Graphite boat warped piece detection device

Abstract

The utility model provides a graphite boat warped piece detection device which comprises a driving assembly and a detection assembly. The driving assembly comprises a sliding rail and a sliding part which are in sliding connection; the sliding part is connected with the detection assembly; the detection assembly comprises a strip-shaped light source and an area-array camera; the number of the strip-shaped light sources is two, and the strip-shaped light sources are perpendicular to the sliding rails. And the area-array camera is arranged between the two strip-shaped light sources and is used for carrying out visual capture on the silicon wafer carried by the graphite boat. A sliding rail is arranged in a driving assembly, a strip-shaped light source perpendicular to the sliding rail is arranged on a sliding part of the sliding rail, namely, the strip-shaped light source is parallel to a graphite boat blade, and each silicon wafer can be uniformly lighted in the graphite boat detection process, so that an area-array camera arranged between the two strip-shaped light sources can clearly perform visual capture on each silicon wafer; therefore, the conditions of warped pieces, falling pieces, boat surface fragments, empty pieces and the like carried by the graphite boat are detected, the defect capturing precision is improved, and reworking is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic silicon wafer detection, in particular to a graphite boat warpage detection device. Background Art

[0002] The graphite boat is used to carry silicon wafers and is widely used in semiconductor manufacturing and other high-precision manufacturing fields. During the loading process, there are often situations such as warped wafers, dropped wafers, debris on the boat surface, and empty wafers, which directly affect the stability of the production process and the quality of products. Therefore, it is necessary to detect the silicon wafers carried by the graphite boat. However, the existing graphite boat warpage detection methods have problems such as low efficiency and low detection accuracy, and cannot meet the requirements of modern manufacturing for high-efficiency and high-precision detection.

[0003] Traditional graphite boat warpage detection methods mainly rely on manual visual inspection. This method is not only time-consuming and laborious, but also the detection accuracy depends on the experience and state of the inspectors, with large subjectivity and instability. In addition, manual inspection is prone to missed or misdetection, resulting in quality problems in the subsequent production process, increasing the risk of rework and scrapping, and affecting production efficiency and cost control.

[0004] To solve the above problems, some automated detection devices have been gradually introduced in the market. These devices usually use fixed light sources and cameras for image acquisition and analysis. However, the existing automated detection devices are unreasonably designed in terms of light source configuration and camera position, and the light source distribution is uneven, resulting in problems such as shadows and uneven illumination in the captured images, thereby affecting the clarity of the images and the accuracy of detection. Summary of the Utility Model

[0005] The technical problem to be solved by the utility model is: to provide a graphite boat warpage detection device to solve the problem of low efficiency in detecting graphite boat warpage.

[0006] To solve the above technical problems, the technical solution adopted by the utility model is:

[0007] A graphite boat warpage detection device includes a driving component and a detection component;

[0008] The driving component includes a slide rail and a sliding part that are slidably connected; the sliding part is connected to the detection component;

[0009] The detection component includes a strip light source and a area array camera; the number of the strip light sources is two, the strip light sources are perpendicular to the slide rail; the area array camera is arranged between the two strip light sources, and the area array camera is used for visually capturing the silicon wafers carried by the graphite boat.

[0010] Further, the detection component further includes a connecting portion provided with a bearing beam and a connecting plate. The bearing beam is perpendicular to the slide rail and connected to the sliding portion, the connecting plate is parallel to the slide rail and connected to the bearing beam, and the two strip light sources are respectively connected to two ends of the connecting plate in the length direction.

[0011] Further, the number of the connecting plates is at least three, and the connecting plates are evenly distributed along the length direction of the bearing beam.

[0012] Further, the number of the area array cameras matches the number of the connecting plates, and the area array cameras are arranged in the middle of the connecting plates.

[0013] Further, the detection component further includes an adjusting plate rotatably connected to the connecting plate, and the area array camera is arranged on the adjusting plate.

[0014] Further, the number of the slide rails is two, and the two slide rails are symmetrically arranged.

[0015] Further, the driving component further includes a driving motor for driving the sliding portions on the two slide rails to run synchronously.

[0016] Further, the driving component further includes a drag chain respectively drivingly connected to the driving motor and the sliding portion.

[0017] Further, the driving component further includes a drag chain groove, the drag chain is arranged in the drag chain groove, and the drag chain groove is arranged on the side of the slide rail.

[0018] Further, it further includes a mounting bracket arranged below the detection component, and the mounting bracket is used for mounting the graphite boat docking station.

[0019] The beneficial effect of the present utility model is as follows: A graphite boat warpage detection device is provided. A slide rail is arranged in the driving component, and a strip light source perpendicular to the slide rail is arranged on the sliding portion of the slide rail, that is, the strip light source is parallel to the graphite boat blade. During the graphite boat detection process, each silicon wafer can be evenly illuminated, so that the area array camera arranged between the two strip light sources can clearly perform visual capture on each silicon wafer, thereby completing the detection of warpage, chip loss, debris on the boat surface, empty wafers, etc. of the silicon wafers carried by the graphite boat, improving the defect capture accuracy and avoiding rework. Description of the Drawings

[0020] Figure 1 is an assembly schematic diagram of a graphite boat warpage detection device in an embodiment of the present utility model;

[0021] Figure 2 is an assembly schematic diagram of the driving component and the detection component in an embodiment of the present utility model;

[0022] Figure 3 This is a top view of the drive assembly and the detection assembly in the embodiment of the present utility model;

[0023] Figure 4 This is a bottom view of the drive assembly and the detection assembly in the embodiment of the present utility model;

[0024] Label description:

[0025] 1. Graphite boat; 2. Drive assembly; 21. Slide rail; 22. Sliding part; 23. Drive motor; 24. Drag chain; 25. Drag chain groove; 3. Detection assembly; 31. Bar-shaped light source; 32. Area array camera; 33. Bearing beam; 34. Connection plate; 35. Adjusting plate; 4. Mounting bracket. Specific implementation mode

[0026] To describe in detail the technical content, the achieved purpose and the effects of the present utility model, the following is described in conjunction with the implementation modes and with reference to the drawings.

[0027] Please refer to Figures 1 to 4 , a graphite boat detection device, comprising a drive assembly 2 and a detection assembly 3;

[0028] The drive assembly 2 includes a slide rail 21 and a sliding part 22 which are slidably connected; the sliding part 22 is connected to the detection assembly 3;

[0029] The detection assembly 3 includes a bar-shaped light source 31 and an area array camera 32; the number of the bar-shaped light sources 31 is two, and the bar-shaped light sources 31 are perpendicular to the slide rail 21; the area array camera 32 is arranged between the two bar-shaped light sources 31, and the area array camera 32 is used for visually capturing the silicon wafers carried by the graphite boat 1.

[0030] It can be seen from the above description that the beneficial effect of the present utility model is that: a slide rail 21 is arranged in the drive assembly 2, and a bar-shaped light source 31 perpendicular to the slide rail 21 is arranged on the sliding part 22 of the slide rail 21, that is, the bar-shaped light source 31 is parallel to the boat blades of the graphite boat 1. During the detection of the graphite boat, each silicon wafer on the graphite boat 1 can be evenly illuminated, so that the area array camera 32 arranged between the two bar-shaped light sources 31 can clearly perform visual capture on each silicon wafer on the graphite boat 1, thereby completing the detection of the warping, dropping, debris on the boat surface and empty wafers of the silicon wafers carried by the graphite boat, improving the defect capture accuracy and avoiding rework.

[0031] Further, the detection component 3 further includes a connecting portion provided with a bearing beam 33 and a connecting plate 34. The bearing beam 33 is perpendicular to the slide rail 21 and connected to the sliding portion 22, and the connecting plate 34 is parallel to the slide rail 21 and connected to the bearing beam 33. The two strip light sources 31 are respectively connected to two ends of the connecting plate 34 in the length direction.

[0032] As can be seen from the above description, by providing the connecting portion including the bearing beam 33 and the connecting plate 34, the structural stability of the detection component 3 is enhanced. The bearing beam 33 is perpendicular to the slide rail 21 and connected to the sliding portion 22, ensuring that the detection component 3 remains stable during the sliding process. The two strip light sources 31 are respectively fixed at both ends of the connecting plate 34, ensuring that the light source can evenly irradiate the silicon wafers carried by the graphite boat 1, enhancing the structural stability of the detection component 3 and the uniformity of the light source irradiation, and improving the quality of image capture.

[0033] Further, the number of the connecting plates 34 is at least three, and the connecting plates 34 are evenly distributed along the length direction of the bearing beam 33.

[0034] As can be seen from the above description, the three connecting plates 34 are evenly distributed along the length direction of the bearing beam 33, making the structure of the entire detection component 3 more stable and avoiding the imbalance problem that may be caused by single-point support. At the same time, the evenly distributed structure of the connecting plates 34 also ensures that the light source can irradiate the graphite boat 1 more evenly, improving the clarity of the image and the accuracy of detection.

[0035] Further, the number of the area array cameras 32 matches the number of the connecting plates 34, and the area array cameras 32 are arranged in the middle of the connecting plates 34.

[0036] As can be seen from the above description, configuring three area array cameras 32 makes the coverage range of the detection area larger, and multiple angles can be photographed simultaneously, improving the comprehensiveness of detection. The area array cameras 32 are arranged in the middle of the connecting plates 34, ensuring that the cameras can capture the best detection images and improving the accuracy of detection.

[0037] Further, the detection component 3 further includes an adjustment plate 35, the adjustment plate 35 is rotatably connected to the connecting plate 34, and the area array camera 32 is arranged on the adjustment plate 35.

[0038] As can be seen from the above description, by adding the adjustment plate 35 to the detection component 3, the area array camera 32 is rotatably connected to the connecting plate 34, and the shooting angle of the camera can be adjusted according to actual needs. In this way, the camera position can be flexibly adjusted according to different sizes and shapes of the graphite boats 1 to ensure obtaining the best detection images.

[0039] Further, the number of the slide rails 21 is two, and the two slide rails 21 are symmetrically arranged.

[0040] From the above description, it can be seen that two symmetrical slide rails 21 are provided to make the sliding part 22 more stable during the sliding process, avoiding the shaking and instability problems that may be caused by a single slide rail 21. The symmetrical slide rail 21 structure increases the overall stability of the device, ensuring that the detection component 3 can accurately capture the image of the graphite boat 1.

[0041] Furthermore, the driving assembly 2 further includes a driving motor 23, and the driving motor 23 is used to drive the sliding parts 22 on the two slide rails 21 to operate synchronously.

[0042] As can be seen from the above description, a driving motor 23 is added to the driving assembly 2 to drive the sliding parts 22 on the two slide rails 21 to operate synchronously. The driving motor 23 ensures the synchronization of the sliding parts 22 during the sliding process, avoids the detection error that may be caused by the asynchrony of the left and right sliding parts 22, and improves the detection efficiency and stability.

[0043] Furthermore, the driving assembly 2 further includes a drag chain 24 , and the drag chain 24 is respectively connected to the driving motor 23 and the sliding part 22 in driving connection.

[0044] As can be seen from the above description, a drag chain 24 is added to the driving assembly 2, so that it is respectively connected to the driving motor 23 and the sliding part 22, ensuring that the power of the driving motor 23 can be stably transmitted to the sliding part 22. The drag chain 24 structure increases the reliability of power transmission, avoids the problem of slipping or chain breaking that may occur during the transmission process, and improves the operating stability of the detection device.

[0045] Furthermore, the driving assembly 2 also includes a drag chain groove 25 , the drag chain 24 is arranged in the drag chain groove 25 , and the drag chain groove 25 is arranged on a side of the slide rail 21 .

[0046] As can be seen from the above description, a drag chain groove 25 is provided in the driving assembly 2, and the drag chain 24 is placed in the drag chain groove 25 to prevent the external environment from damaging the drag chain 24. The existence of the drag chain groove 25 protects the drag chain 24, reduces the risk of wear and breakage, prolongs the service life of the drag chain 24, and further improves the stability and reliability of the detection device.

[0047] Furthermore, it also includes a mounting frame 4, which is arranged below the detection component 3 and is used for installing the graphite boat docking station.

[0048] From the above description, it can be seen that adding a mounting frame 4 and installing it at the graphite boat docking station ensures that after the graphite boat 1 is inspected, the staff can manually or the screening device can automatically screen out the defective graphite boats, thereby achieving timely processing after inspection and improving the applicability of the entire inspection device.

[0049] The present utility model provides a warpage detection device for a graphite boat 1, which is mainly applied to the high-precision detection of the graphite boat 1. Specific descriptions will be given below in combination with embodiments.

[0050] Please refer to Figures 1 to 4 , Embodiment 1 of the present utility model is as follows:

[0051] A graphite boat detection device includes a driving component 2 and a detection component 3; the driving component 2 includes a sliding rail 21 and a sliding part 22 that are slidably connected; the sliding part 22 is connected to the detection component 3; the detection component 3 includes a bar-shaped light source 31 and a area array camera 32; the number of the bar-shaped light sources 31 is two, and the bar-shaped light source 31 is perpendicular to the sliding rail 21; the area array camera 32 is arranged between the two bar-shaped light sources 31, and the area array camera 32 is used for visually capturing the graphite boat 1. By setting the sliding rail 21 in the driving component 2 and arranging the bar-shaped light source 31 perpendicular to the sliding rail 21 on the sliding part 22 of the sliding rail 21, that is, the bar-shaped light source 31 is parallel to the blades of the graphite boat 1, the silicon wafers can be evenly illuminated during the transmission of the graphite boat, so that the area array camera 32 arranged between the two bar-shaped light sources 31 can clearly perform visual capture on each silicon wafer, thereby completing the detection of warpage, missing pieces, debris on the boat surface, empty wafers, etc. of the silicon wafers carried by the graphite boat, improving the defect capture accuracy and avoiding rework.

[0052] Specifically, the conveying component, the driving component 2 and the detection component 3 are assembled and connected to the workbench. Among them, the driving component 2 and the detection component 3 are located above the workbench surface, and the conveying component is located below the workbench surface. It can be understood that in order to facilitate the visual capture of the area array camera 32, the workbench surface is not a board surface or other surfaces that hinder visual capture. The workbench surface can be composed of a hollow metal frame or a transparent material.

[0053] Embodiment 2 of the present utility model is as follows:

[0054] On the basis of Embodiment 1, the detection component 3 further includes a connecting part, and the connecting part is provided with a bearing beam 33 and a connecting plate 34. The bearing beam 33 is perpendicular to the sliding rail 21 and is connected to the sliding part 22, and the connecting plate 34 is parallel to the sliding rail 21 and is connected to the bearing beam 33. The two bar-shaped light sources 31 are respectively connected to the two ends of the length direction of the connecting plate 34. The bearing beam 33 is perpendicular to the sliding rail 21 and is connected to the sliding part 22, ensuring the stability of the detection component 3 during the sliding process. The two bar-shaped light sources 31 are respectively fixed at the two ends of the connecting plate 34, ensuring that the light source can evenly irradiate the graphite boat 1, enhancing the structural stability of the detection component 3 and the uniformity of the light source irradiation, and improving the quality of image capture.

[0055] Specifically, there are three connecting plates 34, which are evenly distributed along the length direction of the load-bearing beam 33. There are three area array cameras 32, which are arranged in the middle of the connecting plates 34. The detection assembly 3 further includes an adjustment plate 35, which is rotatably connected to the connecting plates 34, and the area array cameras 32 are arranged on the adjustment plate 35.

[0056] Embodiment 3 of the present utility model is:

[0057] On the basis of the first embodiment, the number of the slide rails 21 is two, and the two slide rails 21 are symmetrically arranged. The two symmetrical slide rails 21 are arranged so that the sliding part 22 is more stable during the sliding process, avoiding the shaking and instability problems that may be caused by a single slide rail 21. The symmetrical slide rail 21 structure increases the overall stability of the device, ensuring that the detection component 3 can accurately capture the image of the graphite boat 1.

[0058] The driving assembly 2 also includes a driving motor 23, a drag chain 24 and a drag chain slot 25, wherein the driving motor 23 is used to drive the sliding parts 22 on the two slide rails 21 to run synchronously. The drag chain 24 is respectively connected to the driving motor 23 and the sliding part 22 in transmission. The drag chain 24 is arranged in the drag chain slot 25, and the drag chain slot 25 is arranged on the side of the slide rail 21. The driving motor 23 is added to the driving assembly 2 to drive the sliding parts 22 on the two slide rails 21 to run synchronously. The driving motor 23 ensures the synchronization of the sliding part 22 during the sliding process, avoids the detection error that may be caused by the asynchrony of the left and right sliding parts 22, and improves the detection efficiency and stability. At the same time, the drag chain 24 is placed in the drag chain slot 25 to prevent the external environment from damaging the drag chain 24. The existence of the drag chain slot 25 protects the drag chain 24, reduces the risk of wear and breakage, prolongs the service life of the drag chain 24, and further improves the stability and reliability of the detection device.

[0059] The fourth embodiment of the present utility model is:

[0060] On the basis of the first embodiment, a mounting frame 4 is further included, and the mounting frame 4 is arranged at the conveying end of the conveying assembly, and the mounting frame 4 is used for installing the graphite boat docking station. Installing the mounting frame 4 at the graphite boat docking station position ensures that after the graphite boat 1 is inspected, the staff manually or the screening device automatically screens the defective graphite boat, realizes timely processing after inspection, and improves the applicability of the entire inspection device.

[0061] In summary, for the graphite boat fin detection device provided by the present utility model, the driving component is connected through a slide rail and a sliding part parallel to the conveying direction, enabling the detection component to accurately locate and capture images of the silicon wafers carried by the graphite boat. The configuration of the bar light source and the area array camera in the detection component allows the light source to evenly irradiate the silicon wafers, ensuring that the area array camera obtains clear images, thereby improving the accuracy and reliability of detection.

[0062] The above are only embodiments of the present utility model and do not limit the patent scope of the present utility model. Any equivalent transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in related technical fields, shall be equally included in the patent protection scope of the present utility model.

Claims

1. A graphite boat warping detection device, characterized in that: Including driving components and detection components; The driving assembly comprises a sliding rail and a sliding part which are slidably connected; the sliding part is connected to the detection assembly; The detection component includes a strip light source and an array camera; the number of the strip light sources is two, and the strip light sources are perpendicular to the slide rail; the array camera is arranged between the two strip light sources, and the array camera is used to visually capture the silicon wafer carried by the graphite boat.

2. A graphite boat warping detection device according to claim 1, characterized in that: The detection component also includes a connecting part, which is provided with a load-bearing beam and a connecting plate. The load-bearing beam is perpendicular to the slide rail and connected to the sliding part, and the connecting plate is parallel to the slide rail and connected to the load-bearing beam. The two strip light sources are respectively connected to the two ends of the connecting plate in the length direction.

3. A graphite boat warping detection device according to claim 2, characterized in that: The number of the connecting plates is at least three, and the connecting plates are evenly distributed along the length direction of the load-bearing beam.

4. A graphite boat warping detection device according to claim 3, characterized in that: The number of the area array cameras matches the number of the connecting plates, and the area array cameras are arranged in the middle of the connecting plates.

5. The graphite boat warping detection device according to claim 3, characterized in that: The detection component also includes an adjustment plate, which is rotatably connected to the connecting plate, and the area array camera is arranged on the adjustment plate.

6. The graphite boat warping detection device according to claim 1, characterized in that: The number of the slide rails is two, and the two slide rails are symmetrically arranged.

7. A graphite boat warping detection device according to claim 6, characterized in that: The driving assembly also includes a driving motor, and the driving motor is used to drive the sliding parts on the two slide rails to operate synchronously.

8. The graphite boat warping detection device according to claim 7, characterized in that: The driving assembly also includes a drag chain, which is respectively connected to the driving motor and the sliding part in driving connection.

9. A graphite boat warping detection device according to claim 8, characterized in that: The driving assembly further comprises a drag chain groove, the drag chain is arranged in the drag chain groove, and the drag chain groove is arranged on the side of the slide rail.

10. The graphite boat warping detection device according to claim 1, characterized in that: It also includes a mounting frame, which is arranged below the detection component and is used for installing a graphite boat docking station.

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