Preheating assembly and wire welding machine

Abstract

The utility model provides a preheating assembly and a wire bonder, the preheating assembly comprises a first preheating plate, and a second preheating plate or a heat insulation member arranged at an interval with the first preheating plate along a first direction; a heat insulation structure is arranged on the heat insulation piece, and a heat radiation resisting structure is arranged on the side face, close to the first preheating plate, of the heat insulation piece. According to the preheating device, the first preheating plate and the second preheating plate can be arranged in the first direction in a spaced mode, the two preheating plates emit heat at the same time, and the two sides of a material to be heated can be preheated at the same time; or the first preheating plate and the heat insulation piece can be arranged at an interval in the first direction, heat emitted by the first preheating plate preheats the first side of the to-be-heated material, and an anti-heat-radiation structure is arranged on the side face, close to the first preheating plate, of the heat insulation piece; in this way, the heat radiation reflecting structure can reflect heat emitted by the first preheating plate to the second side of the to-be-heated material, and the two sides of the to-be-heated material can be preheated at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of wire bonding machines, in particular to a preheating component and a wire bonding machine. Background Art

[0002] The preheating component can be applied to many devices (such as wire bonding machines) to preheat the material to be heated so that the material to be heated meets the usage requirements. Most semiconductor wire bonding machines on the market adopt the wire bonding process, which requires using heat, pressure, ultrasonic energy, and vacuum adsorption materials to tightly weld the metal wire to the substrate pad. The quality of heat reception of the material plays a key role in the wire bonding quality.

[0003] The current preheating component generally uses a preheating plate to directly preheat the material to be heated, and there is a situation where the material to be heated is not fully heated. When the material to be heated is sent to the heating area, the material to be heated will expand due to heat, resulting in the coordinate deviation of the material to be heated, and further resulting in offset welding. Summary of the Utility Model

[0004] The utility model provides a preheating component and a wire bonding machine to solve the problem that the material to be heated is not fully heated when the existing preheating component is preheating.

[0005] A preheating component includes a first preheating plate, and further includes a second preheating plate or a heat insulation member spaced from the first preheating plate along a first direction;

[0006] The heat insulation member is provided with a heat insulation structure, and the side surface of the heat insulation member close to the first preheating plate is provided with an anti-heat radiation structure.

[0007] Preferably, the heat insulation structure includes a heat insulation layer, and the heat insulation layer is arranged on the side surface of the heat insulation member far from the first preheating plate.

[0008] Preferably, the heat insulation structure includes a heat insulation cavity arranged inside the heat insulation member.

[0009] Preferably, the anti-heat radiation structure includes a mirror polishing layer or an anti-heat radiation coating.

[0010] Preferably, the preheating component further includes an adjusting member;

[0011] The adjusting member is connected to the second preheating plate and is used to adjust the distance between the second preheating plate and the first preheating plate;

[0012] Or, the adjusting member is connected to the heat insulation member and is used to adjust the distance between the heat insulation member and the first preheating plate;

[0013] Alternatively, the adjusting member is in contact with the first preheating plate and is used to adjust the distance between the first preheating plate and the second preheating plate or the heat insulation member.

[0014] A wire bonding machine includes a base, two slide rail assemblies, and the preheating assembly as described above.

[0015] The two slide rail assemblies are oppositely arranged on the base along a second direction.

[0016] The preheating assembly is arranged between the two slide rail assemblies and is used to preheat the material to be heated.

[0017] Preferably, the slide rail assembly includes a slide rail main body, a fixed guide rail, and a slider; the slide rail main body is fixed on the slider, the fixed guide rail is fixed on the base, and the slider is movably mounted on the fixed guide rail along the second direction.

[0018] Preferably, a through groove penetrating along the second direction is provided on the slide rail assembly; the first preheating plate of the preheating assembly is inserted into the through groove, and the heat insulation member or the second preheating plate of the preheating assembly is mounted on the slide rail assembly.

[0019] Preferably, the wire bonding machine further includes a guiding fastener. A guiding groove is provided on the heat insulation member or the second preheating plate along the second direction. The guiding fastener is inserted into the guiding groove and fixed on the slide rail assembly.

[0020] Preferably, the heat insulation member or the second preheating plate includes a first main board and a shielding board; the guiding groove is provided on the first main board.

[0021] The shielding board is mounted on the first main board and is used to shield the guiding groove.

[0022] The preheating component provided by the embodiment of the present utility model includes a first preheating plate, which is used to preheat the material to be heated; the preheating component further includes a second preheating plate or a heat insulation member, and the second preheating plate or the heat insulation member is spaced apart from the first preheating plate along a first direction to form a preheating zone. Specifically, the first preheating plate and the second preheating plate can be spaced apart along the first direction, and the two preheating plates emit heat simultaneously, so that the two sides of the material to be heated can be preheated simultaneously; alternatively, the first preheating plate and the heat insulation member can be spaced apart along the first direction. The heat emitted by the first preheating plate preheats the first side of the material to be heated, and an anti-thermal radiation structure is provided on the side of the heat insulation member close to the first preheating plate. In this way, the anti-thermal radiation structure can reflect the heat emitted by the first preheating plate to the second side of the material to be heated, so that the two sides of the material to be heated can be preheated simultaneously. In addition, a heat insulation structure is provided on the heat insulation member, which can block the heat from dissipating from the heat insulation member, reduce the heat dissipation efficiency, and improve the preheating effect on the material to be heated. The above two layout structures can both realize preheating the two sides of the material to be heated simultaneously, so as to ensure that the material to be heated is uniformly and sufficiently heated, and avoid the material to be heated from expanding due to heating in the later stage, which affects the use effect of the material to be heated. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments of the present utility model will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 is an axonometric view of a wire bonding machine in an embodiment of the present utility model;

[0025] Figure 2 is an axonometric view of a heat insulation member in an embodiment of the present utility model;

[0026] Figure 3 is an axonometric view of a partial structure of a wire bonding machine in an embodiment of the present utility model.

[0027] Wherein, 1, first preheating plate; 2, heat insulation member; 21, first main board; 22, shielding plate; 3, base; 4, slide rail assembly; 41, slide rail body; 42, fixed guide rail; 43, slider; 5, through groove; 6, guiding groove; 7, heating plate; 8, avoidance groove. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] In order to make the technical problems, technical solutions and beneficial effects solved by the present utility model more clearly understood, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "radial", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0030] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0031] An embodiment of the present utility model provides a preheating assembly. Refer to Figure 1 and Figure 2 , the preheating assembly includes a first preheating plate 1, and further includes a second preheating plate or a heat insulation member 2 arranged at an interval with the first preheating plate 1 in a first direction; the heat insulation member 2 is provided with a heat insulation structure, and the side surface of the heat insulation member 2 close to the first preheating plate 1 is provided with an anti-heat radiation structure.

[0032] Among them, the first direction is perpendicular to the first preheating plate 1.

[0033] As an example, the preheating component can be applied to many devices (such as wire bonding machines) to preheat the material to be heated so that the material to be heated meets the usage requirements. The preheating component includes a first preheating plate 1 for preheating the material to be heated; the preheating component further includes a second preheating plate or a heat insulation member 2, and the second preheating plate or the heat insulation member 2 is spaced from the first preheating plate 1 in a first direction to form a preheating zone. Specifically, the first preheating plate 1 and the second preheating plate can be spaced in the first direction, and the two preheating plates emit heat simultaneously to preheat both sides of the material to be heated at the same time; alternatively, the first preheating plate 1 and the heat insulation member 2 can be spaced in the first direction, and the heat emitted by the first preheating plate 1 preheats the first side of the material to be heated. A heat anti-radiation structure is provided on the side of the heat insulation member 2 close to the first preheating plate 1, so that the heat anti-radiation structure can reflect the heat emitted by the first preheating plate 1 to the second side of the material to be heated, and both sides of the material to be heated can be preheated at the same time. In addition, a heat insulation structure is provided on the heat insulation member 2 to block the heat from dissipating from the heat insulation member 2, reducing the heat dissipation efficiency and improving the preheating effect on the material to be heated. The above two layout structures can both achieve preheating both sides of the material to be heated at the same time, ensuring that the material to be heated is uniformly and sufficiently heated, and avoiding the thermal expansion of the material to be heated during later heating, which affects the usage effect of the material to be heated.

[0034] In one embodiment, the heat insulation structure includes a heat insulation layer provided on the side of the heat insulation member 2 away from the first preheating plate 1.

[0035] As an example, the first structural form of the heat insulation structure is introduced, which specifically includes a heat insulation layer. During installation, the heat insulation layer is provided on the side of the heat insulation member 2 away from the first preheating plate 1 and is arranged opposite to the heat anti-radiation structure, so that the heat can be blocked from dissipating from the heat insulation member 2, reducing the heat dissipation efficiency and improving the preheating effect on the material to be heated. Among them, the heat insulation layer can be a heat insulation film or other heat insulation materials to reduce the heat loss of the heat insulation member 2.

[0036] In one embodiment, the heat insulation structure includes a heat insulation cavity provided inside the heat insulation member 2.

[0037] As an example, the second structural form of the heat insulation structure is introduced, which specifically includes a heat insulation cavity provided inside the heat insulation member 2. The heat insulation cavity can block the heat from dissipating from the heat insulation member 2, reducing the heat dissipation efficiency and improving the preheating effect on the material to be heated.

[0038] In one embodiment, the heat anti-radiation structure includes a mirror-polished layer or a heat anti-radiation coating.

[0039] As an example, the anti-thermal radiation structure can adopt a mirror-polished layer or an anti-thermal radiation coating. As long as the heat emitted by the first preheating plate 1 can be reflected to the second side of the material to be heated, the two sides of the material to be heated can be preheated simultaneously.

[0040] In one embodiment, the preheating assembly further includes an adjusting member; the adjusting member is connected to the second preheating plate and is used to adjust the distance between the second preheating plate and the first preheating plate 1; alternatively, the adjusting member is connected to the heat insulation member 2 and is used to adjust the distance between the heat insulation member 2 and the first preheating plate 1; alternatively, the adjusting member is connected to the first preheating plate 1 and is used to adjust the distance between the first preheating plate 1 and the second preheating plate or the heat insulation member 2.

[0041] As an example, the preheating assembly further includes an adjusting member. During installation, the adjusting member is installed on other structures. The adjusting member can be connected to the first preheating plate 1, the second preheating plate, or the heat insulation member 2. By controlling the elongation of the adjusting member, the positions of the first preheating plate 1, the second preheating plate, or the heat insulation member 2 can be adjusted, so as to select a suitable distance between the second preheating plate or the heat insulation member 2 and the first preheating plate 1 according to the sizes of different materials to be heated, ensuring that the materials to be heated can be effectively preheated and the materials to be heated are evenly heated. Specifically, it includes three cases: the first case is that the adjusting member is connected to the second preheating plate and is used to adjust the distance between the second preheating plate and the first preheating plate 1; the second case is that the adjusting member is connected to the heat insulation member 2 and is used to adjust the distance between the heat insulation member 2 and the first preheating plate 1; the third case is that the adjusting member is connected to the first preheating plate 1 and is used to adjust the distance between the first preheating plate 1 and the second preheating plate or the heat insulation member 2. Among them, the second preheating plate or the heat insulation member 2 can be replaced by a pressing plate. By controlling the position of the pressing plate through the adjusting member, the pressing plate presses the material to be heated, so that the material to be heated is in close contact with the first preheating plate 1 to improve the heat transfer effect.

[0042] An embodiment of the present invention provides a wire bonder, referring to Figure 1 、 Figure 2 and Figure 3 , including a base 3, two slide rail assemblies 4 and a preheating assembly; the two slide rail assemblies 4 are arranged oppositely along the second direction on the base 3; the preheating assembly is arranged between the two slide rail assemblies 4 and is used to preheat the material to be heated.

[0043] Wherein, the second direction and the first direction are two mutually perpendicular directions, and the second direction is a direction parallel to the first preheating plate 1, which can be the left-right direction or the front-back direction.

[0044] As an example, there are many types of wire bonding machines. Taking the semiconductor wire bonding machine as an example, semiconductor wire bonding machines all adopt the wire bonding process, which requires using heat, pressure, ultrasonic energy, and vacuum adsorption to heat the material to be heated so that the metal wire is tightly welded to the substrate pad. The heating quality of the material to be heated plays a crucial role in the wire bonding quality. The heating area is divided into a preheating area and a heating area. The material to be heated is conveyed in by a track, first in the preheating area and then in the heating area. In the existing wire bonding machines, the upper part of the preheating area is open, and the material to be heated does not contact the first preheating plate 1 of the preheating component, resulting in insufficient heating of the material to be heated. When the material to be heated is sent to the heating area, since the material to be heated expands after fully contacting the heating plate 7 in the heating area, the coordinates of the material to be heated shift, resulting in offset welding.

[0045] The wire bonding machine in this example includes a base 3, two slide rail components 4, and a preheating component; the preheating component is arranged between the two slide rail components 4 and is used to preheat the material to be heated. The preheating component includes a first preheating plate 1, and the first preheating plate 1 is used to preheat the material to be heated passing by; the preheating component further includes a second preheating plate or a heat insulation member 2. The second preheating plate or the heat insulation member 2 is arranged at an interval from the first preheating plate 1 in the first direction to form a preheating area; specifically, the first preheating plate 1 and the second preheating plate can be arranged at an interval in the first direction, and the two preheating plates emit heat simultaneously, and can preheat both sides of the material to be heated at the same time; or the first preheating plate 1 and the heat insulation member 2 can be arranged at an interval in the first direction. The heat emitted by the first preheating plate 1 preheats the first side of the material to be heated, and a heat reflection radiation structure is provided on the side of the heat insulation member 2 close to the first preheating plate 1. In this way, the heat reflection radiation structure can reflect the heat emitted by the first preheating plate 1 to the second side of the material to be heated, and can preheat both sides of the material to be heated at the same time. In addition, a heat insulation structure is provided on the heat insulation member 2, which can block the heat from dissipating from the heat insulation member 2, reduce the heat dissipation efficiency, and improve the preheating effect on the material to be heated. The above two layout structures can both realize preheating both sides of the material to be heated at the same time, so as to ensure that the material to be heated is heated evenly and sufficiently, avoid thermal expansion during later heating, improve the preheating effect of the material to be heated to ensure that the material to be heated is heated evenly and sufficiently, avoid the influence of the thermal expansion of the material to be heated during later heating on the use effect of the material to be heated, and solve the problem of offset welding; at the same time, it also improves the wire bonding efficiency and reduces energy consumption.

[0046] In one embodiment, referring to Figure 2 and Figure 3 , the slide rail component 4 includes a slide rail main body 41, a fixed guide rail 42, and a slider 43; the slide rail main body 41 is fixed on the slider 43, the fixed guide rail 42 is fixed on the base 3, and the slider 43 is movably installed on the fixed guide rail 42 along the second direction;

[0047] As an example, the slide rail assembly 4 includes a slide rail main body 41, a fixed guide rail 42, and a slider 43. The slide rail main body 41 is fixed on the slider 43, the fixed guide rail 42 is fixed on the base 3, and the slider 43 is movably mounted on the fixed guide rail 42 along the second direction. By arranging two slide rail assemblies 4 on the base 3 relatively along the second direction, the distance between the two slide rail main bodies 41 can be controlled, so as to meet the usage requirements of materials to be heated with different sizes.

[0048] In one embodiment, referring to Figure 2 and Figure 3 , a through groove 5 penetrating along the second direction is provided on the slide rail assembly 4. The first preheating plate 1 of the preheating assembly is inserted into the through groove 5, and the heat insulation member 2 or the second preheating plate of the preheating assembly is installed on the slide rail assembly 4.

[0049] As an example, a through groove 5 penetrating along the second direction is provided on the slide rail assembly 4. Specifically, the through groove 5 is provided on the slide rail main body 41. During installation, the first preheating plate 1 of the preheating assembly is inserted into the through groove 5, and the heat insulation member 2 or the second preheating plate of the preheating assembly is installed on the slide rail assembly 4. Such a setting will not affect the first preheating plate 1 when adjusting the distance between the two slide rail assemblies 4, so as to preheat materials to be heated with different sizes and improve the applicable range of the equipment.

[0050] In one embodiment, referring to Figure 1 and Figure 2 , the wire bonding machine further includes a guiding fastener. A guiding groove 6 is provided on the heat insulation member 2 or the second preheating plate along the second direction. The guiding fastener is inserted into the guiding groove 6 and fixed on the slide rail assembly 4.

[0051] As an example, the wire bonding machine further includes a guiding fastener. During installation, a guiding groove 6 is provided on the heat insulation member 2 or the second preheating plate along the second direction. The guiding fastener is inserted into the guiding groove 6 and fixed on the slide rail assembly 4 to firmly fix the heat insulation member 2 or the second preheating plate on the slide rail assembly 4. In this way, the preheating assembly and the two slide rail assemblies 4 cooperate to form an annular space, which can reduce heat loss and ensure that the materials to be heated are heated more evenly. Among them, an avoidance groove 8 is further provided on the heat insulation member 2 or the second preheating plate. The avoidance groove 8 can avoid parts or other structures on the slide rail assembly 4, providing convenience for installing the heat insulation member 2 or the second preheating plate on the slide rail assembly 4.

[0052] In one embodiment, referring to Figure 2 , the heat insulation member 2 or the second preheating plate includes a first main board 21 and a shielding board 22. The guiding groove 6 is provided on the first main board 21. The shielding board 22 is installed on the first main board 21 for shielding the guiding groove 6.

[0053] As an example, the heat insulation member 2 or the second preheating plate includes a first main board 21 and a shielding plate 22; in the design, the guiding groove 6 is arranged on the first main board 21, and the guiding groove 6 can avoid the guiding fastener, so that when adjusting the distance between the two slide rail assemblies 4, it will not affect the first main board 21, making the preheating assembly applicable to materials to be heated with different sizes. The shielding plate 22 is installed on the first main board 21 to shield the guiding groove 6, which can effectively prevent heat from escaping from the guiding groove 6 and ensure better heating effect of the materials to be heated.

[0054] The above-described embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included in the protection scope of the present invention.

Claims

1. A preheating component, characterized in that: It includes a first preheating plate, and also includes a second preheating plate or a heat insulating member spaced apart from the first preheating plate along a first direction; The heat insulating member is provided with a heat insulating structure, and the side of the heat insulating member close to the first preheating plate is provided with an anti-heat radiation structure.

2. The preheating assembly according to claim 1, characterized in that: The heat insulation structure comprises a heat insulation layer, and the heat insulation layer is arranged on a side surface of the heat insulation component away from the first preheating plate.

3. The preheating assembly according to claim 1, characterized in that: The thermal insulation structure includes a thermal insulation cavity arranged inside the thermal insulation member.

4. The preheating assembly according to claim 1, characterized in that: The anti-heat radiation structure includes a mirror polishing layer or an anti-heat radiation coating.

5. The preheating assembly according to claim 1, characterized in that: The preheating assembly also includes an adjusting member; The adjusting member is connected to the second preheating plate and is used to adjust the distance between the second preheating plate and the first preheating plate; Alternatively, the adjusting member is connected to the heat insulating member and is used to adjust the distance between the heat insulating member and the first preheating plate; Alternatively, the adjusting member is connected to the first preheating plate and is used to adjust the distance between the first preheating plate and the second preheating plate or the thermal insulation member.

6. A wire bonding machine, characterized in that: It comprises a base, two slide rail assemblies and the preheating assembly according to any one of claims 1 to 5; The two slide rail assemblies are arranged on the base opposite to each other along the second direction; The preheating assembly is disposed between the two slide rail assemblies and is used for preheating the material to be heated.

7. The wire bonding machine according to claim 6, characterized in that: The slide rail assembly comprises a slide rail body, a fixed guide rail and a sliding block; the slide rail body is fixed on the sliding block, the fixed guide rail is fixed on the base, and the sliding block is movably mounted on the fixed guide rail along a second direction.

8. The wire bonding machine according to claim 6, characterized in that: The slide rail assembly is provided with a through slot extending through the second direction; the first preheating plate of the preheating assembly is inserted into the through slot, and the heat insulating member or the second preheating plate of the preheating assembly is installed on the slide rail assembly.

9. The wire bonding machine according to claim 8, characterized in that: The wire bonding machine also includes a guide fastener, and the heat insulating member or the second preheating plate is provided with a guide groove arranged along the second direction. The guide fastener is inserted into the guide groove and fixed on the slide rail assembly.

10. The wire bonding machine according to claim 9, characterized in that: The heat insulating member or the second preheating plate comprises a first main board and a shielding plate; the guide groove is arranged on the first main board; The shielding plate is mounted on the first main board and is used for shielding the guide groove.

Images