Crystal wire detection device

Abstract

The utility model belongs to the technical field of silicon rod detection, and particularly relates to a crystal wire detection device. According to the crystal wire detection device, one end of the silicon rod is placed in the rotating module, and the axis of the silicon rod is kept unchanged relative to the axis of the rotating module in the process that the rotating module drives the silicon rod to rotate, so that the problem of concentricity deviation occurring when the silicon rod is driven to rotate through the driving shaft and the driven shaft in the existing scheme can be well solved; meanwhile, when the crystal wire of the silicon rod is detected, the moving module dynamically moves a first detection end and a second detection end to a proper position for detecting the current crystal wire of the silicon rod according to the position distance, obtained by the first detection end in the detection module, between the first detection end and the surface of the silicon rod; for example, the first detection end and the second detection end are moved towards the direction close to the silicon rod or away from the silicon rod, so that crystal line detection of the silicon rods placed at different positions of the rotating module or the silicon rods with different diameter sizes is realized.

Description

Technical Field

[0001] This application belongs to the technical field of silicon rod detection, and particularly relates to a crystal line detection device. Background Art

[0002] In the crystal line detection of silicon rods, the existing solution is to clamp the silicon rod by the driving shaft and the driven shaft in the detection device and then drive the silicon rod to rotate, and then confirm the crystal line position of the silicon rod through the detection end at a fixed position. Due to the non-uniformity of the diameter of the silicon rod, there will be a problem of concentricity deviation during the process of clamping the silicon rod by the driving shaft and the driven shaft, that is, the axis of the silicon rod changes relative to the driving shaft and the driven shaft. And because the position of the detection end in the existing solution is fixed relative to the silicon rod, it is difficult to detect the crystal lines of silicon rods with different diameter sizes. Summary of the Utility Model

[0003] An object of an invention of this application is to provide a crystal line detection device, so that the axis of the silicon rod and the axis of the rotation module maintain a determined relative position during the movement process, and at the same time, the position of the detection module relative to the silicon rod is dynamically adjusted through the movement module, so as to realize the crystal line detection of silicon rods placed at different positions of the rotation module and silicon rods with different diameter sizes.

[0004] According to an embodiment of this application, in the first aspect, a crystal line detection device is provided, and the crystal line detection device includes:

[0005] A rotation module, the rotation module is used to carry one end of the silicon rod, and the rotation module drives the silicon rod to rotate around the axis of the rotation module;

[0006] A detection module, the detection module includes a first detection end and a second detection end, the first detection end is used to obtain the distance value from the outer wall of the silicon rod, the second detection end is attached to the surface of the silicon rod to obtain the surface height change value of the silicon rod, and the crystal line in the silicon rod is determined according to the surface height change value of the silicon rod obtained by the second detection end and the angle value of the rotation of the silicon rod when the rotation module drives the silicon rod to rotate;

[0007] A movement module, the first detection end and the second detection end are arranged on the movement module, and the movement module is configured to adjust the movement of the detection module in a direction close to or away from the silicon rod according to the distance value from the outer wall of the silicon rod obtained by the first detection end.

[0008] In one embodiment, the crystal line detection device further includes a control module, which is electrically connected to the rotation module, the first detection end, the second detection end, and the movement module respectively. The control module controls the rotation module to operate so that the silicon rod rotates around the axis of the rotation module. The control module controls the movement module to move towards or away from the silicon rod according to the distance value obtained by the first detection end from the outer wall of the silicon rod. The control module determines the crystal line in the silicon rod according to the surface height change value of the silicon rod obtained by the second detection end and the rotation angle value of the silicon rod driven by the rotation module.

[0009] In one embodiment, the first detection end includes a photoelectric position sensor, and the second detection end includes a spring type displacement sensor.

[0010] In one embodiment, the movement module includes a linear module and a first driving element. The first driving element drives the linear module to move, and the first detection end and the second detection end are arranged on the linear module.

[0011] In one embodiment, the linear module includes a lead screw and a nut, the first driving element is a speed regulating motor, the speed regulating motor drives the lead screw to rotate, and the first detection end and the second detection end are arranged on the nut.

[0012] In one embodiment, the crystal line detection device includes a detection table, and the rotation module and the movement module are respectively arranged on the detection table.

[0013] In one embodiment, the rotation module includes a rotating disk, a transmission member, and a second driving element. The rotating disk is rotatably arranged on the detection table, the transmission member is arranged between the rotating disk and the second driving element, and the second driving element drives the rotating disk to rotate through the transmission member.

[0014] In one embodiment, the transmission member is a gear transmission member, and the second driving element is a servo motor.

[0015] In one embodiment, the detection module further includes a third detection end, which is arranged on the detection table and is configured to feedback the incoming material information of the silicon rod in the rotation module.

[0016] In one embodiment, the third detection end includes a photoelectric position sensor.

[0017] In the crystal line detection device of the present application, one end of the silicon rod is placed on the rotation module. During the process of driving the silicon rod to rotate by the rotation module, the axis of the silicon rod remains unchanged relative to the axis of the rotation module. Therefore, it can better solve the concentricity deviation problem that occurs when driving the silicon rod to rotate by the driving shaft and the driven shaft in the existing solution. At the same time, when detecting the crystal line of the silicon rod, according to the position distance from the first detection end in the detection module to the surface of the silicon rod, the moving module can dynamically move the first detection end and the second detection end to the appropriate positions for detecting the crystal line of the current silicon rod. For example, move the first detection end and the second detection end closer to or farther away from the silicon rod, so as to realize the detection of the crystal line of the silicon rod placed at different positions on the rotation module or the silicon rod with different diameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 FIG. is a top view structural schematic diagram of the crystal line detection device in an embodiment of the present application;

[0019] Figure 2 FIG. is a structural schematic diagram of the crystal line detection device in another embodiment of the present application.

[0020] DESCRIPTION OF THE REFERENCE NUMERALS IN THE DRAWINGS:

[0021] 100, rotation module; 110, rotating disk; 120, transmission member; 130, second driving element;

[0022] 200, detection module; 210, first detection end; 220, second detection end; 230, third detection end;

[0023] 300, moving module; 310, linear module; 320, first driving element; 400, silicon rod; 500, detection table. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0025] It should be noted that the diagrams provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner.

[0026] The structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in the art to understand and read, and are not used to limit the limiting conditions under which the present invention can be implemented. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present invention can produce and the objectives that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in the present invention.

[0027] The orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "middle", "longitudinal", "lateral", "horizontal", "inner", "outer", "radial", "circumferential", etc. cited in this specification is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of simplified description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0028] As described in the background, in the crystal line detection of a silicon rod, the existing solution is to clamp the silicon rod by the driving shaft and the driven shaft in the detection device and then drive the silicon rod to rotate, and then confirm the crystal line position of the silicon rod through the detection end at a fixed position. Since the diameter of the silicon rod is uneven, there will be a problem of concentricity deviation during the process of clamping the silicon rod by the driving shaft and the driven shaft, that is, the axis of the silicon rod changes relative to the driving shaft and the driven shaft. And because the position of the detection end in the existing solution is fixed relative to the silicon rod, it is difficult to realize the crystal line detection of silicon rods with different diameter sizes. For this reason, the researchers in this application propose a crystal line detection device. By placing one end of the silicon rod in the rotation module, the rotation module drives the silicon rod to rotate around the axis of the rotation module, so that during the rotation of the silicon rod, the axis of the silicon rod remains unchanged relative to the axis of the rotation module. At the same time, the moving module dynamically changes the position of the detection module relative to the silicon rod to realize the crystal line detection of silicon rods placed at different positions in the rotation module or silicon rods with different diameters.

[0029] As Figure 1 shown, Figure 1 is a top view structural schematic diagram of the crystal line detection device in an embodiment of this application. In this embodiment, the crystal line detection device includes: a rotation module 100, a detection module 200, and a moving module 300. The rotation module 100 is used to carry the silicon rod 400 and drive the silicon rod 400 to rotate around the axis of the rotation module 100. The detection module 200 is used to detect the crystal line of the silicon rod 400. The moving module 300 is used to drive the detection end in the detection module 200 to move in the direction close to or away from the silicon rod 400. In this embodiment, the researchers intend to detect the crystal line in the silicon rod 400 placed at different positions in the rotation module 100 or the silicon rod 400 with different diameter sizes under the condition that the axis of the silicon rod 400 remains unchanged relative to the axis of the rotation module 100, so as to solve the problem of concentricity deviation of the axis of the silicon rod 400 relative to the driving shaft and the driven shaft when testing the crystal line of the silicon rod 400 in the existing solution and realize the crystal line detection of the silicon rod 400 placed at different positions in the rotation module 100 and the silicon rod 400 with different diameter sizes.

[0030] Specifically, the rotation module 100 is used to carry one end of the silicon rod 400, and the rotation module 100 drives the silicon rod 400 to rotate around the axis of the rotation module 100; the detection module 200 includes a first detection end 210 and a second detection end 220. The first detection end 210 is used to obtain the distance value from the outer wall of the silicon rod 400, and the second detection end 220 is attached to the surface of the silicon rod 400 to obtain the surface height change value of the silicon rod 400. The crystal line in the silicon rod 400 is determined according to the surface height change value of the silicon rod 400 obtained by the second detection end 220 and the angle value of the rotation of the silicon rod 400 when the rotation module 100 drives the silicon rod 400 to rotate; the first detection end 210 and the second detection end 220 are arranged on the moving module 300, wherein the moving module 300 is configured to adjust the detection module 200 to move closer to or away from the silicon rod 400 according to the distance value between the first detection end 210 and the outer wall of the silicon rod 400 obtained.

[0031] In this embodiment, when it is necessary to detect the crystal line of the silicon rod 400, one end of the silicon rod 400 is placed on the rotation module 100. When the rotation module 100 works, the rotation module 100 drives the silicon rod 400 to rotate. It should be noted that the extension direction of the axis of the rotation module 100 is the vertical direction. Therefore, during the process of the rotation module 100 driving the silicon rod 400 to rotate, the silicon rod 400 can be driven to rotate around the vertical direction. During the process of the rotation module 100 driving the silicon rod 400 to rotate, the axis of the silicon rod 400 remains unchanged relative to the axis of the rotation module 100. At the same time, the position distance between the first detection end 210 in the detection module 200 and the surface of the silicon rod 400 enables the moving module 300 to dynamically move the first detection end 210 and the second detection end 220 to a suitable position for detecting the crystal line of the current silicon rod 400, such as moving the first detection end 210 and the second detection end 220 closer to or away from the silicon rod 400, so as to realize the detection of the crystal line of the silicon rod 400 placed at different positions on the rotation module 100 or the silicon rod 400 with different diameter sizes. When detecting the crystal line of the silicon rod 400, the second detection end 220 in the detection module 200 obtains the surface height information of the silicon rod 400 and determines the crystal line in the silicon rod 400 according to the angle value of the rotation of the silicon rod 400 when the rotation module 100 drives the silicon rod 400 to rotate.

[0032] It should be noted that the crystal lines on the surface of the silicon rod 400 will cause the surface of the silicon rod 400 to protrude highly. Therefore, the second detection end 220 can obtain this height change information value, and at the same time obtain the angle value of the rotation of the silicon rod 400 according to the angle of rotation of the rotation module 100. In addition, the angle information of the crystal lines distributed on the surface of the silicon rod 400 is a known value. When the second detection end 220 obtains a height change value detected at one position of the silicon rod 400, and the second detection end 220 detects the height change value on the surface of the silicon rod 400 again after the silicon rod 400 rotates another angle in the rotation module 100, the position corresponding to the height change value of the silicon rod 400 can be determined as the crystal line position.

[0033] For example, the angle difference between the crystal lines in the silicon rod 400 preset in the crystal line detection device is 90°. The second detection module 200 obtains the height change value at one position, and after the silicon rod 400 is driven by the rotation module 100 to rotate 90°, when the second detection end 220 obtains another height information change value again, it is confirmed that the positions corresponding to the two height change values detected by the second detection end 220 are the crystal line positions of the silicon rod 400 respectively. It should be noted that the angle information distribution of the crystal lines in the silicon rod 400 and the preset angle information can be determined according to the actual situation requirements.

[0034] In an embodiment, the crystal line detection device further includes a control module, where the control module is electrically connected to the rotation module 100, the first detection end 210, the second detection end 220, and the moving module 300 respectively. The control module controls the rotation module 100 to work so that the silicon rod 400 rotates around the axis of the rotation module 100. The control module controls the moving module 300 to move in the direction close to or away from the silicon rod 400 according to the distance value obtained by the first detection end 210 from the outer wall of the silicon rod 400. The control module determines the crystal lines in the silicon rod 400 according to the height change value of the surface of the silicon rod 400 obtained by the second detection end 220 and the angle value of the rotation of the silicon rod 400 when the rotation module 100 drives the silicon rod 400.

[0035] In this embodiment, the researcher controls the coordinated actions of the rotation module 100, the first detection end 210, the second detection end 220, and the moving module 300 through the control module, such as a programmable logic controller (PLC), so as to complete the accurate detection of the crystal lines in the silicon rod 400.

[0036] In an embodiment, the first detection end 210 includes a photoelectric position sensor, and the second detection end 220 includes a spring type displacement sensor.

[0037] In this embodiment, when it is necessary to detect the crystal line of the silicon rod 400 in the rotation module 100, the photoelectric position sensor in the first detection end 210 emits a light source to the surface of the silicon rod 400. After the light source irradiated on the surface of the silicon rod 400 is received by the photoelectric element in the photoelectric position sensor, it is converted into the position information of the silicon rod 400 through a corresponding algorithm. According to the information fed back by the photoelectric position sensor, the movement module 300 is controlled to work. The movement module 300 drives the first detection end 210 and the second detection end 220 to move towards or away from the silicon rod 400 so that the first detection end 210 and the second detection end 220 reach the appropriate positions for detecting the crystal line of the silicon rod 400.

[0038] Meanwhile, in this embodiment, the second detection end 220 includes a spring-type displacement sensor, and the sensor includes a probe with a spring. During the process of the rotation module 100 driving the silicon rod 400 to rotate, the probe moves along the surface of the silicon rod 400. When the crystal line on the surface of the silicon rod 400 is detected, the probe will generate a small displacement. According to the obtained displacement value and the angle value of the rotation of the silicon rod 400, it is determined whether it is the crystal line in the silicon rod 400.

[0039] In one embodiment, referring to Figure 2 As shown, the movement module 300 includes a linear module 310 and a first driving element 320. The first driving element 320 drives the linear module 310 to move, and the first detection end 210 and the second detection end 220 are arranged on the linear module 310.

[0040] In this embodiment, in this embodiment, the linear module and the first driving element 320 in the movement module 300 can drive the first detection end 210 and the second detection end 220 in the detection module 200 to move towards or away from the silicon rod 400, and the linear module 310 can provide high-precision and high-repeatability displacement control.

[0041] Furthermore, the linear module 310 includes a lead screw and a nut, the first driving element 320 is a speed-regulating motor, the speed-regulating motor drives the lead screw to rotate, and the first detection end 210 and the second detection end 220 are arranged on the nut.

[0042] In this embodiment, the lead screw and nut structure can achieve a positioning accuracy of the micron level, ensuring the accurate position of the first detection end 210 and the second detection end 220 in the detection module 200 relative to the surface of the silicon rod 400; at the same time, the speed-regulating motor controls the rotation of the lead screw, enabling a stable and controllable linear motion and reducing the generation of detection errors.

[0043] In one embodiment, referring to Figure 2 As shown, the crystal line detection device includes a detection table 500, and the rotation module 100 and the movement module 300 are respectively arranged on the detection table 500.

[0044] In this embodiment, the detection platform 500 is used to carry and install the rotation module 100 and the moving module 300. The detection platform provides a stable operating platform for the rotation module 100 and the moving module 300. At the same time, integrating the rotation module 100 and the moving module 300 in the detection platform 500 also reduces the occupation of spatial positions.

[0045] Further, referring to Figure 2 As shown, in one embodiment, the rotation module 100 includes a rotating disk 110, a transmission member 120, and a second driving element 130. The rotating disk 110 is rotatably arranged on the detection platform 500. The transmission member 120 is arranged between the rotating disk 110 and the second driving element 130. The second driving element 130 drives the rotating disk 110 to rotate through the transmission member 120. Among them, the transmission member 120 can be a gear transmission member 120, and the second driving element 130 can be a servo motor.

[0046] In this embodiment, the second driving element 130 drives the rotating disk 110 to rotate through the transmission member 120. The rotating disk 110 is used to carry the silicon rod 400, so as to realize the rotation of the silicon rod 400 around the axis direction of the second driving element 130. Among them, the use of gear transmission for the transmission member 120 can achieve a higher-precision transmission control. At the same time, the reason for selecting the second driving element 130 as a servo motor is that the servo motor can achieve precise control and positioning of the rotating disk 110.

[0047] In one embodiment, referring to Figure 2 As shown, the detection module 200 further includes a third detection end 230. The third detection end 230 is arranged on the detection platform 500 and is configured to feedback the incoming material information of the silicon rod 400 in the rotation module 100.

[0048] In this embodiment, the reason for setting the third detection end 230 on the detection platform 500 is that the third detection end 230 can perform automated detection on the crystal line of the silicon rod 400. That is, when the upstream device transports the silicon rod 400 to the detection platform 500, at this time, the third detection end 230 can obtain the incoming material information of the silicon rod 400 to confirm whether there is a silicon rod 400 in the current rotation module 100 that needs crystal line detection. When the third detection end 230 obtains that there is a silicon rod 400 in the rotation module 100, at this time, the first detection end 210 obtains the position information of the silicon rod 400, and the moving module 300 can transport the first detection end 210 and the second detection end 220 to appropriate positions, so that the second detection end 220 can detect the crystal line of the silicon rod 400. Among them, the third detection end 230 includes a photoelectric position sensor, and the detection principle of the photoelectric position sensor in the third detection end 230 is similar to that of the photoelectric position sensor in the first detection end 210.

[0049] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0050] The above embodiments only express several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A crystal line detection device, characterized in that: The crystal line detection device comprises: A rotating module (100), the rotating module (100) being used to support one end of a silicon rod (400), and the rotating module (100) drives the silicon rod (400) to rotate around an axis of the rotating module (100); A detection module (200), the detection module (200) comprising a first detection end (210) and a second detection end (220), the first detection end (210) being used to obtain a distance value from an outer wall of the silicon rod (400), the second detection end (220) being in contact with a surface of the silicon rod (400) to obtain a height change value of the surface of the silicon rod (400), and the crystal lines in the silicon rod (400) being determined according to the height change value of the surface of the silicon rod (400) obtained by the second detection end (220) and according to an angle value of rotation of the silicon rod (400) when the rotation module (100) drives the silicon rod (400) to rotate; A moving module (300), wherein the first detection end (210) and the second detection end (220) are arranged on the moving module (300), and the moving module (300) is configured to adjust the detection module (200) to move towards or away from the silicon rod (400) according to the distance value between the first detection end (210) and the outer wall of the silicon rod (400).

2. The crystal line detection device according to claim 1, characterized in that: The crystal line detection device further comprises a control module, the control module being electrically connected to the rotation module (100), the first detection end (210), the second detection end (220) and the moving module (300) respectively, the control module controlling the rotation module (100) to operate so that the silicon rod (400) rotates around the axis of the rotation module (100), the control module controlling the moving module (300) to move towards or away from the silicon rod (400) according to the distance value between the first detection end (210) and the outer wall of the silicon rod (400) obtained by the first detection end (210), and the control module determining the crystal line in the silicon rod (400) according to the height change value of the silicon rod (400) surface obtained by the second detection end (220) and the angle value of the silicon rod (400) rotating when the rotation module (100) drives the silicon rod (400).

3. The crystal line detection device according to claim 1, characterized in that: The first detection end (210) includes a photoelectric position sensor, and the second detection end (220) includes a spring-type displacement sensor.

4. The crystal line detection device according to claim 1, characterized in that: The moving module (300) comprises a linear module (310) and a first driving element (320), wherein the first driving element (320) drives the linear module (310) to move, and the first detection end (210) and the second detection end (220) are arranged on the linear module (310).

5. The crystal line detection device according to claim 4, characterized in that: The linear module (310) comprises a lead screw and a nut, the first driving element (320) is a speed regulating motor, the speed regulating motor drives the lead screw to rotate, and the first detection end (210) and the second detection end (220) are arranged on the nut.

6. The crystal line detection device according to claim 1, characterized in that: The crystal line detection device comprises a detection platform (500), and the rotating module (100) and the moving module (300) are respectively arranged on the detection platform (500).

7. The crystal line detection device according to claim 6, characterized in that: The rotating module (100) comprises a rotating disk (110), a transmission member (120) and a second driving element (130); the rotating disk (110) is rotatably disposed on the detection platform (500); the transmission member (120) is disposed between the rotating disk (110) and the second driving element (130); and the second driving element (130) drives the rotating disk (110) to rotate via the transmission member (120).

8. The crystal line detection device according to claim 7, characterized in that: The transmission member (120) is a gear transmission member, and the second driving element (130) is a servo motor.

9. The crystal line detection device according to claim 6, characterized in that: The detection module (200) further comprises a third detection end (230), wherein the third detection end (230) is arranged on the detection platform (500), and the third detection end (230) is configured to feed back incoming material information of the silicon rod (400) in the rotation module (100).

10. The crystal line detection device according to claim 9, characterized in that: The third detection end (230) includes a photoelectric position sensor.

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