Cooling disc and cooling disc pressing tool

Abstract

The utility model belongs to the technical field of semiconductors, and discloses a cooling disc and a cooling disc pressing tool. The cooling disc comprises a disc body and a cooling pipe, one side of the disc body is used for cooling a wafer, and the other side of the disc body is provided with an accommodating groove; the containing groove is matched with the cooling pipe in shape, the cooling pipe is embedded in the containing groove in an interference mode, the containing groove comprises a first groove and a second groove, and the width of the first groove is smaller than that of the cooling pipe; the second groove communicates with the first groove and is matched with the peripheral side appearance of the cooling pipe so as to limit the cooling pipe from being disengaged from the second groove. According to the cooling disc and the cooling disc pressing tool, the cooling pipe is embedded in the containing groove, gluing is not needed when the cooling pipe is installed, namely in the pressing process, the cooling pipe has certain elasticity and can be properly shrunk, so that the cooling pipe is installed in the containing groove in an interference state, the appearance of the cooling disc cannot be stained, installation is rapid, and the cooling disc is convenient to install. And the cooling pipe is not easy to fall off, and the mounting stability of the cooling pipe is better.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a cooling plate and a cooling plate pressing tool. Background Art

[0002] During the manufacturing process of a wafer, it is in a high-temperature state after the previous process and needs to be cooled when reaching the next process. Therefore, a cooling plate is used to cool the wafer. The cooling tubes on the cooling plate usually adopt an adhesive bonding method. At present, the existing adhesive bonding process has high costs, uneven coating, and is prone to the situation of cooling tube detachment after long-term use, and the stability is difficult to guarantee. The glue affects the appearance of the cooling plate.

[0003] Therefore, it is urgent to design a cooling plate and a cooling plate pressing tool to solve the above problems. Summary of the Utility Model

[0004] An object of the utility model is to provide a cooling plate with better installation stability of the cooling tubes and a cleaner appearance.

[0005] Another object of the utility model is to provide a cooling plate pressing tool, which can quickly press the cooling tubes into the cooling plate and ensure the pressing accuracy.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] The cooling plate includes:

[0008] A plate body, one side of which is used to cool the wafer, and a receiving groove is opened on the other side of the plate body;

[0009] Cooling tubes, the receiving groove matches the shape of the cooling tubes, and the cooling tubes are press-fitted into the receiving groove. The receiving groove includes:

[0010] A first groove, the width of the first groove is smaller than the width of the cooling tubes;

[0011] A second groove, which is communicated with the first groove and is adapted to the outer shape of the circumference of the cooling tubes to prevent the cooling tubes from disengaging from the second groove.

[0012] As an optional solution, the cross-section of the cooling plate is circular or oblong, and the second groove fits at least more than half of the semicircular section of the cooling tubes.

[0013] As an optional solution, a machining avoidance groove is further opened on the other side of the plate body, the machining avoidance groove is located at the top of the receiving groove, and the width of the machining avoidance groove is larger than the width of the receiving groove.

[0014] As an alternative solution, the two side walls of the above-mentioned machining avoidance groove are inclined in the opposite direction.

[0015] A cooling disk pressing tool for pressing the above-mentioned cooling disk. As an alternative solution, the above-mentioned cooling disk pressing tool includes:

[0016] A lifting driving member;

[0017] A pressing plate, including a main body and a pressing protrusion. The above-mentioned main body is connected to the output end of the above-mentioned lifting driving member. The above-mentioned lifting driving member can drive the above-mentioned pressing plate to move in the vertical direction. The above-mentioned pressing protrusion protrudes from the above-mentioned pressing plate, and the shape of the above-mentioned pressing protrusion is adapted to the shape of the above-mentioned cooling tube.

[0018] As an alternative solution, the above-mentioned disk body is further provided with a first limiting groove. The above-mentioned first limiting groove is located above the above-mentioned accommodating groove, and the width of the above-mentioned first limiting groove is greater than the width of the top of the above-mentioned accommodating groove. The above-mentioned pressing protrusion can be pressed against the bottom of the above-mentioned first limiting groove and be limited between the two side walls of the above-mentioned first limiting groove.

[0019] As an alternative solution, one of the above-mentioned main body and the above-mentioned disk body is provided with a second limiting groove, and the other is provided with a limiting protrusion. The above-mentioned limiting protrusion can be inserted into and limited in the above-mentioned second limiting groove.

[0020] As an alternative solution, the above-mentioned limiting protrusion protrudes from the above-mentioned main body, the above-mentioned disk body is provided with the above-mentioned second limiting groove, and the height of the above-mentioned limiting protrusion is greater than the height of the above-mentioned pressing protrusion.

[0021] As an alternative solution, two of the above-mentioned second limiting grooves are arranged in parallel, and the lengths of the two above-mentioned second limiting grooves are different.

[0022] As an alternative solution, one end of the above-mentioned second limiting groove leads out of the above-mentioned disk body, and the other end is semi-circular.

[0023] The beneficial effects of the present utility model are as follows:

[0024] The present utility model provides a cooling disk. By providing an accommodating groove on one side of the disk body, the cooling tube is embedded in the accommodating groove. When installing the cooling tube, there is no need to apply glue. The cooling tube can be directly pressed into the accommodating groove, which can ensure the interference relationship of the cooling tube in the accommodating groove. That is, during the pressing process, the cooling tube has a certain elasticity and can be appropriately reduced during the pressing process, so that the cooling tube is installed in the accommodating groove in an interference state, which will not dirty the appearance of the cooling disk, the installation is fast, and it is not easy to fall off, and the installation stability of the cooling tube is better; and the cooling tube enters from the first groove, undergoes a slight deformation, enters the second groove, and is in interference fit with the second groove. The size setting of the first groove ensures that the cooling tube is not easily detached from the second groove.

[0025] The present utility model further provides a cooling plate pressing tool. The body is driven to descend by a lifting driving member. After the pressing protrusion contacts the cooling pipe, as the lifting driving member continues to descend, the cooling pipe is pressed into the accommodating groove, and the pressing process is simple and fast. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 FIG. is an exploded view of a cooling plate and a cooling plate pressing tool provided by an embodiment of the present utility model; Figure 1 ;

[0027] Figure 2 FIG. is a schematic structural view of a disk body provided by an embodiment of the present utility model;

[0028] Figure 3 FIG. Figure 2 is an enlarged view of part A in FIG.

[0029] Figure 4 FIG. is a cross-sectional view of the exploded cooling plate and cooling plate pressing tool provided by an embodiment of the present utility model;

[0030] Figure 5 FIG. is a cross-sectional view of the cooling plate and cooling plate pressing tool provided by an embodiment of the present utility model;

[0031] Figure 6 FIG. is an exploded view of a cooling plate and a cooling plate pressing tool provided by an embodiment of the present utility model; Figure 2 ;

[0032] Figure 7 FIG. is a schematic structural view of the cooling plate and cooling plate pressing tool provided by an embodiment of the present utility model.

[0033] In the figure:

[0034] 10. Disk body; 11. Accommodating groove; 111. First groove; 112. Second groove; 12. Machining avoidance groove; 121. Inclined side wall; 13. First limiting groove; 14. Second limiting groove; 20. Cooling pipe;

[0035] 200. Cooling plate pressing tool; 210. Pressing plate; 211. Body; 212. Pressing protrusion; 213. Limiting protrusion. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0036] The present utility model will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. Additionally, it should be noted that for the sake of description, only parts related to the present utility model are shown in the drawings rather than all the structures.

[0037] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0038] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under", and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0039] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "left", and "right" are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meanings.

[0040] This embodiment provides a cooling plate, in which the installation stability of the cooling pipe 20 is better and the appearance is cleaner. As Figures 1 - 5 shown, the cooling plate includes a plate body 10 and a cooling pipe 20. One side of the plate body 10 is used to cool the wafer, and a receiving groove 11 is formed on the other side of the plate body 10; the receiving groove 11 matches the shape of the cooling pipe 20, and the cooling pipe 20 is press-fitted into the receiving groove 11. For the above cooling plate, by forming the receiving groove 11 on one side of the plate body 10 and embedding the cooling pipe 20 in the receiving groove 11, when installing the cooling pipe 20, there is no need to apply glue, and the cooling pipe 20 can be directly pressed into the receiving groove 11, which can ensure the interference relationship of the cooling pipe 20 in the receiving groove 11. That is, during the pressing process, the cooling pipe 20 has a certain elasticity and can be appropriately reduced during the pressing process, so that the cooling pipe 20 is installed in the receiving groove 11 in an interference state, without soiling the appearance of the cooling plate, with fast installation and not easy to fall off, and the installation stability of the cooling pipe 20 is better.

[0041] Optionally, as Figures 3 - 5As shown, the accommodating groove 11 includes a first groove 111 and a second groove 112. The width of the first groove 111 is smaller than the width of the cooling pipe 20. The second groove 112 communicates with the first groove 111 and is adapted to the peripheral shape of the cooling pipe 20 to prevent the cooling pipe 20 from disengaging from the second groove 112. Through the above arrangement, the cooling pipe 20 enters from the first groove 111, undergoes a slight deformation, enters the second groove 112, and is in interference fit with the second groove 112. The size setting of the first groove 111 ensures that the cooling pipe 20 is not easily disengaged from the second groove 112.

[0042] Optionally, as Figure 4 and Figure 5 shown, the cross-section of the cooling disc is circular or oval, and the second groove 112 fits at least more than half of the semicircular section of the cooling pipe 20. It can be understood that if the inner wall of the second groove 112 fits half of the semicircular section, that is, the width at the top of the second groove 112 is the same as the maximum width of the cross-section of the cooling pipe 20. At this time, the cooling pipe 20 can be disengaged from the second groove 112. When the second groove 112 fits more than half of the semicircular section, a negative angle exists in the second groove 112 in the vertical direction, preventing the cooling pipe 20 from disengaging from the second groove 112 in the vertical direction.

[0043] Optionally, as Figures 3 - 5 shown, a machining avoidance groove 12 is further provided on the other side of the disc body 10. The machining avoidance groove 12 is located at the top of the accommodating groove 11, and the width of the machining avoidance groove 12 is greater than the width of the accommodating groove 11. It can be understood that a wider machining avoidance groove 12 is first machined in the shape of the cooling pipe 20, and then the accommodating groove 11 is machined on the basis of the machining avoidance groove 12, and the machining surface is smoother. At the same time, the setting of the machining avoidance groove 12 can avoid the pressing tool and prevent the pressing tool from being damaged.

[0044] Optionally, the two side walls of the machining avoidance groove 12 are inclined in opposite directions to form inclined side walls 121. The machining avoidance groove 12 can play a guiding role in the downward pressing action of the pressing tool.

[0045] This embodiment also provides a cooling disc pressing tool 200 for pressing the above-mentioned cooling disc. As Figures 4 - 7 shown, the cooling disc pressing tool 200 includes a lifting driving member (not shown in the figure) and a pressing plate 210. The pressing plate 210 includes a main body 211 and a pressing protrusion 212. The main body 211 is connected to the output end of the lifting driving member. The lifting driving member can drive the pressing plate 210 to move in the vertical direction. The pressing protrusion 212 protrudes from the pressing plate 210, and the shape of the pressing protrusion 212 is adapted to the shape of the cooling pipe 20. Through the above arrangement, when the lifting driving member drives the main body 211 to descend, after the pressing protrusion 212 contacts the cooling pipe 20, as the lifting driving member continues to descend, the cooling pipe 20 is pressed into the accommodating groove 11, and the pressing process is simple and fast.

[0046] Among them, the lifting driving member is any driving element that can output linear motion in the prior art, such as a cylinder, a motor, etc., which is not limited herein.

[0047] Optionally, referring to Figure 4 and Figure 5 , the disk body 10 is further provided with a first limiting groove 13. The first limiting groove 13 is located above the accommodating groove 11, and the width of the first limiting groove 13 is greater than the width of the top of the accommodating groove 11. The pressing protrusion 212 can be pressed against the bottom of the first limiting groove 13 and be limited between the two groove walls of the first limiting groove 13. Through the above settings, during the pressing process, the first limiting groove 13 ensures the accurate pressing position of the pressing protrusion 212 at the end of the pressing process and does not deflect.

[0048] Optionally, as Figures 4 - 6 shown, one of the body 211 and the disk body 10 is provided with a second limiting groove 14, and the other is provided with a limiting protrusion 213. The limiting protrusion 213 can be inserted into and limited in the second limiting groove 14. Through the above settings, it is ensured that the position is correct at the initial stage when the pressing plate 210 contacts the disk body 10.

[0049] In this embodiment, the body 211 is convexly provided with a limiting protrusion 213, and the disk body 10 is provided with a second limiting groove 14. The height of the limiting protrusion 213 is greater than the height of the pressing protrusion 212. The above settings ensure that the limiting protrusion 213 first enters the second limiting groove 14.

[0050] Optionally, the height of the limiting protrusion 213 is 4 mm, and the height of the pressing protrusion 212 is 2 mm.

[0051] Optionally, as Figure 6 shown, there are two limiting protrusions 213, and the lengths of the two limiting protrusions 213 are different. Correspondingly, the lengths of the two second limiting grooves 14 are also different. Through the above settings, since the entire disk body 10 is in a symmetrical state, in order to distinguish the front and back sides, when machining on a machine tool, the two second limiting grooves 14 with different lengths play a role in preventing reverse installation.

[0052] Optionally, as Figure 6 shown, one end of the second limiting groove 14 leads out of the disk body 10, and the other end is semi-circular. That is, the end of the limiting protrusion 213 is also semi-circular. The end of the limiting protrusion 213 abuts against the end of the semi-circular second limiting groove 14, thereby determining the position of the pressing plate 210 in the horizontal direction.

[0053] Obviously, the above embodiments of the present utility model are merely examples for clearly illustrating the present utility model, rather than limitations on the implementation manners of the present utility model. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present utility model. It is not necessary and impossible to enumerate all implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present utility model shall be included within the protection scope of the claims of the present utility model.

Claims

1. Cooling tray, characterized in that, Comprising: A disk body (10), one side of which is used for cooling a wafer, and a receiving groove (11) is formed on the other side of the disk body (10); A cooling pipe (20), the receiving groove (11) matches the shape of the cooling pipe (20), the cooling pipe (20) is press-fitted into the receiving groove (11) with an interference fit, and the receiving groove (11) includes: A first groove (111), the width of the first groove (111) is smaller than the width of the cooling pipe (20); A second groove (112), which is communicated with the first groove (111) and is adapted to the outer shape of the circumferential side of the cooling pipe (20) to limit the cooling pipe (20) from disengaging from the second groove (112).

2. The cooling tray according to claim 1, wherein, The cross-section of the cooling disk is circular or oblong, and the second groove (112) fits at least more than half of the semicircular section of the cooling pipe (20).

3. The cooling plate according to claim 1 or 2, characterized in that, A processing avoidance groove (12) is further formed on the other side of the disk body (10), the processing avoidance groove (12) is located at the top of the receiving groove (11), and the width of the processing avoidance groove (12) is larger than the width of the receiving groove (11).

4. The cooling plate according to claim 3, wherein The two side walls of the processing avoidance groove (12) are inclined in opposite directions.

5. Cooling plate pressing tool for pressing the cooling plate as described in any one of claims 1 - 4, characterized in that, The cooling disk pressing tool includes: A lifting driving member; A pressing plate (210), including a body (211) and a pressing protrusion (212), the body (211) is connected to the output end of the lifting driving member, the lifting driving member can drive the pressing plate (210) to move in the vertical direction, the pressing protrusion (212) protrudes from the pressing plate (210), and the shape of the pressing protrusion (212) is adapted to the shape of the cooling pipe (20).

6. The cooling plate pressing tool according to claim 5, characterized in that, The disk body (10) further forms a first limiting groove (13), the first limiting groove (13) is located above the receiving groove (11), and the width of the first limiting groove (13) is larger than the width of the top of the receiving groove (11), and the pressing protrusion (212) can be pressed against the bottom of the first limiting groove (13) and be limited between the two side walls of the first limiting groove (13).

7. The cooling disk pressing tool according to claim 5, characterized in that, One of the body (211) and the disk body (10) is provided with a second limiting groove (14), and the other is provided with a limiting protrusion (213), and the limiting protrusion (213) can be inserted into and limited in the second limiting groove (14).

8. The cooling plate pressing tool according to claim 7, wherein, The limiting protrusion (213) protrudes from the body (211), the second limiting groove (14) is formed on the disk body (10), and the height of the limiting protrusion (213) is greater than the height of the pressing protrusion (212).

9. The cooling plate pressing tool according to claim 8, wherein, Two second limiting grooves (14) are arranged in parallel, and the lengths of the two second limiting grooves (14) are different.

10. The cooling plate pressing tool according to claim 8, wherein, One end of the second limiting groove (14) leads out of the disk body (10), and the other end is semicircular.

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