Graphite laser cleaning jig

Abstract

The utility model discloses a graphite laser cleaning jig which comprises a base, an inserting groove formed by graphite blocks is formed in the base, a guide rail is arranged on one side of the base, a sliding block is arranged on the guide rail, and a guide rail lock is arranged on the sliding block. One side of the slot is closed, the other side of the slot is open, and the guide rail is arranged on the closed side; the width of the slot is close to that of the graphite part, and graphite is inserted into the corresponding slot to be fixed; meanwhile, the bottom of each groove position is provided with a height-adjustable sliding block and a guide rail which are used for adjusting the depth of each groove position, and the sliding blocks can be manually adjusted according to the height of the graphite parts after the graphite parts are placed in the groove position, so that the height of each graphite part is kept on the same horizontal plane. And then the jig and the graphite are placed on a laser cleaning platform together to be subjected to laser cleaning.

Description

Technical Field

[0001] The utility model relates to a graphite laser cleaning fixture, in particular to a graphite component and a laser cleaning fixture in a semiconductor ion implantation device. Background Art

[0002] When cleaning an ion implantation component, it is necessary to deeply clean the surface of the component to remove the attached AsO X residual film and other attachments. At present, the cleaning method of graphite is sandblasting, laser cleaning, rinsing, and drying. However, due to the variety of graphite types and different sizes, before cleaning the side of graphite by laser, corresponding programs need to be compiled one by one and then carried out in sequence. This cleaning method is time-consuming and laborious, and is not conducive to improving the cleaning efficiency of the laser cleaning equipment. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a graphite laser cleaning fixture to solve the problems raised in the above background art.

[0004] To achieve the above purpose, the utility model provides the following technical solution: A graphite laser cleaning fixture includes a base, on which there is a slot composed of graphite blocks. There is a guide rail on one side of the base, and a slider is arranged on the guide rail, and a guide rail lock is arranged on the slider; one side of the slot is closed, and the other side is open, and the guide rail is arranged on the closed side.

[0005] Preferably, a bottom support is arranged at one end of the slider extending into the slot.

[0006] Preferably, there are scales on the guide rail.

[0007] Preferably, the guide rail is connected to the base by bolts.

[0008] Preferably, the slot can also be designed to be closed on both sides, and guide rails are arranged on both sides.

[0009] Compared with the prior art, the beneficial effect of the utility model is that: The fixture is provided with a number of slots, the width of the slots is close to the width of the graphite component, and the graphite is inserted into the corresponding slots for fixation; at the same time, the bottom of each slot is provided with a slider and a guide rail with adjustable height for adjusting the depth of each slot. After the graphite component is placed, the height of the slider can be manually adjusted according to the height of the graphite component to ensure that the height of each graphite component remains on a horizontal plane. Then the fixture together with the graphite is placed on the laser cleaning platform for laser cleaning. Brief Description of the Drawings

[0010] Figure 1 It is a structural schematic diagram of the utility model.

[0011] Figure 2 isFigure 1 Side view.

[0012] In the figure: 1 slot, 2 guide rail, 3 slider, 4 base, 5 guide rail lock, 6 bolt. Detailed implementation manner

[0013] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0014] Please refer to Figure 1-2 , the present invention provides a technical solution: a graphite laser cleaning fixture, including a base 4, a slot 1 composed of graphite blocks is provided on the base 4, a guide rail 2 is provided on one side of the base, a slider 3 is provided on the guide rail 2, and a guide rail lock 5 is provided on the slider 3; one side of the slot 1 is closed and the other side is open, and the guide rail 2 is arranged on the closed side.

[0015] One end of the slider 3 extending into the slot 1 is provided with a bottom support for supporting the bottom of the cleaning component, so as to set the height of the cleaning component.

[0016] The guide rail 2 is connected to the base 1 by bolts, and a scale is provided on the guide rail 2 for accurately adjusting the height of the cleaning component.

[0017] The slot 1 can also be designed with both sides closed, and guide rails 2 are provided on both sides to facilitate cleaning of larger components.

[0018] Working principle: Place the graphite component to be cleaned in the graphite groove, adjust the bottom slider to ensure that all graphite components are at the same height, and scan all side edges simultaneously during laser cleaning. After cleaning a single side, the graphite component needs to be rotated, and the height is adjusted at the same time, and then continue laser cleaning; and rotate in turn to complete the laser cleaning process for all sides.

[0019] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A graphite laser cleaning fixture, characterized in that: It includes a base, on which there is a slot composed of graphite blocks. There is a guide rail on one side of the base, and a slider is arranged on the guide rail, and a guide rail lock is arranged on the slider. One side of the slot is closed, and the other side is open, and the guide rail is arranged on the closed side.

2. The graphite laser cleaning jig according to claim 1, characterized in that: One end of the slider extending into the slot is provided with a bottom support.

3. A graphite laser cleaning jig according to claim 1, characterized in that: There are scales on the guide rail.

4. The graphite laser cleaning fixture according to claim 1, characterized in that: The guide rail is connected to the base by bolts.

5. The graphite laser cleaning fixture according to claim 1, characterized in that: The slot can also be designed to be closed on both sides, and guide rails are arranged on both sides.

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