Nanoimprint packaging platform

Abstract

The utility model relates to the technical field of semiconductor packaging, and particularly discloses a nanoimprint packaging platform which comprises a supporting base, an upper sample seat is installed on one side of the upper end of the supporting base through a Z-axis connecting piece, an upper sample support is arranged at the lower end of the upper sample seat, and an X-axis connecting piece is arranged on the other side of the upper end of the supporting base. A Y-axis connecting piece is arranged on the X-axis connecting piece, and an R-axis connecting piece is arranged on the Y-axis connecting piece; according to the five-axis piezoelectric displacement platform disclosed by the utility model, nanoscale accurate movement can be realized, and the distance between substrates in the imprinting process can be finely adjusted; the vacuum nanoimprint packaging platform integrates heating and cooling functions and is matched with the piezoelectric module for use, so that the temperature of an imprint area can be accurately controlled; the automation characteristic of the vacuum nanoimprint packaging platform can improve the production efficiency, the five-axis nanoimprint packaging platform provides high flexibility, and the five-axis nanoimprint packaging platform can adapt to substrates of different sizes and shapes and template design of different complexities.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor packaging, and particularly relates to a nanoimprint packaging platform. Background Technique

[0002] Vacuum nanoimprint packaging is applied in advanced semiconductor packaging technology, aiming to improve the performance, reliability, integration level and cost-effectiveness of integrated circuits; the main types of advanced packaging technologies include wafer-level packaging, fan-out packaging, chip-level packaging, system-level packaging, and embedded packaging; the development of these advanced packaging technologies continuously promotes the development of electronic devices towards smaller size, higher performance and lower cost.

[0003] At present, there are still some problems in the practical application of nanoimprint technology.

[0004] (1) Inaccurate positioning: This is mainly caused by uneven contact between the template and the substrate or inaccurate pressure control during the imprinting process.

[0005] (2) Template damage: During the imprinting process, the direct contact between the template and the substrate may cause damage to the template. Especially under high temperature and high pressure conditions, this damage will reduce the service life of the template and the replication quality of the pattern.

[0006] (3) Pattern defect rate: During the pattern replication process of nanoimprint technology, especially after the template has imprinted thousands of patterns, the pattern defect rate is relatively high. Summary of the Utility Model

[0007] The purpose of the utility model is to provide a nanoimprint packaging platform to solve the problems raised in the above background technique.

[0008] To achieve the above purpose, the utility model provides the following technical solutions:

[0009] A nanoimprint packaging platform, comprising:

[0010] Support base, on one side of the upper end of the support base, an upper sample holder is installed through a Z-axis connecting member. The provided Z-axis connecting member can also drive the upper sample holder to move in the Z-axis direction. At the lower end of the upper sample holder, there is an upper sample tray. At the lower end of the upper sample tray, an upper substrate is installed. On the other side of the upper end of the support base, there is an X-axis connecting member for driving the lower sample holder to move in the X-axis direction. On the X-axis connecting member, there is a Y-axis connecting member for driving the lower sample holder to move in the Y-axis direction. On the Y-axis connecting member, there is an R-axis connecting member for driving the lower sample holder to rotate around the X and Y axes. The three nano-positioning platforms provide precise movement in the X and Y directions and rotation around these two axes for the lower substrate at the upper end of the lower sample holder. On the R-axis connecting member, a sample holder heating table is installed to play a heating role. At the upper end of the sample holder heating table, a lower sample holder is installed. At the upper end of the lower sample holder, there is a lower sample tray that cooperates with the upper sample tray. At the upper end of the lower sample tray, a lower substrate is installed. The lower substrate is also coated with a thermoplastic polymer in the installation groove of the lower sample tray. The same applies to the upper sample tray. During use, after aligning the upper substrate and the lower substrate, the Z-axis connecting member drives the upper sample holder and the upper sample tray to move downward, further causing the upper substrate to move downward and cooperate with the lower substrate to achieve imprinting.

[0011] Preferably, the Z-axis connecting member includes a support side plate and a Z-axis nano-positioning platform. On one side of the upper end of the support base, the support side plate is installed. On one side of the support side plate, the Z-axis nano-positioning platform is installed. The output end of the Z-axis nano-positioning platform is connected to the upper sample holder. The Z-axis nano-positioning platform can drive the upper sample holder to move in the Z-axis direction. The Z-axis nano-positioning platform includes a guide rail and a driving member for driving the upper sample holder to move linearly in the Z-axis direction, which is a high-precision linear movement device in the prior art and will not be described in detail here.

[0012] Preferably, the X-axis connecting member includes an X-axis nano-positioning platform. On the other side of the upper end of the support base, the X-axis nano-positioning platform is provided for driving the lower sample holder to move in the X-axis direction. The X-axis nano-positioning platform includes a guide rail and a driving member for driving the upper sample holder to move linearly in the X-axis direction, which is a high-precision linear movement device in the prior art.

[0013] Preferably, the Y-axis connecting member includes a Y-axis nano-positioning platform and a Y-axis displacement connecting plate. The output end of the X-axis nano-positioning platform is connected to the Y-axis displacement connecting plate. On the upper end of the Y-axis displacement connecting plate, the Y-axis nano-positioning platform is installed for driving the lower sample holder to move in the Y-axis direction. The Y-axis nano-positioning platform includes a guide rail and a driving member for driving the upper sample holder to move linearly in the Y-axis direction, which is a high-precision linear movement device in the prior art.

[0014] Preferably, the R-axis connecting member includes an R-axis nano-positioning platform and an R-axis displacement connecting plate. The output end of the Y-axis nano-positioning platform is connected to the R-axis displacement connecting plate, and the R-axis nano-positioning platform is installed at the upper end of the R-axis displacement connecting plate, which is used to drive the lower sample holder to rotate around the X and Y axes and is a high-precision rotating device in the prior art.

[0015] Preferably, a ceramic heating sheet is installed at the upper end of the sample holder heating table, which plays a role in heating the lower sample holder and further realizes heating the substrate. A thermocouple is also installed on the lower sample holder to play a role in temperature control.

[0016] Preferably, lower sample holder pressing sheets are arranged at the upper ends of both sides of the lower sample holder, which play a role in pressing down both sides of the lower sample holder to realize the installation of the lower sample holder. Installation bolts I are installed on the lower sample holder pressing sheets to play a role in installing the lower sample holder pressing sheets. One ends of the installation bolts I respectively penetrate through the lower sample holder pressing sheets and are connected to the lower sample holder. Upper sample holder pressing sheets are arranged at the lower ends of both sides of the upper sample holder, which play a role in pressing both sides of the upper sample holder to realize the installation of the upper sample holder. Installation bolts II are installed on the upper sample holder pressing sheets, and one ends of the installation bolts II respectively penetrate through the upper sample holder pressing sheets and are connected to the upper sample holder.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0018] 1. The five-axis piezoelectric displacement platform can achieve precise movement at the nanometer level. The translation control accuracy is better than 100 nm, the movement range is not less than 10 mm, the rotation control accuracy is better than 0.001°, and the rotation angle is not less than 180°. It can finely adjust the distance between substrates during the imprinting process, which is crucial for nanoimprinting technology;

[0019] 2. The vacuum nanoimprinting encapsulation platform integrates heating and cooling functions. When used in cooperation with the piezoelectric module, it can precisely control the temperature of the imprinting area and meet the curing requirements of thermoplastic materials;

[0020] 3. The automation characteristics of the vacuum nanoimprinting encapsulation platform can improve production efficiency, reduce manual intervention, improve the repeatability and consistency of the imprinting process. The five-axis nanoimprinting encapsulation platform provides a high degree of flexibility and can adapt to substrates of different sizes and shapes, as well as template designs of different complexities. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0022] Figure 2 is a schematic diagram of another perspective of the present utility model;

[0023] In the figure: 1, support side plate; 2, Z-axis nano-positioning platform; 3, upper sample holder; 4, lower sample holder; 6, lower sample holder pressing plate; 7, upper sample carrier; 10, lower sample holder; 11, sample holder heating table; 12, R-axis nano-positioning platform; 13, R-axis displacement connecting plate; 14, Y-axis nano-positioning platform; 15, Y-axis displacement connecting plate; 16, X-axis nano-positioning platform; 17, support base. Detailed implementation

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] Embodiment:

[0026] Please refer to Figure 1 - Figure 2 As shown, a nanoimprinting encapsulation platform includes:

[0027] A support base 17, one side of the upper end of the support base 17 is provided with an upper sample holder 3 through a Z-axis connecting piece. The provided Z-axis connecting piece can also drive the upper sample holder 3 to move in the Z-axis direction. The lower end of the upper sample holder 3 is provided with an upper sample carrier 7, and the lower end of the upper sample carrier 7 is installed with an upper substrate. The other side of the upper end of the support base 17 is provided with an X-axis connecting piece for driving the lower sample holder 10 to move in the X-axis direction. The X-axis connecting piece is provided with a Y-axis connecting piece for driving the lower sample holder 10 to move in the Y-axis direction. The Y-axis connecting piece is provided with an R-axis connecting piece for driving the lower sample holder 10 to rotate around the X and Y axes (i.e., the plane where the two axes are located). The three nano-positioning platforms X, Y, and R-axis connecting pieces provide precise movement in the X and Y directions and rotation around these two axes (i.e., the plane where the two axes are located) for the lower substrate at the upper end of the lower sample holder 10. The R-axis connecting piece is installed with a sample holder heating table 11, which plays a heating role. The upper end of the sample holder heating table 11 is installed with a lower sample holder 10. The upper end of the lower sample holder 10 is provided with a lower sample carrier 4 that cooperates with the upper sample carrier 7. The upper end of the lower sample carrier 4 is installed with a lower substrate. The lower substrate is also coated with a thermoplastic polymer in the installation groove of the lower sample carrier 4. The upper sample carrier 7 is the same. During use, after aligning the upper substrate and the lower substrate, the Z-axis connecting piece is used to drive the upper sample holder 3 and the upper sample carrier 7 to move downward, further causing the upper substrate to move downward and cooperate with the lower substrate to achieve nanoimprinting.

[0028] The vacuum nanoimprint packaging platform mainly consists of a sample holder, a substrate, a heating system, a nano-displacement platform, etc. A template with nano-scale patterns is installed in a groove coated with a thermoplastic polymer. After being precisely positioned by the nano-displacement platform, the polymer is vitrified by the heating system and pressed into the patterns of the template.

[0029] Reference Figure 1 、 Figure 2 As shown in the reference and , the Z-axis connecting member includes a support side plate 1 and a Z-axis nano-positioning platform 2. One side of the upper end of the support base 17 is provided with the support side plate 1, and the Z-axis nano-positioning platform 2 is installed on one side of the support side plate 1. The output end of the Z-axis nano-positioning platform 2 is connected to the upper sample holder 3. The Z-axis nano-positioning platform 2 can drive the upper sample holder 3 to move in the Z-axis direction. The Z-axis nano-positioning platform 2 includes a guide rail and a driving member, which is used to drive the upper sample holder 3 to perform a linear movement in the Z-axis direction and is a high-precision linear movement device in the prior art, so no detailed description will be given here.

[0030] Reference Figure 1 、 Figure 2 As shown in the reference and , the X-axis connecting member includes an X-axis nano-positioning platform 16. The other side of the upper end of the support base 17 is provided with the X-axis nano-positioning platform 16, which is used to drive the lower sample holder 10 to move in the X-axis direction. The X-axis nano-positioning platform 16 includes a guide rail and a driving member, which is used to drive the upper sample holder 3 to perform a linear movement in the X-axis direction and is a high-precision linear movement device in the prior art.

[0031] Reference Figure 1 、 Figure 2 As shown in the reference and , the Y-axis connecting member includes a Y-axis nano-positioning platform 14 and a Y-axis displacement connecting plate 15. The output end of the X-axis nano-positioning platform 16 is connected to the Y-axis displacement connecting plate 15, and the Y-axis nano-positioning platform 14 is installed on the upper end of the Y-axis displacement connecting plate 15, which is used to drive the lower sample holder 10 to move in the Y-axis direction. The Y-axis nano-positioning platform 14 includes a guide rail and a driving member, which is used to drive the upper sample holder 3 to perform a linear movement in the Y-axis direction and is a high-precision linear movement device in the prior art.

[0032] Reference Figure 1 、 Figure 2 As shown in the reference and , the R-axis connecting member includes an R-axis nano-positioning platform 12 and an R-axis displacement connecting plate 13. The output end of the Y-axis nano-positioning platform 14 is connected to the R-axis displacement connecting plate 13, and the R-axis nano-positioning platform 12 is installed on the upper end of the R-axis displacement connecting plate 13, which is used to drive the lower sample holder 10 to rotate around the X and Y axes and is a high-precision rotating device in the prior art.

[0033] Reference Figure 1 、 Figure 2As shown, a ceramic heating sheet is installed at the upper end of the sample stage heating table 11, which serves to heat the lower sample stage 10 and further heat the substrate. A thermocouple is also installed on the lower sample stage 10 to control the temperature.

[0034] Furthermore, a cooling device can be connected to the upper sample stage 3 (omitted in the figure), which can cool down and further precisely control the temperature of the imprinting area.

[0035] Reference Figure 1 、 Figure 2 As shown, lower sample holder pressing plates 6 are provided at the upper ends of both sides of the lower sample holder 4, which serve to press down both sides of the lower sample holder 4 to install the lower sample holder 4. Installation bolts 1 are installed on the lower sample holder pressing plates 6 to install the lower sample holder pressing plates 6. One end of each installation bolt 1 penetrates through the lower sample holder pressing plate 6 and is connected to the lower sample stage 10. Upper sample holder pressing plates are provided at the lower ends of both sides of the upper sample holder 7, which serve to press both sides of the upper sample holder 7 to install the upper sample holder 7. Installation bolts 2 are installed on the upper sample holder pressing plates. One end of each installation bolt 2 penetrates through the upper sample holder pressing plate and is connected to the upper sample stage 3.

[0036] The nanoimprinting encapsulation platform of this application uses a five-axis displacement stage piezoelectric module, which provides precise movement in the X, Y, and Z directions, as well as rotation around the X and Y axes. This allows for very precise alignment between the template and the substrate, thus reducing the problem of inaccurate positioning. The piezoelectric module can also precisely control the pressure and temperature during the imprinting process to reduce pattern defects caused by uneven pressure or improper temperature control. In summary, the nanoimprinting encapsulation platform plays an important role in improving the accuracy, efficiency, and flexibility of the vacuum nanoimprinting heating encapsulation technology, helps to solve some problems in the existing technologies, and promotes the application of this technology in a wider range of fields.

[0037] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A nanoimprint packaging platform, characterized in that: include: A support base (17), wherein an upper sample holder (3) is mounted on one side of the upper end of the support base (17) via a Z-axis connecting member, an upper sample holder (7) is arranged at the lower end of the upper sample holder (3), an upper substrate is mounted at the lower end of the upper sample holder (7), an X-axis connecting member is arranged on the other side of the upper end of the support base (17), a Y-axis connecting member is arranged on the X-axis connecting member, an R-axis connecting member is arranged on the Y-axis connecting member, a sample holder heating platform (11) is mounted on the R-axis connecting member, a lower sample holder (10) is mounted on the upper end of the sample holder heating platform (11), a lower sample holder (4) matched with the upper sample holder (7) is arranged on the upper end of the lower sample holder (10), and a lower substrate is mounted on the upper end of the lower sample holder (4).

2. The nanoimprint packaging platform according to claim 1, characterized in that: The Z-axis connecting member comprises a supporting side plate (1) and a Z-axis nanopositioning platform (2); the supporting side plate (1) is mounted on one side of the upper end of the supporting base (17); the Z-axis nanopositioning platform (2) is mounted on one side of the supporting side plate (1); and the output end of the Z-axis nanopositioning platform (2) is connected to the upper sample holder (3).

3. The nanoimprint packaging platform according to claim 2, characterized in that: The X-axis connecting member comprises an X-axis nanopositioning platform (16), and the X-axis nanopositioning platform (16) is arranged on the other side of the upper end of the supporting base (17).

4. The nanoimprint packaging platform according to claim 3, characterized in that: The Y-axis connecting member comprises a Y-axis nanopositioning platform (14) and a Y-axis displacement connecting plate (15); the output end of the X-axis nanopositioning platform (16) is connected to the Y-axis displacement connecting plate (15); and the upper end of the Y-axis displacement connecting plate (15) is mounted with the Y-axis nanopositioning platform (14).

5. The nanoimprint packaging platform according to claim 4, characterized in that: The R-axis connecting member comprises an R-axis nanopositioning platform (12) and an R-axis displacement connecting plate (13); the output end of the Y-axis nanopositioning platform (14) is connected to the R-axis displacement connecting plate (13); the upper end of the R-axis displacement connecting plate (13) is mounted with the R-axis nanopositioning platform (12); and the output end of the R-axis nanopositioning platform (12) is connected to the sample holder heating platform (11).

6. The nanoimprint packaging platform according to claim 5, characterized in that: A ceramic heating plate is installed on the upper end of the sample holder heating platform (11).

7. The nanoimprint packaging platform according to claim 6, characterized in that: The upper ends of both sides of the lower sample tray (4) are provided with lower sample tray pressing plates (6), and the lower sample tray pressing plates (6) are installed with mounting bolts 1. The lower ends of both sides of the upper sample tray (7) are provided with upper sample tray (7) pressing plates, and the upper sample tray (7) pressing plates are installed with mounting bolts 2.

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