XRD sample fixing tool

Abstract

The utility model provides an XRD sample fixing tool which comprises a disc body, a plurality of fixed baffles, a movable baffle, a pressing and abutting mechanism and a clamping mechanism. The tray body is used for being placed on a sample table of XRD equipment; the plurality of fixed baffle plates are fixed on the disc body and vertically protrude upwards from the disc body, and the plurality of fixed baffle plates enclose an accommodating space which is positioned among the fixed baffle plates and can accommodate a sample to be tested; the movable baffle plate is movably arranged on the disc body, and is used for clamping and fixing the sample from the peripheral side together with the plurality of fixed baffle plates; the pressing and abutting mechanism is arranged on the disc body and is used for applying pressure to the movable baffle plate, so that the movable baffle plate and the plurality of fixed baffle plates are kept to press and abut against the sample in the accommodating space from the peripheral side; the clamping mechanism is used for detachably clamping the disc body and the sample table together in the vertical direction. Therefore, the sample is prevented from slipping off from the sample table with the supporting surface only being a plane and being damaged due to slipping off, the sample is convenient to fix and take down, and the sample table does not need to be cleaned.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor detection, and more particularly to an XRD sample fixing tooling. Background Art

[0002] In the semiconductor field, it is often necessary to perform XRD detection on samples, such as the detection of germanium wafers.

[0003] Figure 1 is a schematic diagram of an example of an XRD device.

[0004] The XRD device 200 includes a sample stage 201, an X-ray emission end 202, a sample diffraction ray receiving end 203, a camera 204, a three-dimensional translation mechanism 205, a base 206, a rotation mechanism 207, and a housing 208.

[0005] The sample stage 201 is for placing the sample 300 thereon. The X-ray emission end 202 and the sample diffraction ray receiving end 203 are located above the sample stage 201 and spaced apart in the left-right direction D2. The X-ray emission end 202 is used to emit X-rays to the sample 300, and the sample diffraction ray receiving end 203 is used to receive the diffraction rays generated by the sample 300. The camera 204 is used to monitor the position of the sample 300 on the sample stage 201. The three-dimensional translation mechanism 205 is connected to the sample stage 201, and the three-dimensional translation mechanism 205 is used to achieve the translation of the sample stage 201 together with the sample 300 thereon in the front-back direction D1, the left-right direction D2, and the up-down direction D3. The base 206 is located below the three-dimensional translation mechanism 205 and is used to fixedly support the three-dimensional translation mechanism 205. The rotation mechanism 207 is connected to the base 206, and the rotation mechanism 207 is used to rotate the base 206 together with the three-dimensional translation mechanism 205, the sample stage 201, and the sample 300 around the front-back direction D1 in the plane formed by the left-right direction D2 and the up-down direction D3 to tilt the sample stage 201 by a certain angle. The housing 208 has an openable and closable access door (not shown) for the sample 300 to enter and exit. The X-ray emission end 202, the sample diffraction ray receiving end 203, the camera 204, the three-dimensional translation mechanism 205, the base 206, and the sample stage 201 are all located inside the housing 208.

[0006] In Figure 1 the three-dimensional translation mechanism 205 includes a front-back direction translation mechanism 205a, a left-right direction translation mechanism 205b, and an up-down direction translation mechanism 205c. The front-back direction translation mechanism 205a is used to achieve the translation of the sample stage 201 in the front-back direction D1; the left-right direction translation mechanism 205b is used to achieve the translation of the sample stage 201 in the left-right direction D2; the up-down direction translation mechanism 205c is used to achieve the translation of the sample stage 201 in the up-down direction D3.

[0007] In Figure 1In the XRD device 200 shown, the support surface of the sample stage 201 is only a flat surface, and the sample 300 cannot be directly fixed on the support surface of the sample stage 201.

[0008] In addition, when the sample 300 needs to be rotated for measurement, for example, when the sample 300 is a (100) germanium wafer, when testing (100) 0°, the sample stage 201 can be horizontal. When testing (100) 6°, the rotation mechanism 207 is required to rotate the base 206 together with the three-dimensional translation mechanism 205, the sample stage 201, and the sample 300 around the front-rear direction D1 within the plane formed by the left-right direction D2 and the up-down direction D3 so that the sample stage 201 rotates to be inclined 6° relative to the horizontal plane. However, since the sample stage 201 is only a flat surface, the germanium wafer will slide off the sample stage 201 and the germanium wafer will fall off the sample stage 201 and be damaged.

[0009] If the sample 300 is fixed by gluing, the fixing and removal of the sample 300 are not only convenient. In addition, the sample stage 201 needs to be cleaned after the sample 300 is removed. Summary of the Invention

[0010] In view of the problems existing in the background technology, an object of the present disclosure is to provide an XRD sample fixing tooling, which can fix the sample on the sample stage of the XRD device to prevent the sample from sliding off the sample stage whose support surface in the XRD device is only a flat surface, and avoid damage to the sample due to sliding.

[0011] Another object of the present disclosure is to provide an XRD sample fixing tooling, which can make the fixing and removal operations of the sample convenient.

[0012] Still another object of the present disclosure is to provide an XRD sample fixing tooling, which does not require cleaning the sample stage of the XRD device after the sample is removed from the sample stage.

[0013] Therefore, an XRD sample fixing tooling is provided. The XRD sample fixing tooling includes a disk body, a plurality of fixed baffles, a movable baffle, a pressing mechanism, and a clamping mechanism; the disk body is used to be placed on the sample stage of the XRD device; the plurality of fixed baffles are fixed on the disk body and protrude vertically upward from the disk body, and the plurality of fixed baffles enclose a receiving space therebetween capable of accommodating the sample to be tested; the movable baffle is movably arranged on the disk body, and the movable baffle is used to clamp and fix the sample from the periphery together with the plurality of fixed baffles when the sample is placed on the disk body and in the receiving space; the pressing mechanism is arranged on the disk body, and the pressing mechanism is used to apply pressure to the movable baffle, and further make the movable baffle and the plurality of fixed baffles keep pressing the sample in the receiving space from the periphery; the clamping mechanism is used to detachably clamp the disk body and the sample stage of the XRD device together in the up-down direction.

[0014] The beneficial effects of the present disclosure are as follows.

[0015] In the XRD sample fixing tooling according to the present disclosure, even if the support surfaces of both the disk body and the sample stage are only flat surfaces, the sample is first fixed on the disk body by a plurality of fixed baffles, movable baffles and pressing mechanisms, and then the disk body and the sample stage are fixed by a clamping mechanism. Even if the rotating mechanism of the XRD device rotates the base together with the three-dimensional translation mechanism, the sample stage, the XRD sample fixing tooling and the sample by a certain angle in the plane formed by the left-right direction and the up-down direction around the front-back direction, the sample will not slide off the disk body and the sample will not be damaged. In other words, the sample is fixed on the sample stage of the XRD device, and the sample is fixed relative to the sample stage without moving, avoiding the sample from sliding off the sample stage whose support surface of the XRD device is only a flat surface and avoiding damage caused by the sample sliding.

[0016] In the XRD sample fixing tooling according to the present disclosure, the disk body and the sample stage of the device are detachably clamped together in the up-down direction by a clamping mechanism, realizing the detachable assembly of the sample stage and the disk body. Compared with the gluing method in the background art, the fixing and removal of the sample only require simple mechanical operations, which are convenient to operate, and there is no need to clean the sample stage of the XRD device after the XRD sample fixing tooling together with the sample is removed from the sample stage. Description of the Drawings

[0017] Figure 1 is a schematic diagram of an example of an XRD device.

[0018] Figure 2 is a top view schematic diagram of an example of the XRD sample fixing tooling according to the present disclosure, wherein an XRD sample with one diameter is shown by a solid line and XRD samples with two different diameters are shown by dotted lines.

[0019] Figure 3 is Figure 2 a three-dimensional view of the XRD sample fixing tooling, wherein the XRD sample is shown by a dotted line.

[0020] Figure 4 is Figure 3 a three-dimensional view of the assembled XRD sample fixing tooling and the sample stage of the XRD device, wherein the XRD sample is shown by a dotted line.

[0021] Figure 5 is a top view schematic diagram of another example of the XRD sample fixing tooling according to the present disclosure, wherein an XRD sample with one diameter is shown by a solid line and XRD samples with two different diameters are shown by dotted lines.

[0022] Among them, the description of the reference numerals is as follows:

[0023] 100 XRD sample fixing tooling 200 XRD device

[0024] 1 Disc body 201 Sample stage

[0025] 11 Guide groove 202 X-ray emission end

[0026] 12 Threaded hole 203 Sample diffraction line receiving end

[0027] 2 Fixed baffle 204 Camera

[0028] S Receiving space 205 Three-dimensional translation mechanism

[0029] P Vertex 205a Front-back direction translation mechanism

[0030] CL Median line 205b Left-right direction translation mechanism

[0031] 3 Movable baffle 205c Up-down direction translation mechanism

[0032] 31 Protrusion 206 Base

[0033] 4 Pressing mechanism 207 Rotating mechanism

[0034] 5 Clamping mechanism 208 Housing

[0035] 51 C-shaped frame 300 Sample

[0036] 52 Screw D1 Front-back direction

[0037] D2 Left-right direction

[0038] D3 Up-down direction Detailed implementation manner

[0039] The accompanying drawings illustrate embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but only as a basis for the claims and as a representative basis for teaching those of ordinary skill in the art to implement the present disclosure in various ways.

[0040] Refer to Figures 2 to 5 And in combination with Figure 1, the XRD sample fixing tooling 100 according to the present disclosure includes a disk body 1, a plurality of fixed baffles 2, a movable baffle 3, a pressing mechanism 4, and a clamping mechanism 5. The disk body 1 is configured to be placed on the sample stage 201 of the XRD device 200. The plurality of fixed baffles 2 are fixed to the disk body 1 and protrude vertically upward from the disk body 1. The plurality of fixed baffles 2 enclose a receiving space S therebetween that can accommodate the sample 300 to be tested. The movable baffle 3 is movably arranged on the disk body 1. The movable baffle 3 is configured to, when the sample 300 is placed on the disk body 1 and within the receiving space S, clamp and fix the sample 300 from the peripheral side together with the plurality of fixed baffles 2. The pressing mechanism 4 is arranged on the disk body 1. The pressing mechanism 4 is configured to apply a pressure to the movable baffle 3, so that the movable baffle 3 and the plurality of fixed baffles 2 keep pressing the sample 300 within the receiving space S from the peripheral side. The clamping mechanism 5 is configured to detachably clamp the disk body 1 and the sample stage 201 of the XRD device 200 together in the up-down direction D3.

[0041] In the XRD sample fixing tooling 100 according to the present disclosure, during operation, the disk body 1, the plurality of fixed baffles 2, the movable baffle 3, and the pressing mechanism 4 can fix the sample 300 outside the XRD device 200 first. Specifically, the movable baffle 3 is displaced relative to the plurality of fixed baffles 2 on the disk body 1 so that the receiving space S between the movable baffle 3 and the plurality of fixed baffles 2 is large enough to conveniently place the sample 300 on the disk body 1. After that, the movable baffle 3 is moved relative to the plurality of fixed baffles 2 so that the movable baffle 3 approaches or abuts against the sample 300 from the peripheral side. Then, the pressing mechanism 4 is operated, and the pressing mechanism 4 applies a pressure to the movable baffle 3, which causes the movable baffle 3 and the plurality of fixed baffles 2 to keep pressing the sample 300 within the receiving space S from the peripheral side, thereby clamping and fixing the sample 300 from the peripheral side, and thus the sample 300 is fixed on the disk body 1. Of course, the movement of the movable baffle 3 relative to the plurality of fixed baffles 2 can also be operated under the drive of the pressing mechanism 4; after the sample 300 is fixed on the disk body 1, the disk body 1 together with the sample 300 can be placed on the sample stage 201 of the XRD device 200, and then the disk body 1 and the sample stage 201 of the XRD device 200 are detachably clamped together in the up-down direction D3 through the clamping mechanism 5; subsequently, the XRD detection of the sample 300 can be carried out.

[0042] In the XRD sample fixing tooling 100 according to the present disclosure, even if the supporting surfaces of both the disk body 1 and the sample stage 201 are only flat surfaces, the sample 300 is first fixed on the disk body 1 by a plurality of fixing baffles 2, a movable baffle 3 and a pressing mechanism 4, and then the disk body 1 and the sample stage 201 are fixed by a clamping mechanism 5. Even if the rotating mechanism 207 of the XRD device 200 rotates the base 206 together with the three-dimensional translation mechanism 205, the sample stage 201, the XRD sample fixing tooling 100 and the sample 300 by a certain angle in the plane formed by the left-right direction D2 and the up-down direction D3 around the front-back direction D1, the sample 300 will not slip off the disk body 1, and the sample 300 will not be damaged. In other words, the sample 300 is fixed on the sample stage 201 of the XRD device 200, and the sample 300 is fixed relative to the sample stage 201 without moving, avoiding the sample 300 from slipping off the sample stage 201 with only a flat supporting surface of the XRD device 200 and avoiding damage to the sample 300 due to slipping.

[0043] In the XRD sample fixing tooling 100 according to the present disclosure, the disk body 1 and the sample stage 201 of the XRD device 200 are detachably clamped together in the up-down direction D3 by a clamping mechanism 5, realizing the detachable assembly of the sample stage 201 and the disk body 1. Compared with the gluing method in the background art, the fixing and removal of the sample 300 only require simple mechanical operations, which are convenient to operate, and there is no need to clean the sample stage 300 of the XRD device 200 after the XRD sample fixing tooling 100 together with the sample 300 is removed from the sample stage 201.

[0044] As Figure 4 shown, in one example, the disk body 1 is a disk and its diameter is set to be the same as the diameter of the sample stage 201 of the XRD device 200. Thereby, the centering of the disk body 1 and the sample stage 201 of the XRD device 200 is simplified, and further the positioning of the sample 300 relative to the sample stage 201 of the XRD device 200 is simplified.

[0045] The plurality of fixing baffles 2 can be integrally formed with the disk body 1, or the plurality of fixing baffles 2 are separately formed from the disk body 1 and then fixed to the disk body 1 by means such as welding, bonding, clamping, etc. Preferably, the plurality of fixing baffles 2 are integrally formed with the disk body 1.

[0046] The quantity and layout between the plurality of fixing baffles 2 and the movable baffle 3 can be determined flexibly.

[0047] In Figures 2 to 4 the example, the plurality of fixing baffles 2 are two, and the included angle between the two fixing baffles 2 is 60°. That is to say, the two fixing baffles 2 with an included angle of 60° are convenient for forming an equilateral triangle. Further, one end of the two fixing baffles 2 is shared. Thus, the shared end of the two fixing baffles 2 forms a tangible vertex P, which is beneficial to determining the median line CL of the equilateral triangle and this vertex P. For example, asFigure 2 As shown, the movable baffle 3 is arranged on the side of the equilateral triangle opposite to the vertex P formed by the two fixed baffles 2 (i.e., the movable baffle 3 is single); the two fixed baffles 2 and the movable baffle 3 are used together to intersect the sample 300 in the circumferential direction with tangents when clamping and fixing the sample 300 in the accommodation space S on the disk body 1.

[0048] In Figure 5 the example, there are two fixed baffles 2, and the included angle between the two fixed baffles 2 is 90°; there are two movable baffles 3, and the included angle between the two movable baffles 3 is 90°; the traveling trajectories of the two movable baffles 3 do not interfere.

[0049] In an alternative example not shown, the number of the multiple fixed baffles 2 can exceed two. Similarly, the number of the movable baffles 3 can exceed two.

[0050] Compared with the case of using multiple (i.e., more than two) movable baffles 3, Figures 2 to 4 the example structure is simpler, the operation is more convenient, and there is no need to consider the problem of interference of the traveling trajectories between the multiple movable baffles 3.

[0051] The number of the pressing mechanisms 4 is the same as that of the movable baffles 3, and the pressing mechanisms 4 can be adaptively determined based on the movable baffles 3.

[0052] As Figures 2 to 5 shown, in an example, the pressing mechanism 4 is a screw; the disk body 1 is provided with a guide groove 11 and a threaded hole 12, the guide groove 11 is open upward, recessed downward and extends linearly, the threaded hole 12 penetrates the disk body 1 and opens on the circumferential surface and the guide groove 11 of the disk body 1; the movable baffle 3 is provided with a protrusion 31, the protrusion 31 protrudes downward and cooperates with the guide groove 11 to translate in the guide groove 11; the screw is screwed into the threaded hole 12 of the disk body 1 and enters the guide groove 11 and extends along the guide groove 11, and the screw is used to press against the protrusion 31 of the movable baffle 3 and apply pressure to the movable baffle 3 so that the movable baffle 3 moves along the guide groove 11 and pushes the sample 300 to move until the two fixed baffles 2 and the movable baffle 3 together clamp and fix the sample 300 in the accommodation space S on the disk body 1 from the circumferential direction. In Figures 2 to 4 the example, there are two fixed baffles 2; there is one movable baffle 3; the guide groove 11 extends along the median line CL of the triangle formed by connecting the vertices of the two fixed baffles 2. Further, the screw can be enlarged at the end so that the part where the screw contacts the movable baffle 3 is enlarged, so that the part where the movable baffle 3 contacts the sample 300 is within (or covers) the range in the up-down direction D3 of the circumferential side of the sample 300.

[0053] The clamping mechanism 5 can adopt any suitable structure. For example, referring to Figure 4, the clamping mechanism 5 includes a C-shaped frame 51 and two screws 52. The two screws 52 are screwed through the upper and lower parts of the C-shaped frame 51 and are used to fix the stacked disks 1 and the XRD sample stage 201 together. There are multiple clamping mechanisms 5, which can be arranged at intervals along the perimeter of the stacked disks 1 and the XRD sample stage 201 during operation.

[0054] For the specific structure, operation, effects, etc. of the XRD device 200, refer to Figure 1 the background art and will not be repeated here.

[0055] Multiple exemplary embodiments are described using the detailed description above, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations not shown for the sake of brevity.

Claims

1. An XRD sample fixing tooling, characterized in that the XRD sample fixing tooling (100) includes a disk body (1), a plurality of fixed baffles (2), a movable baffle (3), a pressing mechanism (4), and a clamping mechanism (5); the disk body (1) is used to be placed on the sample stage (201) of the XRD device (200); a plurality of fixed baffles (2) are fixed on the disk body (1) and protrude vertically upward from the disk body (1), and the plurality of fixed baffles (2) enclose a receiving space (S) therebetween for accommodating the sample (300) to be tested; the movable baffle (3) is movably arranged on the disk body (1), and the movable baffle (3) is used to clamp and fix the sample (300) from the circumferential side together with the plurality of fixed baffles (2) when the sample (300) is placed on the disk body (1) and in the receiving space (S); the pressing mechanism (4) is arranged on the disk body (1), and the pressing mechanism (4) is used to apply pressure to the movable baffle (3), so that the movable baffle (3) and the plurality of fixed baffles (2) keep pressing the sample (300) in the receiving space (S) from the circumferential side; the clamping mechanism (5) is used to detachably clamp the disk body (1) and the sample stage (201) of the XRD device (200) together in the up-and-down direction (D3).

2. The XRD sample fixing tooling according to claim 1, characterized in that the disk body (1) is a disk and its diameter is set to be the same as the diameter of the sample stage (201) of the XRD device (200).

3. The XRD sample fixing tooling according to claim 1, characterized in that the plurality of fixed baffles (2) are two, and the included angle between the two fixed baffles (2) is 60°.

4. The XRD sample fixing tooling according to claim 3, characterized in that one end of the two fixed baffles (2) is shared.

5. The XRD sample fixing tooling according to claim 3, characterized in that the movable baffle (3) is one; the movable baffle (3) is arranged on the side of the equilateral triangle opposite to the vertex (P) formed by the two fixed baffles (2); the two fixed baffles (2) and the movable baffle (3) are used to intersect the sample (300) with tangents from the circumferential side when clamping and fixing the sample (300) in the receiving space (S) on the disk body (1).

6. The XRD sample fixing tooling according to claim 1, characterized in that the plurality of fixed baffles (2) are two, and the included angle between the two fixed baffles (2) is 90°; the movable baffles (3) are two, and the included angle between the two movable baffles (3) is 90°; the traveling tracks of the two movable baffles (3) do not interfere with each other.

7. The XRD sample fixing tooling according to claim 1, characterized in that the pressing mechanism (4) is a screw; the disk body (1) is provided with a guide groove (11) and a threaded hole (12), the guide groove (11) is open upward, recessed downward and extends linearly, and the threaded hole (12) penetrates the disk body (1) and opens on the circumferential surface of the disk body (1) and the guide groove (11); the movable baffle (3) is provided with a protrusion (31), the protrusion (31) protrudes downward and cooperates with the guide groove (11) to translate in the guide groove (11). The screw is screwed into the threaded hole (12) of the disk body (1), enters the guide groove (11) and extends along the guide groove (11). The screw is used to press against the protrusion (31) of the movable baffle (3) and apply pressure to the movable baffle (3), so that the movable baffle (3) moves along the guide groove (11) and pushes the sample (300) to move until the two fixed baffles (2) and the movable baffle (3) together clamp and fix the sample (300) in the accommodation space (S) on the disk body (1) from the circumferential side.

8. The XRD sample fixing tooling according to claim 7, wherein the number of the plurality of fixed baffles (2) is two; the number of the movable baffles (3) is one; the guide groove (11) extends along the median line (CL) of the triangle formed by connecting the vertices of the two fixed baffles (2).

9. The XRD sample fixing tooling according to claim 1, wherein the number of the pressing mechanisms (4) is the same as the number of the movable baffles (3); the number of the clamping mechanisms (5) is plural.

10. The XRD sample fixing tooling according to claim 1, wherein the clamping mechanism (5) includes a C-shaped frame (51) and two screws (52). The two screws (52) are screwed through the upper and lower parts of the C-shaped frame (51) and are used to fix the stacked disk body (1) and the XRD sample stage (201) together.

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