Water cooling screen and flow guide structure

Abstract

The utility model discloses a water cooling screen and a flow guide structure, and belongs to the field of semiconductor process equipment. The water cooling screen comprises an inner cylinder and an outer cylinder. The inner cylinder forms a channel for atmosphere circulation, the channel comprises a first section and a second section which are connected, the circulation area of the first section is gradually reduced from one end deviating from the second section to one end close to the second section, and the circulation area of the second section is gradually reduced from one end deviating from the first section to one end close to the first section; the outer cylinder is sleeved outside the inner cylinder, and the outer cylinder and the inner cylinder form a cooling cavity for circulation of the cooling medium cooling cavity. By changing the structure of the inner cylinder of the water-cooling screen, the atmosphere flow speed in the channel formed in the inner cylinder can be increased, the heat dissipation efficiency of the water-cooling screen can be improved, so that the maximum rate allowed by crystal pulling is improved, the capability of taking away impurities is improved, and meanwhile, the speed can be reduced to a relatively stable state at the outlet of the channel to help to improve the crystal pulling efficiency; and the inner cylinder is effectively cooled through the cooling cavity between the inner cylinder and the outer cylinder, so that stable operation of equipment is ensured.

Description

Technical Field

[0001] This application belongs to the field of semiconductor process equipment, and particularly relates to a water-cooled screen and a flow guiding structure. Background Art

[0002] With the improvement of battery production technology, the photovoltaic industry is constantly developing in the direction of reducing costs, reducing the loss of silicon materials, and improving production efficiency. Czochralski single crystal silicon has the advantages of low production cost, good crystal quality and performance, and is currently widely used in the field of the photovoltaic industry. In the Czochralski method for preparing solar-grade single crystal silicon, in order to meet the industry requirements, the design of the crystal growth thermal system is developing in the direction of increasing the crystal growth rate and reducing the heater power. Among them, increasing the crystal growth rate is mainly achieved by increasing the pulling speed of the single crystal silicon. When pulling the single crystal silicon, a water-cooled screen is required for cooling. In order to improve the heat dissipation efficiency of the water-cooled screen, generally, the heat dissipation effect is improved by increasing the water flow rate or changing the wall thickness of the water-cooled screen, but the improvement effect is limited and the improvement potential is insufficient. Summary of the Utility Model

[0003] This application aims to at least solve the technical problem that the heat dissipation efficiency of the water-cooled screen in the related art needs to be improved. For this reason, this application provides a water-cooled screen and a flow guiding structure, which can improve the heat dissipation efficiency of the water-cooled screen, thereby increasing the maximum allowable pulling speed of the crystal, enhancing the ability to remove impurities, adding a certain oxygen reduction effect, reducing the interference of the atmosphere on the solid-liquid interface of the crystal pulling, helping to improve the crystal pulling efficiency, ensuring the stable operation of the equipment, improving the radial temperature gradient of the large-size thermal field and the distribution trend of the electrical properties of the crystal rod, and improving the battery efficiency.

[0004] In a first aspect, this application provides a water-cooled screen, including:

[0005] An inner cylinder, the inner cylinder forms a channel for the atmosphere to flow through, the channel includes a first section and a second section connected to each other, the flow area of the first section gradually decreases from one end away from the second section to one end close to the second section, and the flow area of the second section gradually decreases from one end away from the first section to one end close to the first section;

[0006] An outer cylinder, the outer cylinder is sleeved outside the inner cylinder, and forms a cooling cavity for the cooling medium to flow through with the inner cylinder.

[0007] By changing the size of the cross-sectional area of the inner cylinder, a pressure difference is formed, which can increase the flow rate of the atmosphere in the first-section channel of the inner cylinder, improve the crystal pulling rate, reduce costs and energy consumption, and enhance the ability to remove impurities. Additionally, it has a certain oxygen reduction effect. In the second-section channel of the inner cylinder, the flow rate of the atmosphere gradually decreases and reaches a relatively stable state at the outlet of the second-section channel, reducing the interference of the atmosphere on the solid-liquid interface of crystal pulling and improving the crystal pulling efficiency. Through the cooling chamber between the inner cylinder and the outer cylinder, effective cooling and flow control of the atmosphere can be achieved, ensuring the stable operation of the equipment and extending its service life. At the same time, it improves the radial temperature gradient of the large-size thermal field, improves the distribution trend of the electrical properties of the crystal rod, and enhances the battery efficiency.

[0008] According to an embodiment of the present application, the channel further includes a third section connected between the first section and the second section.

[0009] The third section of the channel provides a stable flow environment for the atmosphere, ensuring that after the atmosphere is accelerated in the first section, it can smoothly transition to the second section.

[0010] According to an embodiment of the present application, the ratio of the flow area at one end of the first section close to the second section to the flow area at one end of the second section away from the first section is A, satisfying: 1 ≤ A ≤ 2.

[0011] By changing the size of the cross-sectional area of the inner cylinder, a pressure difference between the compression port and the expansion port is formed, which can increase the flow rate of the atmosphere. At the same time, it can increase the pulling speed, reduce energy consumption and costs, and have a certain oxygen reduction effect. By adjusting the ratio A, the performance of the system can be optimized.

[0012] According to an embodiment of the present application, the inclination angle of the wall surface of the second section with respect to the horizontal direction is α, satisfying: 25° ≤ α ≤ 35°.

[0013] According to an embodiment of the present application, the inclination angle of the wall surface of the first section with respect to the vertical direction is β, satisfying: 12° ≤ β ≤ 15°.

[0014] By selecting the inclination angle α between the wall surface of the second section and the horizontal plane and the inclination angle β between the wall surface of the first section and the vertical direction, the best cooling effect and structural stability can be achieved while meeting specific process requirements.

[0015] According to an embodiment of the present application, a plurality of grooves are provided on the wall surface of the channel.

[0016] The plurality of grooves on the wall surface of the channel can increase the heat transfer area, improve the heat transfer efficiency, increase the heat transfer at the solid-liquid interface, thereby increasing the pulling speed. At the same time, it guides the fluid flow, increases the structural strength, and reduces noise and vibration.

[0017] According to an embodiment of the present application, the lower end of the outer cylinder has a receiving section, and the receiving section is inclined from top to bottom towards the direction close to the inner cylinder, and the lower end of the receiving section is connected to the lower end of the second section.

[0018] The receiving section at the lower end of the outer cylinder is inclined from top to bottom towards the direction close to the inner cylinder, and the lower end of the receiving section is connected to the lower end of the second section, which helps to improve the cooling efficiency, structural stability and installation and maintenance convenience of the water-cooled screen.

[0019] In a second aspect, the present application provides a diversion structure, including:

[0020] The water-cooled screen as described in any one of the above;

[0021] A diversion cylinder, which is sleeved outside the water-cooled screen.

[0022] The diversion structure including the water-cooled screen and the diversion cylinder has a wide application prospect in various scenarios. The diversion structure designed by combining the water-cooled screen and the diversion cylinder can efficiently manage heat, ensure the stable operation of the equipment, and achieve effective cooling and protection of the equipment.

[0023] According to an embodiment of the present application, the lower end of the diversion cylinder has a support surface, and the support surface is inclined from top to bottom towards the direction close to the water-cooled screen;

[0024] The receiving section at the lower end of the outer cylinder of the water-cooled screen is supported on the support surface.

[0025] The cooperation between the receiving section and the support surface can ensure the stable support between the outer cylinder and the diversion cylinder, make the whole structure more stable. At the same time, the inclined support surface can ensure the stable support of the receiving section, optimize the overall performance of the system, and at the same time help to guide the flow direction of the cooling medium, improve the cooling efficiency, and make the whole cooling system structure compact and occupy less space.

[0026] According to an embodiment of the present application, the diversion cylinder includes:

[0027] An inner diversion cylinder, which is sleeved outside the outer cylinder;

[0028] An outer diversion cylinder, which is installed outside the inner diversion cylinder, and the lower end of the outer diversion cylinder has a support section, and the support section is inclined from top to bottom towards the direction close to the water-cooled screen;

[0029] A gasket, which is clamped between the lower end surface of the inner diversion cylinder and the upper surface of the support section, and the upper surface of the gasket forms the support surface.

[0030] Supported by the inner guide cylinder, the outer guide cylinder and the gasket, the guide structure has good stability and reliability. At the same time, the sealing performance between the inner guide cylinder and the outer guide cylinder can be ensured to prevent the leakage of the cooling medium. Through the arrangement of the inclined support section, the cooling medium can flow more efficiently to the water-cooled screen, improving the cooling efficiency.

[0031] Additional aspects and advantages of the present application will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0033] Figure 1 is one of the schematic structural diagrams of the water-cooled screen provided by the embodiment of the present application;

[0034] Figure 2 is Figure 1 the partial enlarged view of A in

[0035] Figure 3 is one of the schematic structural diagrams of the guide structure provided by the embodiment of the present application;

[0036] Figure 4 is Figure 3 the partial enlarged view of B in

[0037] Figure 5 is the second schematic structural diagram of the guide structure provided by the embodiment of the present application.

[0038] REFERENCE MARKS:

[0039] Guide structure 1;

[0040] Water-cooled screen 10;

[0041] Inner cylinder 110, first section 111, second section 112, third section 113, outer cylinder 120, receiving section 130;

[0042] Guide cylinder 20, inner guide cylinder 210, outer guide cylinder 220, support section 221, support surface 222, gasket 230. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0043] Embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary only for explaining the present application and should not be construed as limiting the present application.

[0044] This application aims to at least solve the technical problem that the heat dissipation efficiency of the water-cooled screen in the related art needs to be improved. For this purpose, this application proposes a water-cooled screen and a diversion structure, which can improve the heat dissipation efficiency of the water-cooled screen, thereby increasing the maximum allowable rate of crystal pulling, enhancing the ability to remove impurities, adding a certain oxygen reduction effect, reducing the interference of the atmosphere on the solid-liquid interface of crystal pulling, helping to improve the crystal pulling efficiency, ensuring the stable operation of the equipment, improving the radial temperature gradient of the large-size thermal field and the distribution trend of the electrical properties of the crystal rod, and enhancing the battery efficiency.

[0045] Reference is made below Figures 1 - 5 to describe the water-cooled screen 10 according to an embodiment of the present application.

[0046] As Figure 1 shown, the water-cooled screen 10 includes: an inner cylinder 110 and an outer cylinder 120.

[0047] The inner cylinder 110 forms a channel for the atmosphere to flow through. The channel includes a connected first section 111 and a second section 112. The flow area of the first section 111 gradually decreases from the end away from the second section 112 to the end close to the second section 112, and the flow area of the second section 112 gradually decreases from the end away from the first section 111 to the end close to the first section 111;

[0048] The outer cylinder 120 is sleeved outside the inner cylinder 110 and forms a cooling cavity for the cooling medium to flow through with the inner cylinder 110.

[0049] In the technical solution of the present application, the inner cylinder 110 is the core part of the water-cooled screen 10 and is used to form a channel for the atmosphere to flow through. The channel is a Laval nozzle structure, including a connected first section 111 and a second section 112. The flow area of the first section 111 gradually decreases from the end away from the second section 112 to the end close to the second section 112, that is, the first section 111 channel gradually contracts from top to bottom towards the middle to form a narrow throat, and the decrease in the flow area will increase the flow rate, and the atmosphere gradually accelerates during the flow process. The flow area of the second section 112 gradually decreases from the end away from the first section 111 to the end close to the first section 111, that is, the second section 112 channel expands outward from the throat, so that the atmosphere gradually decelerates during the flow process to reach a relatively stable state at the outlet.

[0050] The atmosphere flowing through the inner cylinder 110 can be an inert gas, such as argon, helium or neon, which can play a protective role, maintain a high-purity and stable environment, prevent oxygen, moisture, etc. in the air from entering the single crystal, ensure the purity and quality of the single crystal, avoid contaminating the silicon crystal, and at the same time, the cooling rate and temperature of the single crystal can be controlled by adjusting the atmosphere flow rate and temperature, which can make the crystal pulling process more stable, reduce the generation rate of crystal defects, and improve the crystal quality of the single crystal.

[0051] The outer cylinder 120 is sleeved outside the inner cylinder 110, maintaining a certain interval from the inner cylinder 110 to form a cooling cavity for the circulation of the cooling medium. The cooling cavity can accommodate a cooling medium, such as water or coolant, for absorbing and carrying away the heat of the atmosphere in the inner cylinder 110, thereby achieving the purpose of cooling and keeping the temperature of the inner cylinder 110 and its internal equipment within a certain range. The flow mode and speed of the cooling medium in the cooling cavity can be controlled by the structure and parameters of the cooling cavity to achieve the best cooling effect.

[0052] According to the water-cooled screen 10 provided by the embodiment of the present application, by changing the size of the cross-sectional area of the inner cylinder 110, a pressure difference can be formed to increase the flow rate of the atmosphere in the first section 111 channel of the inner cylinder 110, improve the heat dissipation efficiency of the water-cooled screen 10, thereby increasing the maximum allowable rate of crystal pulling and enhancing the ability to remove impurities, with an additional certain oxygen reduction effect. In the second section 112 channel of the inner cylinder 110, the flow rate of the atmosphere gradually decreases and reaches a relatively stable state at the outlet of the second section 112 channel, reducing the interference of the atmosphere on the solid-liquid interface of crystal pulling and helping to improve the crystal pulling efficiency. Through the cooling cavity between the inner cylinder 110 and the outer cylinder 120, effective cooling and flow control of the atmosphere can be achieved, thereby ensuring the stable operation of the equipment, improving the radial temperature gradient of the large-size thermal field and the distribution trend of the electrical properties of the crystal rod, and enhancing the battery efficiency.

[0053] In some embodiments, as Figure 1 shown, the channel further includes a third section 113 connected between the first section 111 and the second section 112, and the flow area of the third section 113 remains unchanged from the end connected to the first section 111 to the end connected to the second section 112.

[0054] In the technical solution of the present application, the channel includes a connected first section 111 and a second section 112. The flow area of the first section 111 gradually decreases from the end facing away from the second section 112 to the end close to the second section 112, that is, the first section 111 channel gradually contracts towards the middle from top to bottom. The decrease in the flow area will increase the flow rate, and the atmosphere gradually accelerates during the flow process. The flow area of the third section 113 connected between the first section 111 and the second section 112 remains unchanged from the end connected to the first section 111 to the end connected to the second section 112, providing a stable flow environment to ensure that the atmosphere can smoothly transition after accelerating through the first section 111. The flow area of the second section 112 gradually decreases from the end facing away from the first section 111 to the end close to the first section 111, that is, the second section 112 channel expands outward from the throat, causing the atmosphere to gradually decelerate during the flow process so as to reach a relatively stable state at the outlet.

[0055] It can be understood that the third section 113 of the channel provides a stable flow environment for the atmosphere, ensuring that the atmosphere can smoothly transition to the second section 112 after accelerating through the first section 111.

[0056] In some embodiments, as Figure 1 shown, the ratio of the flow area at one end of the first section 111 close to the second section 112 to the flow area at one end of the second section 112 away from the first section 111 is A, and it satisfies: 1 ≤ A ≤ 2.

[0057] In the technical solution of the present application, taking the end of the second section 112 channel away from the first section 111 as the expansion port, the end of the first section 111 channel close to the second section 112 as the compression port, the ratio of the flow area at one end of the second section 112 away from the first section 111 to the flow area at one end of the first section 111 close to the second section 112 is A, and this ratio A satisfies the condition: 1 ≤ A ≤ 2.

[0058] When A = 1, the flow areas of the expansion port and the compression port are equal, that is, the flow area between the end of the second section 112 channel away from the first section 111 and the end of the first section 111 channel close to the second section 112 is equal. When A is between 1 and 2, the flow area of the expansion port is slightly larger than that of the compression port, that is, the flow area at one end of the first section 111 close to the second section 112 is slightly larger than the flow area at one end of the second section 112 away from the first section 111. When A = 2, the flow area of the expansion port is twice that of the compression port, that is, the flow area at one end of the second section 112 away from the first section 111 is twice the flow area at one end of the first section 111 close to the second section 112. The ratio A can be adjusted between the two to optimize the performance, which helps to control the flow rate, pressure distribution or meet specific process requirements during the flow of the atmosphere.

[0059] It can be understood that by changing the size of the cross-sectional area of the inner cylinder 110, a pressure difference between the compression port and the expansion port can be formed, so as to achieve the purpose of increasing the flow rate of the atmosphere. At the same time, the lifting speed can be increased, energy consumption can be reduced, and the cost can be reduced, and a certain oxygen reduction effect can be added. By adjusting the ratio A, the performance of the system can be optimized.

[0060] In some embodiments, as Figure 2 shown, the inclination angle of the wall surface of the second section 112 with the horizontal direction is α, and it satisfies: 25° ≤ α ≤ 35°.

[0061] In the technical solution of the present application, the inclination angle α represents the inclination angle between the wall surface of the second section 112 and the horizontal plane. According to the ratio A of the flow area at one end of the second section 112 away from the first section 111 to the flow area at one end of the first section 111 close to the second section 112 being between 1 and 2, and the angle between the inner wall expansion port and the horizontal plane being 30°, that is, the angle between the crystal pulling meniscus and the liquid surface is about 30°. When the reasonable range of the inclination angle α between the wall surface of the second section 112 and the horizontal plane is 30° ± 5°, heat exchange can be better carried out, so that this structure can exert the optimal performance.

[0062] When the inclination angle α between the wall surface and the horizontal plane is small, that is, when α is close to 25°, the flow of the cooling medium in the cooling cavity is relatively gentle, which helps to reduce flow noise or pressure loss. At the same time, the smaller inclination angle may also cause the cooling medium to adhere to the wall surface for a longer time, thus reducing the cooling efficiency. On the contrary, when the inclination angle α is large, that is, when α is close to 35°, the flow of the cooling medium in the cooling cavity is more turbulent, and the turbulent flow can more effectively transfer heat from the inner cylinder 110 to the cooling medium, which helps to enhance the cooling effect. At the same time, the larger inclination angle may also cause an increase in flow noise or an increase in pressure loss.

[0063] It can be understood that by selecting the inclination angle α between the wall surface and the horizontal plane, the best cooling effect and structural stability can be achieved while meeting specific process requirements.

[0064] In some embodiments, as Figure 1 shown, the inclination angle of the wall surface of the first section 111 with respect to the vertical direction is β, satisfying: 12° ≤ β ≤ 15°.

[0065] In the technical solution of the present application, the inclination angle β represents the inclination angle of the wall surface of the first section 111 with respect to the vertical direction, which is determined by the ratio A of the flow area at the end of the second section 112 away from the first section 111 to the flow area at the end of the first section 111 close to the second section 112.

[0066] When the inclination angle β is small, that is, when β is close to 12°, the inclination angle of the wall surface of the first section 111 with respect to the vertical direction is small, which helps the flow of the cooling medium in the cooling cavity. The smaller angle can make the cooling medium flow more easily along the wall surface, thereby increasing the contact area between the cooling medium and the inner cylinder 110 and improving the cooling efficiency. On the contrary, when the inclination angle β is large, that is, when β is close to 15°, the inclination angle of the wall surface of the first section 111 with respect to the vertical direction is large, which helps to reduce the flow resistance or increase the structural stability. At the same time, the larger inclination angle will also cause the adhesion time of the cooling medium on the wall surface to decrease, thereby reducing the cooling efficiency.

[0067] It can be understood that by selecting an appropriate inclination angle β, the best cooling effect and structural stability can be achieved while meeting specific process requirements.

[0068] In some embodiments, as Figure 1 shown, the wall surface of the channel is provided with a plurality of grooves.

[0069] In the technical solution of the present application, the presence of the grooves can increase the surface area of the channel wall, thereby increasing the contact area with the cooling medium. When the cooling medium flows through these grooves, more heat can be transferred from the inner cylinder 110 to the cooling medium, thus improving the cooling efficiency. The grooves can affect the flow pattern of the cooling medium in the cooling cavity. By reasonably arranging the grooves, the cooling medium can be guided to flow along a specific path to ensure that all parts of the inner cylinder 110 can be sufficiently cooled. At the same time, the grooves can serve as stress concentration points, enabling the wall surface to distribute stress more evenly when subjected to external forces, thereby increasing the overall strength of the structure. The grooves can also reduce the collision and friction between the fluid and the wall surface, reducing the noise and vibration generated during the flow of the cooling medium.

[0070] It can be understood that by providing a plurality of grooves on the wall surface of the channel, the heat exchange area can be increased, the heat exchange efficiency can be improved, the heat exchange at the solid-liquid interface can be increased, thereby increasing the pulling speed. At the same time, the fluid flow can be guided, the structural strength can be increased, and the noise and vibration can be reduced.

[0071] In some embodiments, as Figure 2 shown, the lower end of the outer cylinder 120 has a receiving section 130. The receiving section 130 is inclined downward and closer to the inner cylinder 110 from top to bottom, and the lower end of the receiving section 130 is connected to the lower end of the second section 112.

[0072] In the technical solution of the present application, the receiving section 130 starts from the lower end of the outer cylinder 120 and gradually inclines toward the inner cylinder 110, forming a gradually shrinking space with the inner cylinder 110, which helps to guide or concentrate the cooling medium at a specific position, thereby enhancing the cooling effect. The upper end of the receiving section 130 is connected to the lower end of the outer cylinder 120, and the lower end of the receiving section 130 is connected to the lower end of the second section 112 of the inner cylinder 110, which can ensure the continuity and stability of the structures of the outer cylinder 120 and the inner cylinder 110. At the same time, the downwardly inclined receiving section 130 can guide the cooling medium to the lower end of the second section 112, thereby ensuring that the second section 112 can also be sufficiently cooled.

[0073] The inclination of the receiving section 130 helps to form a vortex or enhance the flow of the cooling medium, which can enhance the cooling effect and improve the cooling efficiency. At the same time, the receiving section 130 connected to the second section 112 can also ensure that the second section 112 obtains sufficient cooling medium. The receiving section 130 can also increase the structural stability of the water-cooled screen 10 and can also serve as a reference point for installation or disassembly, making the installation and maintenance of the water-cooled screen 10 more convenient.

[0074] It can be understood that the receiving section 130 at the lower end of the outer cylinder 120 is inclined from top to bottom towards the inner cylinder 110, and the lower end of the receiving section 130 is connected to the lower end of the second section 112, which helps to improve the cooling efficiency, structural stability and installation and maintenance convenience of the water-cooled screen 10.

[0075] The embodiment of the present application also provides a flow guiding structure 1, as Figure 3 shown, the flow guiding structure 1 includes: a water-cooled screen 10 and a flow guiding cylinder 20, and the flow guiding cylinder 20 is sleeved outside the water-cooled screen 10.

[0076] In the technical solution of the present application, the water-cooled screen 10 is usually made of a metal with good thermal conductivity, such as copper and aluminum, etc. Water channels or water pipes are usually designed inside the water-cooled screen 10 for circulating cooling water. Through the circulating flow of water, the heat generated inside the equipment or system is taken away to keep the equipment or system running stably. The flow guiding cylinder 20 is usually cylindrical or other shapes, sleeved outside the water-cooled screen 10, and a certain gap is maintained between the flow guiding cylinder 20 and the water-cooled screen 10 so that air or other fluids can pass through. It can be metal, plastic or other composite materials, mainly playing the role of guiding and protecting the water-cooled screen 10, and at the same time preventing external objects or fluids from directly contacting the water-cooled screen 10, causing damage or affecting the cooling effect.

[0077] The gap between the water-cooled screen 10 and the flow guiding cylinder 20 is well sealed, which can prevent the leakage of cooling water. Both the water-cooled screen 10 and the flow guiding cylinder 20 in the flow guiding structure 1 are detachable structures, which is convenient for subsequent maintenance and repair, and at the same time ensures the stable connection between the water-cooled screen 10 and the flow guiding cylinder 20, reducing looseness and vibration.

[0078] It can be understood that the flow guiding structure 1 including the water-cooled screen 10 and the flow guiding cylinder 20 has a wide application prospect in various scenarios. Through the combined design of the water-cooled screen 10 and the flow guiding cylinder 20, the flow guiding structure 1 can efficiently manage heat, ensure the stable operation of the equipment, and achieve effective cooling and protection of the equipment.

[0079] In some embodiments, as Figure 4 shown, the lower end of the flow guiding cylinder 20 has a supporting surface 222, and the supporting surface 222 is inclined from top to bottom towards the water-cooled screen 10;

[0080] The receiving section 130 at the lower end of the outer cylinder 120 of the water-cooled screen 10 is supported on the supporting surface 222.

[0081] In the technical solution of the present application, the water-cooled screen 10 is the core part of the cooling system, which is used to take away heat through the circulation of water. The inner tube 110 is located inside the water-cooled screen 10, and contains equipment or system components that need to be cooled. The outer tube 120 is mounted on the outside of the water-cooled screen 10, and together with the inner tube 110 and the water-cooled screen 10, it forms a cooling space. The lower end of the outer tube 120 has a receiving section 130, which is inclined from top to bottom toward the direction close to the inner tube 110, and the lower end is connected to the lower end of the second section 112 of the inner tube 110 to ensure the continuity and stability of the structure.

[0082] The guide tube 20 is sleeved on the outside of the outer tube 120 for guiding or protecting the flow of the cooling medium. The lower end has a supporting surface 222, which is inclined from top to bottom toward the direction close to the water-cooled screen 10, corresponding to the receiving section 130 of the outer tube 120. The receiving section 130 is supported on the supporting surface 222, which can increase the contact area between the receiving section 130 and the guide tube 20, thereby improving the stability of the connection and ensuring that the relative position between the outer tube 120 and the guide tube 20 is fixed. At the same time, the inclined receiving section 130 and the supporting surface 222 help to guide the fluid to flow in a specific direction, thereby optimizing the cooling effect of the water-cooled screen 10 and improving the system efficiency.

[0083] It can be understood that the cooperation between the receiving section 130 and the supporting surface 222 can ensure the stable support between the outer tube 120 and the guide tube 20, making the entire structure more stable. At the same time, the inclined supporting surface 222 can ensure the stable support of the receiving section 130, optimize the overall performance of the system, and help guide the flow direction of the cooling medium, improve the cooling efficiency, and make the entire cooling system compact and occupy a small space.

[0084] In some embodiments, Figures 3 - 5 As shown, the guide tube 20 includes an inner guide tube 210 , an outer guide tube 220 and a gasket 230 .

[0085] The inner guide tube 210 is sleeved outside the outer tube 120;

[0086] The outer guide tube 220 is installed outside the inner guide tube 210, and the lower end of the outer guide tube 220 has a support section 221, and the support section 221 is inclined from top to bottom toward the direction close to the water-cooling panel 10;

[0087] The gasket 230 is locked between the lower end surface of the inner guide tube 210 and the upper surface of the support section 221 , and the upper surface of the gasket 230 forms a support surface 222 .

[0088] In the technical solution of the present application, the inner flow guide cylinder 210 is sleeved outside the outer cylinder 120. Its main function is to guide and stabilize the flow direction of the cooling medium, and at the same time ensure the support and stability of the outer cylinder 120. The outer flow guide cylinder 220 is installed outside the inner flow guide cylinder 210, forming a double-layer structure. The lower end of the outer flow guide cylinder 220 has a support section 221, and the support section 221 is inclined from top to bottom towards the direction close to the water-cooled screen 10 to provide support for the outer cylinder 120 and at the same time help guide the cooling medium to flow towards the water-cooled screen 10. The gasket 230 is clamped between the lower end surface of the inner flow guide cylinder 210 and the upper surface of the support section 221 of the outer flow guide cylinder 220. The gasket 230 can be made of non-metals such as rubber, asbestos or flexible graphite to ensure the strength and corrosion resistance of the inner gasket 230. The upper surface of the gasket 230 forms a support surface 222 to directly support the receiving section 130 of the outer cylinder 120, ensuring the sealing and stability between the inner flow guide cylinder 210 and the outer flow guide cylinder 220, and at the same time providing a flat support surface 222 to support the outer cylinder 120.

[0089] It can be understood that through the support of the inner and outer two-layer flow guide cylinders 20 and the gasket 230, the entire flow guide structure 1 has good stability and reliability. At the same time, the sealing between the inner flow guide cylinder 210 and the outer flow guide cylinder 220 can be ensured to prevent the leakage of the cooling medium. Through the arrangement of the inclined support section 221, the cooling medium can flow more efficiently towards the water-cooled screen 10, improving the cooling efficiency.

[0090] The embodiments of the present application will be specifically described below.

[0091] The flow guide structure 1 includes: a water-cooled screen 10 and a flow guide cylinder 20. The flow guide cylinder 20 is sleeved outside the water-cooled screen 10. The lower end of the flow guide cylinder 20 has a support surface 222, and the support surface 222 is inclined from top to bottom towards the direction close to the water-cooled screen 10. The receiving section 130 at the lower end of the outer cylinder 120 of the water-cooled screen 10 is supported on the support surface 222. Through the combined design of the water-cooled screen 10 and the flow guide cylinder 20, the flow guide structure 1 can efficiently manage heat, ensure the stable operation of the equipment, and achieve effective cooling and protection of the equipment.

[0092] The draft tube 20 includes: an inner draft tube 210, an outer draft tube 220, and a gasket 230. The inner draft tube 210 is sleeved outside the outer cylinder 120 of the water-cooling screen 10. The outer draft tube 220 is installed outside the inner draft tube 210, and the lower end of the outer draft tube 220 has a support section 221. The support section 221 inclines towards the water-cooling screen 10 from top to bottom. The gasket 230 is clamped between the lower end face of the inner draft tube 210 and the upper surface of the support section 221. The upper surface of the gasket 230 forms a support surface 222. The cooperation between the receiving section 130 and the support surface 222 can ensure the stable support between the outer cylinder 120 and the draft tube 20, making the entire structure more stable. At the same time, the inclined support surface 222 can also ensure the stable support of the receiving section 130, optimize the overall performance of the system, help guide the flow direction of the cooling medium, improve the cooling efficiency, and make the entire cooling system structure compact and occupy less space.

[0093] The water-cooling screen 10 includes: an inner cylinder 110 and an outer cylinder 120. The inner cylinder 110 forms a channel for the atmosphere to flow through. The channel includes a connected first section 111, a second section 112, and a third section 113 connected between the first section 111 and the second section 112. The flow area of the first section 111 gradually decreases from the end away from the second section 112 to the end close to the second section 112. The decrease in the flow area will increase the flow velocity, and the atmosphere gradually accelerates during the flow process. The flow area of the second section 112 gradually decreases from the end away from the first section 111 to the end close to the first section 111, so that the atmosphere gradually decelerates during the flow process and reaches a relatively stable state at the outlet. The flow area of the third section 113 remains unchanged from the end connected to the first section 111 to the end connected to the second section 112, providing a stable flow environment for the atmosphere and ensuring that the atmosphere can smoothly transition to the second section 112 after accelerating through the first section 111. The outer cylinder 120 is sleeved outside the inner cylinder 110 and forms a cooling cavity for the cooling medium to flow through with the inner cylinder 110, which is used to cool the inner cylinder 110.

[0094] The ratio of the flow area at the end of the first section 111 close to the second section 112 to the flow area at the end of the second section 112 away from the first section 111 is A, satisfying: 1 ≤ A ≤ 2. The inclination angle of the wall surface of the second section 112 with the horizontal direction is α, satisfying: 25° ≤ α ≤ 35°. The inclination angle of the wall surface of the first section 111 with the vertical direction is β, satisfying: 12° ≤ β ≤ 15°. By selecting appropriate ratio A, inclination angle α, and inclination angle β, the best cooling effect and structural stability can be achieved while meeting specific process requirements.

[0095] The wall surface of the channel is provided with a plurality of grooves, which can increase the heat exchange area, improve the heat exchange efficiency, increase the heat exchange at the solid-liquid interface, thereby increasing the pulling speed, guiding the fluid flow at the same time, increasing the structural strength, and reducing noise and vibration.

[0096] The lower end of the outer cylinder 120 of the water-cooled screen 10 has a receiving section 130. The receiving section 130 inclines towards the inner cylinder 110 from top to bottom, and the lower end of the receiving section 130 is connected to the lower end of the second section 112, which helps to improve the cooling efficiency, structural stability and installation and maintenance convenience of the water-cooled screen 10.

[0097] By changing the size of the cross-sectional area of the inner cylinder 110, a pressure difference can be formed to achieve the purpose of increasing the atmosphere flow rate in the first section 111 channel of the inner cylinder 110, improving the heat dissipation efficiency of the water-cooled screen 10, thereby increasing the maximum allowable rate of crystal pulling and enhancing the ability to remove impurities, with an additional certain oxygen reduction effect. The atmosphere flow rate gradually decreases in the second section 112 channel of the inner cylinder 110 and reaches a relatively stable state at the outlet of the second section 112 channel, reducing the interference of the atmosphere on the solid-liquid interface of crystal pulling and helping to improve the crystal pulling efficiency. Through the cooling cavity between the inner cylinder 110 and the outer cylinder 120, effective cooling and flow control of the atmosphere can be achieved, thereby ensuring the stable operation of the equipment, while improving the radial temperature gradient of the large-size thermal field and the distribution trend of the electrical properties of the crystal rod, and enhancing the battery efficiency.

[0098] The terms "first", "second", etc. in the description and claims of this application are used to distinguish similar objects and are not used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of this application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are usually of the same category and do not limit the number of objects. For example, the first object can be one or more. In addition, "and / or" in the description and claims means at least one of the connected objects, and the character " / " generally indicates an "or" relationship between the related objects before and after.

[0099] In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to this application.

[0100] In the description of this application, the "first feature", "second feature" may include one or more of such features.

[0101] In the description of this application, the meaning of "a plurality" is two or more.

[0102] In the description of the present application, a first feature being "on" or "under" a second feature may include direct contact between the first and second features, or may include the first and second features not being in direct contact but in contact through additional features therebetween.

[0103] In the description of the present application, a first feature being "on", "above", or "over" a second feature includes the first feature being directly above or obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature.

[0104] In the description of this specification, descriptions with reference to terms such as "an embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples", etc., mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0105] Although the embodiments of the present application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A water cooling screen, characterized in that: include: An inner cylinder, wherein the inner cylinder forms a channel for the atmosphere to circulate, the channel comprising a first section and a second section connected to each other, the flow area of ​​the first section gradually decreases from an end away from the second section to an end close to the second section, and the flow area of ​​the second section gradually decreases from an end away from the first section to an end close to the first section; The outer cylinder is sleeved outside the inner cylinder and forms a cooling cavity with the inner cylinder for cooling medium to flow through.

2. The water cooling screen according to claim 1, characterized in that: The channel also includes a third segment connected between the first segment and the second segment.

3. The water cooling screen according to claim 1, characterized in that: A ratio of a flow area of ​​an end of the first segment close to the second segment to a flow area of ​​an end of the second segment away from the first segment is A, satisfying: 1≤A≤2.

4. The water cooling screen according to claim 1, characterized in that: The inclination angle of the wall surface of the second section to the horizontal direction is α, which satisfies: 25°≤α≤35°.

5. The water cooling screen according to claim 1, characterized in that: The inclination angle of the wall surface of the first section to the vertical direction is β, which satisfies: 12°≤β≤15°.

6. The water cooling screen according to claim 1, characterized in that: The wall surface of the channel is provided with a plurality of grooves.

7. The water cooling screen according to any one of claims 1 to 6, characterized in that: The lower end of the outer cylinder has a receiving section, the receiving section is inclined from top to bottom toward the direction approaching the inner cylinder, and the lower end of the receiving section is connected to the lower end of the second section.

8. A flow guide structure, characterized in that: include: The water cooling screen as claimed in any one of claims 1 to 7; A guide tube is sleeved outside the water cooling screen.

9. The flow guiding structure according to claim 8, characterized in that: The lower end of the guide tube has a support surface, and the support surface is inclined from top to bottom toward the direction close to the water cooling screen; When the water-cooling screen is the water-cooling screen as claimed in claim 7, the receiving section is supported on the supporting surface.

10. The flow guiding structure according to claim 9, characterized in that: The guide tube comprises: An inner guide tube, wherein the inner guide tube is sleeved outside the outer tube; An outer guide tube, wherein the outer guide tube is installed outside the inner guide tube, and the lower end of the outer guide tube has a support section, and the support section is inclined from top to bottom toward a direction close to the water-cooling screen; A gasket is stuck between the lower end surface of the inner guide tube and the upper surface of the support section, and the upper surface of the gasket forms the support surface.

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