Manual wafer rewinder

Abstract

The utility model discloses a manual wafer rewinder, which comprises a platform, a guide rail for a clamping plug to move is arranged on the platform, notches are respectively arranged in the middles of two sides of the guide rail, limit stop blocks are respectively arranged at positions, corresponding to the notches, of the platform, a fixed stop block is arranged at one end of the platform, and a movable stop block is arranged at the other end of the platform. According to the utility model, the wafer rewinder is improved, so that the placement position and direction of the clamping plug on the operation platform of the wafer rewinder are effectively limited, errors caused by offset or inconsistent orientation of the clamping plug in the operation process of an operator are prevented, and the risk occurrence probability of wafer patching, wafer fragmentation and wafer front surface damage in wafer rewinder work is reduced.

Description

Technical Field

[0001] The utility model relates to a fixture for semiconductor wafer conversion, in particular to a manual wafer flipper. Background Art

[0002] Some precision inspection equipment with robotic arms uses fixed chucks for commissioning during the new machine commissioning phase. Since there are slight differences in each chuck, such as the height difference of the slots, etc., after the equipment adjusts the parameters for the robotic arm to pick and place wafers on the chuck, this chuck will be designated as the dedicated chuck for this equipment to avoid accidents such as the robotic arm failing to pick and place wafers or breaking the wafers during the inspection due to chuck differences.

[0003] During the inspection work, there is often a need to transfer wafers from one chuck to another. The original flipper has some defects, which easily cause the following problems for the operator during the flipping operation:

[0004] 1. There is no device on the flipper to fix the chuck. During the flipping process, if the position is not aligned properly, it is easy to shift, or the chuck will shift due to excessive friction in the chuck slot during the flipping process, which will lead to risks of wafer misalignment, chip bonding, and fragmentation during flipping.

[0005] 2. There is no anti-mistake device on the flipper. If the "H" surfaces of the two chucks are not placed consistently during the flipping process and the operator does not notice in time, it will cause the robotic arm, etc. to contact the front side of the wafer during subsequent inspection work, resulting in irreversible damage to the effective surface of the wafer. Summary of the Invention

[0006] In order to overcome the disadvantages and deficiencies existing in the prior art, the purpose of the utility model is to provide a manual wafer flipper.

[0007] The purpose of the utility model is achieved by the following technical solutions: A manual wafer flipper includes a platform. A guide rail for the movement of the chuck is provided on the platform. Notches are respectively provided in the middle parts of both sides of the guide rail. Limiting blocks are respectively provided at the positions of the platform corresponding to the notches. A fixed block is provided at one end of the platform, and a movable block is provided at the other end of the platform. The guide rail, the notches, and the limiting blocks enclose an "H" - shaped area. The bottom surface of the chuck can just be accommodated in the "H" - shaped area, and the chuck can only be placed in the "H" - shaped area from top to bottom, which can prevent the lateral movement of the chuck.

[0008] As an improvement of the manual wafer flipping device of the present utility model, the movable stopper includes a U-shaped sliding rod. One end of the U-shaped sliding rod is provided with a baffle, and the other end of the U-shaped sliding rod is movably connected to the bottom of the platform. The baffle is located above the platform, and the baffle and the fixed stopper jointly limit the left and right movement positions of the chuck, and the two limit stoppers and the guide rail limit the front and back movement positions of the chuck.

[0009] As an improvement of the manual wafer flipping device of the present utility model, a linear slide rail is provided at the bottom of the platform. A linear slider is provided on the linear slide rail. The linear slider is connected to the U-shaped sliding rod, and a handle rod is further provided on the linear slider. The movement of the U-shaped sliding rod is driven by controlling the handle rod.

[0010] As an improvement of the manual wafer flipping device of the present utility model, support blocks are provided at the four corners of the bottom of the platform. The support blocks can support the platform to a certain height. The height supported by the support blocks can provide enough space for the U-shaped sliding rod to move.

[0011] As an improvement of the manual wafer flipping device of the present utility model, a protrusion is provided at each corresponding end of the two limit stoppers. The protrusion can reduce the contact surface with the chuck.

[0012] The beneficial effects of the present utility model are as follows: By improving the flipping device, the present utility model effectively restricts the placement position and direction of the chuck on the operation platform of the flipping device, preventing mistakes caused by the offset or inconsistent orientation of the chuck during the operation of the operator, and reducing the risk occurrence probability of wafer pasting, fragmentation and damage to the front side of the wafer during the flipping operation. Description of the Drawings

[0013] Figure 1 is the front view of the present utility model;

[0014] Figure 2 is the side view of the present utility model;

[0015] Figure 3 is the top view of the present utility model;

[0016] The reference numerals are: 1, platform; 2, guide rail; 3, notch; 4, limit stopper; 5, fixed stopper; 6, movable stopper; 7, linear slide rail; 8, linear slider; 9, handle rod; 10, support block; 41, protrusion; 61, U-shaped sliding rod; 62, baffle. Detailed Description of the Embodiment

[0017] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0018] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present utility model are only used to explain the relative position relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0019] In addition, the descriptions involving "first", "second", etc. in the present utility model are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0020] As Figures 1 - 3 shown, a manual wafer tilter includes a platform 1. A guide rail 2 for the movement of a chuck is provided on the platform 1. Notches 3 are respectively provided in the middle of both sides of the guide rail 2. Limit blocks 4 are respectively provided at the positions of the platform 1 corresponding to the notches 3. A fixed block 5 is provided at one end of the platform 1, and a movable block 6 is provided at the other end of the platform 1. The guide rail 2, the notches 3 and the limit blocks 4 enclose an H-shaped area. The bottom surface of the chuck can just be accommodated in the H-shaped area, and the chuck can only be placed in the H-shaped area from top to bottom, which can prevent the lateral movement of the chuck.

[0021] Preferably, the movable block 6 includes a U-shaped sliding rod 61. A baffle 62 is provided at one end of the U-shaped sliding rod 61. The other end of the U-shaped sliding rod 61 is movably connected to the bottom of the platform 1. The baffle 62 is located above the platform 1. The baffle 62 and the fixed block 5 jointly limit the left and right movement positions of the chuck, and the two limit blocks 4 and the guide rail 2 limit the front and back movement positions of the chuck.

[0022] Preferably, a linear slide rail 7 is provided at the bottom of the platform 1. A linear slider 8 is provided on the linear slide rail 7. The linear slider 8 is connected to the U-shaped sliding rod 61. A handle rod 9 is also provided on the linear slider 8. The movement of the U-shaped sliding rod 61 is driven by controlling the handle rod 9.

[0023] Preferably, support blocks 10 are provided at the four bottom corners of the platform 1, and the support blocks 10 can support the platform 1 to a certain height. The height supported by the support blocks 10 can provide enough space for the U-shaped slide rod to move.

[0024] Preferably, protrusions 41 are respectively provided at the corresponding ends of the two limit blocks 4, and the protrusions 41 can reduce the contact surface with the plug.

[0025] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and structures of the present invention. The scope of the present invention is defined by the appended claims and their equivalent scope.

Claims

1. A manual wafer flip-chip device, comprising a platform, characterized in that, The platform is provided with guide rails for the cassette to move. The middle parts of both sides of the guide rails are respectively provided with notches. The platform is respectively provided with limiting stoppers at positions corresponding to the notches. One end of the platform is provided with a fixed stopper, and the other end of the platform is provided with a movable stopper.

2. The manual wafer inverter according to claim 1, wherein, The movable stopper includes a U-shaped sliding rod. One end of the U-shaped sliding rod is provided with a baffle plate. The other end of the U-shaped sliding rod is movably connected to the bottom of the platform, and the baffle plate is located above the platform.

3. The manual wafer flipper according to claim 2, wherein A linear slide rail is provided at the bottom of the platform. A linear slider is provided on the linear slide rail. The linear slider is connected to the U-shaped sliding rod, and a handle rod is further provided on the linear slider.

4. The manual wafer flipper according to claim 3, wherein, Support blocks are provided at the four corners of the bottom of the platform, and the support blocks can support the platform to a certain height.

5. The manual wafer inverter according to claim 1, wherein One protrusion is respectively provided at the corresponding ends of the two limiting stoppers.

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