Heat shield structure for removing quartz inner conductor

By designing a heat screen structure using graphite ring components in a single crystal furnace, the problems of long procurement cycle, vulnerability and high cost in the quartz internal conduction are solved, and the effects of reducing costs, improving production efficiency and insulation performance are achieved.

CN223017027UActive Publication Date: 2025-06-24QINGHAI GOKIN SOLAR TECH CO LTD +1
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202421945679.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-12
Publication Date
2025-06-24
Estimated Expiration
2034-08-12

AI Technical Summary

Technical Problem

The quartz internal conductors used in existing single crystal furnaces have problems such as long procurement cycle, vulnerability and high cost, which affects production efficiency and cost control.

Method used

A heat screen structure is designed to remove quartz inner conductors, and graphite ring components are used to replace quartz inner conductors, including horizontal plates and vertical cylinders, to block and isolate soft felts, prevent the felt slag from falling, and improve insulation performance through water-cooling and hot-staining screens and soft felt filling.

Benefits of technology

It effectively eliminates the long procurement cycle and vulnerability shortcomings of quartz internal conductors, reduces production costs, improves the insulation performance and production efficiency of the heat screen, and prevents the felt slag from falling into the single crystal furnace.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223017027U_ABST
    Figure CN223017027U_ABST
Patent Text Reader

Abstract

The utility model discloses a heat shield structure for removing quartz inner conduction, which comprises a heat shield body, a cover plate and a heat shield flange are arranged on the upper end face of the heat shield body, the cover plate is connected to the heat shield flange in a covering manner, a graphite ring assembly is arranged between the cover plate and the heat shield flange, and a water-cooled heat shield is arranged in the center of the heat shield body. The graphite ring assembly comprises a transverse plate and a barrel, a via hole is formed in the center of the transverse plate, the barrel penetrates through the via hole to be clamped to the transverse plate, the transverse plate is attached to the upper end face of the heat shield flange, the upper end face of the barrel is attached to the lower end face of the cover plate, and the lower end face of the barrel is embedded into the first soft felt. According to the heat shield structure, quartz is not used as an inner conductor any more, the defects that the purchasing period is long and the heat shield structure is prone to being damaged are overcome, meanwhile, the graphite ring assembly is installed at the heat shield flange, the graphite ring assembly can shield the soft felts on the upper portion and the lower portion of the heat shield flange, edge collapse of the soft felts is prevented, and the service life of the heat shield structure is prolonged. And the felt slag can be prevented from falling into the single crystal furnace.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model belongs to the technical field of the thermal field of a single crystal furnace, and particularly relates to a thermal screen structure for removing a quartz inner guide. Background Art

[0002] In the thermal field of a single crystal furnace, a quartz inner guide (also called a diversion tube or an inner diversion cylinder) is a common component. It is mainly used to control and guide the heat flow and gas flow of molten silicon to maintain a stable temperature distribution in the thermal field and prevent debris of thermal field materials (such as soft felt) from falling into the molten silicon, thereby ensuring the purity and quality during the single crystal silicon growth process. The quartz inner guide can prevent particles of soft felt or other materials in the thermal field from falling off and mixing into the molten silicon. If these particles enter the single crystal silicon, they will become dislocation sources, reducing the electronic properties of the material. Moreover, when the quartz inner guide is replaced, the procurement cycle is long, affecting production efficiency, and the cost of quartz is high and it is easy to be damaged. Summary of the Utility Model

[0003] In order to overcome the deficiencies of the prior art, the purpose of the utility model is to provide a thermal screen structure for removing a quartz inner guide, aiming to improve the production efficiency of single crystal silicon while reducing costs and enhancing the heat preservation performance of the thermal screen.

[0004] To solve the above problems, the technical solution adopted by the utility model is as follows: A thermal screen structure for removing a quartz inner guide, comprising: a thermal screen body, on the upper end surface of the thermal screen body, there are provided a cover plate and a thermal screen flange, the cover plate is connected to the thermal screen flange, between the cover plate and the thermal screen flange, there is provided a graphite ring assembly, in the center of the thermal screen body, there is provided a water-cooled thermal screen, the cavity between the water-cooled thermal screen and the thermal screen flange is filled with a first soft felt, the graphite ring assembly includes a horizontal plate and a cylinder, in the center of the horizontal plate, there is provided a through hole, the cylinder passes through the through hole and is clamped to the horizontal plate, the horizontal plate is attached to the upper end surface of the thermal screen flange, the upper end surface of the cylinder is attached to the lower end surface of the cover plate, the lower end surface of the cylinder is embedded in the first soft felt, and a second soft felt is filled between the horizontal plate and the lower end surface of the graphite ring assembly.

[0005] Compared with the prior art, the beneficial effect of the utility model lies in that: the thermal screen structure proposed by the utility model no longer uses quartz as the inner guide, eliminating the disadvantages of its long procurement cycle and easy damage. At the same time, a graphite ring assembly composed of a horizontal plate and a vertical cylinder is installed at the thermal screen flange. The vertical cylinder can not only block the soft felt at the upper and lower parts of the thermal screen flange to prevent the soft felt from collapsing, but also prevent the felt slag from falling into the single crystal furnace. The horizontal plate can isolate the soft felt on the one hand and play a load-bearing role on the other hand, so that the entire thermal screen structure can prevent the felt slag from falling into the furnace cylinder without a quartz inner guide, and can also save the production cost of the entire thermal screen structure.

[0006] For the above thermal shield structure, a support ring is provided at the bottom of the water-cooled thermal shield, and parallel portions are provided on both sides of the support ring, and the parallel portions are attached to the lower inclined surface of the water-cooled thermal shield.

[0007] For the above thermal shield structure, the side of the support ring has an extension portion, and the extension portion is used to increase the height of the entire support ring.

[0008] For the above thermal shield structure, a through hole is provided in the center of the water-cooled thermal shield, and the bottom of the support ring is snap-fitted into the through hole.

[0009] For the above thermal shield structure, an isolation inner ring is provided on the side of the second soft felt, and the isolation inner ring is used to block the second soft felt.

[0010] For the above thermal shield structure, a convex platform is provided on the lower end surface of the isolation inner ring, and an annular groove is provided on the upper end surface of the thermal shield flange, and the convex platform can be snap-fitted into the annular groove.

[0011] For the above thermal shield structure, an inclined wall is provided on the side of the isolation inner ring, and the upper end surface of the inclined wall abuts against the lower end surface of the cover plate.

[0012] For the above thermal shield structure, relief holes are provided at both ends of the cross plate.

[0013] For the above thermal shield structure, the single-side thickness of the first soft felt outside the water-cooled thermal shield is between 10 mm and 30 mm.

[0014] For the above thermal shield structure, the graphite ring assembly is integrally formed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic cross-sectional view of the thermal shield structure of an embodiment of the present invention Figure 1 ;

[0016] Figure 2 is a schematic cross-sectional view of the thermal shield structure of an embodiment of the present invention Figure 2 ;

[0017] Figure 3 is a schematic diagram of the water-cooled thermal shield structure of an embodiment of the present invention;

[0018] Figure 4 is a schematic diagram of the support ring structure of an embodiment of the present invention;

[0019] Figure 5 is a schematic diagram of the graphite ring assembly structure of an embodiment of the present invention;

[0020] Description of the attached reference numerals: 1000 thermal shield body, 1100 cover plate, 1200 thermal shield flange, 1220 annular groove, 1300 graphite ring assembly, 1310 horizontal plate, 1320 cylinder, 1311 through hole, 1312 relief hole, 1400 water-cooled thermal shield, 1410 support ring, 1411 parallel portion, 1420 lower inclined surface, 1412 extension portion, 1430 through hole, 1500 first soft felt, 1600 second soft felt, 1700 isolation inner ring, 1710 boss, 1720 inclined wall. Specific implementation manner

[0021] The embodiments of the present invention will be described in detail below. Referring to Figures 1 to 5 , the embodiments of the present invention provide a thermal shield structure for removing the quartz inner guide, including: a thermal shield body 1000, a cover plate 1100 and a thermal shield flange 1200 are provided on the upper end surface of the thermal shield body 1000, the cover plate 1100 is connected to the thermal shield flange 1200 in a covering manner, a graphite ring assembly 1300 is provided between the cover plate 1100 and the thermal shield flange 1200, a water-cooled thermal shield 1400 is provided in the center of the thermal shield body 1000, the cavity between the water-cooled thermal shield 1400 and the thermal shield flange 1200 is filled with a first soft felt 1500, the graphite ring assembly 1300 includes a horizontal plate 1310 and a cylinder 1320, a through hole 1311 is provided in the center of the horizontal plate 1310, the cylinder 1320 passes through the through hole 1311 and is clamped to the horizontal plate 1310, the horizontal plate 1310 is attached to the upper end surface of the thermal shield flange 1200, the upper end surface of the cylinder 1320 is attached to the lower end surface of the cover plate 1100, the lower end surface of the cylinder 1320 is embedded in the first soft felt 1500, and a second soft felt 1600 is filled between the horizontal plate 1310 and the lower end surface of the graphite ring assembly 1300. The thermal shield structure proposed by the present invention no longer uses quartz as the inner guide, eliminating the disadvantages of its long procurement cycle and easy damage. At the same time, a graphite ring assembly 1300 composed of a horizontal plate 1310 and a vertical cylinder 1320 is installed at the thermal shield flange 1200. The vertical cylinder 1320 can not only block the first soft felt 1500 and the second soft felt 1600 above and below the thermal shield flange 1200 to prevent the soft felt from collapsing, but also prevent the felt slag from falling into the single crystal furnace. The horizontal plate 1310 can isolate the soft felt and play a load-bearing role on the one hand, so that the entire thermal shield structure can prevent the felt slag from falling to the furnace cylinder without the quartz inner guide, and can also save the production cost of the entire thermal shield structure.

[0022] Furthermore, the cover plate 1100 is used to cover and connect to the thermal shield flange 1200, forming a cavity with the cylinder 1320 of the graphite ring assembly 1300 to place the second soft felt 1600. Of course, the present utility model does not limit the specific structure of the cover plate 1100. The thermal shield structure provided by the present utility model removes the quartz inner guide in the prior art and adds the graphite ring assembly 1300. The graphite ring assembly 1300 includes a horizontal plate 1310 and a cylinder 1320. The axis of the cylinder 1320 is perpendicular to the plane of the horizontal plate 1310 so that the cylinder 1320 is clamped to the horizontal plate 1310. Of course, the present utility model does not limit the specific structure of the cylinder 1320. Preferably, the cylinder 1320 is a vertical cylinder 1320. The vertical cylinder 1320 can block the first soft felt 1500 below the thermal shield flange 1200 to prevent the edge of the first soft felt 1500 from collapsing, and can also block the second soft felt 1600 above the thermal shield flange 1200 to prevent the felt slag of the second soft felt 1600 from falling into the single crystal furnace. Of course, the present utility model does not limit the specific connection method between the horizontal plate 1310 and the cylinder 1320, and the graphite ring assembly 1300 can be integrally formed. Further, the horizontal plate 1310 of the graphite ring assembly 1300 plays a load-bearing role, mainly used to isolate the second soft felt 1600 and the first soft felt 1500 above and below the thermal shield flange 1200, making the entire thermal shield structure easy to disassemble. Refer to Figure 1 , the horizontal plate 1310 of the graphite ring assembly 1300 is attached to the thermal shield flange 1200. The setting of the graphite ring assembly 1300 and the second soft felt 1600 ensures good sealing and heat insulation between the water-cooled thermal shield 1400 and the thermal shield flange 1200, avoids direct heat conduction, and improves the overall thermal shielding effect. Further, in order to prevent the felt slag from falling into the single crystal furnace below the water-cooled thermal shield 1400, refer to Figure 1 , a support ring 1410 is provided at the bottom of the water-cooled thermal shield 1400. Parallel portions 1411 are provided on both sides of the support ring 1410, and the parallel portions 1411 are attached to the lower inclined surface 1420 of the water-cooled thermal shield 1400. Further, the side of the support ring 1410 has an extension portion 1412, and the extension portion 1412 is used to increase the height of the entire support ring 1410. By increasing the height of the support ring 1410, it mainly prevents the felt slag from falling into the single crystal furnace. Of course, the present utility model does not limit the specific structure of the extension portion 1412. Preferably, refer to Figure 3 , the inner wall of the extension portion 1412 is attached to the outer wall surface of the water-cooled thermal shield 1400. Further, a through hole 1430 is provided in the center of the water-cooled thermal shield 1400, and the bottom of the support ring 1410 is clamped to the through hole 1430.

[0023] Further, refer to Figure 1, an isolation inner ring 1700 is provided on the side of the second soft felt 1600. The isolation inner ring 1700 is used to block the second soft felt 1600 to prevent the second soft felt 1600 from falling. Of course, the present utility model does not limit the specific structure of the isolation inner ring 1700. Preferably, referring to Figure 2 and Figure 4 , a boss 1710 is provided on the lower end surface of the isolation inner ring 1700, and an annular groove 1220 is provided on the upper end surface of the hot screen flange 1200. The boss 1710 can be clamped in the annular groove 1220. Further, an inclined wall 1720 is provided on the side of the isolation inner ring 1700. The upper end surface of the inclined wall 1720 abuts against the lower end surface of the cover plate 1100. The inclined wall 1720 is used to expand the load-bearing area of the second soft felt 1600. Of course, the present utility model does not limit the specific inclination degree of the inclined wall 1720. Further, referring to Figure 5 , relief holes 1312 are provided at both ends of the cross plate 1310. The relief holes 1312 are used to avoid the screws protruding from the end surface of the hot screen flange 1200. Of course, the present utility model does not limit the specific position and structure of the relief holes 1312. Further, a second soft felt 1600 is provided between the cover plate 1100 and the hot screen flange 1200, and a first soft felt 1500 is provided between the water-cooled hot screen 1400 and the hot screen flange 1200. Both the first soft felt 1500 and the second soft felt 1600 are used to increase the heat preservation of the hot screen, reduce the heat conduction of the hot screen, reduce the heat power consumption of the hot screen, and improve the production efficiency of the entire hot screen. Of course, the present utility model does not limit the specific thickness of the first soft felt 1500 and the second soft felt 1600. Preferably, the thickness of the first soft felt 1500 on the outer single side of the water-cooled hot screen 1400 is between 10 mm and 30 mm

[0024] It should be noted that in the description of the present utility model, if there is any reference to the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., it is all based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and should not be construed as a limitation to the present utility model.

[0025] In the description of the present utility model, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If there is a description of the first or the second, etc., it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0026] In the description of the present utility model, unless otherwise clearly defined, terms such as "set", "installed", "connected", etc. should be understood in a broad sense, and those skilled in the relevant technical field can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0027] The above-mentioned embodiments are only the preferred embodiments of the present utility model, and cannot be used to limit the scope of protection of the present utility model. Any non-substantive changes and substitutions made by those skilled in the art based on the present utility model fall within the scope of protection required by the present utility model.

Claims

1. A heat shield structure without quartz inner conductor, characterized in that: include: A heat shield body (1000), wherein a cover plate (1100) and a heat shield flange (1200) are provided on the upper end surface of the heat shield body (1000), wherein the cover plate (1100) is connected to the heat shield flange (1200), wherein a graphite ring assembly (1300) is provided between the cover plate (1100) and the heat shield flange (1200), wherein a water-cooled heat shield (1400) is provided in the center of the heat shield body (1000), wherein a first soft felt (1500) is filled in the cavity between the water-cooled heat shield (1400) and the heat shield flange (1200), and wherein the graphite ring assembly (1300) comprises a transverse plate (1310) ) and a cylinder (1320), a through hole (1311) is provided in the center of the transverse plate (1310), the cylinder (1320) is clamped to the transverse plate (1310) through the through hole (1311), the transverse plate (1310) is attached to the upper end surface of the heat shield flange (1200), the upper end surface of the cylinder (1320) is attached to the lower end surface of the cover plate (1100), the lower end surface of the cylinder (1320) is embedded in the first soft felt (1500), and the second soft felt (1600) is filled between the transverse plate (1310) and the lower end surface of the graphite ring assembly (1300).

2. The heat shield structure according to claim 1, characterized in that: A support ring (1410) is provided at the bottom of the water-cooled heat shield (1400), and parallel portions (1411) are provided on both sides of the support ring (1410), and the parallel portions (1411) are attached to the lower edge slope (1420) of the water-cooled heat shield (1400).

3. The heat shield structure according to claim 2, characterized in that: The side of the support ring (1410) has an extension portion (1412), and the extension portion (1412) is used to increase the height of the entire support ring (1410).

4. The heat shield structure according to claim 3, characterized in that: A through hole (1430) is provided in the center of the water-cooled heat shield (1400), and the bottom of the support ring (1410) is snap-connected to the through hole (1430).

5. The heat shield structure according to claim 1, characterized in that: An isolation inner ring (1700) is provided on the side of the second soft felt (1600), and the isolation inner ring (1700) is used to cover the second soft felt (1600).

6. The heat shield structure according to claim 5, characterized in that: The lower end surface of the isolation inner ring (1700) is provided with a boss (1710), and the upper end surface of the heat shield flange (1200) is provided with an annular groove (1220), and the boss (1710) can be snap-fitted into the annular groove (1220).

7. The heat shield structure according to claim 5, characterized in that: An inclined wall (1720) is provided on the side of the isolation inner ring (1700), and the upper end surface of the inclined wall (1720) abuts against the lower end surface of the cover plate (1100).

8. The heat shield structure according to claim 1, characterized in that: Both ends of the transverse plate (1310) are provided with clearance holes (1312).

9. The heat shield structure according to claim 1, characterized in that: The thickness of one side of the first soft felt (1500) outside the water-cooled heat shield (1400) is between 10 mm and 30 mm.

10. The heat shield structure according to claim 1, characterized in that: The graphite ring assembly (1300) is integrally formed.