Ultraviolet LED photoetching exposure device

By introducing limit structures and adjustment structures into the UV LED lithography exposure device, the problems of uneven illumination and material skewness are solved, the accurate positioning of materials and multi-model adaptability are achieved, and the product yield is improved.

CN223065645UActive Publication Date: 2025-07-04ZHANGJIAGANG QIDIAN PHOTOELECTRIC TECH CO LTD
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Patent Information

Application Number
CN202422237052.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-12
Publication Date
2025-07-04
Estimated Expiration
2034-09-12

AI Technical Summary

Technical Problem

The uneven light illumination of existing LED lithography exposure equipment during the exposure process leads to uneven thickness of the photoresist pattern, affecting product yield, and may be skewed when manually putting the material, resulting in damage or skewed processing images.

Method used

An ultraviolet LED lithography exposure device is designed, including a limit structure and an adjustment structure. The rotating rod and the connecting rod are driven by a servo motor to drive the installation plate and slider to move, combine with the roller to limit the material, and increase friction through the rubber sleeve to ensure the correct positioning of the material.

Benefits of technology

It realizes accurate positioning of materials, avoids damage or skew in processing images, adapts to the limit requirements of different types of materials, and improves product yield.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the field of photoetching exposure devices, in particular to an ultraviolet LED photoetching exposure device. Comprising a support and an adjusting structure, a machine tool is fixedly connected to the upper end of the support, a transmission belt is installed in the machine tool, a guide rail is installed on the upper surface of the machine tool, a moving device is slidably connected to the interior of the guide rail, a photoetching device is installed on the surface of the moving device, and a limiting structure is arranged on the upper surface of the machine tool. The limiting structure comprises two fixing plates, the two fixing plates are fixedly connected with a machine tool, the upper ends of the fixing plates are fixedly connected with a connecting plate, the upper surface of the connecting plate is fixedly connected with four guide rails, and every two of the four guide rails are divided into one group. The ultraviolet LED photoetching exposure device provided by the utility model has the advantages that articles can be conveniently limited, and the problem that a processed image is easily damaged or skewed due to the fact that the materials are possibly skewed when the materials are manually put in is solved.
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Description

Technical Field

[0001] The utility model relates to the field of lithography exposure devices, in particular to an ultraviolet LED lithography exposure device. Background Art

[0002] An LED lithography exposure device is composed of a bracket, a machine tool, a transmission belt, a guide rail, a moving device and a lithography device, and is used for performing LED lithography exposure on an article, which is relatively common in daily life.

[0003] The prior art such as the utility model with the publication number of CN211718691 U discloses an ultraviolet LED lithography exposure device. This patent adopts a mounting plate. The lower end of the mounting plate is fixedly connected with a connecting plate through a plurality of connecting rods. A chute is opened at the lower end of the connecting plate. A driving motor is fixedly connected to the side wall of the connecting plate. The output end of the driving motor is fixedly connected with a rotating rod. The rotating rod passes through the connecting plate and extends into the chute, and is rotatably connected to the groove wall of the chute through a bearing. A reciprocating lead screw is fixedly sleeved on the rod wall of the rotating rod located in the chute. A reciprocating sliding sleeve is engaged with the reciprocating lead screw. The reciprocating sliding sleeve is slidably connected in the chute. The lower end of the reciprocating sliding sleeve passes through the notch of the chute and is fixedly connected with a strip-shaped LED light source. The lower end of the connecting plate is symmetrically and fixedly connected with positioning rods. Clamps are installed at the lower ends of the positioning rods. A mask plate is jointly clamped by the two clamps. It solves the problem that in the exposure process, the pattern obtained after the photoresist on the substrate is exposed is required to have a uniform thickness. However, during the exposure process, since the position of the exposure lamp is fixed, the illuminance distribution of the light emitted by the exposure lamp at the edge and the middle part of the mask plate is uneven during the exposure process, resulting in uneven thickness of the pattern formed by the photoresist after exposure, affecting the subsequent process and causing a low yield of the product.

[0004] In daily work, it is found that during the use of the LED lithography exposure device, the existing LED lithography exposure devices are directly sent under the lithography device for processing. However, since the material may be skewed when manually placed, it is easy to cause damage or skew of the processed image. Summary of the Utility Model

[0005] The purpose of the utility model is to solve the defects existing in the prior art, and to propose an ultraviolet LED lithography exposure device.

[0006] To solve the above technical problems, the utility model provides an ultraviolet LED lithography exposure device, including: a bracket and an adjustment structure. The upper end of the bracket is fixedly connected with a machine tool. A transmission belt is installed inside the machine tool. A guide rail is installed on the upper surface of the machine tool. A moving device is slidably connected inside the guide rail. A lithography device is installed on the surface of the moving device. A limiting structure is arranged on the upper surface of the machine tool. The limiting structure includes two fixing plates. The two fixing plates are fixedly connected with the machine tool. The upper end of the fixing plate is fixedly connected with a connecting plate. Four sliding bars are fixedly connected to the upper surface of the connecting plate. The four sliding bars are divided into two groups in pairs. A slider is slidably connected to the surface of the sliding bar. A mounting plate is fixedly connected to the upper surface of a group of sliders. An adapter rod is rotatably connected to the upper surface of the mounting plate. A rotating rod is rotatably connected to the upper surface of the connecting plate. The rotating rod is rotatably connected with the adapter rod. Two fixing rods are fixedly connected to the upper surface of the connecting plate. A servo motor is fixedly connected to one end of the two fixing rods close to each other. The output end of the servo motor is fixedly connected with the rotating rod. Two chutes are opened on the inner wall of the connecting plate. Two connecting frames are arranged below the mounting plate. The two connecting frames are connected to the mounting plate by means of an adjustment structure. A plurality of rollers are rotatably connected to the lower surface of the connecting frame.

[0007] The effects achieved by the above components are as follows: When it is necessary to limit and process an item that needs LED lithography, the item is placed on the transmission belt. Then the transmission belt drives the item to the lower part of the limiting structure. Then the servo motor is started to operate. The servo motor drives the rotating rod to rotate. The rotating rod drives the adapter rod to move. The adapter rod drives the mounting plate to move. The mounting plate drives the slider to move. The mounting plate drives the slider to slide on the surface of the sliding bar. The mounting plate drives the adjustment structure to slide on the inner wall of the chute. The adjustment structure drives the connecting frame to move. The connecting frame drives the roller to move. The roller limits the item. After the limiting is completed, the transmission belt drives the item to move to the lower part of the lithography device, and the lithography device is started for processing. The moving device drives the lithography device to move for processing.

[0008] Preferably, a rubber sleeve is fixedly connected to the arc surface of the roller, and the cross section of the rubber sleeve is in a circular ring shape.

[0009] The effects achieved by the above components are as follows: The rubber sleeve can not only protect the roller to a certain extent, but also increase the friction between the roller and the contact surface.

[0010] Preferably, the cross section of the fixing rod is in an "L" shape, and the fixing rod is made of stainless steel.

[0011] The effects achieved by the above components are that the stainless steel material can prevent the fixing rod from rusting after long-term use, which may easily cause the servo motor to fall off.

[0012] Preferably, the cross-section of the sliding bar is rectangular, and the sliding bar is made of stainless steel.

[0013] The effect achieved by the above components is that the sliding bar can limit the position in a certain situation, avoiding deviation when moving the mounting plate.

[0014] Preferably, an adjusting structure is provided on the lower surface of the mounting plate. The adjusting structure includes a hydraulic rod, which is fixedly connected to the mounting plate. The hydraulic rod is slidably connected to the chute. The output end of the hydraulic rod is fixedly connected with a connecting block. Two limiting grooves are formed in the inner wall of the connecting block. A screw rod is slidably connected to the inner wall of the limiting groove. The lower end of the screw rod is fixedly connected to the connecting frame. A threaded ring is threadedly connected to the arc surface of the screw rod.

[0015] The effect achieved by the above components is that when it is necessary to adjust the positions of the connecting frame and the roller, loosen the threaded ring for adjustment, pull the screw rod to move, the screw rod slides on the inner wall of the chute, the screw rod drives the connecting frame to move, the connecting frame drives the roller to move. After moving to the appropriate position, tighten the threaded ring for fixation, and then start the hydraulic rod for up and down adjustment.

[0016] Preferably, a limiting rod is fixedly connected inside the limiting groove, and the limiting rod is slidably connected to the screw rod.

[0017] The effect achieved by the above components is that the limiting rod can limit the screw rod, avoiding deviation or rotation of the screw rod during movement.

[0018] Preferably, a protective sleeve is fixedly connected to the arc surface of the threaded ring, and a notch is formed in the arc surface of the protective sleeve.

[0019] The effect achieved by the above components is that the protective sleeve can protect the threaded ring, avoiding excessive wear of the threaded ring during use. The notch can increase the friction between the hand and the threaded ring, avoiding sliding when rotating the threaded ring.

[0020] Compared with the related art, an ultraviolet LED lithography exposure device provided by the present invention has the following beneficial effects:

[0021] The present invention provides an ultraviolet LED lithography exposure device. By setting a limiting structure, the effect of conveniently limiting an object can be achieved, avoiding damage or skew of the processed image caused by the possible skew of the material when manually placing it.

[0022] By setting an adjusting structure, the effect of conveniently adjusting the connecting frame and the roller and conveniently limiting materials of various models and sizes can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Structural schematic diagram of an ultraviolet LED lithography exposure device provided by the present utility model;

[0024] Figure 2 is Figure 1 the shown limiting structure schematic diagram;

[0025] Figure 3 is Figure 1 shown Figure 2 enlarged view of part A;

[0026] Figure 4 is Figure 1 the shown adjustment structure schematic diagram.

[0027] Reference numerals in the figure: 1, support; 2, machine tool; 3, transmission belt; 4, guide rail; 5, moving device; 6, lithography device; 7, limiting structure; 701, fixing plate; 702, connecting plate; 703, sliding bar; 704, slider; 705, connecting rod; 706, rotating rod; 707, servo motor; 708, fixed rod; 709, connecting frame; 710, chute; 711, roller; 712, rubber sleeve; 713, mounting plate; 8, adjustment structure; 81, connecting block; 82, hydraulic rod; 83, limiting groove; 84, limiting rod; 85, screw; 86, threaded ring; 87, protective sleeve; 88, notch. Detailed implementation manners

[0028] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0029] The following describes the specific implementation of the present utility model in detail with reference to specific embodiments.

[0030] Please refer to Figures 1 to 4 , an ultraviolet LED lithography exposure device provided by an embodiment of the present utility model includes: a support 1 and an adjustment structure 8. The upper end of the support 1 is fixedly connected to a machine tool 2. A transmission belt 3 is installed inside the machine tool 2. A guide rail 4 is installed on the upper surface of the machine tool 2. A moving device 5 is slidably connected inside the guide rail 4. A lithography device 6 is installed on the surface of the moving device 5. A limiting structure 7 is provided on the upper surface of the machine tool 2. An adjustment structure 8 is provided on the lower surface of the mounting plate 713.

[0031] In an embodiment of the present utility model, please refer to Figure 2 and Figure 3, the limiting structure 7 includes two fixed plates 701. The two fixed plates 701 are fixedly connected to the machine tool 2. The upper ends of the fixed plates 701 are fixedly connected with connecting plates 702. Four sliding bars 703 are fixedly connected to the upper surface of the connecting plate 702. The four sliding bars 703 are divided into two groups in pairs. A slider 704 is slidably connected to the surface of the sliding bar 703. An installation plate 713 is fixedly connected to the upper surface of a group of sliders 704. An adapter bar 705 is rotatably connected to the upper surface of the installation plate 713. A rotating rod 706 is rotatably connected to the upper surface of the connecting plate 702. The rotating rod 706 is rotatably connected to the adapter bar 705. Two fixed rods 708 are fixedly connected to the upper surface of the connecting plate 702. A servo motor 707 is fixedly connected to the ends of the two fixed rods 708 that are close to each other. The output end of the servo motor 707 is fixedly connected to the rotating rod 706. Two chutes 710 are opened in the inner wall of the connecting plate 702. Two connecting frames 709 are arranged below the installation plate 713. The two connecting frames 709 are connected to the installation plate 713 by means of an adjusting structure 8. A plurality of rollers 711 are rotatably connected to the lower surface of the connecting frame 709. When it is necessary to perform limiting processing on an item that needs LED lithography, the item is placed on the conveyor belt 3, and then the conveyor belt 3 conveys the item to the lower part of the limiting structure 7. Then the servo motor 707 is started to operate. The servo motor 707 drives the rotating rod 706 to rotate. The rotating rod 706 drives the adapter bar 705 to move. The adapter bar 705 drives the installation plate 713 to move. The installation plate 713 drives the slider 704 to move. The installation plate 713 drives the slider 704 to slide on the surface of the sliding bar 703. The installation plate 713 drives the adjusting structure 8 to slide on the inner wall of the chute 710. The adjusting structure 8 drives the connecting frame 709 to move. The connecting frame 709 drives the rollers 711 to move. The rollers 711 limit the item. After the limiting is completed, the conveyor belt 3 drives the item to move to the lower part of the lithography device 6, and the lithography device 6 is started to perform processing. The moving device 5 drives the lithography device 6 to move for processing. A rubber sleeve 712 is fixedly connected to the arc surface of the roller 711. The cross section of the rubber sleeve 712 is annular. The rubber sleeve 712 can not only protect the roller 711 to a certain extent, but also increase the friction between the roller 711 and the contact surface. The cross section of the fixed rod 708 is "L" shaped, and the fixed rod 708 is made of stainless steel. The stainless steel material can prevent the fixed rod 708 from rusting after long-term use, which may easily cause the servo motor 707 to fall off. The cross section of the sliding bar 703 is rectangular, and the sliding bar 703 is made of stainless steel. The sliding bar 703 can perform a certain degree of limiting to prevent deviation when the installation plate 713 moves;

[0032] In an embodiment of the present invention, please refer to Figure 1 and Figure 4, the adjustment structure 8 includes a hydraulic rod 82. The hydraulic rod 82 is fixedly connected to the mounting plate 713, and the hydraulic rod 82 is slidably connected to the chute 710. The output end of the hydraulic rod 82 is fixedly connected to a connecting block 81. Two limiting grooves 83 are formed in the inner wall of the connecting block 81. A screw rod 85 is slidably connected to the inner wall of the limiting groove 83. The lower end of the screw rod 85 is fixedly connected to the connecting frame 709. A threaded ring 86 is threadedly connected to the arc surface of the screw rod 85. When it is necessary to adjust the positions of the connecting frame 709 and the roller 711, loosen the threaded ring 86 for adjustment, pull the screw rod 85 to move. The screw rod 85 slides on the inner wall of the chute 710. The screw rod 85 drives the connecting frame 709 to move, and the connecting frame 709 drives the roller 711 to move. After moving to the appropriate position, tighten the threaded ring 86 for fixation, and then start the hydraulic rod 82 for up and down adjustment. A limiting rod 84 is fixedly connected to the inside of the limiting groove 83, and the limiting rod 84 is slidably connected to the screw rod 85. The limiting rod 84 can limit the screw rod 85 to prevent the screw rod 85 from shifting or rotating during movement. A protective sleeve 87 is fixedly connected to the arc surface of the threaded ring 86, and a notch 88 is formed in the arc surface of the protective sleeve 87. The protective sleeve 87 can protect the threaded ring 86 to prevent excessive wear of the threaded ring 86 during use. The notch 88 can increase the friction between the hand and the threaded ring 86 to prevent slipping when rotating the threaded ring 86;

[0033] The working principle of an ultraviolet LED lithography exposure device provided by the present utility model is as follows: When it is necessary to perform limiting processing on an item that needs LED lithography, place the item on the conveyor belt 3, and then the conveyor belt 3 conveys the item to the lower part of the limiting structure 7. Then start the servo motor 707 to operate. The servo motor 707 drives the rotating rod 706 to rotate, the rotating rod 706 drives the connecting rod 705 to move, the connecting rod 705 drives the mounting plate 713 to move, the mounting plate 713 drives the slider 704 to move, the mounting plate 713 drives the slider 704 to slide on the surface of the slide bar 703, the mounting plate 713 drives the adjustment structure 8 to slide on the inner wall of the chute 710, the adjustment structure 8 drives the connecting frame 709 to move, the connecting frame 709 drives the roller 711 to move, and the roller 711 limits the item. After the limiting is completed, the conveyor belt 3 drives the item to move under the lithography device 6, and start the lithography device 6 for processing. The moving device 5 drives the lithography device 6 to move for processing. The rubber sleeve 712 can not only protect the roller 711 to a certain extent, but also increase the friction between the roller 711 and the contact surface. The stainless steel material can prevent the fixing rod 708 from rusting after long-term use, which may easily cause the servo motor 707 to fall off. The slide bar 703 can perform a certain degree of limiting to prevent deviation when moving the mounting plate 713.

[0034] When it is necessary to adjust the positions of the connecting frame 709 and the roller 711, loosen the threaded ring 86 for adjustment, pull the screw rod 85 to move. The screw rod 85 slides on the inner wall of the chute 710. The screw rod 85 drives the connecting frame 709 to move, and the connecting frame 709 drives the roller 711 to move. After moving to the appropriate position, turn the threaded ring 86 to fix it. Then start the hydraulic rod 82 for up and down adjustment. The limiting rod 84 can limit the screw rod 85 to prevent the screw rod 85 from shifting or rotating during movement. The protective sleeve 87 can protect the threaded ring 86 to prevent excessive wear of the threaded ring 86 during use. The notch 88 can increase the friction between the hand and the threaded ring 86 to prevent slipping when turning the threaded ring 86.

[0035] The circuits and controls involved in the present utility model are all prior arts and will not be elaborated herein.

[0036] The above are only the embodiments of the present utility model, and do not limit the patent scope of the present utility model accordingly. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present utility model.

Claims

1. An ultraviolet LED lithography exposure device, characterized in that, Including: A bracket (1) and an adjustment structure (8), the upper end of the bracket (1) is fixedly connected to a machine tool (2), a transmission belt (3) is installed inside the machine tool (2), a guide rail (4) is installed on the upper surface of the machine tool (2), a moving device (5) is slidably connected inside the guide rail (4), a lithography device (6) is installed on the surface of the moving device (5), a limiting structure (7) is provided on the upper surface of the machine tool (2), the limiting structure (7) includes two fixing plates (701), the two fixing plates (701) are fixedly connected to the machine tool (2), a connecting plate (702) is fixedly connected to the upper end of the fixing plate (701), four sliding bars (703) are fixedly connected to the upper surface of the connecting plate (702), the four sliding bars (703) are divided into two groups in pairs, a slider (704) is slidably connected to the surface of the sliding bar (703), a mounting plate (713) is fixedly connected to the upper surface of a group of sliders (704), a connecting rod (705) is rotatably connected to the upper surface of the mounting plate (713), a rotating rod (706) is rotatably connected to the upper surface of the connecting plate (702), the rotating rod (706) is rotatably connected to the connecting rod (705), two fixing rods (708) are fixedly connected to the upper surface of the connecting plate (702), a servo motor (707) is fixedly connected to the ends of the two fixing rods (708) close to each other, the output end of the servo motor (707) is fixedly connected to the rotating rod (706), two chutes (710) are opened in the inner wall of the connecting plate (702), two connecting frames (709) are arranged below the mounting plate (713), the two connecting frames (709) are connected to the mounting plate (713) by means of the adjustment structure (8), and a plurality of rollers (711) are rotatably connected to the lower surface of the connecting frame (709).

2. The ultraviolet LED lithography exposure apparatus according to claim 1, wherein, A rubber sleeve (712) is fixedly connected to the arc surface of the roller (711), and the cross section of the rubber sleeve (712) is annular.

3. An ultraviolet LED lithography exposure device according to claim 1, characterized in that The cross section of the fixing rod (708) is in an "L" shape, and the fixing rod (708) is a stainless steel rod.

4. The ultraviolet LED lithography exposure device according to claim 1, wherein The cross section of the sliding bar (703) is rectangular, and the sliding bar (703) is made of stainless steel.

5. An ultraviolet LED lithography exposure apparatus according to claim 1, characterized in that, An adjustment structure (8) is provided on the lower surface of the mounting plate (713), the adjustment structure (8) includes a hydraulic rod (82), the hydraulic rod (82) is fixedly connected to the mounting plate (713), the hydraulic rod (82) is slidably connected to the chute (710), a connecting block (81) is fixedly connected to the output end of the hydraulic rod (82), two limiting grooves (83) are opened in the inner wall of the connecting block (81), a screw rod (85) is slidably connected to the inner wall of the limiting groove (83), the lower end of the screw rod (85) is fixedly connected to the connecting frame (709), and a threaded ring (86) is threadedly connected to the arc surface of the screw rod (85).

6. The ultraviolet LED lithography exposure device according to claim 5, wherein, A limiting rod (84) is fixedly connected inside the limiting groove (83), and the limiting rod (84) is slidably connected to the screw rod (85).

7. An ultraviolet LED lithography exposure apparatus according to claim 5, characterized in that, The arc surface of the threaded ring (86) is fixedly connected with a protective sleeve (87), and a notch (88) is formed in the arc surface of the protective sleeve (87).

Citation Information

Patent Citations

  • Ultraviolet LED photoetching exposure device

    CN211718691U