Crystal support for slicing silicon single crystal rod

Abstract

The crystal support comprises a fixing part, a main body part and a sticky plate part, the fixing part comprises an inserting plate and two T-shaped sliding rails, each T-shaped sliding rail is provided with a plurality of strip-shaped through grooves and a plurality of first inserting holes, the main body part is provided with an inserting groove matched with the inserting plate and a plurality of second inserting holes, the sticky plate part is connected with a plurality of screw rods, and the screw rods are connected with the inserting plate. The main body part is provided with a plurality of through holes matched with the screws, the fixing part is provided with a plurality of counter bores, and the screws sequentially penetrate through the through holes and the counter bores and then are fixedly connected with the nuts. According to the crystal support, the sticky plate part is convenient to replace after being used for a long time, so that the whole crystal support does not need to be replaced, and the maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon slicing, and more specifically, to a crystal holder for slicing a single crystal silicon rod. Background Art

[0002] Single crystal silicon rods play a crucial role in the semiconductor manufacturing industry, and slicing is one of the key steps in the processing of single crystal silicon rods. During the slicing process of a single crystal silicon rod, the crystal holder is a key component. The main function of the crystal holder is to provide a stable and flat support surface for the single crystal silicon rod. During slicing, the silicon rod, resin plate, and crystal holder are usually bonded together, and then the crystal holder is fixed on the slicing machine to slice the silicon rod.

[0003] Since it is necessary to ensure the complete cutting of the silicon wafer during the slicing process, in actual operation, a little more is usually cut, so the resin plate will be cut. Therefore, the resin plate is generally used once and not reused. However, the crystal holder is reused. Since the crystal holder needs to go through operations such as gluing and removing the glue after cutting each time, after long-term use, the gluing surface of the crystal holder will also be damaged, and problems such as poor bonding will occur after the surface is damaged. The cost of replacing the entire crystal holder is relatively high, and the existing crystal holder requires the use of a plug rod during the loading and unloading process. Sometimes, it is difficult to align the plug rod with the jack, which takes a long time and results in low work efficiency. Summary of the Utility Model

[0004] The utility model aims to overcome the defects of the prior art and provide a crystal holder for slicing a single crystal silicon rod.

[0005] To achieve the above object, the utility model provides the following technical solution: A crystal holder includes a fixing part, a main body part installed at the bottom of the fixing part, and a bonding plate part fixed at the bottom of the main body part. The fixing part includes an insertion plate and two T-shaped sliding rails fixedly connected to the insertion plate. The T-shaped sliding rails have a plurality of strip-shaped through grooves and a plurality of first jacks. The number of strip-shaped through grooves at the two T-shaped sliding rails is the same and corresponds one by one, and the number of first jacks at the two T-shaped sliding rails is the same and corresponds one by one. The main body part has a slot matching with the insertion plate and a plurality of second jacks. The bonding plate part is connected with a first strip-shaped reinforcing plate, and both sides of the first strip-shaped reinforcing plate are connected with a plurality of second strip-shaped reinforcing plates. The main body part has a first strip-shaped accommodating groove matching with the first strip-shaped reinforcing plate and a plurality of second strip-shaped accommodating grooves matching with the second strip-shaped reinforcing plates. The first strip-shaped reinforcing plate has a plurality of screw rods, the main body part has a plurality of through holes matching with the screw rods, and the fixing part has a plurality of counterbores. The screw rods sequentially pass through the through holes and counterbores and are fixedly connected with nuts.

[0006] Further, one end of the main body part has two positioning blocks, and the insertion plate has a positioning groove matching with the positioning blocks. One end of the positioning groove is open.

[0007] Thus, the positioning is more accurate when the main body is installed.

[0008] Furthermore, the adhesive plate part has a rectangular frame-shaped convex edge.

[0009] Thus, the convex edge of the rectangular frame can prevent the adhesive from sticking to the side of the main body.

[0010] Furthermore, there are multiple groups of the screw rods, and the multiple groups of screw rods are evenly distributed at equal intervals.

[0011] Thus, a firm connection is achieved among the solid part, the main body part, and the adhesive plate part.

[0012] Furthermore, the end of the main body part is flush with the end of the fixing part.

[0013] Thus, the overall structure of the crystal tray is more stable.

[0014] Furthermore, there are two second jacks, and each T-shaped slide rail has two strip-shaped through grooves and two first jacks.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] 1. For the crystal tray of the present application, after the adhesive plate part is used for a long time, it is convenient to replace, so that the whole crystal tray does not need to be replaced, reducing the maintenance cost.

[0017] 2. For the crystal tray of the present application, the fixing part has the first jack and the strip-shaped through groove, and the insertion rod can be used to cooperate with the first jack or the strip-shaped through groove; when the crystal tray is blanked by inserting the insertion rod into the strip-shaped through groove, the operation of the insertion rod is easier. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the first perspective of the separated components;

[0019] Figure 2 It is a schematic diagram of the second perspective of the separated components;

[0020] Figure 3 It is a schematic diagram of the cooperation between the insertion plate and the insertion slot;

[0021] Figure 4 It is a schematic diagram of the overall structure of the crystal tray.

[0022] Description of the reference numerals: 1 fixing part; 1.1 insertion plate; 1.2 T-shaped slide rail; 1.3 strip-shaped through groove; 1.4 first jack; 1.5 counterbore; 1.6 positioning groove; 2 main body part; 2.1 insertion slot; 2.2 second jack; 2.3 first strip-shaped accommodating groove; 2.4 second strip-shaped accommodating groove; 2.5 through hole; 2.6 positioning block; 3 adhesive plate part; 3.1 first strip-shaped reinforcing plate; 3.2 second strip-shaped reinforcing plate; 3.3 screw rod; 3.4 nut; 3.5 convex edge. Detailed implementation mode

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0024] The present utility model provides a crystal holder for slicing single crystal rods as Figures 1-4 shown, which includes a fixing part 1, a main body part 2 installed at the bottom of the fixing part 1, and an adhesive plate part 3 fixed at the bottom of the main body part 2. The fixing part 1 includes an insertion plate 1.1 and two T-shaped sliding rails 1.2 fixedly connected to the insertion plate 1.1. The T-shaped sliding rails 1.2 have a plurality of strip-shaped through grooves 1.3 and a plurality of first insertion holes 1.4. The number of strip-shaped through grooves 1.3 at the two T-shaped sliding rails 1.2 is the same and corresponds one by one, and the number of first insertion holes 1.4 at the two T-shaped sliding rails 1.2 is the same and corresponds one by one. The main body part 2 has a slot 2.1 that cooperates with the insertion plate 1.1 and a plurality of second insertion holes 2.2. The adhesive plate part 3 is connected with a first strip-shaped reinforcing plate 3.1, and both sides of the first strip-shaped reinforcing plate 3.1 are connected with a plurality of second strip-shaped reinforcing plates 3.2. The main body part 2 has a first strip-shaped accommodating groove 2.3 that cooperates with the first strip-shaped reinforcing plate 3.1 and a plurality of second strip-shaped accommodating grooves 2.4 that cooperate with the second strip-shaped reinforcing plates 3.2. The first strip-shaped reinforcing plate 3.1 has a plurality of screw rods 3.3, and the main body part 2 has a plurality of through holes 2.5 that cooperate with the screw rods 3.3. The fixing part 1 has a plurality of counterbores 1.5. The screw rods 3.3 sequentially pass through the through holes 2.5 and the counterbores 1.5 and are fixedly connected with nuts 3.4.

[0025] One end of the main body part 2 has two positioning blocks 2.6, and the insertion plate 1.1 has a positioning groove 1.6 that cooperates with the positioning blocks 2.6, and one end of the positioning groove is open; the adhesive plate part 3 has a rectangular frame-shaped convex edge 3.5; there are multiple groups of the screw rods 3.3, and multiple groups of the screw rods 3.3 are equally spaced; the end of the main body part 2 is flush with the end of the fixing part 1; there are two second insertion holes 2.2, and each T-shaped sliding rail 1.2 has two strip-shaped through grooves 1.3 and two first insertion holes 1.4.

[0026] Working principle: When the crystal carrier of the present application is in use, the bonding plate part is coated with bonding glue to bond the resin plate, and the resin plate is coated with glue to bond the silicon rod. The T-shaped slide rail is used in cooperation with the lifting unit of the silicon wafer cutting device, and the cooperation between the insertion rod and the first jack is utilized to fixedly connect the crystal carrier to the lifting unit of the silicon wafer cutting device. Driven by the lifting unit, the crystal carrier can descend to facilitate the cutting of the silicon wafer. During blanking, the insertion rod in the first jack can be pulled out, the transportation device and the lifting unit of the silicon wafer cutting device can be aligned, the crystal carrier can be pulled out from the silicon wafer cutting device, moved to the transportation device, and the crystal carrier is fixed to the transportation device by using the cooperation between the insertion rod and the first jack or the strip-shaped through groove (it is more convenient to operate when inserting by using the cooperation between the strip-shaped through groove and the insertion rod. Although the cooperation between the strip-shaped through groove and the insertion rod will give the crystal carrier some space for left and right movement, in actual use, due to the large weight of the crystal carrier and the fact that the transportation device will immediately fix the crystal carrier to the crystal carrier holder after receiving the crystal carrier, it does not affect the actual transfer operation). Then, when the crystal carrier is installed on the crystal carrier holder from the transportation device, the crystal carrier can be fixedly installed on the crystal carrier holder by using the cooperation between the insertion rod and the second jack, and the insertion rod in the first jack or the strip-shaped through groove is pulled out to disconnect the crystal carrier from the transportation device, thus facilitating subsequent operations.

[0027] After the bonding plate part is used for a period of time, there will be wear and tear, and the bonding plate part can be replaced, so that the whole crystal carrier does not need to be replaced, thus reducing the maintenance cost.

[0028] Although the present utility model has been illustrated and described with respect to the preferred embodiments, those skilled in the art should understand that various changes and modifications can be made to the present utility model as long as they do not exceed the scope defined by the claims of the present utility model.

Claims

1. A crystal carrier for slicing single crystal silicon rods, characterized in that, It includes a fixing part, a main body part installed at the bottom of the fixing part, and an adhesive plate part fixed at the bottom of the main body part. The fixing part includes an insertion plate and two T-shaped slide rails fixedly connected to the insertion plate. The T-shaped slide rails have a plurality of strip-shaped through grooves and a plurality of first jacks. The number of strip-shaped through grooves at the two T-shaped slide rails is the same and they correspond one by one. The number of first jacks at the two T-shaped slide rails is the same and they correspond one by one. The main body part has a slot matching with the insertion plate and a plurality of second jacks. The adhesive plate part is connected with a first strip-shaped reinforcing plate, and both sides of the first strip-shaped reinforcing plate are connected with a plurality of second strip-shaped reinforcing plates. The main body part has a first strip-shaped accommodating groove matching with the first strip-shaped reinforcing plate and a plurality of second strip-shaped accommodating grooves matching with the second strip-shaped reinforcing plates. The first strip-shaped reinforcing plate has a plurality of screw rods, and the main body part has a plurality of through holes matching with the screw rods. The fixing part has a plurality of counterbores, and the screw rods are fixedly connected with nuts after passing through the through holes and the counterbores in sequence.

2. The crystal carrier for slicing single crystal rods according to claim 1, characterized in that, One end of the main body part has two positioning blocks, and the insertion plate has a positioning groove matching with the positioning blocks. One end of the positioning groove is open.

3. The crystal carrier for slicing single crystal rods according to claim 1, characterized in that, The adhesive plate part has a rectangular frame-shaped convex edge.

4. The crystal carrier for slicing single crystal rods according to claim 1, characterized in that, There are multiple groups of the screw rods, and the multiple groups of screw rods are equally spaced.

5. The crystal carrier for slicing single crystal rods according to claim 1, characterized in that, The end of the main body part is flush with the end of the fixing part.

6. The crystal carrier for slicing single crystal rods according to claim 1, characterized in that, There are two second jacks, and each T-shaped slide rail has two strip-shaped through grooves and two first jacks.

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