside of the connecting screw, a lifting slider is installed on the outside of the fixed bracket, a driving motor is connected to the outside of the lifting slider, and a cutting tool holder is installed on the outside of the output shaft of the driving motor through a belt.

[0008] As a further solution of the present invention: the metal mounting frame and the mounting bracket are fixedly connected.

[0009] As a further solution of the utility model: the placement connection seat and the movable connection plate are fixedly connected.

[0010] As a further solution of the utility model: the bottom of the main control box is provided with the connecting support feet.

[0011] As a further solution of the utility model: the anti-skid claws are driven by long cylinders.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] When the device is in use, it can ensure that the quartz crucible can be demoulded smoothly from the inside of the carbon-carbon crucible, where smooth demoulding means separating the quartz crucible from the carbon-carbon crucible and avoiding strong mechanical impact on the carbon-carbon crucible as much as possible. Through the coordinated use of the lifting and conveying column, the limit mounting pad, the lifting and moving frame, the connecting mounting plate, the driving gear, the movable rack, and the movable mounting frame, the front actuator is hydraulically driven, and the clamping action is driven by the motor to clamp the crucible with the arm frame. The anti-slip claw 12 in direct contact with the crucible is lined with non-metallic high-temperature resistant material, and the bottom of the bottom claw has an inclined anti-falling rib that can hold the crucible. The overturning of the crucible is carried out by the turning cylinder driving the connecting rod. Thus, the crucible can be clamped, lifted, turned over and transferred, and the crucible in a high temperature state can be conveniently and quickly transported, lifted and turned over, and the residue in the crucible can be easily cleaned. At the same time, a servo motor connection is set on the lower side, so that the connection seat and the connection support foot can be translated along the guide sliding sleeve on the top of the first guide rail, so that the single crystal crucible can move back and forth between the loading position and the cutting position. At the same time, the drive motor drives the saw blade of the cutting tool holder to rotate at high speed through the belt, and the forward and reverse motor drives the lead screw to move the drive motor and the cutting tool holder up and down along the fixed bracket. The working principle of this equipment is to cut the quartz crucible with a high-speed rotating diamond saw blade without damaging the carbon-carbon crucible. The inner arm of the quartz crucible cuts a groove as deep as possible without touching the carbon-carbon crucible. The plasma arc technology is used in the cutting process to strictly control the distance between the saw blade and the inner wall of the carbon-carbon crucible. It is advisable to retain a 1±0.5mm quartz layer inside the carbon-carbon crucible to protect the carbon-carbon crucible from damage. The quartz crucible after cutting and slotting can be peeled off from the inner wall of the carbon-carbon crucible by light knocking or prying. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A three-dimensional diagram of a single crystal silicon crucible cutting and demoulding machine;

[0015] Figure 2 It is a schematic diagram of the structure of the outer side of the first guide rail in the single crystal silicon crucible cutting and demoulding machine;

[0016] Figure 3 It is a schematic diagram of the structure of a cutting device in a single crystal silicon crucible cutting and demoulding machine;

[0017] Figure 4 This is a schematic diagram of the outer structure of the bottom rotating chassis in the single crystal silicon crucible cutting and demolding machine.

[0018] In the figure: 1. Mounting bracket; 2. Connecting support feet; 3. Main control box; 4. Connecting bracket; 5. Lifting transmission column; 6. Limiting mounting pad; 7. Lifting movable frame; 8. Connecting mounting plate; 9. Driving gear; 10. Movable rack; 11. Movable mounting frame; 12. Anti-skid claws; 13. Placing connecting seat; 14. Cutting device; 141. Metal mounting frame; 142. Forward and reverse motor; 143. Connecting screw rod; 144. Fixed bracket; 145. Lifting slider; 146. Driving motor; 147. Cutting tool holder; 15. First guide rail; 16. Servo motor; 17. Ball screw rod; 18. Ball nut; 19. Guide sliding sleeve; 20. Movable connecting plate; 21. Connecting motor; 22. Installing movable bracket; 23. Connecting rotating disk; 24. Bottom rotating chassis. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-3In the embodiment of the utility model, the single crystal silicon crucible cutting and demolding machine includes a mounting bracket 1, a connecting support foot 2 is fixed at the bottom of the mounting bracket 1, a main control box 3 is connected to the outside of the mounting bracket 1, a connecting support foot 2 is arranged at the bottom of the main control box 3, a connecting bracket 4 is fixed inside the main control box 3, a lifting and conveying column 5 is installed in cooperation with the inside of the connecting bracket 4, a limited position mounting pad 6 is arranged on the top of the lifting and conveying column 5, a lifting and moving frame 7 is installed in cooperation with the outside of the lifting and conveying column 5, a connecting mounting plate 8 is fixed to the outside of the connecting bracket 4, a motor is arranged on the outside of the connecting mounting plate 8, and a driving gear 9 is fixed to the outside of the output shaft of the motor, two movable racks 10 are meshed on the outside of the driving gear 9, a movable mounting frame 11 is fixed to the outside of the movable rack 10, and an anti-slip claw 12 is installed on the outside of the movable mounting frame 11, a cutting device 14 extending to the outside is arranged inside the mounting bracket 1, a first guide rail 15 is fixed inside the mounting bracket 1, and a servo motor 16 is installed inside the mounting bracket 1 A servo motor 16, a ball screw 17 is fixed on the outside of the output shaft of the servo motor 16, a ball nut 18 is threadedly connected to the outside of the ball screw 17, a guide sliding sleeve 19 is fixed to the outside of the ball nut 18, a mobile connecting plate 20 is arranged on the top of the guide sliding sleeve 19, a placement connecting seat 13 is arranged on the top of the mobile connecting plate 20, the placement connecting seat 13 and the mobile connecting plate 20 are fixedly connected, the anti-skid claw 12 is driven by a long cylinder, and the inner lining of the anti-skid claw 12 is non-metallic high temperature resistant The front end actuator of the anti-skid claw 12 is hydraulically driven, and the clamping action is driven by the hydraulic motor in conjunction with the positive and negative screw rods to drive the arm to clamp the crucible. The bottom of the anti-skid claw 12 is provided with an inclined anti-falling rib at the bottom of the claw, and the bottom of the connecting seat 13 is connected to the bottom of the bottom rotating chassis 24. The bottom of the bottom rotating chassis 24 is fixed with a connecting rotating disk 23. The outer side of the connecting rotating disk 23 is equipped with an installation movable bracket 22, and the outer side of the installation movable bracket 22 is equipped with a connecting motor 21.

[0021] The cutting device 14 includes a metal mounting frame 141, a forward and reverse motor 142 is fixed to the outside of the metal mounting frame 141, a connecting screw rod 143 is installed on the outside of the output shaft of the forward and reverse motor 142, a fixed bracket 144 is arranged on the outside of the connecting screw rod 143, a lifting slider 145 is installed on the outside of the fixed bracket 144, a driving motor 146 is connected to the outside of the lifting slider 145, a cutting tool holder 147 is installed on the outside of the output shaft of the driving motor 146 through a belt, and the metal mounting frame 141 and the mounting bracket 1 are fixedly connected.

[0022] The working principle of the utility model is as follows: when the device is in use, it can ensure that the quartz crucible can be demoulded smoothly from the inside of the carbon-carbon crucible, wherein smooth demoulding means separating the quartz crucible from the carbon-carbon crucible and avoiding strong mechanical impact on the carbon-carbon crucible as much as possible. Through the coordinated use of the lifting and conveying column 5, the limit installation pad 6, the lifting and moving frame 7, the connecting installation plate 8, the driving gear 9, the movable rack 10, and the movable installation frame 11, the front-end actuator is hydraulically driven, and the clamping action is achieved by the motor cooperating with the driving arm to clamp the crucible. The anti-slip claw 12 in direct contact with the crucible is lined with non-metallic high-temperature resistant material, and the bottom of the anti-falling retaining edge of the inclined claw can hold the crucible. The overturning of the crucible is carried out by the overturning cylinder driving the connecting rod, thereby realizing The crucible can be clamped, lifted, turned over and transferred, and the crucible in a high temperature state can be conveniently and quickly transported, lifted and turned over, and the residue in the crucible can be easily cleaned. At the same time, a servo motor 16 is set on the lower side to connect, so that the connection seat 13 and the connection support foot 2 can be translated along the guide sliding sleeve 19 on the top of the first guide rail 15, so that the single crystal crucible can move back and forth between the loading position and the cutting position. At the same time, the driving motor 146 drives the saw blade of the cutting tool holder 147 to rotate at high speed through the belt, and the forward and reverse motor 142 drives the screw rod to make the driving motor 146 and the cutting tool holder 147 move up and down along the fixed bracket 144. The working principle of this equipment is to cut the quartz crucible with a high-speed rotating diamond saw blade without damaging the carbon-carbon crucible. The arm cuts a groove as deep as possible in the quartz crucible without touching the carbon-carbon crucible. The plasma arc technology is used in the cutting process to strictly control the distance between the saw blade and the inner wall of the carbon-carbon crucible. It is advisable to retain a 1±0.5mm quartz layer inside the carbon-carbon crucible to protect the carbon-carbon crucible from damage. The quartz crucible after cutting and slotting can be peeled off from the inner wall of the carbon-carbon crucible by light knocking or prying.

[0023] The above are only preferred specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the utility model, who makes equivalent replacements or changes based on the technical scheme and utility model concept of the utility model, should be covered by the protection scope of the utility model.

Claims

1. A single crystal silicon crucible cutting and demoulding machine, comprising a mounting bracket (1), characterized in that: A connecting support foot (2) is fixed to the bottom of the mounting bracket (1), a main control box (3) is connected to the outer side of the mounting bracket (1), a connecting bracket (4) is fixed inside the main control box (3), a lifting and conveying column (5) is installed in cooperation with the inside of the connecting bracket (4), a limit position mounting pad (6) is arranged on the top of the lifting and conveying column (5), a lifting and moving frame (7) is installed in cooperation with the outer side of the lifting and conveying column (5), a connecting mounting plate (8) is fixed to the outer side of the connecting bracket (4), and the connecting mounting plate (8) is fixed to the outer side of the connecting bracket (4). 8) is provided on the outside of the motor, and a driving gear (9) is fixed on the outside of the output shaft of the motor, two movable racks (10) are meshed on the outside of the driving gear (9), a movable mounting frame (11) is fixed on the outside of the movable rack (10), and an anti-slip claw (12) is installed on the outside of the movable mounting frame (11), a cutting device (14) extending to the outside is provided inside the mounting bracket (1), a first guide rail (15) is fixed inside the mounting bracket (1), and a mounting bracket (1) is installed inside A servo motor (16) is provided, a ball screw (17) is fixed on the outer side of the output shaft of the servo motor (16), a ball nut (18) is threadedly connected on the outer side of the ball screw (17), a guide sliding sleeve (19) is fixed on the outer side of the ball nut (18), a movable connecting plate (20) is arranged on the top of the guide sliding sleeve (19), a connecting seat (13) is arranged on the top of the movable connecting plate (20), the anti-slip claw (12) is lined with a non-metallic high-temperature resistant material, and the front end of the anti-slip claw (12) is provided with a non-metallic high-temperature resistant material. The actuator is hydraulically driven, and the clamping action is driven by a hydraulic motor in cooperation with a forward and reverse screw rod to drive the arm frame to clamp the crucible. The bottom of the anti-slip clamping claw (12) is provided with an inclined anti-falling retaining edge at the bottom of the clamping claw. The bottom of the placement connection seat (13) is connected to a bottom rotating chassis (24), and a connecting rotating disk (23) is fixed to the bottom of the bottom rotating chassis (24). The outer side of the connecting rotating disk (23) is cooperatively installed with a mounting movable bracket (22), and the outer side of the mounting movable bracket (22) is cooperatively connected with a connecting motor (21).

2. The single crystal silicon crucible cutting and demoulding machine according to claim 1, characterized in that: The cutting device (14) comprises a metal mounting frame (141), a forward and reverse motor (142) is fixed on the outer side of the metal mounting frame (141), a connecting screw (143) is mounted on the outer side of the output shaft of the forward and reverse motor (142), a fixing bracket (144) is arranged on the outer side of the connecting screw (143), a lifting slider (145) is mounted on the outer side of the fixing bracket (144), a driving motor (146) is connected to the outer side of the lifting slider (145), and a cutting blade holder (147) is mounted on the outer side of the output shaft of the driving motor (146) via a belt.

3. The single crystal silicon crucible cutting and demoulding machine according to claim 2, characterized in that: The metal mounting frame (141) and the mounting bracket (1) are fixedly connected.

4. The single crystal silicon crucible cutting and demoulding machine according to claim 1, characterized in that: The placement connection seat (13) and the movable connection plate (20) are fixedly connected.

5. The single crystal silicon crucible cutting and demoulding machine according to claim 1, characterized in that: The bottom of the main control box (3) is provided with the connecting support foot (2).

6. The single crystal silicon crucible cutting and demoulding machine according to claim 1, characterized in that: The anti-slip claw (12) is driven by a long cylinder.

Images