Flow control valve and mass flow controller

Abstract

The utility model relates to the technical field of control valves, and provides a flow control valve and a mass flow controller, the flow control valve comprises a valve body, a connecting seat, an electromagnetic actuator, a fixed seat, a first valve element, a second valve element, a movable seat, a first elastic piece and a second elastic piece, and the first valve element is provided with a valve port and is arranged on the valve body; the connecting seat comprises a sealing plate, and the electromagnetic actuator and the fixing seat are located on the two sides of the sealing plate respectively. The first elastic piece is arranged between the second valve element and the fixing base and used for applying elastic force to the second valve element so that the second valve element can block the valve port, and the second valve element is provided with a first magnetic attraction part. The movable seat sleeves the outer side of the fixed seat, the movable seat is provided with a second magnetic attraction part, and an annular sealing part is arranged on the movable seat; the two ends of the second elastic piece are in sealed connection with the sealing plate and the movable base correspondingly. The second elastic piece is used for applying elastic force to the movable base so that the annular sealing part can abut against the surface of the first valve element. According to the flow control valve, the problem of inner leakage of the flow control valve is solved through two times of sealing.

Description

Technical Field

[0001] This application relates to the technical field of control valves, and particularly to a flow control valve and a mass flow controller. Background Art

[0002] A mass flow controller (abbreviated as MFC) is used for precise measurement and accurate control of the mass flow rate of fluids, and is widely used in fields such as semiconductor manufacturing, biopharmaceuticals, environmental monitoring, the petroleum industry, and the chemical industry that require precise control of fluid flow rates.

[0003] The flow control valve is an important component of the mass flow controller. The flow control valve closes the valve by moving the upper valve core downward relative to the lower valve core. However, after the flow control valve has been working for a long time, due to the erosion of the fluid, the sealing surfaces of the upper valve core and the lower valve core may be worn, resulting in the problem of internal leakage in the flow control valve. Utility Model Content

[0004] In view of this, embodiments of this application provide a flow control valve and a mass flow controller to solve the problem of internal leakage in the flow control valve.

[0005] A first aspect of this application provides a flow control valve, which includes a valve body, a connection seat, an electromagnetic actuator, a fixed seat, a first valve core, a second valve core, a movable seat, a first elastic member, and a second elastic member. The first valve core has a valve port and is disposed on the valve body; the connection seat is fixed on the valve body and is arranged corresponding to the first valve core, and the connection seat includes a sealing plate; the electromagnetic actuator is fixed on the connection seat and is on the side of the sealing plate facing away from the first valve core; the fixed seat is disposed on the side of the sealing plate facing the first valve core, and a first fluid passage is provided on the fixed seat; both the second valve core and the first elastic member are installed in the fixed seat, and the first elastic member is disposed between the second valve core and the fixed seat. The first elastic member is used to apply an elastic force to the second valve core to block the valve port. The second valve core has a first magnetic attraction portion that is attracted when the electromagnetic actuator is energized; the movable seat is sleeved outside the fixed seat, and the movable seat has a second magnetic attraction portion that is attracted when the electromagnetic actuator is energized. An annular sealing portion is provided on the side of the movable seat facing the first valve core; the second elastic member is of a cylindrical structure, and both ends of the second elastic member are hermetically connected to the sealing plate and the movable seat respectively, and the second elastic member is used to apply an elastic force to the movable seat so that the annular sealing portion abuts against the surface of the first valve core.

[0006] Beneficial effects of the flow control valve provided by the embodiments of the present application: When not powered on, the flow control valve is in a normally closed state. The second valve core seals the valve port under the elastic force of the first elastic member to achieve the first seal. Both ends of the cylindrical second elastic member are hermetically connected to the sealing plate and the movable seat respectively. The movable seat makes the annular sealing portion abut against the surface of the first valve core under the elastic force of the second elastic member to achieve the second seal. Through the above two seals, the problem of internal leakage in the flow control valve is effectively solved.

[0007] When powered on, the electromagnetic actuator attracts the first magnetic attraction portion and the second magnetic attraction portion. The second valve core moves towards the electromagnetic actuator against the elastic force of the first elastic member to open the valve port. The movable seat moves towards the electromagnetic actuator against the elastic force of the second elastic member to make the annular sealing portion disengage from the surface of the first valve core. At the same time, a first fluid passage is provided on the fixed seat to ensure that the fluid can flow from the fluid inlet to the fluid outlet.

[0008] In some embodiments, the fixed seat includes a first seat body and a second seat body. The first elastic member is a shrapnel clamped between the first seat body and the second seat body. The second valve core is fixed on the shrapnel. One end of the first seat body away from the second seat body abuts against the sealing plate. One end of the second seat body away from the first seat body abuts against the first valve core.

[0009] Beneficial effects of adopting the above technical solution: By clamping the shrapnel between the first seat body and the second seat body, it is beneficial to fix the shrapnel on the fixed seat. Since one end of the first seat body away from the second seat body abuts against the sealing plate and one end of the second seat body away from the first seat body abuts against the first valve core, the fixed seat can be pressed on the first valve core through the sealing plate, making the installation of the fixed seat relatively simple.

[0010] In some embodiments, the valve port is a conical port. The second valve core includes a conical sealing section adapted to the conical port. A limiting step is provided at one end of the first seat body close to the second seat body and / or at one end of the second seat body close to the first seat body. There is a moving gap between the limiting step and the shrapnel in a direction parallel to the shrapnel.

[0011] Beneficial effects of adopting the above technical solution: Since there is a moving gap between the limiting step and the shrapnel in a direction parallel to the shrapnel, the second valve core fixed on the shrapnel can translate within a certain range. Under the interaction of the conical port and the conical sealing section, automatic centering of the second valve core and the first valve core is achieved, thereby improving the sealing effect.

[0012] In some embodiments, the second elastic member is located outside the movable seat.

[0013] Advantages of adopting the above technical solution: Compared with the second elastic member being inside the movable seat, the movable seat is closer to the center line of the electromagnetic actuator, which is beneficial to increasing the magnetic attraction force received by the movable seat.

[0014] In some embodiments, an avoidance annular space for avoiding the second magnetic attraction portion is provided on the fixed seat.

[0015] Advantages of adopting the above technical solution: The second magnetic attraction portion can extend towards the central position of the fixed seat to increase the size of the second magnetic attraction portion and further increase the magnetic attraction force received by the movable seat.

[0016] In some embodiments, a connection step for connecting with the second end of the second elastic member is provided on the movable seat.

[0017] Advantages of adopting the above technical solution: By providing a connection step on the movable seat, it is beneficial to connect the second end of the second elastic member with the movable seat.

[0018] In some embodiments, the second elastic member is formed by welding a plurality of disc springs.

[0019] Advantages of adopting the above technical solution: After welding a plurality of disc springs, a cylindrical structure is formed, which has a certain elastic force and can achieve sealing after being hermetically connected to the sealing plate and the movable seat at both ends respectively.

[0020] In some embodiments, the annular sealing portion is a sealing ring.

[0021] Advantages of adopting the above technical solution: The sealing ring has a good sealing effect and low cost.

[0022] In some embodiments, the connection seat includes a second connection seat and a first connection seat for pressing and fixing the second connection seat on the valve body, and the sealing plate is arranged on the second connection seat; a plurality of support platforms for supporting the second connection seat are provided at the edge of the first valve core, and the plurality of support platforms are arranged at intervals along the circumferential direction of the first valve core, and a second fluid passage is formed between adjacent two support platforms.

[0023] Advantages of adopting the above technical solution: Dividing the connection seat into a first connection seat and a second connection seat is beneficial to arranging the sealing plate on the second connection seat; the second connection seat is supported by a plurality of support platforms at the edge of the first valve core to ensure the stability of the second connection seat after being pressed by the first connection seat.

[0024] In the second aspect of the present application, a mass flow controller is proposed. The mass flow controller includes a flow sensor and the flow control valve as described in the first aspect, and the flow sensor is in signal connection with the flow control valve.

[0025] The mass flow controller adopts any one or more embodiments of the above-mentioned flow control valves, and thus has the beneficial effects of the above embodiments, which will not be elaborated here one by one.

[0026] The above description is only an overview of the technical solution of this application. In order to be able to understand the technical means of this application more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of this application more obvious and understandable, the following specific embodiments of this application are specifically given. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required for use in the embodiments or the description of conventional technologies. Obviously, the drawings in the following description are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0028] Figure 1 is a schematic structural diagram of a flow control valve provided by some embodiments of this application;

[0029] Figure 2 is Figure 1 a sectional view taken along the A-A direction of the shown flow control valve;

[0030] Figure 3 is Figure 2 an enlarged view of the shown flow control valve at B;

[0031] Figure 4 is Figure 3 a schematic structural diagram of the second valve core and the movable seat respectively sealingly cooperating with the first valve core in ;

[0032] Figure 5 is Figure 4 the external view of ;

[0033] Figure 6 is Figure 5 a schematic structural diagram of the first valve core in ;

[0034] Figure 7 is Figure 5 a schematic structural diagram of the fixed seat, the movable seat and the first elastic member in.

[0035] The meanings of the marks in the figure are as follows:

[0036] 100, flow control valve;

[0037] 10, valve body; 11, fluid inlet; 12, fluid outlet; 13, groove;

[0038] 20. Connecting seat; 21. First connecting seat; 22. Second connecting seat; 221. Sealing plate

[0039] 30. Electromagnetic actuator; 31. Housing; 32. Coil; 33. Magnetic core; 34. Locking nut

[0040] 40. Fixed seat; 41. First seat body; 411. Avoidance annulus; 412. End plate; 42. Second seat body; 421. First fluid passage; 422. Positioning post; 43. Moving gap

[0041] 50. First valve core; 51. Valve port; 52. Support platform; 53. Second fluid passage; 54. Positioning hole

[0042] 60. Second valve core; 61. First magnetic attraction part; 62. Conical sealing section

[0043] 70. Moving seat; 71. Second magnetic attraction part; 72. Annular sealing part; 73. Connecting step

[0044] 80. First elastic member

[0045] 90. Second elastic member Detailed implementation manner

[0046] The embodiments of the technical solutions of the present application will be described in detail below with reference to the accompanying drawings. The following embodiments are only used to illustrate the technical solutions of the present application more clearly, so they are only examples and cannot be used to limit the protection scope of the present application.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion.

[0048] In the description of the embodiments of the present application, technical terms such as "first" and "second" are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity, specific order or primary-secondary relationship of the indicated technical features. In the description of the embodiments of the present application, "a plurality" means more than two unless otherwise specifically defined.

[0049] Reference to "embodiments" in this document means that the specific features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment each time, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0050] In the description of the embodiments of the present application, the term "and / or" is merely a description of the association relationship between associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally represents an "or" relationship between the associated objects before and after.

[0051] In the description of the embodiments of the present application, the term "plurality" refers to two or more (including two). Similarly, "multiple groups" refers to two or more groups (including two groups), and "multiple pieces" refers to two or more pieces (including two pieces).

[0052] In the description of the embodiments of the present application, the orientation or positional relationship indicated by technical terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the embodiments of the present application.

[0053] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installation", "connection", "connection", "fixation", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can also be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0054] A first aspect of the present application proposes a flow control valve, which is applied to fluid control systems in industries such as oil, natural gas, chemical industry, electric power, metallurgy, water treatment, aerospace, semiconductor, pharmaceutical, and medical industries. Please also refer to Figures 1 to 3, the flow control valve 100 includes a valve body 10, a connection seat 20, an electromagnetic actuator 30, a fixed seat 40, a first valve core 50, a second valve core 60, a movable seat 70, a first elastic member 80 and a second elastic member 90. The first valve core 50 has a valve port 51 and is arranged on the valve body 10; the connection seat 20 is fixed on the valve body 10 and is arranged corresponding to the first valve core 50, and the connection seat 20 includes a sealing plate 221; the electromagnetic actuator 30 is fixed on the connection seat 20 and is on the side of the sealing plate 221 facing away from the first valve core 50; the fixed seat 40 is arranged on the side of the sealing plate 221 facing the first valve core 50, and a first fluid passage 421 is provided on the fixed seat 40; both the second valve core 60 and the first elastic member 80 are installed in the fixed seat 40, the first elastic member 80 is arranged between the second valve core 60 and the fixed seat 40, and the first elastic member 80 is used to apply an elastic force to the second valve core 60 to block the valve port 51, and the second valve core 60 has a first magnetic attraction portion 61 that is attracted when the electromagnetic actuator 30 is energized; the movable seat 70 is sleeved outside the fixed seat 40, the movable seat 70 has a second magnetic attraction portion 71 that is attracted when the electromagnetic actuator 30 is energized, and an annular sealing portion 72 is provided on the side of the movable seat 70 facing the first valve core 50; the second elastic member 90 is of a cylindrical structure, and both ends of the second elastic member 90 are hermetically connected to the sealing plate 221 and the movable seat 70 respectively, and the second elastic member 90 is used to apply an elastic force to the movable seat 70 so that the annular sealing portion 72 abuts against the surface of the first valve core 50.

[0055] The valve body 10 is made of a corrosion-resistant material, for example, stainless steel (such as 304, 316), Hastelloy, etc.

[0056] Optionally, a groove 13 is provided on the valve body 10, the first valve core 50 is located in the groove 13, and a first sealing ring is provided between the bottom wall of the groove 13 and the bottom of the first valve core 50 to prevent external leakage. Among them, the first sealing ring can be a rubber sealing ring or a metal sealing ring. The valve port 51 is provided at the top of the first valve core 50, and a fluid inlet 11 and a fluid outlet 12 are also provided on the valve body 10. When the valve port 51 is opened, the fluid can flow from the fluid inlet 11 to the fluid outlet 12; when the valve port 51 is closed, the fluid passage is blocked, and the fluid cannot flow from the fluid inlet 11 to the fluid outlet 12. Among them, the fluid can be a gas or a liquid.

[0057] Optionally, the connecting seat 20 includes a first connecting seat 21 and a second connecting seat 22. Both the first connecting seat 21 and the second connecting seat 22 are annular structures. A sealing plate 221 is provided on the second connecting seat 22 to prevent fluid from flowing towards the electromagnetic actuator 30. It can be understood that a second sealing ring is provided between the valve body 10 and the second connecting seat 22. Among them, the second sealing ring can be a rubber sealing ring or a metal sealing ring. The first connecting seat 21 and the second connecting seat 22 are fixed to the valve body 10 by bolts; alternatively, a second sealing ring may not be provided between the valve body 10 and the second connecting seat 22, and the second connecting seat 22 is fixed to the valve body 10 by welding. At this time, the first connecting seat 21 can be fixed to the second connecting seat 22 by welding or can be fixed to the second connecting seat 22 by bolts.

[0058] Among them, the connecting seat 20 is arranged corresponding to the first valve core 50, that is, the connecting seat 20 is installed on the edge of the groove 13.

[0059] Optionally, the electromagnetic actuator 30 includes a housing 31, a coil 32, and a magnetic core 33. Both the coil 32 and the magnetic core 33 are inside the housing 31, and the coil 32 is wound around the magnetic core 33; after the coil 32 is energized, the magnetic core 33 can generate an electromagnetic force to attract the first magnetic attraction part 61 and the second magnetic attraction part 71.

[0060] Among them, the voltage level of the coil 32 is selected according to the application environment. For example, DC 12V, DC 24V, AC 110V, etc. The power of the coil 32 is selected according to the required magnetic field strength to ensure sufficient suction force to drive the second valve core 60 and the movable seat 70.

[0061] The electromagnetic actuator 30 is on the side of the sealing plate 221 facing away from the first valve core 50, that is, the electromagnetic actuator 30 is on the upper side of the sealing plate 221. Optionally, the electromagnetic actuator 30 further includes a locking nut 34. The housing 31 is threadedly connected to the first connecting seat 21, and the magnetic core 33 is pressed against the sealing plate 221, and then locked by the locking nut 34 to fix the electromagnetic actuator 30 on the first connecting seat 21; by adjusting the depth of the housing 31 screwed into the first connecting seat 21, the fixing force of the magnetic core 33 can be adjusted. Of course, if the electromagnetic actuator 30 does not include the locking nut 34, the housing 31 can be fixed to the first connecting seat 21 by welding, clamping, crimping, fastener connection, etc.

[0062] The fixing seat 40 is provided on the side of the sealing plate 221 facing the first valve core 50, that is, the fixing seat 40 is on the lower side of the sealing plate 221, and at the same time, the fixing seat 40 is on the upper side of the first valve core 50. Among them, a first fluid passage 421 is provided on the fixing seat 40 so that after the valve port 51 is opened, fluid can flow from the inside of the fixing seat 40 to the outside of the fixing seat 40.

[0063] The second valve core 60 has a first magnetic attraction part 61. For example, the first magnetic attraction part 61 can be an armature. It can be understood that when the electromagnetic actuator 30 is not powered on, the first elastic member 80 applies an elastic force to the second valve core 60 to move the second valve core 60 downward to block the valve port 51. At this time, the sealing surface of the second valve core 60 is in close contact with the sealing surface of the first valve core 50. When the electromagnetic actuator 30 is powered on, the first magnetic attraction part 61 of the second valve core 60 is subjected to the magnetic attraction force of the electromagnetic actuator 30, so that the second valve core 60 moves upward against the elastic force of the first elastic member 80 to open the valve port 51. At this time, the sealing surface of the second valve core 60 is not in contact with the sealing surface of the first valve core 50. Moreover, by controlling the magnetic attraction force of the electromagnetic actuator 30, the flow rate can be controlled. Optionally, both the first valve core 50 and the second valve core 60 are cylindrical.

[0064] The movable seat 70 has a second magnetic attraction part 71. For example, the second magnetic attraction part 71 can be an armature. It can be understood that when the electromagnetic actuator 30 is not powered on, the second elastic member 90 applies an elastic force to the movable seat 70 to move the movable seat 70 downward, so that the annular sealing part 72 abuts against the surface of the first valve core 50. When the electromagnetic actuator 30 is powered on, the second magnetic attraction part 71 of the movable seat 70 is subjected to the magnetic attraction force of the electromagnetic actuator 30, so that the movable seat 70 moves upward against the elastic force of the second elastic member 90, so that the annular sealing part 72 disengages from the surface of the first valve core 50.

[0065] It should be noted that since the second elastic member 90 is a cylindrical structure, and the two ends of the second elastic member 90 are respectively sealed and connected to the sealing plate 221 and the movable seat 70, therefore, the fluid can only flow between the annular sealing part 72 and the surface of the first valve core 50 when the annular sealing part 72 disengages from the surface of the first valve core 50.

[0066] The beneficial effects of the flow control valve 100 provided by the embodiment of the present application: When not powered on, the flow control valve 100 is in a normally closed state. The second valve core 60 blocks the valve port 51 under the elastic force of the first elastic member 80 to achieve the first seal. The two ends of the cylindrical second elastic member 90 are respectively sealed and connected to the sealing plate 221 and the movable seat 70. The movable seat 70 makes the annular sealing part 72 abut against the surface of the first valve core 50 under the elastic force of the second elastic member 90 to achieve the second seal. Through the above two seals, the problem of internal leakage of the flow control valve 100 can be effectively solved.

[0067] When powered on, the electromagnetic actuator 30 attracts the first magnetic attraction part 61 and the second magnetic attraction part 71. The second valve core 60 moves towards the electromagnetic actuator 30 against the elastic force of the first elastic member 80 to open the valve port 51. The movable seat 70 moves towards the electromagnetic actuator 30 against the elastic force of the second elastic member 90, so that the annular sealing part 72 disengages from the surface of the first valve core 50. At the same time, a first fluid passage 421 is provided on the fixed seat 40 to ensure that the fluid can flow from the fluid inlet 11 to the fluid outlet 12.

[0068] Please refer to Figure 3 、 Figure 6 and Figure 7 In some embodiments, the fixing seat 40 includes a first seat body 41 and a second seat body 42. The first elastic member 80 is a spring plate clamped between the first seat body 41 and the second seat body 42, and the second valve core 60 is fixed on the spring plate; one end of the first seat body 41 away from the second seat body 42 abuts against the sealing plate 221, and one end of the second seat body 42 away from the first seat body 41 abuts against the first valve core 50.

[0069] It can be understood that the second valve core 60 can be fixed on the spring plate by means of welding, fastener connection, snap connection, etc.

[0070] Among them, the stiffness of the spring plate is selected according to the mass and reset force of the second valve core 60, and the material is stainless steel or alloy steel with good corrosion resistance and fatigue resistance.

[0071] Optionally, the second seat body 42 is of a cylindrical structure. A plurality of positioning posts 422 are provided on the second seat body 42, and the plurality of positioning posts 422 are arranged at intervals along the circumferential direction of the second seat body 42. A first fluid passage 421 is formed between two adjacent positioning posts 422. Correspondingly, a plurality of positioning holes 54 are provided on the first valve core 50, and the plurality of positioning posts 422 are respectively inserted into the plurality of positioning holes 54 to prevent the second seat body 42 from translating and rotating.

[0072] The first seat body 41 is of a cylindrical structure, and an end plate 412 is provided at the upper end of the first seat body 41. The first seat body 41 abuts against the sealing plate 221 through the end plate 412. Among them, there is a certain distance between the second valve core 60 and the end plate 412 so that the second valve core 60 can move upward for a certain distance.

[0073] By clamping the spring plate between the first seat body 41 and the second seat body 42, it is beneficial to fix the spring plate on the fixing seat 40; since one end of the first seat body 41 away from the second seat body 42 abuts against the sealing plate 221 and one end of the second seat body 42 away from the first seat body 41 abuts against the first valve core 50, therefore, the fixing seat 40 can be pressed on the first valve core 50 through the sealing plate 221, making the installation of the fixing seat 40 relatively simple.

[0074] In other embodiments, the fixing seat 40 can be of an integral structure, and the first elastic member 80 is located between the first valve core 50 and the end plate 412 of the fixing seat 40.

[0075] Please refer to Figure 3, in some embodiments, the valve port 51 is a conical port, and the second valve core 60 includes a conical sealing section 62 adapted to the conical port; a limiting step is provided at one end of the first seat body 41 close to the second seat body 42 and / or at one end of the second seat body 42 close to the first seat body 41; there is a moving gap 43 between the limiting step and the elastic piece in a direction parallel to the elastic piece.

[0076] It can be understood that limiting steps can be provided at both the end of the first seat body 41 close to the second seat body 42 and the end of the second seat body 42 close to the first seat body 41. At this time, under the limitation of the elastic piece, the first seat body 41 does not need to be connected to the second seat body 42 and will not translate either; or, a limiting step is provided at the end of the first seat body 41 close to the second seat body 42 or the end of the second seat body 42 close to the first seat body 41. At this time, the first seat body 41 and the second seat body 42 need to be connected together by welding, fasteners, clamping, etc. to prevent the first seat body 41 from translating.

[0077] Optionally, the conical surface angles of the conical port and the conical sealing section 62 are designed to be between 30° and 45°, and are precisely machined and polished to improve the sealing performance.

[0078] Since there is a moving gap 43 between the limiting step and the elastic piece in a direction parallel to the elastic piece, the second valve core 60 fixed on the elastic piece can translate within a certain range. Under the interaction of the conical surfaces of the conical port and the conical sealing section 62, automatic centering of the second valve core 60 and the first valve core 50 is achieved, thereby improving the sealing effect and further reducing the risk of internal leakage.

[0079] Moreover, the conical sealing surface is suitable for high-pressure and high-temperature environments, can withstand large pressure and temperature changes; the conical sealing surface is usually made of a material with relatively high hardness and has excellent wear resistance, and is suitable for frequent switching and harsh working conditions.

[0080] As Figure 3 shown, in some embodiments, the second elastic member 90 is located outside the movable seat 70.

[0081] Compared with the second elastic member 90 being located inside the movable seat 70, the movable seat 70 is closer to the center line of the electromagnetic actuator 30, which is beneficial to increasing the magnetic suction force received by the movable seat 70. Among them, there is a certain distance between the second magnetic attraction portion 71 and the sealing plate 221, so that the movable seat 70 can move upward by a certain distance.

[0082] Of course, in other embodiments, when the magnetic suction force of the electromagnetic actuator 30 meets the requirements, the second elastic member 90 can also be located inside the movable seat 70.

[0083] Please also refer to Figure 3 and Figure 4, in some embodiments, an avoidance annular space 411 for avoiding the second magnetic attraction part 71 is provided on the fixed seat 40.

[0084] By adopting the above technical solution, the second magnetic attraction part 71 can extend towards the center position of the fixed seat 40 to increase the size of the second magnetic attraction part 71, and further increase the magnetic attraction force received by the movable seat 70.

[0085] Optionally, the size of the second magnetic attraction part 71 is larger than that of the first magnetic attraction part 61. Therefore, after the electromagnetic actuator 30 is powered on, the electromagnetic force received by the movable seat 70 is greater, so that the upward movement distance of the movable seat 70 is greater, ensuring that the gap between the annular sealing part 72 and the upper surface of the first valve core 50 is greater than the gap between the conical sealing section 62 and the valve port 51, and will not affect the fluid flow. Further, the second elastic member 90 has a relatively smaller elastic modulus than the first elastic member 80. According to Hooke's law, after the electromagnetic actuator 30 is powered on, the movable seat 70 has a greater upward displacement than the second valve core 60.

[0086] In other embodiments, when the magnetic attraction force of the electromagnetic actuator 30 meets the requirements, the avoidance annular space 411 may not be provided on the fixed seat 40.

[0087] Please refer to Figure 3 and Figure 4 , in some embodiments, a connection step 73 connected to the second end of the second elastic member 90 is provided on the movable seat 70.

[0088] Optionally, the connection step 73 is an annular step.

[0089] By providing the connection step 73 on the movable seat 70, it is beneficial to connect the second end of the second elastic member 90 to the movable seat 70.

[0090] Please refer to Figure 3 and Figure 4 , in some embodiments, the second elastic member 90 is formed by welding a plurality of disc springs.

[0091] Optionally, the upper end of the second elastic member 90 is welded and connected to the sealing plate 221, and the lower end of the second elastic member 90 is welded and connected to the connection step 73.

[0092] By adopting the above technical solution, a plurality of disc springs are welded to form a cylindrical structure, which has a certain elastic force and can achieve sealing after being hermetically connected to the sealing plate 221 and the movable seat 70 at both ends respectively.

[0093] In some embodiments, the annular sealing part 72 is a sealing ring.

[0094] Optionally, an annular groove is provided on the lower end surface of the movable seat 70, and the sealing ring is installed in the annular groove.

[0095] The sealing ring can be made of a material with high anti - internal leakage performance, for example, fluororubber.

[0096] By adopting the above - mentioned technical solution, the sealing effect of the sealing ring is good and the cost is relatively low.

[0097] In other embodiments, the annular sealing portion 72 can be a sealing plane provided at the lower end of the movable seat 70, and the flatness and smoothness of this sealing plane are relatively high to ensure good sealing.

[0098] Please also refer to Figure 2 、 Figure 4 、 Figure 5 and Figure 6 In some embodiments, the connecting seat 20 includes a second connecting seat 22 and a first connecting seat 21 for pressing and fixing the second connecting seat 22 on the valve body 10. The sealing plate 221 is provided on the second connecting seat 22; a plurality of support platforms 52 for supporting the second connecting seat 22 are provided at the edge of the first valve core 50. The plurality of support platforms 52 are arranged at intervals along the circumferential direction of the first valve core 50, and a second fluid passage 53 is formed between two adjacent support platforms 52.

[0099] Optionally, the first connecting seat 21 is provided with bolt holes, and the first connecting seat 21 is fixed on the valve body 10 by bolts. Since the first connecting seat 21 presses and fixes the second connecting seat 22 on the valve body 10, there is no need to process bolt holes on the second connecting seat 22.

[0100] By providing the sealing plate 221 on the second connecting seat 22, there is no need to provide a sealing ring between the first connecting seat 21 and the second connecting seat 22, reducing the leakage points.

[0101] By adopting the above - mentioned technical solution, the connecting seat 20 is divided into the first connecting seat 21 and the second connecting seat 22, which is beneficial to the arrangement of the sealing plate 221 on the second connecting seat 22; the second connecting seat 22 is supported by a plurality of support platforms 52 at the edge of the first valve core 50, ensuring the stability of the second connecting seat 22 after being pressed by the first connecting seat 21.

[0102] In the second aspect of the present application, a mass flow controller is proposed. The mass flow controller includes a flow sensor and a flow control valve 100 as described in the first aspect. The flow sensor is in signal connection with the flow control valve 100. Among them, the flow rate is detected by the flow sensor to control the opening degree of the flow control valve 100.

[0103] This mass flow controller adopts any one or more embodiments of the above - mentioned flow control valve 100, and thus has the beneficial effects of the above - mentioned embodiments, which will not be elaborated here one by one.

[0104] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A flow control valve, characterized in that: The invention comprises a valve body, a connecting seat, an electromagnetic actuator, a fixed seat, a first valve core, a second valve core, a movable seat, a first elastic member and a second elastic member, wherein the first valve core has a valve port and is arranged on the valve body; the connecting seat is fixed on the valve body and arranged corresponding to the first valve core, and the connecting seat comprises a sealing plate; the electromagnetic actuator is fixed on the connecting seat and is located on the side of the sealing plate facing away from the first valve core; the fixed seat is arranged on the side of the sealing plate facing the first valve core, and a first fluid channel is provided on the fixed seat; the second valve core and the first elastic member are both installed in the fixed seat, and the first elastic member is arranged on the second valve core and the fixed seat, the first elastic member is used to apply elastic force to the second valve core so that it blocks the valve port, and the second valve core has a first magnetic attraction portion that is attracted when the electromagnetic actuator is energized; the movable seat is sleeved on the outer side of the fixed seat, and the movable seat has a second magnetic attraction portion that is attracted when the electromagnetic actuator is energized, and an annular sealing portion is provided on the side of the movable seat facing the first valve core; the second elastic member is a cylindrical structure, and the two ends of the second elastic member are respectively sealed and connected to the sealing plate and the movable seat, and the second elastic member is used to apply elastic force to the movable seat so that the annular sealing portion abuts against the surface of the first valve core.

2. The flow control valve according to claim 1, characterized in that: The fixed seat includes a first seat body and a second seat body, the first elastic member is a spring sheet clamped between the first seat body and the second seat body, and the second valve core is fixed on the spring sheet; one end of the first seat body away from the second seat body abuts against the sealing plate, and one end of the second seat body away from the first seat body abuts against the first valve core.

3. The flow control valve according to claim 2, characterized in that: The valve port is a conical port, and the second valve core includes a conical sealing section adapted to the conical port; a limiting step is provided at one end of the first seat body close to the second seat body and / or one end of the second seat body close to the first seat body; a movable gap is provided between the limiting step and the spring sheet in a direction parallel to the spring sheet.

4. The flow control valve according to claim 1, characterized in that: The second elastic member is located outside the movable seat.

5. The flow control valve according to claim 4, characterized in that: The fixing seat is provided with an escape ring for escaping the second magnetic attraction part.

6. The flow control valve according to claim 4, characterized in that: The movable seat is provided with a connecting step connected to the second end of the second elastic member.

7. The flow control valve according to any one of claims 1 to 6, characterized in that: The second elastic member is formed by welding a plurality of butterfly springs.

8. The flow control valve according to any one of claims 1 to 6, characterized in that: The annular sealing portion is a sealing ring.

9. The flow control valve according to any one of claims 1 to 6, characterized in that: The connecting seat includes a second connecting seat and a first connecting seat for pressing and fixing the second connecting seat on the valve body, and the sealing plate is arranged on the first connecting seat; the edge of the first valve core is provided with a plurality of support platforms for supporting the first connecting seat, and the plurality of support platforms are arranged at intervals along the circumference of the first valve core, and a second fluid channel is formed between two adjacent support platforms.

10. A mass flow controller, characterized in that: It comprises a flow sensor and a flow control valve as described in any one of claims 1 to 9, wherein the flow sensor is connected to the flow control valve signal.

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