Cantilever paddle for horizontal diffusion furnace

Abstract

The utility model relates to the technical field of diffusion furnaces, in particular to a cantilever paddle for a horizontal diffusion furnace, which comprises a cantilever paddle body, the end side of the cantilever paddle body is provided with a support part, and the upper surface of the support part is suitable for bearing a product to be processed; and the thermocouple fixing assembly is arranged on the lower surface of the supporting part, and the thermocouple fixing assembly is suitable for fixing a thermocouple. The thermocouple fixing assembly is arranged on the cantilever paddle body, the thermocouple is connected with the cantilever paddle body through the thermocouple fixing assembly, and the thermocouple is close to the supporting part, so that the thermocouple can be close to a to-be-heated product and detect the accurate temperature of the to-be-heated product, and meanwhile, the thermocouple fixing assembly enables the thermocouple to be in a suspended position; the thermocouple is not contacted with the surface of the furnace body, so that the detection temperature of the thermocouple is not influenced by the surface of the furnace body.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a cantilever paddle used for a horizontal diffusion furnace. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0003] The thermocouple in the existing diffusion furnace is set at the bottom of the furnace body and is close to the furnace body. With this method, the distance between the thermocouple and the cantilever paddle is too far, and the heat conduction method in the furnace body is thermal radiation, which causes a large deviation between the temperature detected by the thermocouple and the actual temperature of the product to be heated at the cantilever paddle. In addition, the thermocouple is close to the furnace body, so that the temperature detected by the thermocouple is affected by the surface of the furnace body. Utility Model Content

[0004] Therefore, the utility model aims to overcome the technical problems that need to be solved in the prior art, thereby providing a cantilever paddle for a horizontal diffusion furnace.

[0005] The utility model provides a cantilever paddle for a horizontal diffusion furnace, comprising:

[0006] A cantilever paddle body, wherein the end side of the cantilever paddle body is provided with a support portion, and the upper surface of the support portion is suitable for carrying the product to be added;

[0007] The thermocouple fixing assembly is arranged on the lower surface of the supporting portion, and the thermocouple fixing assembly is suitable for fixing the thermocouple.

[0008] Furthermore, the thermocouple fixing assembly comprises:

[0009] The thermocouple head fixing tube is arranged on the end side of the cantilever paddle body close to the supporting part. The thermocouple head fixing tube is located on the lower surface of the cantilever paddle body. The head of the thermocouple is inserted into the thermocouple head fixing tube.

[0010] Furthermore, the thermocouple fixing assembly also includes:

[0011] The thermocouple tail fixing tube is arranged on the end side of the support part away from the thermocouple head fixing tube. The thermocouple tail fixing tube is located on the lower surface of the cantilever paddle body. The tail of the thermocouple is inserted into the thermocouple tail fixing tube.

[0012] Furthermore, the thermocouple fixing assembly also includes a thermocouple connecting assembly, which is arranged on the thermocouple and the thermocouple tail fixing tube and is suitable for connecting the thermocouple to the thermocouple tail fixing tube.

[0013] Furthermore, the thermocouple connection assembly comprises:

[0014] A ball head is fixedly arranged at one end of the fixing tube at the tail of the thermocouple, and a through hole for passing the thermocouple is arranged on the ball head;

[0015] In a cross section perpendicular to the extending direction of the thermocouple tail fixing tube, the ball head has a cross section whose cross section diameter is larger than the cross section diameter of one end of the ball head close to the thermocouple tail fixing tube.

[0016] Furthermore, the thermocouple connection assembly also includes:

[0017] The ball bowl is fixedly arranged on the outer surface of the thermocouple, the ball bowl and the ball head are located on the same side of the thermocouple tail fixing tube, and the concave portion of the ball bowl faces the ball head and is matched with the surface of the ball head.

[0018] Furthermore, the thermocouple connection assembly also includes:

[0019] A connecting clip, the connecting clip includes a first arm, a second arm and an elastic component that makes the first arm abut against the second arm, the first arm is provided with a first notch, the thermocouple is inserted into the first notch, the first arm abuts against the protrusion of the ball bowl, the second arm is provided with a second notch, an end of the ball head close to the thermocouple tail fixing tube is inserted into the second notch, and the second arm abuts against the outer surface of the ball head.

[0020] Furthermore, the central axes of the thermocouple, the thermocouple head fixing tube, the thermocouple tail fixing tube, the ball head and the ball bowl coincide with each other.

[0021] The technical solution of the utility model has the following advantages:

[0022] The utility model provides a cantilever paddle for a horizontal diffusion furnace, in which a thermocouple fixing assembly is arranged on the cantilever paddle body, the thermocouple is connected to the cantilever paddle body through the thermocouple fixing assembly, and the thermocouple is close to a supporting portion, so that the thermocouple can be close to a product to be heated and detect the accurate temperature of the product to be heated. At the same time, the thermocouple fixing assembly enables the thermocouple to be in a suspended position and not in contact with the surface of the furnace body, so that the detected temperature of the thermocouple is not affected by the surface of the furnace body.

[0023] The utility model provides a cantilever paddle for a horizontal diffusion furnace, wherein a thermocouple head fixing tube can support and protect the head of the thermocouple.

[0024] The utility model provides a cantilever paddle for a horizontal diffusion furnace, wherein a thermocouple tail fixing tube can support and protect the thermocouple tail.

[0025] The utility model provides a cantilever paddle for a horizontal diffusion furnace, wherein the elastic component of the connecting clip can make the first arm have a tendency to abut against the second arm, the first arm drives the ball bowl, and the second arm drives the ball head, so that the concave part of the ball bowl abuts against the outer surface of the ball head, thereby fixing the thermocouple on the thermocouple tail fixing tube. When the thermocouple and the cantilever paddle body need to be separated, the connecting clip can be removed from the thermocouple and the ball head.

[0026] The utility model provides a cantilever paddle for a horizontal diffusion furnace, wherein the central axes of the thermocouple, the thermocouple head fixing tube, the thermocouple tail fixing tube, the ball head and the ball bowl coincide with each other, so that the fixation of the thermocouple and the thermocouple tail fixing tube can be more stably performed. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a schematic diagram of the structure of the utility model;

[0029] Figure 2 This is a schematic diagram of the cantilever propeller body structure of the utility model;

[0030] Figure 3 This is a schematic diagram of the structure of the thermocouple connection assembly of the utility model.

[0031] Description of reference numerals;

[0032] 1. Cantilever paddle body; 2. Thermocouple; 3. Thermocouple head fixing tube; 4. Thermocouple tail fixing tube; 5. Ball head; 6. Through hole; 7. Ball bowl. DETAILED DESCRIPTION

[0033] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0037] Example

[0038] like Figures 1 to 3 A specific embodiment of a cantilever paddle for a horizontal diffusion furnace is shown, and the cantilever paddle for a horizontal diffusion furnace comprises:

[0039] A cantilever paddle body 1, wherein a support portion is disposed at the end side of the cantilever paddle body 1, and an upper surface of the support portion is suitable for carrying a product to be added;

[0040] The thermocouple fixing assembly is arranged on the lower surface of the supporting portion, and the thermocouple fixing assembly is suitable for fixing the thermocouple 2.

[0041] Specifically, the thermocouple fixing assembly may include a support tube arranged on the lower surface of the support part and a bolt arranged on the support tube and passing through the side wall of the support tube. The thermocouple 2 can be inserted into the support tube, and the bolt is turned so that the bolt tightens the thermocouple 2 in the support tube to complete the fixation of the thermocouple 2.

[0042] By arranging a thermocouple fixing assembly on the cantilever paddle body 1, the thermocouple 2 is connected to the cantilever paddle body 1 through the thermocouple fixing assembly, and the thermocouple 2 is close to the supporting portion, so that the thermocouple 2 can be close to the product to be heated and detect the accurate temperature of the product to be heated. At the same time, the thermocouple fixing assembly makes the thermocouple 2 in a suspended position and does not contact the surface of the furnace body, so that the detected temperature of the thermocouple 2 is not affected by the surface of the furnace body.

[0043] Furthermore, the thermocouple fixing assembly comprises:

[0044] The thermocouple head fixing tube 3 is arranged on the cantilever paddle body 1 at the end side close to the supporting part, the thermocouple head fixing tube 3 is located on the lower surface of the cantilever paddle body 1, and the head of the thermocouple 2 is inserted into the thermocouple head fixing tube 3. The thermocouple head fixing tube 3 can support and protect the head of the thermocouple 2.

[0045] Furthermore, the thermocouple fixing assembly also includes:

[0046] The thermocouple tail fixing tube 4 is arranged on the end side of the support portion away from the thermocouple head fixing tube 3, the thermocouple tail fixing tube 4 is located on the lower surface of the cantilever paddle body 1, and the tail of the thermocouple 2 is inserted into the thermocouple tail fixing tube 4. The thermocouple tail fixing tube 4 can support and protect the tail of the thermocouple 2.

[0047] Furthermore, the thermocouple fixing assembly further includes a thermocouple connecting assembly, which is arranged on the thermocouple 2 and the thermocouple tail fixing tube 4, and is suitable for connecting the thermocouple 2 to the thermocouple tail fixing tube 4. The thermocouple 2 can be close to the product to be heated and detect the accurate temperature of the product to be heated. At the same time, the thermocouple fixing assembly makes the thermocouple 2 in a suspended position and does not contact the surface of the furnace body, so that the detected temperature of the thermocouple 2 is not affected by the surface of the furnace body.

[0048] Furthermore, the thermocouple connection assembly comprises:

[0049] The ball head 5 is fixedly arranged at one end of the thermocouple tail fixing tube 4, and is provided with a through hole 6 for passing the thermocouple 2; wherein the cross-section of the ball head 5 along the extension direction of the thermocouple tail fixing tube 4 can be an ellipse with both ends removed, can be a trumpet shape, etc., and the present embodiment is not limited thereto.

[0050] In a cross section perpendicular to the extension direction of the thermocouple tail fixing tube 4, the ball head 5 has a cross section whose cross section diameter is larger than the cross section diameter of one end of the ball head 5 close to the thermocouple tail fixing tube 4. The second arm can be clamped on the ball head 5 close to one end of the thermocouple tail fixing tube 4, and the second arm can abut against the outer surface of the ball head 5 when the second arm has a tendency to abut against the first arm.

[0051] Furthermore, the thermocouple connection assembly also includes:

[0052] The ball bowl 7 is fixedly arranged on the outer surface of the thermocouple 2, the ball bowl 7 and the ball head 5 are located on the same side of the thermocouple tail fixing tube 4, and the recessed portion of the ball bowl 7 faces the ball head 5 and matches the surface of the ball head 5. The ball bowl 7 can be considered to be bowl-shaped, with the protruding side being the protruding portion and the recessed side being the recessed portion.

[0053] Furthermore, the thermocouple connection assembly also includes:

[0054] A connecting clip (not shown), the connecting clip includes a first arm, a second arm and an elastic component that makes the first arm abut against the second arm, the first arm is provided with a first notch, the thermocouple 2 is inserted into the first notch, the first arm abuts against the protrusion of the ball bowl 7, the second arm is provided with a second notch, one end of the ball head 5 close to the thermocouple tail fixing tube 4 is inserted into the second notch, and the second arm abuts against the outer surface of the ball head 5. Specifically, the first arm and the second arm in the connecting clip are rotatably connected, and the elastic component is a spring, which is provided between the first arm and the second arm, so that the first arm and the second arm have a tendency to abut against each other.

[0055] The elastic component of the connecting clip can make the first arm have a tendency to abut against the second arm, the first arm drives the ball bowl 7, and the second arm drives the ball head 5, so that the concave part of the ball bowl 7 abuts against the outer surface of the ball head 5, thereby fixing the thermocouple 2 on the thermocouple tail fixing tube 4. When it is necessary to separate the thermocouple 2 and the cantilever paddle body 1, the connecting clip can be removed from the thermocouple 2 and the ball head 5.

[0056] Furthermore, the central axes of the thermocouple 2, the thermocouple head fixing tube 3, the thermocouple tail fixing tube 4, the ball head 5 and the ball bowl 7 coincide with each other, so that the fixation of the thermocouple 2 and the thermocouple tail fixing tube 4 is more stable.

[0057] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A cantilever paddle for a horizontal diffusion furnace, characterized in that: include: A cantilever paddle body (1), wherein a support portion is provided at the end side of the cantilever paddle body (1), and an upper surface of the support portion is suitable for carrying a product to be added; A thermocouple fixing assembly is arranged on the lower surface of the support portion, and the thermocouple fixing assembly is suitable for fixing the thermocouple (2).

2. The cantilever paddle for a horizontal diffusion furnace according to claim 1, characterized in that: The thermocouple fixing assembly comprises: A thermocouple head fixing tube (3) is arranged on the cantilever paddle body (1) at an end side close to the support portion, the thermocouple head fixing tube (3) is located on the lower surface of the cantilever paddle body (1), and the head of the thermocouple (2) is inserted into the thermocouple head fixing tube (3).

3. The cantilever paddle for a horizontal diffusion furnace according to claim 2, characterized in that: The thermocouple fixing assembly also includes: The thermocouple tail fixing tube (4) is arranged on the end side of the support portion away from the thermocouple head fixing tube (3), the thermocouple tail fixing tube (4) is located on the lower surface of the cantilever paddle body (1), and the tail of the thermocouple (2) is inserted into the thermocouple tail fixing tube (4).

4. The cantilever paddle for a horizontal diffusion furnace according to claim 3, characterized in that: The thermocouple fixing assembly further comprises a thermocouple connecting assembly, which is arranged on the thermocouple (2) and the thermocouple tail fixing tube (4) and is suitable for connecting the thermocouple (2) to the thermocouple tail fixing tube (4).

5. The cantilever paddle for a horizontal diffusion furnace according to claim 4, characterized in that: The thermocouple connection assembly comprises: A ball head (5) fixedly arranged at one end of the thermocouple tail fixing tube (4), the ball head (5) being provided with a through hole (6) for passing the thermocouple (2); In a cross section perpendicular to the extension direction of the thermocouple tail fixing tube (4), the ball head (5) has a cross section whose cross section diameter is larger than the cross section diameter of one end of the ball head (5) close to the thermocouple tail fixing tube (4).

6. The cantilever paddle for a horizontal diffusion furnace according to claim 5, characterized in that: The thermocouple connection assembly also includes: A ball bowl (7) is fixedly arranged on the outer surface of the thermocouple (2); the ball bowl (7) and the ball head (5) are located on the same side of the thermocouple tail fixing tube (4); and the recessed portion of the ball bowl (7) faces the ball head (5) and is matched with the surface of the ball head (5).

7. The cantilever paddle for a horizontal diffusion furnace according to claim 6, characterized in that: The thermocouple connection assembly also includes: A connecting clamp, the connecting clamp comprising a first arm, a second arm and an elastic component that enables the first arm to abut against the second arm, the first arm being provided with a first notch, the thermocouple (2) being inserted into the first notch, the first arm abutting against the protruding portion of the ball bowl (7), the second arm being provided with a second notch, an end of the ball head (5) close to the thermocouple tail fixing tube (4) being inserted into the second notch, the second arm abutting against the outer surface of the ball head (5).

8. The cantilever paddle for a horizontal diffusion furnace according to claim 6, characterized in that: The central axes of the thermocouple (2), the thermocouple head fixing tube (3), the thermocouple tail fixing tube (4), the ball head (5) and the ball bowl (7) coincide with each other.

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